CN101441063A - Test device of integrated circuit height measurement - Google Patents
Test device of integrated circuit height measurement Download PDFInfo
- Publication number
- CN101441063A CN101441063A CNA2007101883647A CN200710188364A CN101441063A CN 101441063 A CN101441063 A CN 101441063A CN A2007101883647 A CNA2007101883647 A CN A2007101883647A CN 200710188364 A CN200710188364 A CN 200710188364A CN 101441063 A CN101441063 A CN 101441063A
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- integrated circuit
- load bearing
- unit
- bearing unit
- proving installation
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Abstract
The invention relates to a measuring arrangement for integrated circuit height, which mainly includes: a bearing unit for arranging the integrated circuit, a positioning unit positioned correspondingly to the bearing unit, and a group of light measurement units arranged between the bearing unit and the positioning unit for providing a passage for light source, wherein each of the light measurement units includes a light source body, a photoreceptor and the like. So that, when the integrated circuit is arranged on the bearing unit and the positioning unit is correspondingly matched with the bearing unit, the measuring arrangement can directly measure height of the integrated circuit through the position where the light source of the light measurement units passes through, thereby achieving a innovation structure technique which can accurately obtain measured result by effectively performing integrated circuit without contact.
Description
Technical field
What the present invention relates to is a kind of proving installation of integrated circuit height measurement, be particularly related to be a kind of utilize one can ccontaining integrated circuit load bearing unit and the positioning unit of top when corresponding matching, can by the flash ranging unit with light source by and can try to achieve the technology of the test height between test probe and integrated circuit rapidly.
Background technology
Press, along with the high tech electron product and use but day by day general with, usable range is also wide, small product size is also little, the interests in market drive, and feasible electronic product now is ultra-thinization more and more, especially at this electronic package of integrated circuit, development of integrated circuits trend, really based on small size, highly dense intensity, and quicken the integrated circuit research and development, improve the product yield and promote fiduciary level, accurately Measurement and analysis is the indispensable important process of integrated circuit.
Because the size of IC interior structure is got over fine shallow, tend to because of pollution or other foeign element that is subjected to micronic dust causes electrically, the rapid variation of rerum natura and voltinism, the demand that causes analysis to measure or observe the various tool of the integrated circuit precision that becomes of healing, and the structural design of various tool, also faced the unprecedented limit, these limit are if fail to overcome, and one has error a little, and the step of ic manufacturing technology development also will be seriously influenced.
Edge this, the structure technology of the proving installation that this case inventor then measures at integrated circuit height is deeply developed and is also had a measurement structure of accuracy and form, and can judge its test height not contact integrated circuit, tries to achieve and accurately measures the result.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of proving installation of integrated circuit height measurement, utilize load bearing unit (shuttle) to insert integrated circuit, and and the positioning unit corresponding matching of top between, the innovative technology of its test height of integrated circuit is obtained in the position that light source by the flash ranging unit passes through directly measurement, need not to contact the real benefit that integrated circuit can accurately be tried to achieve measurement and reach.
The present invention reaches the proving installation of taking off the designed integrated circuit height measurement of purpose, and its structure is to comprise:
One load bearing unit (shuttle) is provided with the recessed space of inserting for integrated circuit of putting, and the described recessed both sides, space of putting are provided with the channel that can supply external light source to pass through, and this channel is corresponding with the flash ranging unit; Be provided with balanced component in the load bearing unit both sides in addition;
Locating unit is provided with resist component, and the recessed space of putting of the corresponding load bearing unit of this resist component is provided with perforation, and this perforation is corresponding with channel, the flash ranging unit of load bearing unit; In addition be provided with limit assembly in the positioning unit both sides, this limit assembly has through hole, and is steadily spacing with positioning unit for the balanced component of above-mentioned load bearing unit passes;
One flash ranging unit includes: light source body, photoreceptor constituent components such as (photoreceptor), and corresponding with above-mentioned load bearing unit and positioning unit;
In view of the above, provide and integrated circuit can be placed on the load bearing unit, and with after positioning unit and the load bearing unit corresponding matching, again by the flash ranging unit with light source by positioning unit perforation and inject the position that photoreceptor is fed back to original optical path and measure, directly measurement obtains the test height of integrated circuit.
Description of drawings
Fig. 1 is the spatial structure exploded view of the proving installation of integrated circuit height measurement of the present invention;
Fig. 2 be measuring equipment of the present invention the one unit look up stereo appearance figure;
Fig. 3 is the STRUCTURE DECOMPOSITION figure of the one unit of measuring equipment of the present invention;
Fig. 4 is the section plan that each unit of measuring equipment of the present invention does not cooperate as yet;
Fig. 5 is the cooperation enforcement figure that each unit of measuring equipment of the present invention measures test height;
Fig. 6 is another enforcement illustration of the proving installation of integrated circuit height measurement of the present invention;
Fig. 7 is the cooperation enforcement figure that each unit of measuring equipment of the present invention measures test height; And
Fig. 8 is an enforcement illustration again of the proving installation of integrated circuit height measurement of the present invention.
