CN101464559A - Double-piezoelectric patch deformation reflection mirror with large-amplitude defocusing and astigmation calibration function - Google Patents
Double-piezoelectric patch deformation reflection mirror with large-amplitude defocusing and astigmation calibration function Download PDFInfo
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- CN101464559A CN101464559A CNA2009100765110A CN200910076511A CN101464559A CN 101464559 A CN101464559 A CN 101464559A CN A2009100765110 A CNA2009100765110 A CN A2009100765110A CN 200910076511 A CN200910076511 A CN 200910076511A CN 101464559 A CN101464559 A CN 101464559A
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Abstract
The invention relates to a double-piezoelectric plate deformed reflecting mirror for correcting large amplitude defocus and astigmatic image error, which comprises a specular layer, two drive layers and a microscope base. The reflecting mirror is characterized in that the two drive layers are formed by combining two circular wafers, wherein, a discrete electrode on one surface of one of the drive layers is divided into eight fan-shaped areas and used for correcting the large amplitude defocus and the astigmatic image error, and another discrete electrode on one surface of another drive layer is divided into more than ten small areas and used for correcting other higher-order aberration. The double-piezoelectric plate deformed reflecting mirror has more outstanding capacity of correcting the defocus and the astigmatic image error, simultaneously ensures the correction accuracy of the higher-order aberration, and is suitable for being applied to adaptive optical correction systems taking target aberration as main defocus and astigmatism. Furthermore, the double-piezoelectric plate deformed reflecting mirror has the advantages of simple structure, low processing difficulty, easy implementation, and lower cost.
Description
Technical field
The invention belongs to the wave-front corrector technical field of ADAPTIVE OPTICS SYSTEMS, relate to a kind of double-piezoelectric plate deformed reflecting mirror.
Background technology
The fundamental purpose of adaptive optical technique is to survey the also wavefront distortion of correcting optical system in real time, thereby makes optical system remain the good optical performance.And in all aberrations that need proofread and correct often out of focus and astigmatism account for Main Ingredients and Appearance, for example out of focus and astigmatism account for 80% and 12.7% respectively in the aberration of human eye; The total amount of the wavefront error of out of focus astigmatism and all high-order errors is suitable in the wavefront error that atmospheric turbulence causes.Primary Component in the ADAPTIVE OPTICS SYSTEMS is exactly a deformation reflection mirror, and main type has: polynary discrete piezoelectric deforming reflection mirror, and based on the micro deformable mirror and the double-piezoelectric plate deformed reflecting mirror of MEMS (MEMS (micro electro mechanical system)) technology.And use at present is polynary discrete piezoelectric deforming reflection mirror more widely.Along with unit number increases, the ability that this distorting lens is proofreaied and correct higher order aberratons is more outstanding, but its actuation mechanism has determined its deflection to be subjected to single driver distortion quantitative limitation, so just be difficult in the low order aberration of proofreading and correct big amplitude under the densely arranged situation of driver, as out of focus and astigmatism etc.And its manufacturing process is very complicated, and the manufacturing cycle is long, and price is also extremely expensive.The MEMS micro deformable mirror also is to be limited by deformation mechanism, is difficult to satisfy simultaneously the requirement of proofreading and correct higher order aberratons and big amplitude low order aberration.With respect to the above two, bimorph formula deformation reflection mirror has the characteristics that the controllable deforming amount is big, manufacturing process is simple, with low cost and comes into one's own day by day.
