CN101468340A - Paster glue coating apparatus and coating method - Google Patents
Paster glue coating apparatus and coating method Download PDFInfo
- Publication number
- CN101468340A CN101468340A CNA2007103008522A CN200710300852A CN101468340A CN 101468340 A CN101468340 A CN 101468340A CN A2007103008522 A CNA2007103008522 A CN A2007103008522A CN 200710300852 A CN200710300852 A CN 200710300852A CN 101468340 A CN101468340 A CN 101468340A
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- web plate
- substrate
- roller shape
- shape web
- heraeus
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- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
The invention discloses a patch glue coating device and a coating method. The patch glue coating device comprises a glue coating table, a roller-shaped net board, a scraper, an external pressurizing device, a first driving device and a second driving device, wherein the glue coating table is used for supporting a base plate to be coated; a plurality of hollow meshes which are corresponding to a preset coating area of the base plate to be coated are formed on the roller-shaped net board; the scraper is positioned in the roller-shaped net board; the external pressurizing device is used for pressurizing patch glue; the first driving device is used for driving the roller-shaped net board so as to ensure that the roller-shaped net board rotates above the surface of the base plate to be coated around the center of the base plate to be coated; and the second driving device is used for driving the base plate to be coated so as to ensure that the base plate to be coated horizontally moves on the surface of the base table.
Description
Technical field
The present invention relates to a kind of paster glue coating apparatus and coating method, more particularly, the present invention relates to a kind of paster glue coating apparatus and coating method that improves paster glue coating efficient.
Background technology
Heraeus is widely used in the semiconductor packages field, is used for fixing chip.The method that is used to apply Heraeus at present mainly contains two kinds, and a kind of is dotting glue method, and another kind is a print process.
Fig. 1 shows the dispensing method that is used to apply Heraeus of prior art.With reference to Fig. 1, the dispensing method of the coating Heraeus of prior art may further comprise the steps: photoresist spinner 101 is provided, is used for follow-up coated technique is provided support; Substrate 105 to be applied is placed on the photoresist spinner 101, and wherein, substrate 105 to be applied has predetermined the area of application; Heraeus 104 is dropped on predetermined the area of application of substrate 105 by nozzle 106, wherein, nozzle 106 can be regulated the output quantity of Heraeus 104.Therefore, Heraeus 104 is coated on predetermined the area of application of substrate 105 to be applied exactly.
Fig. 2 shows the printing process that is used to apply Heraeus of prior art.With reference to Fig. 2, the printing process of the coating Heraeus of prior art may further comprise the steps: photoresist spinner 101 is provided, is used for follow-up coated technique is provided support; Substrate 105 to be applied is placed on the photoresist spinner 101, and wherein, substrate 105 to be applied has predetermined the area of application; Above substrate 105 to be applied, web plate 102 is set, makes that the open area of web plate 102 is corresponding with predetermined the area of application of substrate 105 to be applied, can determine the thickness of the Heraeus 104 of coating on substrate 105 to be applied by the thickness of regulating web plate 102; The end of scraper 103 from web plate 102 moved to the other end, make scraper 103 drive Heraeus 104 and move, so Heraeus 102 is uniformly coated on predetermined the area of application of substrate 105 to be applied along web plate 102.
In above-mentioned two kinds of methods, adopt the predetermined the area of application that can only treat on the coated substrate 105 with reference to the dispensing method of Fig. 1 to carry out single coating, efficient is low.Though employing can be finished coat operations to a substrate simultaneously with reference to the printing process of Fig. 2, can enhance productivity to a certain extent, but after the coat operations of finishing a substrate, must lift web plate 102 and load new substrate to be applied, after the loading of finishing new substrate, again web plate 102 is fallen, proceed coated technique.For suitability for industrialized production, lifting and fall all of web plate 102 can take the production time, thereby reduces production efficiency.
Therefore, need a kind of paster glue coating method that has improved production efficiency.
Summary of the invention
The objective of the invention is to solve the low problem of production efficiency that exists in the prior art, accuracy is good and production efficiency is high paster glue coating apparatus and coating method are provided.
