CN101458972A - Probe card correcting equipment - Google Patents
Probe card correcting equipment Download PDFInfo
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- CN101458972A CN101458972A CNA2007101996486A CN200710199648A CN101458972A CN 101458972 A CN101458972 A CN 101458972A CN A2007101996486 A CNA2007101996486 A CN A2007101996486A CN 200710199648 A CN200710199648 A CN 200710199648A CN 101458972 A CN101458972 A CN 101458972A
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- probe card
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Abstract
The invention relates to a probe card calibrator, wherein a low power microscope and a high power microscope are assembled on one conversion block provided on a support in a sliding type. When the conversion block moves along the support and is positioned on a first position, the low power microscope of the conversion block can be aligned to an comparison cover, to process low power microscope detection and probe adjustment; when the conversion block moves along the support and is positioned at a second position, the high power microscope of the conversion block can be aligned to the comparison cover to process high power microscope detection and probe adjustment. Therefore, via moving the conversion block between the first and the second positions, the low power microscope and the high power microscope can be switched quickly, thereby accurately, easily and quickly adjusting probe card.
Description
Technical field
Invention relates to a kind of calibration equipment, refers to a kind of probe card correcting equipment that is applicable to especially.
The scape technology
Probe is proofreaied and correct, and can be divided into correction, and the average height correction of probe of the warp-wise of probe and broadwise deflection.Carry out then being aided with the comparison cover and carry out the comparison of probe with the low range microscope through, broadwise timing.At this moment, if probe produces warp-wise with respect to the comparison mark of comparison cover or during with broadwise position deflection, then proofread and correct through, broadwise manually carrying out, this corrective action lasts till that probe correctly aims at till the comparison mark.If proofread and correct at the average height of probe, then be to be aided with correction with the high magnification microscope, will protrude or the probe that caves in carries out height control so that the height average homogeneity of whole probe than average height.In prior art, the correction of warp-wise and broadwise deflection is to carry out with a specialized equipment, and the correction of the average height of probe then is another specialized equipment.Therefore, the user needs correcting probe to be stuck between two complete equipments usually, not only goes up inconvenience, labor intensive and time especially in using, and the good probe of adjustment also may make locating bias cause the precision variation of adjustment because of back and forth carrying and installation, thereby the problems of deriving.Therefore, demand a kind of probe card correcting equipment that two special-purpose boards can be integrated urgently, to solve above-mentioned variety of problems.
Summary of the invention
The object of the invention provides a kind of probe card correcting equipment, comprising: a pedestal, a mobile platform, a comparison device and a compound microscope equipment.Wherein, mobile platform is mounted on the pedestal top, and can move adjustment as two-dimensions with respect to pedestal, and group is provided with a rotation microscope carrier on the mobile platform, and can do the rotation of third dimension degree with respect to mobile platform, the rotation microscope carrier is provided with at least one anchor clamps in order to clamping one probe.Comparison device includes a comparison cover, and the comparison cover is optionally divided a word with a hyphen at the end of a line between a comparison position and is away from the position.The comparison cover also includes a slide, includes a comparison area on the slide, and the comparison area internal labeling has at least one comparison mark.Compound microscope equipment includes a support, a conversion block, a low-power microscope, reaches a high-power microscope.Support is fixedly arranged on the pedestal, and conversion block work is located on the support, and low-power microscope and high-power microscope are mounted on the conversion block respectively.Low-power microscope includes a low power objective, and high-power microscope includes a high power objective, and conversion block is optionally to be displaced between a primary importance and the second place.Wherein, primary importance is meant the comparison area position the when low power objective of low-power microscope is registered to comparison cover and is positioned at its comparison position, and the second place is meant the comparison area position the when high power objective of high-power microscope is registered to the comparison cover and is positioned at its comparison position.
Therefore, the present invention sees through mobile conversion block between the primary importance and the second place, can switch the low-power microscope that uses on the conversion block or high-power microscope fast aiming at the comparison area of comparison cover, thus can reach precisely, conveniently, the purpose of correcting probe card promptly.