Publication number is the PCT application of WO 2005/124425, a kind of double-piezoelectric plate deformed reflecting mirror is disclosed, what adopt is two piezoelectrics, the technology with copying surface generates optical mirror plane on the outside surface of a slice therein, the shortcoming of this design is a complex process, be difficult to obtain high-quality reflecting surface, and this intensity of mainly being made up of piezoelectric of structure own is less, is difficult to form the optical mirror plane of larger caliber.Publication number is that the PCT application of WO 96/018919 discloses a kind of multiple layer piezoelectric deformable bimorphic mirror, adopts a plurality of piezoelectric layers as Drive Layer, and independent metal level is as minute surface, thereby has guaranteed the intensity of structure; But the project organization of its outer cover and minute surface one has increased the difficulty of processing and has been difficult to realize the structure that this is complicated with other nonmetallic materials, so the relative limitation of specular material has just limited the range of application of this distorting lens.The patent No. is US 6,464,364 U.S. Patent Publication a kind of pair of piezoelectric deforming reflection mirror, by two piezoelectrics as Drive Layer, in the hope of obtaining bigger deflection.But these above structures are not all considered low order aberration especially, particularly the concern to the calibration capability of out of focus and astigmatism is not enough, just can not realize the calibration result of real optimum based on the system of out of focus astigmatism at aberrations such as eyes imaging and ICF light beam cleaning systems.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the deficiencies in the prior art, provide a kind of and can when proofreading and correct higher order aberratons, take into account the out of focus of the big amplitude of correction and the double-piezoelectric plate deformed reflecting mirror of astigmatic image error, realize the combination of aximal deformation value and high-order calibration capability, thereby the wave-front corrector of efficient cheapness is provided for systems such as eyes imaging and the purifications of ICF light beam.
The technical solution adopted for the present invention to solve the technical problems is: a kind of double-piezoelectric plate deformed reflecting mirror of proofreading and correct big amplitude out of focus and astigmatic image error that has concurrently includes specular layer, two Drive Layer and microscope base; It is characterized in that: described two Drive Layer are combined by two circular wafers; The wherein discrete electrodes of one side of one of them Drive Layer is divided into eight sector regions, is used to proofread and correct the out of focus and the astigmatism class low order aberration of big amplitude; The wherein discrete electrodes of one side of another Drive Layer is divided into 10 above zonules, in order to proofread and correct other higher order aberratons.
The order of described two Drive Layer is to exchange.
The diameter of described specular layer is greater than the Drive Layer diameter, and a circumference edge portion with specular layer bonds on the microscope base when bonding, and the edge of Drive Layer is relatively freely.
The material of described Drive Layer can be piezoelectric or electrostriction material.
The material of described specular layer can be glass, quartz, silicon or metal.
Described mirror holder is a hollow cylinder; Its material can be glass, quartz, silicon or metal.
Gap between described discrete electrodes is 0.5mm～1mm.
All there is electrode on two surfaces of two Drive Layer, and wherein one side is zero utmost point, and another side is divided into a plurality of discrete electrodes; The difference of two Drive Layer is the zoned format of their discrete electrodes: wherein the discrete electrodes of one deck is divided into a plurality of little boxed area (can be fan piece, rectangle, hexagon etc.), and purpose is the aberration that is used for proofreading and correct the small magnitude of high-order; The discrete electrodes of another sheet Drive Layer then only is divided into eight sector regions, is specifically designed to the low order aberration of proofreading and correct big amplitude such as out of focus and astigmatism.So just, can realize purpose that big amplitude low order aberration and small magnitude higher order aberratons are proofreaied and correct simultaneously.
The advantage that the present invention is compared with prior art had:
1, double-piezoelectric plate deformed reflecting mirror of the present invention is more outstanding to the calibration capability of out of focus and astigmatic image error, has also guaranteed correction accuracy simultaneously;
2, the edge of the Drive Layer of double-piezoelectric plate deformed reflecting mirror of the present invention is free relatively, and the effective deformation amount that obtains is bigger;
3, double-piezoelectric plate deformed reflecting mirror of the present invention is simple in structure, and difficulty of processing is low, is easy to realize that cost is lower.
Description of drawings
Fig. 1 a is the structural drawing of double-piezoelectric plate deformed reflecting mirror Drive Layer of the present invention and specular layer;
Among the figure, the 11st, specular layer, the 12, the 13rd, Drive Layer, the 14th, the zero utmost point in the electrode, the 15, the 16th, discrete electrodes; Fig. 1 b is the structural drawing of whole distorting lens, the 17th, and microscope base;
Fig. 2 is the block-shaped discrete electrodes layout of typical several fan;
Fig. 3 is the layout of the discrete electrodes of honeycomb shape;
Fig. 4 is the layout at the discrete electrodes of out of focus-astigmatism;
Fig. 5 is the shape synoptic diagram of the out of focus aberration in the standard Ze Nike aberration;
Fig. 6 is the shape synoptic diagram of the astigmatic image error in the standard Ze Nike aberration, is divided into both direction: what Fig. 6 a represented is the astigmatism of 0 ° of direction, and Fig. 6 b represents the astigmatism of 45 ° of directions;
Fig. 7 is the synoptic diagram of an off-gauge astigmatic image error.