Paster glue coating apparatus according to the present invention is finished the coating for the treatment of coated substrate by the roller shape web plate that utilization has the hollow out mesh corresponding with predetermined the area of application of substrate to be applied, make roller shape web plate and substrate to be applied move simultaneously by drive unit, in roller shape web plate and substrate motion to be applied, Heraeus flows on the roller shape web plate, and passes the mesh of roller shape web plate and be applied on predetermined the area of application of substrate to be applied.Therefore, paster glue coating apparatus according to the present invention has improved the surface covered of Heraeus when guaranteeing that Heraeus is coated to predetermined the area of application of substrate to be applied exactly.
To achieve these goals, the invention provides a kind of like this paster glue coating apparatus, described paster glue coating apparatus comprises: photoresist spinner, and this photoresist spinner is used for supporting substrate to be applied; Roller shape web plate forms a plurality of hollow out meshes corresponding with predetermined the area of application of described substrate to be applied on this roller shape web plate; Scraper, this scraper are positioned at described roller shape web plate inside; The external pressurized device, this external pressurized device is used for Heraeus is pressurizeed; First drive unit, this first drive unit are used to drive described roller shape web plate, make roller shape web plate rotate around its center in the surface of substrate to be applied; Second drive unit, this second drive unit is used to drive described substrate to be applied, makes substrate to be applied horizontal movement on the surface of photoresist spinner; Wherein, when rotation of described roller shape web plate and described substrate horizontal movement to be applied, described external pressurized device pressurizes to Heraeus, make described Heraeus flow on the described roller shape web plate, and pass the hollow out mesh of described roller shape web plate and be applied on predetermined the area of application of described substrate to be applied along described scraper.
Preferably, described roller shape web plate also comprises rotating shaft, and described rotating shaft passes the center of roller shape web plate, and described roller shape web plate rotates around described rotating shaft by the driving of described first drive unit.
Substrate to be applied according to the present invention can be plate shaped or winding shape.
Paster glue coating method according to the present invention is finished the coating for the treatment of coated substrate by the roller shape web plate that utilization has the hollow out mesh corresponding with predetermined the area of application of substrate to be applied, make roller shape web plate and substrate to be applied move simultaneously by drive unit, in roller shape web plate and substrate motion to be applied, Heraeus flows on the roller shape web plate, and passes the mesh of roller shape web plate and be applied on predetermined the area of application of substrate to be applied.Therefore, paster glue coating method according to the present invention has improved the surface covered of Heraeus when guaranteeing that Heraeus is coated to predetermined the area of application of substrate to be applied exactly.
To achieve these goals, the invention provides a kind of like this paster glue coating method, described paster glue coating method may further comprise the steps: substrate to be applied is placed on the photoresist spinner, and described substrate to be applied has predetermined the area of application; Roller shape web plate is set above described substrate to be applied, and described roller shape web plate comprises a plurality of hollow out meshes corresponding with predetermined the area of application of described substrate to be applied; Drive described roller shape web plate by first drive unit, make roller shape web plate rotate around its center in the surface of substrate to be applied; Drive described substrate to be applied by second drive unit, make substrate to be applied horizontal movement on the surface of photoresist spinner; Wherein, when rotation of described roller shape web plate and described substrate horizontal movement to be applied, utilize the external pressurized device that Heraeus is pressurizeed, make described Heraeus flow on the described roller shape web plate, and pass the hollow out mesh on the described roller shape web plate and be applied on predetermined the area of application of described substrate to be applied along described scraper.
Description of drawings
Fig. 1 shows the dispensing method that is used to apply Heraeus of prior art;
Fig. 2 shows the printing process that is used to apply Heraeus of prior art;
Fig. 3 shows the schematic diagram that paster glue coating apparatus according to an exemplary embodiment of the present invention applies plate shaped substrate;
Fig. 4 shows the schematic diagram that paster glue coating apparatus according to an exemplary embodiment of the present invention applies winding shape substrate;
Fig. 5 shows the schematic diagram of the detailed structure of roller shape web plate according to an exemplary embodiment of the present invention.
In the accompanying drawings, identical label will be used for representing same or analogous element.
The specific embodiment
Hereinafter, with reference to the accompanying drawings exemplary embodiment of the present invention is described in detail.
