CN101481033A

CN101481033A - Vessels with personnel access provisions

Info

Publication number: CN101481033A
Application number: CNA2008101893291A
Authority: CN
Inventors: V·Y·格什泰因; C·R·巴特勒
Original assignee: Air Products and Chemicals Inc
Current assignee: Versum Materials US LLC
Priority date: 2007-11-26
Filing date: 2008-11-26
Publication date: 2009-07-15
Anticipated expiration: 2028-11-26
Also published as: US10222000B2; US9222622B2; MY174890A; CN103253473B; US20090134172A1; KR101076597B1; SG153024A1; JP5670941B2; US20160084444A1; EP2063167B1; EP2063167A3; JP2009126586A; SG189766A1; TW200942465A; SG155239A1; CN101481033B; EP2063167A2; CN103253473A; JP5266025B2; KR20090054396A

Abstract

Embodiments of vessels include personnel access provisions having welded or otherwise permanent connections that substantially reduce the potential for leakage into or out of the vessels by way of the personnel access provisions.

Description

Container with personnel access provisions

Technical field

[0001] the present invention relates to be used for storage and transport specialities and other materials (as, high purity (HP) and ultra-high purity (UHP) fluid) jar or container.

Background technology

[0002] in the electronics industry new development of institute's operation technique and raising cause to a large amount of further special materials (as, be used for the HP and the UHP fluid of manufacturing process) demand.Special material is the chemicals that is used in the manufacturing process (as, the manufacturing of electronic component), and it demonstrates some characteristic, as high purity or ultra-high purity.For example, special material can be powder, emulsion, suspending fluid and steam.Term as used herein " fluid " is meant solid and its combination that comprises gas, liquid, distillation.

[0003] is used for the difference processing of corresponding production equipment and the special material handled may need to transmit the impurity that the records product in the ppb level.Even special gas and chemicals may only account for cost of production about 0.01 percent to about percent 0.1, may jeopardize (for example) keeps the productive output of hope or needs in the electron production facility ability but lack described material.Sometimes, the specification that the product of use pollution may jeopardize final products in manufacturing process.The specification of final products can be determined in the very final stage of manufacturing process.For example, in the situation of wafer manufacture, the specification of final products may be checked in the production assurance program.The wafer of being produced may be considered to " it is outer to run off specification limit " and may be dropped, and it may cause the loss of millions of dollar.Therefore, during transporting, keep the purity of special material to have real importance.

[0004] pollutants that is used for storing the container of HP or UHP fluid or other special materials may be characterised in that when existence when container injects described special material and can damage the material of the predetermined purity level of special material, perhaps high purity product is being carried in container and/or memory period impurity has penetrated in the container.

[0005] pollutants can be taked the form of solid, liquids and gases.For example, pollutants can be to be formed by the residue that was kept at the another kind of material in the container in the past.Pollutants can also leak gas owing to container, by, for example, outside air penetrates in the container interior volume and introduces.More particularly, the air by environment infiltrates the oxygen that enters be considered to pollutants usually with regard to the HP in the electronics manufacturing and UHP fluid and employed other special material.Oxygen can form the oxide that pollutes on the inside face of container.In addition, oxygen molecule can be trapped on the inside face of container, and can be spread among the HP or UHP fluid or other special materials that is placed into subsequently in the container.When HP or UHP fluid retention were in container, owing to have concentration gradient with HP or UHP fluid, oxygen molecule can be dragged the inside face from container, and is sent in the production facilities, influences the specification of final products unfriendly.

[0006] material that is characterized by the special material pollutants is decided on using, and can be along with changing as factor such as the particular type of special material, the product specification of special material and the expectation purposes of special material.Therefore, the material that is considered to pollutants in one application may not be considered to pollutants in another kind is used.For example, oxygen, hydro-carbon, metal particle, water and nitrogen are considered to supercritical carbon dioxide (SCCO ₂) pollutants.Yet nitrogen is not considered to as NH ₃, NF ₃And Cl ₂The pollutants of electronics grade gas.

[00071 sometimes, and the old transfer approach that is used to transmit small amount of H P and UHP material may be no longer suitable.For example, owing to need quite a large amount of described materials, the transmission of use cylindrical bottle or other inner wrappings may be no longer desirable in some manufacturing process.For example, to ultra-high purity " White Ammonia " (NH ₃) and highly purified Nitrogen trifluoride (NF ₃) demand significantly increasing in recent years, and nowadays in many different manufacturing processs, need a large amount of described materials.