Embodiment
Below in conjunction with accompanying drawing, be described in more detail with other technical characterictic and advantage the present invention is above-mentioned.
At first, see also Fig. 1 to shown in Figure 5, the proving installation of the integrated circuit height measurement that the present invention is designed, the structure technology that it is designed is to comprise:
One load bearing unit (shuttle) 1 which is provided with the recessed space of inserting for integrated circuit 10 11 of putting, and described recessed 11 both sides, space of putting are provided with the channel 12 that can supply external light source to pass through, and this channel 12 is corresponding with flash ranging unit 3; Be provided with the balanced component 13 that protrudes out up in load bearing unit 1 both sides in addition;
Locating unit 2 which is provided with resist component 21, and the recessed space 11 of putting of the corresponding load bearing unit 1 in the below of this resist component 21 is provided with perforation 22, and as shown in Figure 1 to Figure 3, this perforation 22 is corresponding with channel 12, the flash ranging unit 3 of load bearing unit 1; In addition be provided with limit assembly 23 in positioning unit 2 both sides, this limit assembly 23 has through hole 24, passes for the balanced component 13 of above-mentioned load bearing unit, and makes positioning unit 2 and load bearing unit 1 be able to corresponding matching and steadily spacing mutually;
One flash ranging unit 3, include: constituent components such as light source body 31, photoreceptor 32, and light source body 31, photoreceptor 32 lay respectively at channel 12 two ends of above-mentioned load bearing unit 1, and also corresponding with the perforation 22 of the resist component 21 of positioning unit 2, and described light source body 31 can be visible light source, laser light source, infrared ray and ultraviolet ray etc.
Moreover, when the assembling structurally of the proving installation of the integrated circuit height measurement that the present invention is designed is used with reality, earlier integrated circuit 10 is placed on the recessed space 11 of putting of load bearing unit 1, and, make positioning unit 2 and load bearing unit 1 corresponding cooperation with the through hole 24 and the load bearing unit 1 corresponding balanced component 13 that is inserted in load bearing unit 1 of positioning unit 2 with its limit assembly 23; After, light source body 31 by flash ranging unit 3 is launched light source or laser light source, this moment, laser light source was passed through the perforation 22 of positioning unit 2 along the channel 12 of load bearing unit 1, inject photoreceptor 32 via the channel 12 of load bearing unit 1 again, by photoreceptor 32 source reflection or the position that is fed back to original optical path are measured again, thus, directly measurement obtain the test height of integrated circuit 10 or integrated circuit 10 by the top to the distance source path.
In view of the above, the proving installation of the integrated circuit height measurement that the present invention is designed, utilize load bearing unit 1 to insert integrated circuit 10, and and positioning unit 2 corresponding matching of top between, the innovative technology of the test height of integrated circuit 10 is obtained in the position that light source by flash ranging unit 3 passes through directly measurement, can reach to need not to contact the real benefit that integrated circuit 10 can accurately be tried to achieve measurement.
In addition, the proving installation of the integrated circuit height measurement that the present invention is designed, its load bearing unit 1 recessed put plane that space 11 desires place for integrated circuit 10 and recessed junction of putting the vertical perisporium in space 11 can be formed with groove 14, and outstanding isolating part 15 is arranged around the groove 14, the outstanding unit of this outstanding isolating part 15 and width thereof are to set up according to the scope of stable firm integrated circuit 10 structures, the recessed space 11 of putting of load bearing unit 1 then utilizes this outstanding isolating part 15 to contact integrated circuit 10, the complete unlikely architectural characteristic that influences integrated circuit 10.
In addition, the proving installation of the integrated circuit height measurement that the present invention is designed, except extremely shown in Figure 5 as Fig. 1, its structure is each performance that is main embodiment with a quantity all, also can adopt to surpass two at least and be the performance of another embodiment more than the quantity, extremely shown in Figure 8 as Fig. 6, described load bearing unit 1 has the recessed space 11 of putting of number, establish with balanced component 13 in per two recessed outsides of putting space 11, balanced component 13 orientation of the corresponding described load bearing unit 1 in cooperation positioning unit 2 both sides also are provided with the limit assembly 23 of tool through hole 24, recessedly put the resist component 21 that 11 places, space are provided with two tools perforation 22 for per two of then corresponding described load bearing unit 1 on the positioning unit 2, and aforesaid flash ranging unit 3 can set up single one or more groups, all can reach required accurate measurement condition.