Can be provided with a horizontal concrete chute on the support of above-mentioned compound microscope equipment, conversion block then can use a slide block with the horizontal slippage of correspondence in horizontal concrete chute; Or on support, change and establish a swivelling chute, conversion block is then used a spill spin block instead to be hubbed in the swivelling chute, and can to rotate on relatively between first and second angle position and also can.Compound microscope equipment more can include one first actuator, reach one first switch.First switch and the first actuator electrically connect start and can cause behind first switch first actuator to drive the transversely horizontal slippage of chute and optionally being positioned on the primary importance or the second place of slide block.First actuator can be meant an oil hydraulic cylinder, maybe can use pneumatic cylinder, step motor or belt, the transmission of refining bar instead ... Deng all can.
Comparison device of the present invention can comprise turning over transfers device, an and bull stick.One side of comparison cover can be fixedly arranged on the bull stick, turn over transfer device be drive bull stick axially rotation so that the upset of comparison cover, and optionally be positioned to compare the position or away from the position; Maybe can transfer device use a jacking gear instead with turning over, with drive these comparison cover rise and fall with optionally divide a word with a hyphen at the end of a line above one being positioned at the comparison position of below, being positioned at one away from the position.Comparison device of the present invention can more include a second switch, turns over and transfers device then can comprise one second actuator.Second actuator and second switch electrically connect start second switch and can cause second actuator drive bull stick axially to rotate.Second actuator can be meant a rotary oil hydraulic cylinder, maybe can use pneumatic cylinder, motor instead ... Deng all can.
Above-mentioned high-power microscope can more comprise a vertical slide block, one the 3rd actuator, reach one the 3rd switch.The 3rd actuator and the 3rd switch electrically connect start the 3rd switch and can cause the 3rd actuator to drive the vertical slippage of vertical slide block on conversion block, with the focal length of fine setting high-power microscope.The 3rd actuator can be meant an oil hydraulic cylinder, maybe can use pneumatic cylinder, motor instead ... Deng all can.
Above-mentioned low-power microscope can more comprise a vertical slipper, reach a vertical-adjustment device.See through vertical-adjustment device and can drive the vertical slippage of vertical slipper on conversion block, to adjust the focal length of low-power microscope.Above-mentioned vertical-adjustment device can be meant that a manual knob or electronic button or other equivalent adjusting gear all can.
Mobile platform of the present invention can comprise a warp-wise adjusting gear, reach a broadwise adjusting gear, and the warp-wise adjusting gear can be adjusted the warp-wise position of mobile platform, and the broadwise adjusting gear can be adjusted the broadwise position of mobile platform.Above-mentioned warp, broadwise adjusting gear can adopt the electro-motor adjustment respectively, or adopt pneumatic cylinder or oil hydraulic cylinder adjustment, and therefore, robotization auxiliary that sees through calibration equipment can make the correction work of probe have more facility, and accuracy.Certainly, above-mentioned warp, broadwise adjusting gear also can simply adopt as manual knob and adjust the position, to reduce cost.
Description of drawings
Fig. 1 is the three-dimensional combination figure of the present invention's one preferred embodiment;
Fig. 2 is the enlarged diagram of the comparison cover of the present invention's one preferred embodiment;
Fig. 3 is the front view that the slide block of the present invention's one preferred embodiment moves to primary importance;
Fig. 4 is the front view that the slide block of the present invention's one preferred embodiment moves to the second place.
[primary clustering symbol description]
Pedestal 1 mobile platform 2 rotation microscope carriers 21
Slide 311 comparison area 312 comparison marks 313
Turn over and transfer device 32 bull sticks 321 rotary oil hydraulic cylinders 33
High-power microscope 43 high power objectives 431 vertical slide blocks 44
Oil hydraulic cylinder 45,5 the 3rd switch 46 first switches 51
Position P1 is away from position P2 probe 8 in comparison
Embodiment
See also Fig. 1, it is shown as the three-dimensional combination figure of the present invention's one preferred embodiment.The probe card correcting equipment of present embodiment comprises a pedestal 1, a mobile platform 2, a comparison device 3 (comparing device) and a compound microscope equipment 4 (hybrid microscopicapparatus).