[0008] a large amount of (bulk) that is used to transmit HP and UHP material transmits container and system not known or be used in recent years.Only the recent development of up-to-date technology (for example, being used to produce the technology of different electronicies package) has caused HP and UHP product (as, NF ₃, NH ₃, Cl ₂, HCl and other special gas and chemicals) heavy demand.In the past, be used to transmit the HP and the UHP product of relatively small amount as the small canister of bottle-like cylinder.Though strict, can relatively easily satisfy for the requirement of preparation small canister.Even the jar preparation process that is used for less relatively jar and container is known, and described jar and container are used for transport of H P and UHP product.For example, the simple jar of heat process (being called as " curing ") in baking oven helps to obtain jar needed purity of inside face.Be ready to or so-called " purity processings " crosses jar can receive the UHP product and the threat of not polluting the UHP product." a curing " baking oven that is used to jar heating may be of different sizes and shape, but generally is only limited to the preparation of (as, gas cylinder) of less relatively jar.

[0009] large-sized jar or container (as, be used to transmit required those of a large amount of industrial gasses) can not use the preparation method of less relatively jar.The new jar of preparation method who is used for a large amount of HP and UHP product has been developed and has been incorporated into this system jar industry.For example, it at title the U.S. Pat 6 of " Systems and Methods forconditioning Ultra High Purity Gas Bulk Containers ", 616,769 B2 and US 6,814, the preparation of international standarkdization (ISO) jar of about 6,000 pounds of volumes has been described among 092 B2.It is complicated a lot of that the preparation of canister is compared in described jar preparation, because bigger jar is too big so that can not put into existing " curing " baking oven, and because the maximum surface temperature of jar is subjected to transport establishment, agreement and the agreement of country to come control, for example, comprise US Department of Transportation (DOT), United Nations (UN), international ocean shipping dangerous material (IMDG), about the European agreement (ADR) of the carriage of dangerous goods by highway, safety container agreement (CSC) etc.In other words, organize control as the large tank of transport box by global transportation.For example, according to the suggestion of DOT, the highest outdoor temperature of portable T50 type ISO jar should not surpass 125 ℉, in order to avoid cause the thermal stress and the fatigue of jar.Obviously, need significant high temperature to handle because cure, so can not carry out the processing of " curing " to obtain enough vessel surfaces.

[0010] method of the large scale container of cleaning and preparation transportation HP and UHP product is known and just is being applied in the industry.Described method is quite thorny and needs actv. work and a large amount of expense.Therefore, keeping of container purity is important, and may influence the quality of the device that the income of the HP that transported or UHP product and HP that employing is transported or UHP manufacture of materials go out significantly.For example, the different step of the manufacturing process of semiconductor wafer may depend on the HP that transported and UHP material (as, NF3, NH3, CO2 etc.) use.

[0011] carries out actv. work and developed and finished transport systems and the method that is used for a large amount of HP and UHP material.Design and a preparation that vital task be big volume jar relevant with described transportation, to a certain extent, described jar may be used for carrying the product purity that needs with transport point and not jeopardize the latter.The present design and the preparation process of some unique containers of cicada.Under fixing container situation, satisfy the design of the container of handling high purity substance and the task of preparation and have a few not too complicated.Yet for movable vessel, the task of acquisition and preservation product purity more has challenge.Movable vessel need be observed various standards, and described standard not only results from the standard of control container material, structure and mechanical characteristics, and adopts for the transport establishment of whole world country variant (for example comprising DOT, UN, IMDG, ADR, CSC etc.).The task of described mechanism and regulation thereof be guarantee to carry the movable vessel of a large amount of different materials can be during transportation to social being danger on every side.Strictly control design, check, transportation and other processing programs of container, and all containers that do not meet existing standard do not allow to be used to carry hazardous materials.Simultaneously, the design of some containers, preparation and the method for inspection contradict with the requirement of high purity product.

[0012] people need understand the requirement that puts on the transportable container, what can be done and what cannot be done in the set up procedure of the container of understanding design to volumetric standard, standard, the method for inspection etc.Use new or improved structure of container and new or improved preparation and the method for inspection to ratify to use by national transportation mechanism." international standarkdization (ISO) survey requirement " part of the ITCO ACC handbook third phase of in January, 2003 issue has shown the example of some requirements relevant with check that put on the container, it has stipulated " to enter for the people, guarantee that it is the inspectoral responsibility in warehouse that jar safety enters.This may need to check the gaseous contamination of hypoxemia ".Draw this statement from the vessel examination handbook and be meant the people and enter under the situation of jar (container), require suitable condition guaranteeing in container, not leaving over dangerous gas remnants, and eliminate anaerobic environment.If container may be the source that forms the main capsule contamination thing of (for example) metallic oxide and other undesirable residues, then the latter may need to carry out air purge.In addition, needs are carried out (purification) process of container preparation completely to eliminate residual oxygen (even after utilizing the inert gas purge container).Vessel surface may be caught a large amount of oxygen, and described oxygen is enough to pollute the UHP product that is introduced into subsequently in the container.For example, in U.S. Pat 6,616, the example of quite thorny container preparation method has been described among the 769B2.Therefore, can save a large amount of time, the energy and money by exempting the demand that container is prepared in the case of any possible.