Embodiment
Introduce the present invention in detail below in conjunction with the drawings and the specific embodiments.
Present embodiment a kind of have concurrently proofread and correct big amplitude out of focus and astigmatic image error double-piezoelectric plate deformed reflecting mirror as shown in Figure 1, the Drive Layer 12 that two piezoelectric thin slices are made and the two-sided metal electrode (being generally copper or silver) that plates conduction of Drive Layer 13 are glued together then; Above the laminar specular layer 11 of the glass that a slice diameter is bigger (or quartz, silicon, copper etc.) material bonds to again; A hollow cylinder microscope base 17 of making equally of glass (or quartz, silicon, copper etc.), its internal diameter is bigger slightly than Drive Layer diameter, bonds to the lower surface of specular layer 11; Such structure allows the relative state that is in Free Transform in edge of Drive Layer 12 and Drive Layer 13, thereby helps forming the deflection that bigger edge slope improves distorting lens.
Two Drive Layer all are two-sided plated electrodes; Wherein a Drive Layer all each has electrode conduct zero utmost point that one side is an integral body in twos, this two sides can stick together as public zero utmost point when bonding, thereby reduce lead-in wire, in manufacturing process, also can satisfy other situation needs and these two faces are not bonded together.The other one side of two Drive Layer all is divided into the variform discrete electrodes of quantity.The outside surface of Drive Layer 13 is provided with the discrete electrodes of 10 above zonules, and block-shaped with fan shown in Figure 2 be many, but also can be divided into other shape, such as shown in Figure 3 cellular.Fig. 2 a, Fig. 2 b, Fig. 2 c are respectively the schematic layout patterns of 19,21,35 discrete electrodes, and Fig. 3 then has 31 discrete electrodes.The many more capability of fitting to higher order aberratons of number of electrodes are strong more in principle, but should determine concrete number and the mode of arranging according to the requirement of system.Interelectrode gap is between 0.5 to 1mm, and useful area can be wasted in too big gap, thereby causes the deflection of single one pole to reduce.Otherwise, when adjacent electrode voltage difference distance is big, puncture if this gap is too little.The discrete electrodes of Drive Layer 12 as shown in Figure 4, be divided into uniform 8 fan-shaped.
Fig. 5 is the out of focus in the Ze Nike aberration of standard; Fig. 6 is the astigmatism in the Ze Nike aberration of standard.These two kinds of aberrations all are low order aberrations, but all are the principal ingredients of system optics aberrations such as human eye and ICF, and often amplitude is bigger, and traditional discrete distorting lens is difficult to good correction.And general double-piezoelectric plate deformed reflecting mirror is not optimized at these two kinds of aberrations specially yet, so calibration capability neither be very outstanding.Drive Layer 13 is to design for the low order aberration of proofreading and correct these two kinds of big amplitudes in this example.As shown in Figure 4, if 8 discrete sector electrode 41-48 on Drive Layer 12 add identical bias voltage, and public zero utmost point ground connection, then can produce the minute surface face shape of a similar out of focus shape.If on the discrete electrodes 41 of Drive Layer 12, discrete electrodes 44, discrete electrodes 45, discrete electrodes 48, add positive voltage, add negative voltage on the discrete electrodes 42 of Drive Layer 12, discrete electrodes 43, discrete electrodes 46, discrete electrodes 47 electrodes, minute surface will become the astigmatism shape of similar Fig. 6 a; What represent is the astigmatism of 0 ° of direction; Equally, if only on the discrete electrodes 41 of Drive Layer 12, discrete electrodes 42, discrete electrodes 45, discrete electrodes 46 electrodes, add positive voltage, on the discrete electrodes 43 of Drive Layer 12, discrete electrodes 44, discrete electrodes 47, discrete electrodes 48, add negative voltage, then can produce the astigmatism shape of similar Fig. 6 b, the astigmatism of 45 ° of directions of expression.
