CN101451230B - Metal evaporation equipment - Google Patents
Metal evaporation equipment Download PDFInfo
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- CN101451230B CN101451230B CN2007100943157A CN200710094315A CN101451230B CN 101451230 B CN101451230 B CN 101451230B CN 2007100943157 A CN2007100943157 A CN 2007100943157A CN 200710094315 A CN200710094315 A CN 200710094315A CN 101451230 B CN101451230 B CN 101451230B
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- crucible
- rotating shaft
- cavity
- metal evaporation
- cover plate
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Abstract
The invention discloses a metal evaporation device. A cavity of the device comprises a crucible cover plate and a crucible. The device also comprises a rotating shaft, a cover plate cooling pipe, and a crucible cooling pipe, wherein the rotating shaft passes through the cavity and is connected with the crucible; part of the cover plate cooling pipe is embedded inside the crucible cover plate; the crucible cooling pipe is wholly embedded inside the rotating shaft and the crucible; and a water inlet and a water outlet which are arranged on the surface of the rotating shaft are arranged outside the cavity of the device. The metal evaporation device adopts combination of magnetic liquid sealing and conventional rubber sealing ring so as to realize the vacuum seal of the cavity of the metal evaporation device. The metal evaporation device also has a separated design for cooling water systems of the crucible and the crucible cover plate and has the sealing structure between the cooling water system of the crucible and the rotating shaft arranged outside the vacuum cavity, thereby exerting no influence on the vacuum degree of the cavity even if the cooling water is leaked, and consequently improving the reliability of the device.
Description
Technical field
The present invention relates to a kind of semiconductor manufacturing facility, particularly relate to a kind of metal evaporation equipment.
Background technology
In semiconductor fabrication process, electron beam evaporation deposition is a very important technology.Whether the cavity of metal evaporation equipment can guarantee vacuum, plays important effect for the adhesivity between film forming homogeneity and film and the film.If when evaporation film forming or switching evaporation source, the intravital vacuum in the chamber of metal evaporation equipment is destroyed, for example air or water coolant leak into vacuum cavity, will cause metallic membrane to peel off, the intravital product rejection in chamber.
Existing metal evaporation equipment as shown in Figure 1, cavity wall 10 surround cavity in mainly comprise crucible cover plate 11, crucible 12 and rotating shaft 13.During work, driving mechanism 131 output kinetic energies that cavity is outer, via some gear driven rotating shaft 13 rotations, crucible 12 links together with rotating shaft 13 and follows rotating shaft 13 rotations.Article one, the cooling water pipeline 141 of permeate chamber inside and outside is through rotating shaft 13 inside, crucible 12 inside and crucible cover plate 11 inside, in order to cooling crucible 12 and crucible cover plate 11.Crucible 12 is around its inner cooling water pipeline 141 rotations.There is trim 121 to surround cooling water pipeline 141 in the crucible 12, two wear rings 15 that are arranged above and below arranged, between trim 121 and the cooling water pipeline 141 in order to the space between trim 121 and the cooling water pipeline 14 is sealed.Cooling water pipeline 141 is up and down having one or more holes between two wear rings 15, makes up and down zone between two wear rings 15 and the trim 121 be full of the water coolant from cooling water pipeline 141.This zone also connects the cooling duct 142 of crucible inside, is used for supplying with and reclaiming the water coolant of crucible cooling duct 142.Similar with it, between the trim of cooling water pipeline 141 and crucible cover plate 11, between driving mechanism 131 (or transmission rig) and the cavity wall 10 wear ring 15 is arranged respectively.
There is following problem in above-mentioned metal evaporation equipment: there be relative rotatablely moving in one between wear ring 15 and the trim 121, this wear ring 15 that can wear and tear; Its two, in case there is foreign matter to drop between trim 121 and cooling water pipeline 141, wear ring 15 will push and wear and tear; Its three, if in crucible 12 rotation processes, rotating shaft 13 eccentric rotary, the wear ring 15 on the cooling water pipeline 141 that will push and wear and tear.The problems referred to above all may cause the intravital crucible in chamber vacuum leak to occur, thereby cause metallic membrane to peel off from silicon chip surface, product rejection.