[0013] another example that can find the container inspection of standard to require in " Pressure Vessel NotAcceptable Conditions " chapter of the ITCO ACC handbook third phase of announcing in January, 2003.For example, can to regard the container of being checked as be inferior-quality for further purposes to the container state below finding in the inspection period:

Weld seam or parent material defectiveness

Main body is ground and is deeper than 0.1 millimeter (0.004 inch)

Excessively grinding or other metal losses and the thickness of shell is reduced to less than minimum value

A corrosion corrosion or a concave point, it causes thickness of shell to pollute trap less than required minimum value or generation

Stress corrosion corrosion

Sharp-pointed impression indentation, folding line crease or indenture dent...

Last 1/3rd indenture dent that occur greater than 6 millimeters (0.25 inches) of jar shell

Following 2/3rds indenture dent that occur greater than 10 millimeters (0.4 inches) of jar shell

[0014] in order to meet above listed state, needs the inspection of strict internal container.Described inspection may not only relate to the qualitative analysis directly perceived of inner surface of container, but also relates to the actual measurement of the shape etc. of possible surface discontinuity, particle size, inner structure.Under present standard practice instructions, in fact the people enters the container of being checked and can not exempt from, so that obtain desired checking on the quality.Why Here it is accepts on the sector and the standard set up needs container entrance, makes the inspector pass the footway relevant with the internal tank inspection and enters.Therefore, the size on footway and often also have in addition standard of its position, with guarantee inspector's safety enter and withdraw from limit interval.

[0015] establishment is formulated by UN for another file of the requirement of the container that transports in the whole world.For example, be used for carrying and using the used portable ISO jar of UN T50 type of international transportation of anhydrous ammonia UN 1005.These are the movable vessels that meet in the safety container international convention of revising in 1972 (CSC) the container regulation, and must bear inspection with CSC and test according to UN schema management 6.7.3.15 etc.This document has been forced exacting requirements to carrying out container inspection, and has stipulated the strict time requirement to carrying out described inspection.For example, this document regulation " ... can not give after the expiration of the testDate in 2.5 or 5 years the last time and move canned material.Can transport the jar of in described testDate, filling, surpass 3 months dates of expiry of the period on last routine test date at the most ... ".Obviously, in time do not finished and check or can not be used for international goods transport by the container of checking.In the U.S., formulated similar rule by DOT.CSC is expressed in CSC detailed rules and regulations #2 about the rule of container inspection and maintenance.For example: " ... check for the first time must carried out earlier than producing in back 5 years, and check in after this per at least 2.5 years is once ... ".In addition, described inspection rule stipulates equally that with CSC who can carry out inspection.Qualified and have license representative to attend be important, and only described representative can carry out check and finally by or stop container and further use.In another part of CSC file, also stipulate as follows: " ... must carry out or prove cross-check sum test described herein by up-to-standard inspector/office through competent authorities or the approval of its authorized organization.Ground is fit to do these if the inspector has qualification, then can be carried out the test and the inspection of CSC and UN jar by identical inspector.The typical office that this work is carried out in approval is: ABS, Bureau Veritas, Lloyds Register etc.. ".In fact, the up-to-standard inspector that requires in last example should enter execution inspection in the container.Only just can make the final adjudication whether container can continue to use when checking when finishing.Unfortunately, the requirement of the familiar expressly transportation of up-to-standard procuratorial organs' neither one and supply HP and UHP product container and system.Therefore, the inspector has the inspection of qualification ground execution to container, but they do not have qualification to enter in the container of transportation HP or UHP article.

[0016] container that is used to store and transport a large amount of HP and UHP gas and other special materials generally comprises various external valves.Valve can be used for as step-down, material is sent to internal tank, is sent to external container and in functions such as internal tank transmission.Valve is usually located in the valve box that is installed on the shell of tank.The valve box helps avoid valve because caused destructions such as valve is impacted, extruding, pullings.In addition, can cover the valve box, so that can be at the inner gas blanket that keeps of valve box.Gas can be free of contamination the material in being stored in container, so as gas by valve infiltration and enter internal tank and can not pollute material in the container.

[0017] footway often with the container that is used for transporting a large amount of HP and UHP gas and other special materials in the valve box be integrated into integral body.Particularly, the bottom of valve box generally is fixed on other suitable points of engagement of flange or valve box remainder by fastener, enters container interior volume so that can unload the bottom of lower valve box to provide.

[0018] the valve box can play the footway, and it needs enough big so that the people of adult's size passes through wherein.For example, the valve box that can play the footway generally has and is approximately 2.5 feet diameter at least.Therefore, the interface between other points of engagement of the detachable base of valve box and flange or valve box remainder is sizable.It may be very difficult keeping aeroseal on described sizable interface, and particularly in transportable container, it during transportation generally is subjected to physical shock, vibration and temperature fluctuation.Therefore, the described leak free seepage on the footway by being arranged in valve box bottom has been represented the potential source at the pollutants of the container that is used to store and transport a large amount of HP and UHP gas and other special materials.

