CN101443647B - 同时具有多波长、多入射角和多方位角的光学测量系统 - Google Patents
同时具有多波长、多入射角和多方位角的光学测量系统 Download PDFInfo
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- CN101443647B CN101443647B CN200780016961XA CN200780016961A CN101443647B CN 101443647 B CN101443647 B CN 101443647B CN 200780016961X A CN200780016961X A CN 200780016961XA CN 200780016961 A CN200780016961 A CN 200780016961A CN 101443647 B CN101443647 B CN 101443647B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 27
- 238000005259 measurement Methods 0.000 title abstract description 13
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- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000007689 inspection Methods 0.000 abstract 2
- 238000002310 reflectometry Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
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- 230000004075 alteration Effects 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Abstract
Description
Claims (29)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US79904306P | 2006-05-10 | 2006-05-10 | |
US60/799,043 | 2006-05-10 | ||
US11/735,979 US20070242267A1 (en) | 2006-04-14 | 2007-04-16 | Optical Focusing Devices |
US11/735,979 | 2007-04-16 | ||
US11/747,173 | 2007-05-10 | ||
US11/747,173 US20070263220A1 (en) | 2006-05-10 | 2007-05-10 | Optical Measurement System with Simultaneous Multiple Wavelengths, Multiple Angles of Incidence and Angles of Azimuth |
PCT/US2007/068712 WO2007134195A2 (en) | 2006-05-10 | 2007-05-10 | An optical measurement system with simultaneous multiple wavelengths, multiple angles of incidence and angles of azimuth |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101443647A CN101443647A (zh) | 2009-05-27 |
CN101443647B true CN101443647B (zh) | 2012-02-29 |
Family
ID=38684799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200780016961XA Active CN101443647B (zh) | 2006-05-10 | 2007-05-10 | 同时具有多波长、多入射角和多方位角的光学测量系统 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070263220A1 (zh) |
CN (1) | CN101443647B (zh) |
TW (1) | TW200813420A (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070091325A1 (en) * | 2005-01-07 | 2007-04-26 | Mehrdad Nikoonahad | Multi-channel optical metrology |
US20100118308A1 (en) * | 2007-04-16 | 2010-05-13 | Raintree Scientific Instruments (Shanghai) Corporation | Composite Optical Focusing Devices |
FR2926138A1 (fr) * | 2008-01-07 | 2009-07-10 | Ecole Nationale D Ingenieurs D | Procede d'analyse et d'identification de surface. |
TWI463272B (zh) * | 2010-11-30 | 2014-12-01 | Ushio Electric Inc | Light irradiation device |
CN103091837B (zh) * | 2013-01-24 | 2015-07-15 | 东南大学 | 利用抛物面镜校正扫描角度的激光扫描采样装置 |
CN103162829B (zh) * | 2013-03-06 | 2015-02-25 | 电子科技大学 | 透射式及反射式光谱探测系统和应用该系统的传感器 |
FR3009085A1 (fr) * | 2013-07-24 | 2015-01-30 | Duncan Prospective | Source de lumiere pour fluorescence hyper spectrale |
CN104516082B (zh) * | 2013-09-30 | 2017-03-29 | 睿励科学仪器(上海)有限公司 | 一种镜头组安装组件以及具有该组件的光学测量系统 |
KR102594756B1 (ko) * | 2015-05-26 | 2023-10-30 | 루미리즈 홀딩 비.브이. | 고휘도 광을 발생하는 광학 디바이스 |
CN107764831B (zh) * | 2016-08-23 | 2020-09-25 | 杭州海康机器人技术有限公司 | 一种光学平板检测装置 |
CN109896585A (zh) * | 2019-04-26 | 2019-06-18 | 德州汉升光电科技有限公司 | 一种360度感光紫外线传感器 |
CN110068540B (zh) * | 2019-05-17 | 2022-04-22 | 重庆科技学院 | 基于气体成份浓度检测系统的检测方法 |
CN110596045A (zh) * | 2019-09-23 | 2019-12-20 | 河南师范大学 | 一种变温双向反射分布函数快速测量装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2158813Y (zh) * | 1992-07-16 | 1994-03-16 | 唐永河 | 高效防眩车灯 |
US6563473B2 (en) * | 2001-02-22 | 2003-05-13 | Ems Technologies Canada, Ltd. | Low sidelobe contiguous-parabolic reflector array |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19807120A1 (de) * | 1998-02-20 | 1999-08-26 | Zeiss Carl Fa | Optisches System mit Polarisationskompensator |
US6987568B2 (en) * | 2000-11-15 | 2006-01-17 | Rutgers, The State University Of New Jersey | Apparatus and method for measuring spatially varying bidirectional reflectance distribution function |
US7397553B1 (en) * | 2005-10-24 | 2008-07-08 | Kla-Tencor Technologies Corporation | Surface scanning |
-
2007
- 2007-05-10 CN CN200780016961XA patent/CN101443647B/zh active Active
- 2007-05-10 TW TW096116639A patent/TW200813420A/zh unknown
- 2007-05-10 US US11/747,173 patent/US20070263220A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2158813Y (zh) * | 1992-07-16 | 1994-03-16 | 唐永河 | 高效防眩车灯 |
US6563473B2 (en) * | 2001-02-22 | 2003-05-13 | Ems Technologies Canada, Ltd. | Low sidelobe contiguous-parabolic reflector array |
Also Published As
Publication number | Publication date |
---|---|
CN101443647A (zh) | 2009-05-27 |
US20070263220A1 (en) | 2007-11-15 |
TW200813420A (en) | 2008-03-16 |
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Effective date of registration: 20180718 Address after: 201203 6 Hua Tuo road Pioneer Park, 68 Pudong New Area Road, Pudong New Area, Shanghai. Co-patentee after: Rui Li microelectronic equipment (Shanghai) Co.,Ltd. Patentee after: RAINTREE SCIENTIFIC INSTRUMENTS (SHANGHAI) Corp. Address before: 200120 Hua Tuo Road 68, Shanghai Pudong New Area Pioneer Park 6, 6 Patentee before: RAINTREE SCIENTIFIC INSTRUMENTS (SHANGHAI) Corp. |
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Denomination of invention: Optical measurement system with simultaneous multiple wavelengths, multiple angles of incidence and angles of azimuth Effective date of registration: 20190121 Granted publication date: 20120229 Pledgee: Shanghai Xingcheng Investment Management Co.,Ltd. Pledgor: RAINTREE SCIENTIFIC INSTRUMENTS (SHANGHAI) Corp. Registration number: 2019310000002 |
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Date of cancellation: 20191029 Granted publication date: 20120229 Pledgee: Shanghai Xingcheng Investment Management Co.,Ltd. Pledgor: RAINTREE SCIENTIFIC INSTRUMENTS (SHANGHAI) Corp. Registration number: 2019310000002 |
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Effective date of registration: 20230406 Address after: 201203 6 Hua Tuo road Pioneer Park, 68 Pudong New Area Road, Pudong New Area, Shanghai. Patentee after: RAINTREE SCIENTIFIC INSTRUMENTS (SHANGHAI) Corp. Address before: 201203 6 Hua Tuo road Pioneer Park, 68 Pudong New Area Road, Pudong New Area, Shanghai. Patentee before: RAINTREE SCIENTIFIC INSTRUMENTS (SHANGHAI) Corp. Patentee before: Rui Li microelectronic equipment (Shanghai) Co.,Ltd. |
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