Secondly, as Fig. 1, shown in Figure 3, the proving installation of the integrated circuit height measurement that the present invention is designed, its balanced component 13 on load bearing unit 1 can be adopted the design of stand-alone assembly, and establishes combining of mode with load bearing unit 1 with group; Resist component 21 on the described positioning unit 2, limit assembly 23, the design that also can adopt stand-alone assembly individually, and with the combination of positioning unit 2 in the solid mode of spiral shell.
Via above-mentioned, the proving installation of the integrated circuit height measurement that the present invention is designed, in above-listed detailed description is to be concrete representative at a possible embodiments, only described embodiment is not in order to limit claim of the present invention, allly do not break away from equivalence that skill spirit of the present invention does and implement or become also, all should be included in the scope of demand patent of the present invention.
In sum, the proving installation of the designed a kind of integrated circuit height measurement of the present invention not only really belongs to innovation on present industrial kenel, and it should fully meet the legal patent of invention important document of novelty and progressive, files an application in accordance with the law.
Claims (8)
1. the proving installation of an integrated circuit height measurement, it is characterized in that: it comprises: a load bearing unit of placing for integrated circuit, is with the load bearing unit corresponding matching and have one and bore a hole and be positioned at positioning unit on the integrated circuit, and one is positioned at the flash ranging unit of light source by boring a hole is provided between load bearing unit and positioning unit both sides;
Integrated circuit is placed on the described load bearing unit, makes described positioning unit and load bearing unit corresponding matching, direct measurement obtains the test height of integrated circuit by the position measurement of the perforation of positioning unit with light source by the flash ranging unit.
2. the proving installation of integrated circuit height measurement according to claim 1 is characterized in that: describedly include light source body, photoreceptor by the flash ranging unit, measure by the punch position of load bearing unit for light source body transmitting illuminant.
3. the proving installation of integrated circuit height measurement according to claim 1, it is characterized in that: described load bearing unit is provided with the recessed space of inserting for integrated circuit of putting, the described recessed both sides, space of putting are provided with the channel that passes through for external light source, and this channel is corresponding with the flash ranging unit.
4. the proving installation of integrated circuit height measurement according to claim 1, it is characterized in that: described positioning unit is provided with resist component, the recessed space of putting of the corresponding load bearing unit of this resist component is provided with perforation, and this perforation is corresponding with channel, the flash ranging unit of load bearing unit.
5. according to the proving installation of claim 1 or 3 or 4 described integrated circuit height measurements, it is characterized in that: described load bearing unit further is provided with balanced component, and positioning unit also is provided with limit assembly at the balanced component place of corresponding load bearing unit, this limit assembly has through hole, passes for above-mentioned balanced component.
6. the proving installation of integrated circuit height measurement according to claim 5, it is characterized in that: described load bearing unit recessed put the space on plane that desire is placed for integrated circuit and the junction of vertical perisporium be formed with groove, outstanding isolating part is arranged around this groove, set up according to the scope of firm integrated circuit structure.
7. according to the proving installation of the described integrated circuit height measurement of claim 6, it is characterized in that: the balanced component on the described load bearing unit is a stand-alone assembly, and combines in the group mode of establishing with described load bearing unit; Resist component on the described positioning unit, limit assembly also are individually stand-alone assembly, and with the combination of described positioning unit in the solid mode of spiral shell.
8. according to the proving installation of the described integrated circuit height measurement of claim 6, it is characterized in that: described load bearing unit has the recessed space of putting of number, establish with balanced component in per two recessed outsides of putting the space, the balanced component orientation of the corresponding described load bearing unit in cooperation positioning unit both sides also is provided with the limit assembly of tool through hole, and per two recessed spaces places of putting of corresponding described load bearing unit are provided with two pertusate resist components on the described positioning unit, and aforesaid flash ranging unit set up single one or more groups.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101883647A CN101441063A (en) | 2007-11-19 | 2007-11-19 | Test device of integrated circuit height measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101883647A CN101441063A (en) | 2007-11-19 | 2007-11-19 | Test device of integrated circuit height measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101441063A true CN101441063A (en) | 2009-05-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101883647A Pending CN101441063A (en) | 2007-11-19 | 2007-11-19 | Test device of integrated circuit height measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101441063A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103868458A (en) * | 2014-03-19 | 2014-06-18 | 歌尔声学股份有限公司 | Product height double-gap detection device |
| CN103868459A (en) * | 2014-03-19 | 2014-06-18 | 歌尔声学股份有限公司 | Product height single-gap detecting device |
-
2007
- 2007-11-19 CN CNA2007101883647A patent/CN101441063A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103868458A (en) * | 2014-03-19 | 2014-06-18 | 歌尔声学股份有限公司 | Product height double-gap detection device |
| CN103868459A (en) * | 2014-03-19 | 2014-06-18 | 歌尔声学股份有限公司 | Product height single-gap detecting device |
| CN103868458B (en) * | 2014-03-19 | 2016-08-17 | 歌尔声学股份有限公司 | Product height double slit detection device |
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Open date: 20090527 |