[0019] therefore, current needs be used to transport a large amount of special materials (as, HP and UHP gas) container do not have the personnel access provisions that leaks basically.

Summary of the invention

[0020] embodiment of container comprises and welding or other permanent bonded assembly personnel access provisions, and described welding or other permanent connections have reduced the possibility of infiltrating or spill container through personnel access provisions significantly.

[0021] embodiment of container comprises the shell that limits internal capacity; Be installed on the shell and limit and be convenient to the sleeve pipe that personnel enter the passage of internal capacity; With cover described passage and be connected to the lid of sleeve pipe by weld seam.

[0022] embodiment that can store and transport the gas containers of high purity and ultra-high purity comprises shell; Be installed on the shell and extend through the hollow sleeve of shell; For good and all be connected to the lid of the end of described sleeve pipe.

[0023] is provided for entering the method for container interior volume.Described container comprises the shell that limits internal capacity, be connected to shell and limit the passage that enters from the outside of container the internal capacity and be connected to sleeve pipe and cover the lid of passage by weld seam.Described method comprises the cutting weld seam; Lid is moved apart passage; With enter internal capacity by described passage.

Description of drawings

[0024] when in conjunction with the accompanying drawings, can understand the foregoing invention content and the following preferred specific embodiment better.Described accompanying drawing only is used for the illustrative purpose, and the scope of claim is not limited to the particular shown in the accompanying drawing.In the accompanying drawings:

[0025] Fig. 1 is the lateral plan of embodiment of container with personnel access provisions of valve box-like formula;

[0026] Fig. 2 is the cross sectional view of the amplification in " A " indicated zone among Fig. 1;

[0027] Fig. 3 is the enlarged drawing in " B " indicated zone among Fig. 2;

[0028] Fig. 4 is the cross sectional view of a part of first alternative embodiment of the container shown in Fig. 1-3, takes from the angle identical with Fig. 2;

[0029] Fig. 5 is the cross sectional view of a part of second alternative embodiment of the container shown in Fig. 1-3, takes from the angle identical with Fig. 2;

[0030] Fig. 6 is the cross sectional view of a part of the 3rd alternative embodiment of the container shown in Fig. 1-3, takes from the angle identical with Fig. 2;

[0031] Fig. 7 is the lateral plan of the 4th alternative embodiment of the container shown in Fig. 1-3;

[0032] Fig. 8 is the lateral plan of the 5th alternative embodiment of the container shown in Fig. 1-3;

[0033] Fig. 9 is the birds-eye view of the 6th alternative embodiment of the container shown in Fig. 1-3; With

[0034] Figure 10 is the lateral plan of the 7th alternative embodiment of the container shown in Fig. 1-3.

The specific embodiment

[0035] Fig. 1 to 3 has described transportable jar or the embodiment of container 10 with internal capacity 12.For example, container 10 can be used to store the special material as HP or UHP gas.

[0036] container 10 comprises shell 14.Shell 14 can comprise main portion 15 and two ends or the head 16 of substantial cylindrical, as shown in Figure 1.Can head 16 be connected to the opposed end of main portion 15 by suitable manner as welding.

[0037] container 10 also comprises the personnel access provisions with the footway form of the bottom that is positioned at valve box 17.Valve box 17 can be installed on the top of main portion 15 of shell 14.Valve box 17 can be installed in other positions on the shell 14, comprises that in alternative embodiment (for example) is installed on the bottom or side of main portion 15, or is installed on the head 16.

[0038] directional terminology (as, top, bottom, upper and lower, above, following, level etc.) is used with reference to the component orientations described in Fig. 1-3.Described term only is used for the illustrative purpose, does not plan to limit the scope of claim.

[0039] valve box 17 comprises the sleeve pipe 18 of substantial cylindrical.The opening that sleeve pipe 18 can be formed in the main portion 15 of shell 14 holds, and can be fixed to main portion 15 by the suitable manner as weld seam 23.Locating sleeve 18 is so that valve box 17 is recessed partly with respect to the outside face of main portion 15, as illustrated in fig. 1 and 2.In alternative embodiment, sleeve pipe 18 can be than recessed greater or lesser degree shown in Fig. 1 and 2.

[0040] sleeve pipe 18 has cylindrical form interior surface 19, and this inside face defines the passage 20 by sleeve pipe 18.Passage 20 can have enough big diameter so that the people passes through passage wherein, so that can enter the internal capacity 12 of container 10 by sleeve pipe 18.For example, the diameter of passage 20 can be approximately 2.5 feet.In the alternative embodiment of container 10, sleeve pipe 18 and passage 20 can respectively have the shape except that cylindrical.For example, when by cross-sectional view, sleeve pipe 18 and passage 20 can be square or rectangle.

[0041] valve box 17 also comprises base assemblies 21.This base assemblies 21 comprises the roughly tabular lid 22 and the projection 24 of ring-type roughly.Can projection 24 be installed on the upper surface of lid 22 by suitable manner as welding.The inside and outside diameter of projection 24 is approximately equal to the corresponding inside and outside diameter of sleeve pipe 18.

