CN101476861A - Probe altitude measurement system and method - Google Patents

Probe altitude measurement system and method Download PDF

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Publication number
CN101476861A
CN101476861A CNA2008100003220A CN200810000322A CN101476861A CN 101476861 A CN101476861 A CN 101476861A CN A2008100003220 A CNA2008100003220 A CN A2008100003220A CN 200810000322 A CN200810000322 A CN 200810000322A CN 101476861 A CN101476861 A CN 101476861A
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China
Prior art keywords
probe
measuring unit
height
altitude measurement
detection signal
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Pending
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CNA2008100003220A
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Chinese (zh)
Inventor
陈天青
杨家森
李宏德
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SUNFUIN TECHNOLOGY CO LTD
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SUNFUIN TECHNOLOGY CO LTD
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Priority to CNA2008100003220A priority Critical patent/CN101476861A/en
Publication of CN101476861A publication Critical patent/CN101476861A/en
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Abstract

The invention relates to a probe height measuring system, which is used for measuring the height of probes on a probe tool. The probe height measuring system comprises a measuring unit and a signal processing unit which is electrically connected with the measuring unit, wherein the measuring unit can be used for electrical conductance and is provided with a measuring stroke which tends to the displacement of the probe tool; the signal processing unit is also electrically connected with various probes on the probe tool and acquires position information of the measuring unit on the measuring stroke; the measuring stroke is provided with at least one contact position which contacts the probes; the measuring unit generates a detection signal on the contact position, transmits the detection signal to at least one probe, and then transmits the detection signal to the signal processing unit; and the signal processing unit determines the height of the at least one probe which is positioned on the contact position corresponding to the position information. The probe height measuring system can quickly position the height of all the probes on the probe tool.