As shown in Figure 1, the mobile platform 2 of present embodiment is to be mounted on pedestal 1 top, and can make directions X (calling warp-wise in the following text) that Fig. 1 shows, move adjustment with respect to pedestal 1 with the two-dimensions of Y direction (calling broadwise in the following text), group is provided with a rotation microscope carrier 21 on the mobile platform 2, and can do the third dimension degree rotation of Z-direction with respect to mobile platform 2.In this example, rotation microscope carrier 21 be provided with four groups of anchor clamps 211 in order to clamping one to be corrected with the probe 8 (procard) of adjusting probe 81 on it.
As Fig. 1, comparison device 3 is provided with comparison cover 31 (mask), and turns over accent device 32, a bull stick 321, reaches a second switch 34.One side of comparison cover 31 is to be fixedly arranged on the end of bull stick 321, the other end of bull stick 321 then is linked to and turns on second actuator of transferring device 32, this second actuator system adopts a rotary oil hydraulic cylinder 33 in this example, this rotary oil hydraulic cylinder 33 and with second switch 34 electrically connects.So, can make rotary oil hydraulic cylinder 33 drive bull stick 321 and do axially rotation when the user starts this second switch 34.
In practical operation correction and accent pin process, the user needs will compare earlier the position that cover 31 is turned to probe 8 tops and is close to each probe 81,31 solid line positions (calling comparison position P1 in the following text) are covered in comparison as shown in Figure 1, so that carry out the micro-comparison of in-plant longitude and latitude position with each probe; Depart from its tram in case compare out any probe, the user needs again above-mentioned each probe location is left in 31 upsets of comparison cover, 31 dotted line positions (calling in the following text away from position P2), the longitude and latitude position of manually adjusting this deviation probe to make things convenient for the user to see through are covered in comparison as shown in Figure 1.Therefore, the user can repeatedly open this second switch 34 and drive bull sticks 321 and axially rotate to control rotary oil hydraulic cylinder 33, and makes the 31 front and back upset of comparison cover, also is positioned above-mentioned comparison position P1 according to need and optionally or away from the P2 of position.
Fig. 1 also shows that the compound microscope equipment 4 of present embodiment includes a support 40, a conversion block, a low-power microscope 42, reaches a high-power microscope 43.This routine support 40 is directly to be fixedly arranged on pedestal 1 rear and to be vertical, and support 40 is provided with a horizontal concrete chute 401.Above-mentioned conversion block is to adopt a slide block 41 to be located on the support 40 to live in this example, or rather, be with slide block 41 corresponding laterally slippages in horizontal concrete chute 401.Fig. 1 shows that low-power microscope 42 and high-power microscope 43 are that mutual group is located on this slide block 41, and can follow slide block 41 together transversely chute 401 do horizontal slippage.In this example, on support 40, be assembled with one first actuator in addition, oil hydraulic cylinder 5 for example shown in Figure 1, this oil hydraulic cylinder 5 are and first switch, 51 electrically connects of being located on the pedestal 1.So, can cause the push rod of oil hydraulic cylinder 5 front ends to drive the transversely laterally left and right slippage of chute 401 of slide block 41 when the user activates first switch 51.
The low-power microscope 42 of present embodiment includes a low power objective 421, a vertical slipper 422, reaches a vertical-adjustment device.In this example, vertical-adjustment device is meant a manual knob 423, can drive vertical slipper 422 through rotation manual knob 423 and do vertical slippage with respect to slide block 41, this measure can be adjusted the high and low position of low-power microscope 42, even adjusts the focal length of low-power microscope 42 with respect to comparison cover 31.