[0042] base assemblies 21 of valve box 17 also comprises the cylindrical skirt roughly 28 of annular sleeve 18 bottoms.Can skirt section 28 be installed on the upper surface of lid 22 by suitable manner as welding.

[0043] fluid valve 35 is installed on the lid 22 of valve box 17.It is disclosed that to utilize valve box 17 to hold single fluid valve 35 only be to be used for exemplary purpose.In alternative embodiment, valve box 17 can be used for holding more than a fluid valve 35.Other alternative embodiment can comprise personnel access provisions, and except this personnel access provisions does not comprise any fluid valve (that is, the personnel access provisions of alternative embodiment does not play the valve box), it is equal to valve box 17 basically.

[0044] projection 24 has upper surface 36, and this upper surface is angled with respect to the line of centers " C " of valve box 17, shown in Fig. 2 and 3.Sleeve pipe 18 has basal surface 40.Basal surface 40 directly is positioned at the top of the upper surface 36 of projection 24, so that angled surface 36 and basal surface 40 limit groove 42.Groove 42 can hold the weld seam 44 that the remainder of projection 24 and base assemblies 21 is fixed to sleeve pipe 18.In alternative embodiment, replace the upper surface 36 of projection 24 or except that the upper surface 36 of projection 24, the basal surface 40 of sleeve pipe 18 can be angled.

[0045] during the manufacturing of container 10, base assemblies 21 can be positioned at the inside of container 10.More especially, before one or two head 16 is welded to main portion 15, base assemblies 21 can be positioned at the inside of the internal capacity 12 of container 10, because the opening that base assemblies 21 is too big so that impassabitity holds in the shell 14 of sleeve pipe 18 is installed.

[0046] after no longer needing the people to enter the internal capacity 12 of container 10, projection 24 can be welded to sleeve pipe 18, so that base assemblies 21 is fixed to sleeve pipe 18.Before the welding process and during welding process, can use (for example) to be connected to the elevator belt of carriage 52 or be installed in other suitable devices on the lid 22 and base assemblies 21 is mentioned and be supported from the outside of container 10.Clear for diagram, this elevator belt is not described in the accompanying drawings.

[0047] skirt section 28 can prevent or stop the fragment that produces in the welding process to enter the internal capacity 12 of container 10.When container 10 was used for storing HP or UHP gas subsequently or need keeps other special materials of purity of higher level, described fragment can become the potential source of pollutants.

[0048] at container 10 behind the place in operation, on the basis of needs, valve box 17 can be used for providing the internal capacity 12 that enters container 10.Particularly, can use saw, welding gun or other suitable devices to cut weld seam 44 discharges from sleeve pipe 18 with the remainder with projection 24 and base assemblies 21.When cutting weld seam 44, skirt section 28 can prevent or stop the fragment from weld seam 44 to enter internal capacity 12.Particularly, can determine the size of skirt section 28 internal diameters, so that between skirt section 28 and sleeve pipe 18, form continuous or semi-continuous depression (pocket) 31, as shown in Figure 2.In addition, or in addition, depression 32 can be formed in the skirt section 18 itself.When cutting weld seam 44, depression 31 and/or depression 32 can be caught the fragment from weld seam 44.

[0049] when being released, can using elevator belt and carriage 52 to support skirt section 28 and base assemblies 21 and put it in the internal capacity 12.Subsequently, can enter internal capacity 12 by the passage 20 of sleeve pipe 18.

[0050] no longer need the people enter the internal capacity 12 of container 10 after and after the resistates of having removed initial weld seam 44, can be in a manner described the projection 24 in skirt section 28 be welded on the sleeve pipe 18 again.

[0051] if necessary, after the projection 24 in skirt section 28 has been welded to sleeve pipe 18 again, can purifying vessel 10, so that container 10 turns back to the state that is suitable for storing HP or UHP gas or other special materials.

[0052] valve box 17 is convenient to the internal capacity 12 that the people enters container 10, and can eliminate the needs to the footway thus.Compare with the footway, valve box 17 does not rely on and uses sealing member or packing ring that the internal capacity 12 in the container 10 is kept apart from surrounding environment; On the contrary, the connection between each major part of valve box 17 is the air-tightness weld seam.Therefore, believe by valve box 17 bleed or the possibility of internal capacity 12 that spills container 10 significantly less than the possibility of the footway seepage by comparable dimensions, particularly, bear under the situation of contingent physical shock, vibration and temperature fluctuation between the delivery period of container 10 at container 10.

[0053] being welded to connect between the major part of valve box 17 is considered to make valve box 17 wherein not needing to be particularly suitable for the people often and/or regularly to enter in the application of internal capacity 12 of container 10.For example, be to have described in the U.S. Patent application undetermined (attorney docket 07144USA) of " Devices and Methods for Performing Inspections; Repairs; and/or Other Operations Within Vessels " to be used for checking, repair and the device of other operations at the title of on November 26th, 2007 application, in conjunction with its full content as a reference at this at container.Use disclosed device in aforementioned application can be eliminated the people is regularly entered container (as container 10) in-to-in needs.Therefore, the valve box that container (as container 10) can be equipped as valve box 17 replaces footway (with the possibility of its seepage), so that the people enters the inside of container as required once in a while.