According to the definition and the character of Ze Nike aberration, any one direction astigmatism can be decomposed into the combination of the astigmatism of two quadratures shown in Fig. 6 a and Fig. 6 b on the circle territory.For example, aberration shown in Figure 7 is that the aberration by Fig. 6 b is rotated counterclockwise 30 ° and obtains, and it can be fully obtained by the astigmatism combination of two standards shown in Figure 6, if the aberration of Fig. 6 a, Fig. 6 b and Fig. 7 is designated as A, B and C respectively, this combinatorial formula can be expressed as so: C=0.476A+0.824B.On the discrete electrodes of Drive Layer 13, just can produce face shape shown in Figure 7 so by combinations thereof formula making alive.So the realization of above-mentioned two kinds of aberrations combination promptly illustrates this invention and can proofread and correct the aberration of the astigmatism shape of all directions.
Sample mirror with minute surface diameter 40mm is an example, makes specular layer with K9 optical glass, and piezoelectric ceramics is made Drive Layer, and thickness is in 2mm altogether.Under the voltage of 400V, can produce pact ± 5um astigmatism and ± out of focus of 10um, the correction amplitude of other higher order aberratons (preceding 15) is also about ± 1.5um.Will obtain more considerable correction amplitude if further reduce thickness of structure or increase its diameter; As known from the above, double-piezoelectric plate deformed reflecting mirror of the present invention can realize the deflection of bigger out of focus and astigmatism shape, has improved the calibration capability to out of focus and astigmatic image error effectively.
Claims (6)
1, a kind of double-piezoelectric plate deformed reflecting mirror of proofreading and correct big amplitude out of focus and astigmatism that has concurrently includes specular layer, two Drive Layer and microscope base; It is characterized in that: described two Drive Layer are combined by two circular wafers; The wherein discrete electrodes of one side of one of them Drive Layer is divided into eight sector regions, is used to proofread and correct the out of focus and the astigmatism class low order aberration of big amplitude; The wherein discrete electrodes of one side of another Drive Layer is divided into ten above zonules, in order to proofread and correct other higher order aberratons.
2, a kind of double-piezoelectric plate deformed reflecting mirror of proofreading and correct big amplitude out of focus and astigmatism that has concurrently according to claim 1, it is characterized in that: the order of described two Drive Layer is to exchange.
3, a kind of double-piezoelectric plate deformed reflecting mirror of proofreading and correct big amplitude out of focus and astigmatism that has concurrently according to claim 1, it is characterized in that: the diameter of described specular layer is greater than the Drive Layer diameter, a circumference edge portion with specular layer bonds on the microscope base when bonding, and the edge of Drive Layer is relatively freely.
4, a kind of double-piezoelectric plate deformed reflecting mirror of proofreading and correct big amplitude out of focus and astigmatism that has concurrently according to claim 1, it is characterized in that: the material of described Drive Layer can be piezoelectric or electrostriction material.
5, a kind of double-piezoelectric plate deformed reflecting mirror of proofreading and correct big amplitude out of focus and astigmatism that has concurrently according to claim 1, it is characterized in that: the material of described specular layer can be glass, quartz, silicon or metal.
6, a kind of double-piezoelectric plate deformed reflecting mirror of proofreading and correct big amplitude out of focus and astigmatism that has concurrently according to claim 1, it is characterized in that: described mirror holder is a hollow cylinder; Its material can be glass, quartz, silicon or metal.
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2009100765110A CN101464559A (en) | 2009-01-06 | 2009-01-06 | Double-piezoelectric patch deformation reflection mirror with large-amplitude defocusing and astigmation calibration function |
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| CNA2009100765110A CN101464559A (en) | 2009-01-06 | 2009-01-06 | Double-piezoelectric patch deformation reflection mirror with large-amplitude defocusing and astigmation calibration function |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102880014A (en) * | 2012-10-11 | 2013-01-16 | 中国科学院光电技术研究所 | Device and method for photoetching illumination of active deformable mirror based on active optical technology |
| CN105700127A (en) * | 2016-04-29 | 2016-06-22 | 中国工程物理研究院应用电子学研究所 | Wave-front defocus correction device |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
-
2009
- 2009-01-06 CN CNA2009100765110A patent/CN101464559A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102880014A (en) * | 2012-10-11 | 2013-01-16 | 中国科学院光电技术研究所 | Device and method for photoetching illumination of active deformable mirror based on active optical technology |
| CN105700127A (en) * | 2016-04-29 | 2016-06-22 | 中国工程物理研究院应用电子学研究所 | Wave-front defocus correction device |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
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Open date: 20090624 |