The high-power microscope 43 of present embodiment includes a high power objective 431, one vertical slide block 44, one the 3rd actuator, reaches one the 3rd switch 46.In this example, the 3rd actuator is meant an oil hydraulic cylinder 45, itself and the 3rd switch 46 electrically connects.The user can start the 3rd switch 46 causes the vertical slide block 44 of oil hydraulic cylinder 45 drives to do vertical slippage with respect to slide block 41, and this measure can be adjusted the high and low position of high-power microscope 43, even the focal length of fine setting high-power microscope 43.
Fig. 2 shows the enlarged diagram of present embodiment comparison cover 31, comparison cover 31 includes a slide 311, be formed with a comparison area 312 on the slide 311, in comparison area 312, be marked with in advance corresponding to the probe number of probes, with a plurality of comparison marks 313 of tram.
When the timing of desiring to carry out probe, the rotary oil hydraulic cylinder 33 of user elder generation application drawing 1 drives bull stick 321 and axially rotates, make comparison cover 31 be turned to the P1 place, comparison position of earlier figures 1 forward, the comparison area 312 of comparison this moment cover 31 will be registered to each probe 81 position of probe 8, that is the angle position at Fig. 2 place, in fact herein slide 311 go up comparison area 312 with it each compare the needle point of mark 313 with each probe 81 of the probe 8 of very close below, but for diagram is clear, so specially probe 81 is wherein plotted a little away from pairing comparison mark 313 conveniently to inspect among Fig. 2.
The user sees through the very close each other needle point of respectively comparing mark 313 and each probe 81 of visual comparison, and the syringe needle that just can directly proofread and correct each probe 81 of comparison has or not and departs from its tram.If when visual comparison has probe 81 to depart from its pairing comparison mark 313, represent that then this probe 81 obviously departs from its tram, but the user just rotary oil hydraulic cylinder 33 driving bull sticks 321 of application drawing 1 axially rotates, it is aforesaid away from behind the P2 of position to make comparison cover 31 turn over, and carries out the work of craft accent pin with instruments such as tweezers again to vacate the operating space.Showing that by Fig. 1 this example is so-called away from position P2, is each probe 81 position that the comparison area 312 of comparison cover 31 is turned over and moved away probe 8.Manual transfer pin after, the user is if whether the distance that needs checking once more to be adjusted correct, compares once more as long as will compare the P1 places, comparison position that cover 31 overturns earlier figures 1 once more.Therefore, the correction that goes round and begins again comparison will last till that with transferring the pin action each probe 81 all adjusts to till its tram.
Note that in the aforesaid correction comparison process that the user need see through microscope assisting its visual comparison of carrying out tiny object, present embodiment also provides a kind of can the conversion rapidly to use different low, high- power microscopes 42,43 to assist the structure of visual comparison.
From the above, present embodiment needs to compare the comparison position P1 that cover 31 is turned to Fig. 1 forward earlier when proofreading and correct 81 operations of comparison probe, and comparison area 312 herein is positioned at probe 8 top positions just and aims at each probe 81.Fig. 3,4 show that all the comparison cover 31 of present embodiment has been turned to the front view of its comparison position P1.
Fig. 3 shows that more its slide block 41 is with respect to horizontal concrete chute 401 slippages and stop at the primary importance A place that Fig. 3 manifests, this primary importance A is meant that the low power objective 421 of its low-power microscope 42 is registered to the position of comparison area 312 just, can do vertical slippage with manual adjustment low-power microscope 42 more in case of necessity, micro-ly inspect operation with what carry out low range, for example adjust the longitude and latitude position of probe or do inspecting of big regional extent.
Fig. 4 shows that then its slide block 41 is with respect to horizontal concrete chute 401 slippages and stop at the second place B place that Fig. 4 manifests, this second place B is meant that the high power objective 431 of its high-power microscope 43 is registered to the position of comparison area 312 just, can do vertical slippage with electronic adjustment high-power microscope 43 more in case of necessity, to carry out the powerful micro-operation of inspecting, for example adjust the height and position of probe or do inspecting of tiny regional extent.