[0054] alternative embodiment of valve box 17 can be configured to not have groove 42.For example, Fig. 4 has described the alternative embodiment with the container 10 of container 10a form.Container 10a comprises the valve box 60 that replaces valve box 17.Other aspects, container 10a is equal to container 10 basically.Basically the parts of container 10a that are equal to the parts of container 10 are represented by identical Reference numeral in the accompanying drawings.

[0055] valve box 60 comprises the sleeve pipe 62 and the base assemblies 64 of substantial cylindrical.The opening that sleeve pipe 62 can be formed in the main portion 15 of shell 14 holds, and can be fixed to main portion 15 by the suitable manner as weld seam 23.

[0056] base assemblies 64 comprises lid 66 and is installed in the skirt section 68 of the substantial cylindrical on the upper surface of lid 66 by the suitable manner as weld seam 69.As shown in Figure 4, can by as the suitable manner of the weld seam 70 that 68 interior periphery extends along the skirt section lid 66 directly is fixed to the basal surface of sleeve pipe 62.In alternative embodiment, sleeve pipe 62 and skirt section 68 can respectively have the shape except that cylindrical.For example, in alternative embodiment, sleeve pipe 62 and skirt section 68 can respectively have square or rectangular cross section.

[0057] fluid valve 35 can be installed on the lid 66 of valve box 60.In alternative embodiment, valve box 60 can be used for holding more than a fluid valve 35.Other alternative embodiment can comprise personnel access provisions, and except described personnel access provisions did not comprise any fluid valve, it was equal to valve box 60 basically.

[0058] when needing the people to enter the internal capacity 12 of container 10b, the lid 66 of valve box 60 can be taken apart with sleeve pipe 62.For example, can take lid 66 apart by the weld seam 70 that cutting or other modes are cut off between lid 66 and the sleeve pipe 62.During the cutting process and after cutting process, can use elevator belt and be installed in carriage 52 on the lid 66 and support lid 66 and it is fallen.

[0059] other alternative embodiment of valve box 17 can be configured to not have the skirt section.For example, Fig. 5 has described the alternative embodiment with the container 10 of container 10b form.Container 10b comprises the valve box 80 that replaces valve box 17.Other aspects, container 10b is equal to container 10 basically.

[0060] valve box 80 comprises the sleeve pipe 82 of substantial cylindrical.The opening that sleeve pipe 82 can be formed in the main portion 15 of shell 14 holds, and can be fixed to main portion 15 by the suitable manner as weld seam 23.

[0061] valve box 80 also comprises lid 84.Can by as the suitable manner of the weld seam 88 that extends around sleeve pipe 82 interior peripheries lid 84 is installed on the sleeve pipe 82.In alternative embodiment, sleeve pipe 82 can have the shape except that cylindrical.For example, in alternative embodiment, sleeve pipe 82 can have square or rectangular cross section.

[0062] fluid valve 35 can be installed on the lid 84 of valve box 80.In alternative embodiment, valve box 80 can be used for holding more than a fluid valve 35.Other alternative embodiment can comprise personnel access provisions, and except described personnel access provisions did not comprise any fluid valve, it was equal to valve box 80 basically.

[0063] when needing the people to enter the internal capacity 12 of container 10b, valve box 80 can be taken apart and take off from the main portion 15 of the shell 14 of container 10.Particularly, weld seam 23 can be cut, so and can use (for example) elevator belt and the carriage 52 that is installed on the lid 84 to promote sleeve pipe 82 and accompanying lid 84.Can obtain to enter internal capacity 12 by the opening in the main portion 15 of holding sleeve pipe 80 subsequently.

[0064] Fig. 6 has described another alternative embodiment with the container 10 of container 10c form.Container 10c comprises valve box 90.Except following difference, valve box 90 is equal to the valve box 80 of container 10b basically; Valve box 90 comprises around the location, upper end of sleeve pipe 82 and is fixed to the strut member of ring 92 forms on the sleeve pipe 82 by the suitable manner as weld seam 93.Basically the parts of valve box 90 that are equal to the parts of valve box 80 utilize identical Reference numeral to represent in the accompanying drawings.

[0065] weld seam 94 that can extend by the excircle around described ring 92 is fixed to valve box 90 on the main portion 15 of shell 14.When needing the people to enter in the internal capacity 12 of container 10c, valve box 90 can be taken apart and take off from the main portion 15 of the shell 14 of container 10c.Particularly, weld seam 94 can be cut, and can use (for example) elevator belt and be installed in carriage 52 on the lid 84 and promote sleeve pipe 82, accompanying lid 84 and encircle 92.Can obtain to enter internal capacity 12 by the opening in the main portion 15 of holding sleeve pipe 80 subsequently.Ring 92 weld seam 94 places that are arranged on away from opening, and the fragment that can prevent or stop welding process to produce thus enters the internal capacity 12 of container 10c.