Description

Probe altitude measurement system and method thereof
Technical field
The present invention relates to a kind of probe altitude measurement method, refer to a kind of probe altitude measurement method that once measures most probe height especially.
Background technology
The probe tool is printed circuit board (PCB) (Printed Circuit Board, PCB), integrated circuit (Integrated Circuit, IC) or connector (Connector) after completing, encapsulate or shipment before the downstream, normally whether be used for detecting its circuit.At present under the day by day complicated trend of electronic device construction, single electronic installation may have a large amount of electronic contact positions, and corresponding probe tool, no matter on number of probes or the complexity of arranging, also grows with each passing day.And the yield of probe tool often determines the degree of accuracy of testing result, as long as the position appearance deviation slightly of a probe is arranged, promptly may judge the testing result of a series of objects to be measured by accident, may cause huge cost allowance, perhaps because of remedy the waste that causes the plenty of time afterwards.Therefore, accurate probe on the position probe tool except judging whether this probe tool is enough to detect as determinand, also can be exempted because of erroneous judgement causes waste on the resource, helps keeping the smooth and easy of manufacture process.
Probe tip on the probe tool is not to be all same plane because in response to the opposed body structure of object to be measured, therefore for the interpretation of probe height all be all the time one quite difficult and have a problem of suitable error.Generally speaking be the probe that has positioning function by another, shown in No. the 7250782nd, United States Patent (USP),, treat location and put and position by point-to-point mode.Yet the number of probes that is provided with on the general probe tool is quite huge, will expend considerable time by point-to-point measuring process, prolong integral body and go out ETCD estimated time of commencing discharging, and uneconomical.Another known technology shown in TaiWan, China patent I283449 number, by the mode of carrying out image photography in the object to be measured side image processing system of arranging in pairs or groups, decides the height of terminal.This mode also is not suitable for being used in the height of each probe on the probe tool and measures, and the probe on the probe tool is arranged closely, if take data around only obtaining in the side mode, still can't carry out measurement on the height for the probe of center.
Summary of the invention
Fundamental purpose of the present invention is accurately to determine the position of all probes on the probe tool, and reduces the needed time of location.For achieving the above object, the invention provides a kind of probe altitude measurement method, in order to the height of probe on the measuring probe tool, comprise that step has: the means of contact probe: driving can contact with this probe for the measuring unit of conduction; Obtain the means of contact position information: transmit this measuring unit and this probe institute position contacting information to signal processing unit; The means of detecting institute contact probe: this measuring unit produces detection signal in this probe that is contacted; The means of decision probe height: this probe transmits this detection signal in this signal processing unit, to should positional information to determine at least one height that is positioned at this contact position probe.Because this probe tool has the probe of at least one group of differing heights, and this probe can be stressed and produce elastic displacement up and down, return back to the means of this contact probe after the means of this decision probe height are finished, all probes have determined its height all on this probe tool.
In addition, the present invention also provides a kind of system for carrying out said process that is applicable to, is a kind of probe altitude measurement system, includes measuring unit, and the signal processing unit that is linked to this measuring unit; This measuring unit can and have the measurement stroke of this probe tool displacement of trend for conduction, this signal processing unit, and also electrical ties each probe on this probe tool, and obtain the positional information of this measuring unit on this measurement stroke; Wherein, in this measurement stroke, has at least one contact position that contacts with this probe, this measuring unit produces detection signal in this contact position and is passed at least one probe, and this detection signal is sent to this signal processing unit, to should positional information to determine at least one height that is positioned at this contact position probe.
By this measuring unit on a large scale with the contacting of probe, make the present invention be judged the position of institute's contact probe in a large number, be different from and knownly must carry out the measurement of point-to-point mode, the present invention only need can obtain the height of all probes on the probe tool to be measured by the displacement of several measuring unit, can effectively save the time of probe altitude measurement, promote the efficient on whole the manufacturing comparatively speaking.
Description of drawings
Fig. 1 is the stereoscopic synoptic diagram of probe altitude measurement system preferred embodiment of the present invention.
Fig. 2 is the steps flow chart synoptic diagram of probe altitude measurement method preferred embodiment of the present invention.
Fig. 3-1 is to Fig. 3-the 4th, a series of start schematic flow sheets of the preferred embodiment of the present invention.
Embodiment
Relevant detailed description of the present invention and technology contents now cooperate schematic view illustrating as follows:
See also shown in Figure 1, it is the stereoscopic synoptic diagram of one embodiment of the present invention, as shown in the figure: the present invention has a kind of probe altitude measurement system, in order to measure the height of probe 11 on the probe tool 10, this probe altitude measurement system mainly includes a measuring unit 20 and a signal processing unit 30, and this measuring unit 20 forms electrical ties each other with this signal processing unit 30.This probe tool 10 is fixed on the stationary platform 12, this measuring unit 20 can and have a drive unit 21 for conduction and trend towards probe tool 10 on this stationary platform 12 to drive this measuring unit 20, make this measuring unit 20 have one and measure stroke P, and comprise a junction 22 with conductive capability; This signal processing unit 30 is obtained the positional information of this measuring unit 20 on this measurement stroke P except being linked to this measuring unit 20, also is linked to each probe 11 on this probe tool 10; Generally speaking, probe tool 10 has the probe 11 of at least one group of differing heights, and this probe 11 can be stressed and produces elastic displacement about in the of.All probes 11 all can contact with this measuring unit 20 on this probe tool 10 in order to make, carry out having at least one contact position that contacts with this probe 11 in the process of this measurement stroke P, this measuring unit 20 produces a detection signal in this contact position and is passed at least one this probe 11, and this detection signal is sent to this signal processing unit 30, to should positional information to determine at least one height that is positioned at this contact position probe 11.This signal processing unit 30 is linked to a display device 40, determines the elevation information of this probe 11 according to this positional information and this detection signal in order to show this signal processing unit 30.