Since present embodiment can see through first switch 51 with start oil hydraulic cylinder 5 promote slide block 41 transversely chute 401 do horizontal left and right slippage, so the position of conversion slide block 41 stops on a primary importance A or the second place B it rapidly, thus can switch fast the low-power microscope 42 that uses on the slide block 41, and high-power microscope 43 aim at comparison and cover 31 comparison area 312.Therefore, can improve the prior art probe proofread and correct to need earlier to do to do the average height correction with another average height calibration equipment again after, latitude is proofreaied and correct through, latitude calibration equipment via one.Back if need remake the affirmation of proofreading and correct through, latitude, then need move back to the inconvenience of on, latitude calibration equipment, doing to proofread and correct comparison again again.
Therefore, the present invention is save probe and is moved improper between two complete equipments, prior art, labor intensive inconvenient and time so be improved in use going up, and the good probe of adjustment also may make locating bias cause the problems of the precision variation of adjustment because of back and forth carrying and installation.See through the present invention, reached precisely, convenient, the purpose of correcting probe card promptly.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (10)
1, a kind of probe card correcting equipment is characterized in that comprising:
One pedestal;
One mobile platform is mounted on this pedestal top, and can moves adjustment as two-dimensions with respect to this pedestal, and group is provided with a rotation microscope carrier on this mobile platform, and can do the rotation of third dimension degree with respect to this mobile platform, and this rotation microscope carrier is provided with at least one anchor clamps;
One comparison device includes a comparison cover, and this comparison cover is optionally divided a word with a hyphen at the end of a line between a comparison position and is away from the position, and this comparison cover includes a slide, includes a comparison area on this slide, and this comparison area internal labeling has at least one comparison mark; And
One compound microscope equipment, include a support, one conversion block, one low-power microscope, an and high-power microscope, this support is fixedly arranged on this pedestal, this conversion block work is located on this support, this low-power microscope and this high-power microscope are mounted on respectively on this conversion block, this low-power microscope includes a low power objective, this high-power microscope includes a high power objective, this conversion block is optionally to be displaced between a primary importance and the second place, wherein, this primary importance is meant this comparison area position when this low power objective of this low-power microscope is registered to this comparison cover and is positioned at its comparison position, and this second place is meant this comparison area position when this high power objective of this high-power microscope is registered to this comparison cover and is positioned at it and compares position.
2, probe card correcting equipment as claimed in claim 1 is characterized in that, this support of this compound microscope equipment is provided with a horizontal concrete chute, this conversion block be meant a slide block with the horizontal slippage of correspondence in this horizontal concrete chute.
3, probe card correcting equipment as claimed in claim 2, it is characterized in that, this compound microscope equipment more comprises one first actuator, reaches one first switch, this first switch and this first actuator electrically connect, start this first switch cause this first actuator drive this slide block along the horizontal slippage of this horizontal concrete chute, and optionally be positioned on this primary importance or this second place.
4, probe card correcting equipment as claimed in claim 1, it is characterized in that, this comparison device comprises turning over transfers device, an and bull stick, one side of this comparison cover is to be fixedly arranged on this bull stick, this turn over transfer device be drive this bull stick axially rotation so that should the upset of comparison cover, also optionally be positioned this comparison position or be somebody's turn to do away from the position.
5, probe card correcting equipment as claimed in claim 4, it is characterized in that, this comparison device more comprises a second switch, this turns over transfers device to comprise one second actuator, this second actuator and this second switch electrically connect start this second switch and cause this second actuator to drive this bull stick axially to rotate.
6, probe card correcting equipment as claimed in claim 5 is characterized in that, this second actuator is meant a rotary oil hydraulic cylinder.
7, probe card correcting equipment as claimed in claim 1, it is characterized in that, this high-power microscope more comprises a vertical slide block, one the 3rd actuator, reaches one the 3rd switch, the 3rd actuator and the 3rd switch electrically connect start the 3rd switch and cause the 3rd actuator to drive the vertical slippage of this vertical slide block on this conversion block.