Summary of the invention
Technical problem to be solved by this invention provides a kind of metal evaporation equipment, and the possibility of vacuum leak appears in this equipment in the time of can reducing the crucible rotation, reduce product losses.
For solving the problems of the technologies described above, comprise crucible cover plate and crucible in the cavity of this equipment of metal evaporation equipment of the present invention, this equipment also comprises:
Rotating shaft runs through inside and outside the cavity of this equipment, and links together with described crucible;
Cover plate cooling pipe, part is embedded in the inside of described crucible cover plate;
The crucible cooling duct all is embedded in the inside of described rotating shaft and crucible, at the water inlet on rotating shaft surface and water outlet all outside the cavity at this equipment;
The rotating shaft cover, described rotating shaft cover links together with the cavity wall of this equipment, and surrounds the part of described rotating shaft outside this equipment cavity;
Description of drawings
Water inlet and the delivery port on described Gan Guo cooling pipe Zai Zhuan Zhou surface are annular ditch groove.
The present invention adopts magnet fluid sealing and traditional Xiang combination of rubber seal ring, has realized the interior vacuum seal of cavity of metal evaporation equipment. The present invention also carries out separate design to the cooling water system of Gan Guo and crucible cover plate, and with the cooling water system of Gan Guo Yu the sealed junction between Zhi the Zhuan Zhou set up outside the Zhi Yu vacuum cavity, can not become Ying Xiang to the Zhen reciprocal of duty cycle Zao of cavity even Guo leakage also takes place Zhe Yang cooling water, improve the reliability of equipment.
The present invention is further detailed explanation in conjunction with the accompanying drawings and embodiments for Xia face:
Fig. 1 is the schematic diagram of the metal evaporation equipment of Xian You;
Fig. 2 is the synoptic diagram of metal evaporation equipment of the present invention;
Embodiment
Fig. 3 is the synoptic diagram of metal evaporation equipment shaft of the present invention.
Reference numeral is among the figure: the 10-cavity wall; The 11-crucible cover plate; The 12-crucible; The 121-trim; The 13-rotating shaft; The 131-driving mechanism; The 141-cooling water pipeline; 142-crucible cooling duct; The 15-wear ring; The 20-cavity wall; The 21-crucible cover plate; The 22-crucible; The 23-rotating shaft; 241-crucible cover plate cooling duct; 242-crucible cooling duct; 242in-crucible cooling duct water inlet; 242out-crucible cooling duct water outlet; 251-magnetic current sealing zone; The 252-wear ring; 26-rotating shaft cover.
See also Fig. 2, metal evaporation equipment of the present invention cavity wall 20 surround cavity in mainly comprise crucible cover plate 21 and crucible 22.This equipment also comprises:
Rotating shaft 23 runs through inside and outside the cavity of this equipment, and links together with crucible 22;
Cover plate cooling pipe 241, part is embedded in the inside of crucible cover plate 21;
Crucible cooling duct 242 all is embedded in the inside of rotating shaft 23 and crucible 22, at the water inlet 242in on rotating shaft 22 surfaces and water outlet 242out all outside the cavity at this equipment.
Above-mentioned cover plate cooling pipe 241 and crucible cooling duct 242 are separate.Wherein cover plate cooling pipe 241 is used to cool off crucible cover plate 21, and its water inlet and water outlet all are positioned at outside the cavity, has section of tubing to be exposed in the cavity after passing through cavity wall 20, and remaining pipes all is embedded in crucible cover plate 21 inside.Wherein crucible cooling duct 242 is used to cool off crucible 22, and its water inlet and water outlet all are positioned at the surface of the part of rotating shaft 23 outside cavity, and remaining pipes all is embedded in rotating shaft 23 inner and crucible 22 inside.Because crucible cooling duct 242 phase countershafts 23 and crucible 22 all are fixed, so the gap between crucible cooling duct 242 and the crucible 22 can adopt the annular seal of traditional elastomeric material to realize.