For making the present invention be detected the height of all probes 11 fast, the junction 22 of this measuring unit 20 is in order to directly to contact with this probe 11, and the area of this junction 22 is at least greater than the set scope of this probe 11, the scope that so when measuring stroke P, can once contain whole probes 11, reduce the number of times measure stroke P, and this junction 22 be a copper metal or other can be for the material of conduction.The detection signal that this measuring unit 20 produces in this contact position is except can producing voluntarily, also can receive the detection signal that is passed to this measuring unit 20 from this signal processing unit 30 at least by a probe 11 in contact position, measuring unit 20 with this detection signal, detection signal is sent to the probe 11 that is contacted by junction 22 again, therefore having the probe 11 that contacts with this junction 22 only just can be recycled to detection signal this signal processing unit 30, to pick out the probe 11 with the junction 22 sustained height positions of this measuring unit 20, person very, for guaranteeing that all probes 11 can both receive this detection signal, the dirt that is attached to when avoiding this probe 11 because of work or other cause the factor that resistance increases influences its normal conducting function, the voltage the when voltage of this detection signal is worked greater than this probe 11 at least.
In addition, the present invention also has the probe altitude measurement method of a collocation said system, sees also shown in Figure 2ly, comprises that basic step has:
The means of contact probe: drive one and can contact (step 1) with this probe 11 for the measuring unit 20 of conduction;
A) obtain the means of contact position information: transmit this measuring unit 20 and 11 position contacting information to one of this probe signal processing unit, 30 (steps 2);
B) means of detecting institute contact probe: this measuring unit 20 produces a detection signal in this probe 11 (step 3) that is contacted;
C) means of decision probe height: this probe 11 transmits these detection signals in this signal processing unit 30, to should positional information to determine at least one height (step 4) that is positioned at this contact position probe 11;
D) show the means of probe height: the elevation information of probe 11 is shown on the display device 40, reads or carry out follow-up and handle (step 5) for the user;
E) return back to the means of this contact probe: drive this measuring unit 20 and continue displacements, to reach this other contact position (step 6).
In one embodiment of the present invention, see also Fig. 2 and arrange in pairs or groups Fig. 3-1 to shown in Fig. 3-2, this measuring unit 20 is by the driving power of this drive unit 21, make this measuring unit 20 these probe tools 10 of trend, and contact with at least one probe 11 by this junction 22, to finish the means (step 1) of contact probe.Person very, the measurement range of this measuring unit 20 is at least greater than the set scope of this probe 11, when this measuring unit 20 finish one measure stroke P after, all probes 11 all can be finished the measurement of height on this probe tool 10.Because this measuring unit 20 and a signal processing unit 30 electrical ties, this measuring unit 20 is able to send it to this signal processing unit 30 in the positional information L1 that measures on the stroke P, the positional information L1 that produces when this measuring unit 20 contacts with this probe 11, also can represent the height and position information with these measuring unit 20 contact probes 11, and finish the means (step 2) that obtain contact position information.And on the general probe tool 10, be geometric position difference in response to the testing component terminal, and having the probe 11 of at least one group of differing heights, and be the measurement elasticity that can keep certain, this probe 11 can be stressed and produce elastic displacement about in the of.(step 3) is meant when this measuring unit 20 is positioned at first contact position of measuring on the stroke P means of detecting institute contact probe, may only there be the probe 11 of part to contact with this junction 22, this measuring unit 20 transmits a detection signal S1 by this junction 22 for the probe 11 that is contacted, therefore, have the probe 11 that contacts with this measuring unit 20 only and just have this detection signal S1.This detection signal S1 also is passed to this measuring unit 20 in contact position with this detection signal S1 by a probe 11 by this signal processing unit 30 at least except can directly being produced voluntarily by this measuring unit 20.When probe 11 carried out work, possibility was because dirt or oxidation etc. cause impedance to increase, and the influence conduction all can receive this detection signal for guaranteeing all probes 11, the voltage the when voltage of this detection signal is worked greater than this probe 11 at least.
And this probe 11 is passed to this signal processing unit 30 with detection signal S1, this signal processing unit 30 is with the detection signal S1 of received expression and this measuring unit 20 contact probes 11, the positional information L1 of corresponding these measuring unit 20 height and positions of expression is to determine at least one elevation information Z1 that is positioned at this contact position probe 11, so to finish the means (step 4) of decision probe height.At last, the elevation information Z1 of this signal processing unit 30 this probe 11 that determines is that (step 5) is shown in the elevation information Z1 of probe 11 on the display device 40, reads or carries out follow-up and handle for the user by means that show probe height.
The height of probe 11 differs on the probe tool 10, for detecting the height of all probes 11 on this probe tool 10, though finish the measurement of probe 11 height on above-mentioned first contact position, still has other probe to be measured 11.Because this probe 11 can be stressed flexible, therefore, also (step 4) comprises a means (step 6) that returns back to this contact probe after finishing to the inventive method in the means of this decision probe height, and consult shown in Fig. 3-3 and Fig. 3-4, continue to carry out this measurement stroke P in this measuring unit 20 and oppress this probe that has contacted 11 continuation displacements, to reach this other contact position and to carry out height for the probe 11 that contacts and measure, and will be in the measured positional information L2 of different contact position, L3 and detection signal S2, S3 is integrated into probe 11 elevation information Z2, Z3 is shown on this display device 40, and all probes 11 have determined its height all on this probe tool 10.
In sum, method compared to tradition detecting probe height, the problem that may expend a large amount of time or can't detect comprehensively, one aspect of the present invention only need make the difference of this measuring unit 20 according to whole probe 11 height groups, carry out the measurement that measurement stroke P for several times can finish probes 11 whole on the probe tool 10 height, on the other hand, the measurement range of this measuring unit 20 is provided with scope greater than this probe 11 at least, therefore no matter the set position of this probe 11 in around or central authorities, all can be detected, reach the effect of comprehensive measuring height by this measuring unit 20.Therefore the present invention has progressive and meets the important document of applying for patent of invention.
Below the present invention is described in detail, only the above person only is a preferred embodiment of the present invention, when not limiting scope of the invention process.Be that all equalizations of doing according to the present patent application scope change and modify etc., all should still belong in the patent covering scope of the present invention.