8, probe card correcting equipment as claimed in claim 1 is characterized in that, this low-power microscope more comprises a vertical slipper, reaches a vertical-adjustment device, sees through this vertical-adjustment device and drives the vertical slippage of this vertical slipper on this conversion block.
9, probe card correcting equipment as claimed in claim 8 is characterized in that, this vertical-adjustment device is meant a manual knob.
10, the described probe card correcting equipment of claim 1, it is characterized in that, this mobile platform comprises a warp-wise adjusting gear, reaches a broadwise adjusting gear, and this warp-wise adjusting gear is the warp-wise position of adjusting this mobile platform, and this broadwise adjusting gear is the broadwise position of adjusting this mobile platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101996486A CN101458972A (en) | 2007-12-11 | 2007-12-11 | Probe card correcting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101996486A CN101458972A (en) | 2007-12-11 | 2007-12-11 | Probe card correcting equipment |
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| Publication Number | Publication Date |
|---|---|
| CN101458972A true CN101458972A (en) | 2009-06-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101996486A Pending CN101458972A (en) | 2007-12-11 | 2007-12-11 | Probe card correcting equipment |
Country Status (1)
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|---|---|
| CN (1) | CN101458972A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101963646A (en) * | 2009-07-23 | 2011-02-02 | 瑞萨电子株式会社 | The testing apparatus of semiconductor devices and method of testing thereof |
| CN105097598A (en) * | 2015-08-14 | 2015-11-25 | 武汉新芯集成电路制造有限公司 | Automatic detection device for wafer probe card |
| CN108089116A (en) * | 2017-12-01 | 2018-05-29 | 上海华岭集成电路技术股份有限公司 | A kind of rotatable probe card |
| CN109212282A (en) * | 2018-08-22 | 2019-01-15 | 深圳市矽电半导体设备有限公司 | A kind of full-automatic probe in detecting platform and its probe positioning module |
| CN110986774A (en) * | 2019-12-17 | 2020-04-10 | 上海嘉奥信息科技发展有限公司 | Optical locator-based static calibration system, method, medium, and apparatus for tool tip position |
| CN111443320A (en) * | 2019-01-17 | 2020-07-24 | 均豪精密工业股份有限公司 | Probe self-calibration system and method thereof |
-
2007
- 2007-12-11 CN CNA2007101996486A patent/CN101458972A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101963646A (en) * | 2009-07-23 | 2011-02-02 | 瑞萨电子株式会社 | The testing apparatus of semiconductor devices and method of testing thereof |
| CN101963646B (en) * | 2009-07-23 | 2014-10-22 | 瑞萨电子株式会社 | Test apparatus of semiconductor device and method thereof |
| CN105097598A (en) * | 2015-08-14 | 2015-11-25 | 武汉新芯集成电路制造有限公司 | Automatic detection device for wafer probe card |
| CN105097598B (en) * | 2015-08-14 | 2018-06-26 | 武汉新芯集成电路制造有限公司 | A kind of wafer probe cards automatic detection device |
| CN108089116A (en) * | 2017-12-01 | 2018-05-29 | 上海华岭集成电路技术股份有限公司 | A kind of rotatable probe card |
| CN108089116B (en) * | 2017-12-01 | 2020-04-14 | 上海华岭集成电路技术股份有限公司 | Rotatable probe card |
| CN109212282A (en) * | 2018-08-22 | 2019-01-15 | 深圳市矽电半导体设备有限公司 | A kind of full-automatic probe in detecting platform and its probe positioning module |
| CN109212282B (en) * | 2018-08-22 | 2021-04-16 | 矽电半导体设备(深圳)股份有限公司 | Full-automatic probe detection platform and probe positioning module thereof |
| CN111443320A (en) * | 2019-01-17 | 2020-07-24 | 均豪精密工业股份有限公司 | Probe self-calibration system and method thereof |
| CN110986774A (en) * | 2019-12-17 | 2020-04-10 | 上海嘉奥信息科技发展有限公司 | Optical locator-based static calibration system, method, medium, and apparatus for tool tip position |
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Open date: 20090617 |