Therefore in the above-mentioned metal evaporation equipment, rotating shaft 23 runs through inside and outside the cavity of metal evaporation equipment, must guarantee that rotating shaft 23 passes through the sealing at cavity wall 20 positions.For this reason, the present invention also comprises rotating shaft cover 26, and rotating shaft cover 26 links together with the cavity wall 20 of this equipment, and surrounds the part of rotating shaft 23 outside this equipment cavity, comprises in the rotating shaft cover 26:
An annular seal 252, the gap between countershaft cover 26 and the cavity wall 20 seals;
The three loop magnetic current sealing zones 25 that are arranged above and below, the gap between wherein any circle magnetic current sealing zone 25 equal countershafts 23 and the rotating shaft cover 26 seals.
Described magnetic current sealing is a characteristic of utilizing magnetic fluid, by magnet with magnetic fluid be fixed in turning axle around, form " O-ring seals " of magnetic fluid liquid, be called the magnetic current sealing zone, its vacuum tightness can reach 10e-6Pa usually.For this reason, rotating shaft of the present invention cover is magneticsubstance, and perhaps the rotating shaft position of overlapping corresponding described magnetic current sealing zone comprises the annulus (as ringshaped magnet) of magneticsubstance.
Metal evaporation equipment of the present invention is when work, and the outer driving mechanism 231 of cavity directly drives rotating shaft 23 rotations, thereby drives crucible 22 rotations that link together with rotating shaft 23.And rotating shaft cover 26 is fixed in cavity wall 20, does not have relative movement between the two.Therefore between rotating shaft cover 26 and cavity wall 20 in addition the annular seal 252 of an elastomeric material can realize sealing.In addition, because the sealing between rotating shaft 23 and the rotating shaft cover 26 can be guaranteed in last circle magnetic current sealing zone 25, annular seal 252 can be guaranteed the sealing between rotating shaft cover 26 and the cavity wall 20 again, has therefore guaranteed the sealing between rotating shaft 23 and the cavity wall 20.
See also Fig. 3, though crucible cooling duct 242 is fixed with respect to rotating shaft 23, but and the supply of water coolant and reclaim all and will overlap pipeline realization on 26 by rotating shaft rotate in rotating shaft 23 with respect to rotating shaft cover 26.For being connected of rotating water inlet 242in in the supply that realizes the water coolant on the rotating shaft cover 26 and recovery channel and the rotating shaft 23 and water outlet 242out, specialized designs of the present invention the water inlet 242in and the water outlet 242out of groove shape in the form of a ring.And one of them annular ditch groove is between the magnetic current sealing zone 25 of last circle and centre circle, and another annular ditch groove is between the magnetic current sealing zone 25 of centre circle and following circle.Like this, completely cut off two independences and airtight zone between the three circle magnetic current sealing zones, be respectively applied for to crucible cooling duct 242 and supply with and reclaim water coolant.
In sum, metal evaporation equipment of the present invention has designed the separate crucible cover plate and the cooling water pipeline of crucible, and crucible cooling duct wherein all is embedded in rotating shaft and crucible inside in cavity.Then adopt magnetic current sealing and traditional rubber seal ring bonded mode for the rotating shaft of permeate chamber inside and outside, guaranteed the sealing between rotating shaft and the cavity wall.Water inlet and water outlet for the crucible cooling duct have then adopted unique annular ditch groove, and two spaces that utilize magnetic current sealing zone, three roads to be completely cut off are used for supplying with and the recovery water coolant, are that one of existing metal evaporation equipment is improved greatly in fact.