With reference to Fig. 3 and Fig. 5, Fig. 3 shows according to an exemplary embodiment of the present invention paster glue coating apparatus to the situation of plate shaped coating of substrates Heraeus to be applied.Paster glue coating apparatus comprises according to an exemplary embodiment of the present invention: photoresist spinner 101 is used to treat coated substrate 105 and provides support; Roller shape web plate 107 is arranged on substrate to be applied 105 tops, and roller shape web plate 107 has a plurality of hollow out meshes 109 (referring to Fig. 5) corresponding with predetermined the area of application of substrate 105 to be applied; Scraper 103 is arranged on roller shape web plate 107 inside.Wherein, can determine the thickness of Heraeus by the scraper 103 and the distance of substrate 105 to be applied.Paster glue coating apparatus also comprises the first drive unit (not shown) according to an exemplary embodiment of the present invention, be used for driving rolls shape web plate 107, make roller shape web plate 107 rotate around its center, and do not carry out horizontal movement in the surface of substrate 105 to be applied.Paster glue coating apparatus also comprises the second drive unit (not shown), is used to drive substrate 105 to be applied, makes substrate 105 to be applied horizontal movement on the surface of photoresist spinner 101.Preferably, in the position of contact substrate 105 to be applied, the tangential direction that roller shape web plate 107 rotatablely moves is identical with the horizontal movement direction of substrate 105 to be applied.
Paster glue coating apparatus also comprises external pressurized device (not shown), when 107 rotations of roller shape web plate and substrate to be applied 105 horizontal movements, by the external pressurized device Heraeus 104 is pressurizeed, make Heraeus 104 along the flowing on the roller shape web plate 107 of scraper 103, and pass the hollow out mesh 109 of roller shape web plate 107 and be applied on predetermined the area of application of substrate 105.
In addition, roller shape web plate 107 can also comprise the rotating shaft (not shown), and described rotating shaft passes the center of roller shape web plate.Described roller shape web plate 107 rotates around described rotating shaft by the driving of first drive unit.
The paster glue coating method may further comprise the steps according to an exemplary embodiment of the present invention: substrate 105 to be applied is placed on the photoresist spinner 101, and wherein, substrate 105 to be applied has predetermined the area of application; Roller shape web plate 107 is placed on the substrate 105 to be applied, and wherein, roller shape web plate 107 has a plurality of hollow out meshes 109 (referring to Fig. 5) corresponding with predetermined the area of application of substrate 105 to be applied; Come driving rolls shape web plate 107 by the first drive unit (not shown), make roller shape web plate 107 rotate around its center in the surface of substrate 105 to be applied; Drive substrate 105 to be applied by the second drive unit (not shown), make substrate 105 to be applied horizontal movement on the surface of photoresist spinner 101; Wherein, when 107 rotations of roller shape web plate and substrate to be applied 105 horizontal movements, utilize external pressurized device (not shown) to Heraeus 104 pressurizations, make Heraeus 104 flow on the roller shape web plate 107, and pass the hollow out mesh 109 of roller shape web plate 107 and be applied on the zone to be applied of substrate 105 to be applied along scraper 103.
Below, with reference to Fig. 4 and Fig. 5 the situation that paster glue coating apparatus according to an exemplary embodiment of the present invention applies the substrate 105 to be applied of winding shape is described.Substrate to be applied 105 in Fig. 4 is for the winding shape, and the paster glue coating method shown in Fig. 4 is identical with the paster glue coating method shown in Fig. 3.For under the situation of winding shape, second drive unit drives substrate 105 to be applied, makes substrate 105 to be applied carry out spool movement at substrate 105 to be applied.
According to paster glue coating apparatus of the present invention and coating method, in can be on guaranteeing Heraeus is coated to exactly predetermined the area of application of substrate to be applied, realize continuous paster glue coating operation, and do not need of the prior art web plate being lifted and the technology that web plate is fallen after the loading of finishing new substrate, reduce the process time of paster glue coating process, thereby can improve the efficient of paster glue coating.
Although described the present invention with reference to certain exemplary embodiments of the present invention, but those skilled in the art should understand that, under the situation that does not break away from the spirit or scope of the present invention that limit by claim and equivalent thereof, can modifications and variations of the present invention are.