[0066] as mentioned above,

valve box

17,60,80 and 90 alternative embodiment can be configured to not be with valve, and can only play personnel access provisions.For example, Fig. 7 has described the container 10d that is equipped with personnel access provisions 122, except described personnel access provisions 122 does not comprise that any valve, it is equal to valve box 17 basically.The degree of depth of personnel access provisions 122 or height (with valve box 17 be different) be not subjected to hold the restriction or the restriction of valve.Basically the parts of container 10d that are equal to the parts of container 10 utilize identical Reference numeral to represent in the accompanying drawings.

[0067] just as discussed above, traditional valve box possible configuration is with the footway, so that the single overplate that can use uncontamination gas is to reduce or to eliminate owing to make outside air penetrate into the possibility of container by footway and the seepage that is arranged in the valve of valve box.

[0068], thinks and eliminated the possibility of passing through personnel access provisions 122 seepages basically owing to its welded structure.The overplate that therefore, need not keep uncontamination gas in the inside of personnel access provisions 122.Therefore, when user of service's access to plant 122, the above-mentioned advantage that valve and personnel access provisions are set in common valve box has not existed.Therefore, valve can be arranged in and be placed on the suitable of entire container 10d or other one or more less relatively valve box of position easily.

[0069] for example, container 10d comprises the first fluid valve 126 and second fluid valve 128.First fluid valve 126 is installed in the first valve box 129 on the top of the shell 15 that is arranged in container 10d.Second fluid valve 128 is installed in the second valve box 130 of the bottom of the shell 15 that is arranged in container 10d.

[0070] first and second valve box 128,129 does not need to hold personnel access provisions, because the internal capacity 12 that provides the people to enter container 10d by personnel access provisions 122.The size of determining the first and second valve boxes 129,130 to be only holding the corresponding first fluid valve 126 and second fluid valve 128, and the valve box that therefore just also holds relatively as the personnel access provisions on footway is quite compact.

[0071] Fig. 8 has described another alternative embodiment with container 10e form.Basically the parts that are equal to the unit container 10e of container 10 utilize identical Reference numeral to represent in the accompanying drawings.

[0072] container 10e comprises inwall 134, and this inwall is divided into first compartment 136 and second compartment 138 with the internal capacity of container 10e.Described inwall has the import (not shown), and the hatch cover (also not showing) that this import is installed on the inwall 134 usually covers.

[0073] container 10e also comprises the first fluid valve 140 and second fluid valve 142.First fluid valve 140 is installed in the first valve box 174 on the shell 15 that is installed in container 10e, is communicated with so that first fluid valve 140 is in first compartment, 136 fluids.Second fluid valve 142 is installed in the second valve box 176 that is installed on the shell 15, is communicated with so that second fluid valve 142 is in second compartment, 138 fluids.Can provide personnel to enter first compartment 136 by the personnel access provisions 122 that is installed on the shell 15.For example, can come the acquisition personnel to enter second compartment 138 by the hatch cover that enters first compartment 136 and open on the inwall 134.

[0074] Fig. 9 has described another alternative embodiment with container 10f form.Container 10f is equal to container 10e basically, except following exception.Basically the parts of container 10ef that are equal to the parts of container 10e utilize identical Reference numeral to represent in the accompanying drawings.

[0075] container 10f comprises first fluid valve 150, second fluid valve 152, the 3rd fluid valve 154 and the 4th fluid valve 156.Container 10f also comprises valve box 158.The first, second, third and the 4th fluid valve 150,152,154,156 is at valve box 158 inner linear ranks.Valve box 158 is installed on the shell 15 of container 10f, be communicated with so that first and second fluid valves 150,152 are in first compartment, 136 fluids, and third and fourth fluid valve 154,156 is in second compartment, 138 fluids and is communicated with.Valve box 158 has substantially elliptical, to hold the linearly aligned first, second, third and the 4th fluid valve 150,152,154,156.In alternative embodiment, valve box 158 can have other shapes that are suitable for holding linearly aligned valve.

[0076] Figure 10 has described another alternative embodiment with container 10g form.Basically the parts of container 10g that are equal to the parts of container 10 utilize identical Reference numeral to represent in the accompanying drawings.

[0077] container 10g comprises the access to plant 122 on the main portion 15 of the shell 14 that is installed in container 10g.Container 10g also comprises the fluid valve 162 that is held by the valve box 163 on the head 16 that is installed in shell 14.

[0078], can there be other structure of container according to the special requirement that is used for special applications.For example, can three fluids (valve) be installed in single valve box inside by delta pattern; Can four fluid valves be installed in single valve box inside by square or rectangular patterns, etc.