Claims (18)

1. probe altitude measurement method goes up the height of probe (11) in order to measuring probe tool (10), it is characterized in that, comprises that step has:
The means of contact probe: driving can contact with described probe (11) for the measuring unit (20) of conduction;
Obtain the means of contact position information: transmit described measuring unit (20) and described probe (11) institute position contacting information (L1, L2, L3) to signal processing unit (30);
The means of detecting institute contact probe: described measuring unit (20) produces detection signal (S1, S2, S3) in the described probe (11) that is contacted;
The means of decision probe height: described probe (11) transmits described detection signal (S1, S2, S3) in described signal processing unit (30), and corresponding described positional information (L1, L2, L3) is to determine at least one height that is positioned at described contact position probe (11).
2. probe altitude measurement method according to claim 1 is characterized in that, described detection signal (S1, S2, S3) is passed to described measuring unit (20) by a probe (11) at least by described signal processing unit (30).
3. probe altitude measurement method according to claim 1 is characterized in that, described probe tool (10) has the probe (11) of at least one group of differing heights.
4. according to claim 1 or 3 described probe altitude measurement methods, it is characterized in that described probe (11) can be stressed and produce elastic displacement up and down.
5. probe altitude measurement method according to claim 4, it is characterized in that, also after the means of described decision probe height are finished, comprise the means that return back to described contact probe, go up all probes (11) up to described probe tool (10) and all determined its height.
6. probe altitude measurement method according to claim 1 is characterized in that, the measurement range of described measuring unit (20) is at least greater than the set scope of described probe (11).
7. probe altitude measurement method according to claim 1 is characterized in that, also has the means that show described probe (11) height.
8. probe altitude measurement method according to claim 1 is characterized in that, the voltage the when voltage of described detection signal (S1, S2, S3) is worked greater than described probe (11) at least.
9. probe altitude measurement system is gone up the height of probe (11) in order to measuring probe tool (10), it is characterized in that, includes:
Measuring unit (20) can and have the measurement stroke (P) that tends to described probe tool (10) displacement for conduction;
Signal processing unit (30), electrical ties goes up each probe (11) in described measuring unit (20) and described probe tool (10) respectively, and obtains the positional information (L1, L2, L3) of described measuring unit (20) on described measurement stroke (P);
Wherein, in described measurement stroke (P), has the contact position that at least one and described probe (11) contacts, described measuring unit (20) produces detection signal (S1, S2, S3) in described contact position and is passed at least one described probe (11), and described detection signal (S1, S2, S3) is sent to described signal processing unit (30), corresponding described positional information (L1, L2, L3) is to determine at least one height that is positioned at described contact position probe (11).
10. probe altitude measurement system according to claim 9 is characterized in that, described probe tool (10) has the probe (11) of at least one group of differing heights.
11. probe altitude measurement system according to claim 9 is characterized in that, described probe (11) can be stressed and produce elastic displacement up and down.
12. probe altitude measurement system according to claim 9 is characterized in that, described measuring unit (20) comprises the junction (22) with conductive capability.
13. probe altitude measurement system according to claim 12 is characterized in that, described junction (22) is the copper metal.
14. probe altitude measurement system according to claim 12 is characterized in that, the area of described junction (22) is at least greater than the set scope of described probe (11).
15. probe altitude measurement system according to claim 9 is characterized in that, described measuring unit (20) has the drive unit (21) that drives described measuring unit (20) the described measurement stroke of generation (P).
16. probe altitude measurement system according to claim 9 is characterized in that, described signal processing unit (30) is passed to described measuring unit (20) in contact position with detection signal (S1, S2, S3) by a probe (11) at least.
17. probe altitude measurement system according to claim 9 is characterized in that, described signal processing unit (30) is linked to the display device (40) that shows described probe (11) height.
18. probe altitude measurement system according to claim 9 is characterized in that, the voltage the when voltage of described detection signal (S1, S2, S3) is worked greater than described probe (11) at least.
CNA2008100003220A 2008-01-04 2008-01-04 Probe altitude measurement system and method Pending CN101476861A (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104748658A (en) * 2013-12-31 2015-07-01 上海华虹宏力半导体制造有限公司 Method and instrument for automatically measuring loss amount of pin tip of probe card
CN110333471A (en) * 2019-07-18 2019-10-15 深圳橙子自动化有限公司 A kind of probe error compensating method for flying probe

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104748658A (en) * 2013-12-31 2015-07-01 上海华虹宏力半导体制造有限公司 Method and instrument for automatically measuring loss amount of pin tip of probe card
CN110333471A (en) * 2019-07-18 2019-10-15 深圳橙子自动化有限公司 A kind of probe error compensating method for flying probe
CN110333471B (en) * 2019-07-18 2021-07-23 深圳橙子自动化有限公司 Probe error compensation method for flying probe test

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Open date: 20090708