Claims (6)
1, a kind of paster glue coating apparatus is characterized in that comprising:
Photoresist spinner, this photoresist spinner is used for supporting substrate to be applied;
Roller shape web plate forms a plurality of hollow out meshes corresponding with predetermined the area of application of described substrate to be applied on this roller shape web plate;
Scraper, this scraper are positioned at described roller shape web plate inside;
The external pressurized device, this external pressurized device is used for Heraeus is pressurizeed;
First drive unit, this first drive unit are used to drive described roller shape web plate, make roller shape web plate rotate around its center in the surface of substrate to be applied;
Second drive unit, this second drive unit is used to drive described substrate to be applied, makes substrate to be applied horizontal movement on the surface of photoresist spinner;
Wherein, when the rotation of described roller shape web plate, described substrate horizontal movement to be applied, described external pressurized device pressurizes to Heraeus, make described Heraeus flow on the described roller shape web plate, and pass the hollow out mesh of described roller shape web plate and be applied on the predetermined surplus deposited zone of described substrate to be applied along described scraper.
2, paster glue coating apparatus according to claim 1, it is characterized in that described roller shape web plate also comprises rotating shaft, described rotating shaft passes the center of roller shape web plate, and described roller shape web plate rotates around described rotating shaft by the driving of described first drive unit.
3, paster glue coating apparatus according to claim 1 and 2 is characterized in that described substrate to be applied can be plate shaped or winding shape.
4, a kind of paster glue coating method is characterized in that may further comprise the steps:
Substrate to be applied is placed on the photoresist spinner, and described substrate to be applied has predetermined the area of application;
Roller shape web plate is set above described substrate to be applied, and described roller shape web plate comprises a plurality of hollow out meshes corresponding with predetermined the area of application of described substrate to be applied;
Drive described roller shape web plate by first drive unit, make roller shape web plate rotate around its center in the surface of substrate to be applied;
Drive described substrate to be applied by second drive unit, make substrate to be applied horizontal movement on the surface of photoresist spinner;
Wherein, when the rotation of described roller shape web plate, described substrate horizontal movement to be applied, utilize the external pressurized device that Heraeus is pressurizeed, make described Heraeus flow on the described roller shape web plate, and pass the hollow out mesh on the described roller shape web plate and be applied on predetermined the area of application of described substrate to be applied along described scraper.
5, coating method according to claim 4 is characterized in that described roller shape web plate also comprises rotating shaft, and described rotating shaft passes the center of roller shape web plate, and described roller shape web plate rotates around described rotating shaft by the driving of described first drive unit.
6,, it is characterized in that described substrate to be applied can be plate shaped or winding shape according to claim 4 or 5 described coating methods.
Priority Applications (1)
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CNA2007103008522A CN101468340A (en) | 2007-12-29 | 2007-12-29 | Paster glue coating apparatus and coating method |
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CNA2007103008522A CN101468340A (en) | 2007-12-29 | 2007-12-29 | Paster glue coating apparatus and coating method |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010145425A1 (en) * | 2009-11-06 | 2010-12-23 | 中兴通讯股份有限公司 | Surface mounting apparatus and corresponding surface mounting method for pop packaging devices |
CN108787319A (en) * | 2018-08-17 | 2018-11-13 | 浙江永和纺织植绒有限公司 | A kind of flocking gluing machine |
CN114204054A (en) * | 2021-12-13 | 2022-03-18 | 浙江唐锋能源科技有限公司 | Microporous layer coating method and device suitable for production of sheet GDL (gas diffusion layer) |
-
2007
- 2007-12-29 CN CNA2007103008522A patent/CN101468340A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010145425A1 (en) * | 2009-11-06 | 2010-12-23 | 中兴通讯股份有限公司 | Surface mounting apparatus and corresponding surface mounting method for pop packaging devices |
CN108787319A (en) * | 2018-08-17 | 2018-11-13 | 浙江永和纺织植绒有限公司 | A kind of flocking gluing machine |
CN108787319B (en) * | 2018-08-17 | 2023-04-25 | 浙江永和纺织植绒有限公司 | Flocking gluing machine |
CN114204054A (en) * | 2021-12-13 | 2022-03-18 | 浙江唐锋能源科技有限公司 | Microporous layer coating method and device suitable for production of sheet GDL (gas diffusion layer) |
CN114204054B (en) * | 2021-12-13 | 2024-04-19 | 浙江唐锋能源科技有限公司 | Microporous layer coating method and device suitable for sheet GDL production |
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Application publication date: 20090701 |