[0079] other alternative embodiment can comprise personnel access provisions, and wherein lid is connected to the upper surface of sleeve pipe, so that lid is positioned at the enclosure of container.

[0080] above-mentioned explanation is to be used for the illustrative purpose, and does not regard limitation of the present invention as.Though described the present invention with reference to preferred embodiment or method for optimizing, very clear, already used herein words and phrases are words and phrases of explanation and diagrammatic, rather than restrictive words and phrases.In addition, though described the present invention with reference to special construction, method and embodiment herein, the present invention does not plan to be limited in the special case disclosed herein, because the present invention expands in claim scope interior all structures, method and the purposes.Be subjected to the instruction of specification sheets, those skilled in the art can carry out many modifications to the present invention described herein, and can change and do not break away from the defined scope and spirit of the present invention of claim.

Claims

1. container comprises:

Shell, it limits internal capacity;

Sleeve pipe, it is installed on the described shell and limits is convenient to the passage that personnel enter described internal capacity; With

Lid, it covers described passage and is connected on the described sleeve pipe by weld seam.

2. the container of claim 1, wherein said width of channel or diameter be approximately 2.5 feet or more than.

3. the container of claim 2 also comprises the projection that is installed on the described lid, and wherein said weld seam is formed between described projection and the sleeve pipe.

4. the container of claim 3, wherein said sleeve pipe and projection define groove, and described weld seam is positioned at described groove at least in part.

5. the container of claim 4, at least one in wherein said sleeve pipe and the projection has such surface, and described surface is angled and partly limit described groove with respect to the line of centers of described sleeve pipe.

6. the container of claim 1 also comprises the skirt section that is installed on the described lid and centers at least a portion sleeve pipe.

7. the container of claim 6, wherein said weld seam are along the interior periphery setting of described sleeve bottom, and described skirt section is around the bottom of described sleeve pipe.

8. the container of claim 1 also comprises the support of the outside face of the outside face that is attached to described sleeve pipe and described shell.

9. the container of claim 8, wherein said sleeve pipe is a substantial cylindrical, and described support is a general toroidal.

10. the container of claim 1 also comprises the valve that is installed on the described lid.

11. the container of claim 1, wherein said sleeve pipe is installed on the primary importance of described shell, and described container also comprises valve box and the valve that is installed in the described valve box on the second place that is installed in described shell.

12. the container of claim 11, the diameter of wherein said valve box are approximately less than 2.5 feet.

13. the container of claim 11 also comprises the 3rd locational second valve box that is installed in described shell and second valve that is installed in the second valve box.

14. the container of claim 11 also comprises the second and the 3rd valve that is installed in the described valve box, wherein said valve is pressed linearity pattern and is arranged, and described valve box has substantially elliptical.

15. the container of claim 11, wherein said shell comprise main portion and are connected to the head of described main portion end; And described valve box is installed on the described head.

16. the container of claim 13 also comprises the inwall that the internal capacity of described container is divided into first compartment and second compartment, wherein in the valve is in the first compartment fluid and is communicated with, and in the valve another is in the second compartment fluid and is communicated with.

17. the container that can store and transport high purity and ultra-high purity gas comprises:

Shell;

Hollow sleeve, it is installed on the described shell and extends through described shell; With

Lid, it for good and all is connected to the end of described sleeve pipe.

18. the container of claim 17, wherein said lid is soldered to the end of described sleeve pipe.

19. the container of claim 17, the end of wherein said sleeve pipe is arranged in the internal capacity of described shell.

20. the container of claim 17 also comprises the valve that is installed on the described lid.

21. the container of claim 17, wherein said shell limits the internal capacity of described container, and described sleeve pipe is limited to the passage that extends between described internal capacity and the outside of containers, and described width of channel or diameter be approximately 2.5 feet or more than.

22. the container of claim 17, wherein said lid isolates described internal capacity from the surrounding environment of described external container.

23. the container of claim 18 also comprises the projection that is installed on the described lid, wherein said sleeve pipe and described projection limit groove, and the weld seam that connects described lid and sleeve pipe is positioned at described groove at least in part.

24. method that is used for entering the internal capacity of container, described container comprises the shell that limits described internal capacity, be connected to described shell and limit the sleeve pipe of the passage that enters described internal capacity from described container outside and be connected to described sleeve pipe and cover the lid of described passage by weld seam, and described method comprises:

Cut described weld seam;

Described lid is removed from described passage; With

Enter in the described internal capacity by described passage.

25. the method for claim 24 is wherein removed described lid and is comprised described lid is lowered into the described internal capacity from described passage.

26. the method for claim 24 also comprises when being lowered into described lid in the described internal capacity, uses the lifting that is connected to described lid to bring and supports described lid.

27. the method for claim 24 also comprises by described passage and leaves described internal capacity, and described lid is welded to described sleeve pipe again.

28. the method for claim 27 also is included in to leave described internal capacity and described lid is welded to again and purifies described container after the described sleeve pipe.