Claims (7)
1. a metal evaporation equipment comprises crucible cover plate and crucible in the cavity of this equipment, it is characterized in that: this equipment also comprises:
Rotating shaft runs through inside and outside the cavity of this equipment, and links together with described crucible;
Cover plate cooling pipe, part is embedded in the inside of described crucible cover plate;
The crucible cooling duct all is embedded in the inside of described rotating shaft and crucible, at the water inlet on rotating shaft surface and water outlet all outside the cavity at this equipment;
The rotating shaft cover, described rotating shaft cover links together with the cavity wall of this equipment, and surrounds the part of described rotating shaft outside this equipment cavity;
Described crucible cooling duct is annular ditch groove at the water inlet and the water outlet on rotating shaft surface.
2. metal evaporation equipment according to claim 1 is characterized in that: comprise in the described rotating shaft cover:
An annular seal ring seals the gap between described rotating shaft cover and the cavity wall;
The three loop magnetic current sealing zones that are arranged above and below, wherein any circle magnetic current sealing zone all seals the gap between described rotating shaft and the rotating shaft cover.
3. metal evaporation equipment according to claim 2 is characterized in that: one of them annular ditch groove is between the magnetic current sealing zone of last circle and centre circle, and another annular ditch groove is between the magnetic current sealing zone of centre circle and following circle.
4. metal evaporation equipment according to claim 4 is characterized in that: described crucible cooling duct is with the annular seal ring at the position of crossing over described rotating shaft and crucible, and the gap between described crucible cooling duct and the crucible is sealed.
5. metal evaporation equipment according to claim 1 is characterized in that: described cover plate cooling pipe and crucible cooling duct are independent separately.
6. metal evaporation equipment according to claim 2 is characterized in that: described annular seal ring is an elastomeric material.
7. metal evaporation equipment according to claim 2 is characterized in that: described rotating shaft cover is magneticsubstance, and the position that corresponding described magnetic current sealing zone is overlapped in perhaps described rotating shaft comprises the annulus of magneticsubstance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100943157A CN101451230B (en) | 2007-11-28 | 2007-11-28 | Metal evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100943157A CN101451230B (en) | 2007-11-28 | 2007-11-28 | Metal evaporation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101451230A CN101451230A (en) | 2009-06-10 |
| CN101451230B true CN101451230B (en) | 2011-06-01 |
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ID=40733714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100943157A Active CN101451230B (en) | 2007-11-28 | 2007-11-28 | Metal evaporation equipment |
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| Country | Link |
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| CN (1) | CN101451230B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101665913B (en) * | 2009-09-30 | 2012-05-23 | 东莞宏威数码机械有限公司 | Processing device used for vacuum coating |
| KR102193613B1 (en) * | 2017-03-17 | 2020-12-21 | 어플라이드 머티어리얼스, 인코포레이티드 | Apparatus for vacuum processing of substrates, system for manufacture of devices with organic materials, and method for sealing an opening connecting two pressure zones |
| CN109594046B (en) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | Evaporation device for coating film |
| CN113370195B (en) * | 2021-06-30 | 2022-09-09 | 哈尔滨科能熔敷科技股份有限公司 | Mechanical arm applied to high-temperature working condition |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2205832Y (en) * | 1994-09-05 | 1995-08-23 | 北京电炉厂 | Large area controllable arc evaporation source |
| CN1380439A (en) * | 2002-04-16 | 2002-11-20 | 北京科技大学 | Hall type ion auxiliary evaporation source |
| CN1854332A (en) * | 2005-03-09 | 2006-11-01 | 三星Sdi株式会社 | Multiple vacuum evaporation coating device and method for controlling the same |
-
2007
- 2007-11-28 CN CN2007100943157A patent/CN101451230B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2205832Y (en) * | 1994-09-05 | 1995-08-23 | 北京电炉厂 | Large area controllable arc evaporation source |
| CN1380439A (en) * | 2002-04-16 | 2002-11-20 | 北京科技大学 | Hall type ion auxiliary evaporation source |
| CN1854332A (en) * | 2005-03-09 | 2006-11-01 | 三星Sdi株式会社 | Multiple vacuum evaporation coating device and method for controlling the same |
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| Publication number | Publication date |
|---|---|
| CN101451230A (en) | 2009-06-10 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131218 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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| TR01 | Transfer of patent right |
Effective date of registration: 20131218 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |