CN101441319B - 大行程平面三自由度精密微动装置及其控制方法 - Google Patents
大行程平面三自由度精密微动装置及其控制方法 Download PDFInfo
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- CN101441319B CN101441319B CN2008102432555A CN200810243255A CN101441319B CN 101441319 B CN101441319 B CN 101441319B CN 2008102432555 A CN2008102432555 A CN 2008102432555A CN 200810243255 A CN200810243255 A CN 200810243255A CN 101441319 B CN101441319 B CN 101441319B
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CN2008102432555A CN101441319B (zh) | 2008-12-19 | 2008-12-19 | 大行程平面三自由度精密微动装置及其控制方法 |
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CN2008102432555A CN101441319B (zh) | 2008-12-19 | 2008-12-19 | 大行程平面三自由度精密微动装置及其控制方法 |
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CN101441319A CN101441319A (zh) | 2009-05-27 |
CN101441319B true CN101441319B (zh) | 2010-08-25 |
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TWI432762B (zh) | 2011-12-07 | 2014-04-01 | Ind Tech Res Inst | 雷達波感測裝置及方法 |
CN103357894A (zh) * | 2013-06-26 | 2013-10-23 | 吉林大学 | 一种大行程三自由度直线式快速刀具伺服装置 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Jiangsu Rich Life Science Instrument Co., Ltd. Assignor: China University of Mining & Technology Contract record no.: 2012320000123 Denomination of invention: Large-range plane three-freedom degree precision fine motion device and control method thereof Granted publication date: 20100825 License type: Exclusive License Open date: 20090527 Record date: 20120228 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100825 Termination date: 20181219 |
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CF01 | Termination of patent right due to non-payment of annual fee |