CN101417747B - Conveyer table mechanism - Google Patents
Conveyer table mechanism Download PDFInfo
- Publication number
- CN101417747B CN101417747B CN2008101846591A CN200810184659A CN101417747B CN 101417747 B CN101417747 B CN 101417747B CN 2008101846591 A CN2008101846591 A CN 2008101846591A CN 200810184659 A CN200810184659 A CN 200810184659A CN 101417747 B CN101417747 B CN 101417747B
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- platform
- transfer station
- base platform
- sliding base
- upper saddle
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Abstract
The invention relates to a transmission station mechanism, which comprises an upper sliding base platform, a lower sliding base platform, a middle sliding base platform and a transmission element, and an altitude difference is kept between the lower sliding base platform and the upper sliding base platform, and the middle sliding base platform is respectively connected with the upper sliding base platform and the lower sliding base platform in a sliding manner, and a transmission element is coupled with the middle sliding base platform, and a part thereof is fixedly connected with the upper sliding base platform. The transmission element is driven by the middle sliding base platform to lead the upper sliding base platform to move by two times of the transmission distance of the transmission element opposing to the lower sliding base platform. Therefore, the upper sliding base platform of the transmission station mechanism can be extended forward into a trolley to lead a master mask to displace to the upper sliding base platform from the trolley, and then be extended forwards into a master mask storing station through the upper sliding base platform, and the master mask placed on the upper sliding base platform can even be displaced into a storing box, thus reducing the cost of process equipment.
Description
Technical field
The present invention relates to a kind of transfer station mechanism, particularly a kind of transfer station mechanism that carrying object is protracted.
Background technology
Display panel becomes epochmaking product in the current technique of display owing to its lightweight and slimming.Micro-photographing process is for making a critical processes of display panel, and so-called micro-photographing process is the circuit that forms patterning on a substrate, and micro-photographing process mainly comprises exposure, development, etching and the steps such as causing resist of delustering.Substrate is when carrying out the exposure of surperficial photoresist, and its needed process apparatus is except light source, and is most important, is used to provide line pattern in addition to carry out the mask of design transfer.Before exposure, operating personal must take out mask to the mask storage bed, and delivers to exposure machine with manual type, executes instruction then to aim at exposure.And after exposure finishes, need mask is put back to the mask storage bed to store.
After exposure finished, operating personal need be driven a chassis to exposure machine mask is transferred load on the chassis, chassis is sailed by the mask storage bed again.Fig. 1 is the transmission of mask and the scheme drawing that stores equipment needed thereby, as shown in Figure 1, chassis 11 is carried to mask near the mask storage bed 12, and mask is moved to an elevator 13 by a mechanical arm (figure does not show), and elevator 13 moves to suitable mask storage location (for example 12b) via a track 14, by mechanical arm mask is moved to the Storage Box of mask storage location again.Hence one can see that, and existing mask mode of transport all need use mechanical arm, but mechanical arm involves great expense, and makes manufacturing cost significantly increase.
Summary of the invention
In view of this, purpose of the present invention is for a kind of transfer station mechanism is provided, as the substitute of mechanical arm, significantly to reduce manufacturing cost.
For reaching above-mentioned purpose,, comprise a upper saddle platform, once a slide platform and a driver element in the slide platform, according to a kind of transfer station of the present invention mechanism.Lower slider platform and upper saddle platform have a diff-H.Middle slide platform is established with upper saddle platform and lower slider platform cunning by a slide rail respectively and is connected.Driver element is drive belt or driving chain, and this driver element and middle slide platform couple, and the part of driver element is affixed with the upper saddle platform.Drive driver element by middle slide platform and make the relative lower slider platform of upper saddle platform, the transmission that doubles this driver element is apart from motion.
From the above, useful technique effect of the present invention is, comprise the upper, middle and lower slide platform according to transfer station of the present invention mechanism, wherein, the relative lower slider platform of upper saddle platform, apart from motion, and three layers of relative storehouse of platform also can make bearing force increase with the transmission that doubles driver element, and deflection is diminished.With this, the upper saddle platform of transfer station mechanism can project forwardly in the chassis, makes mask be transferred to the upper saddle platform from chassis, projects forwardly in the mask storage bed by the upper saddle flat-bed then, more can be transferred in the Storage Box being placed in upper saddle flat-bed mask.In addition; mobile device (for example wheel) also can be installed additional in transfer station of the present invention mechanism; make transfer station mechanism more can replace existing chassis; the transfer station mechanism of this form can directly take off mask or mask is mounted to exposure machine from exposure machine, and then cost-cutting and reduce the time and the artificial careless mistake risk of mask carrying more.In addition, the upper saddle flat-bed of present embodiment is of a size of can be adjusted adapting to the mask of different size, and then increases the comformability of transfer station mechanism, and reduces the process apparatus cost.
Description of drawings
Fig. 1 transmits and stores the scheme drawing of required equipment for a kind of existing mask;
Fig. 2 is the front-view schematic diagram according to a kind of transfer station mechanism of preferred embodiment of the present invention;
Fig. 3 A and Fig. 3 B are the schematic side view according to the transfer station mechanism of preferred embodiment of the present invention;
Fig. 4 A and Fig. 4 B transmit the scheme drawing of mask for the transfer station mechanism that uses preferred embodiment of the present invention; And
Fig. 5 is for having the scheme drawing of mobile device according to the transfer station mechanism of preferred embodiment of the present invention.
Wherein, description of reference numerals is as follows:
11: chassis 12,32a, 32b: the mask storage bed
12a～12d: mask storage location 13: elevator
14: track 2: transfer station mechanism
21: upper saddle platform 22: the lower slider platform
23: middle slide platform 24: driver element
241: fixed part 25: slide rail
26: roller 27: actuating device
28: rack rails 321: Storage Box
D1: transmission is apart from E: the counterweight element
F: jacking system M: mask
W: mobile device
The specific embodiment
Hereinafter with reference to relevant drawings, the transfer station mechanism according to preferred embodiment of the present invention is described.
Fig. 2 is the front-view schematic diagram of a kind of transfer station mechanism 2 of preferred embodiment of the present invention, and Fig. 3 A is the schematic side view of transfer station mechanism 2.Please refer to shown in Fig. 2 and Fig. 3 A, transfer station mechanism 2 comprises a upper saddle platform 21, once a slide platform 23 and a driver element 24 in the slide platform 22.Lower slider platform 22 has a diff-H with upper saddle platform 21, and this is meant that lower slider platform 22 is positioned at different height with upper saddle platform 21.Middle slide platform 23 is connected with upper saddle platform 21 and lower slider platform 22 sliding establishing respectively, and in the present embodiment, middle slide platform 23 is connected with upper saddle platform 21 and lower slider platform 22 sliding establishing by a slide rail 25 respectively.
With this, when central slide platform 23 moves, can make roller 26 drive driver elemenies 24 motions, and then make 21 relative lower slider platforms 22 motions of upper saddle platform.Fig. 3 A is the scheme drawing that the driver element 24 of transfer station mechanism 2 does not move as yet, and the scheme drawing that Fig. 3 B is the driver element 24 of transfer station mechanism has a transmission distance D 1, shown in Fig. 3 B, upper saddle platform 21 protracts, and lower slider platform 22 maintains static, and upper saddle platform 21 relative lower slider platforms 22 double transmission distance D 1 motion of driver element 24.
As shown in Figure 2, in the present embodiment, transfer station mechanism 2 also comprises an actuating device 27, and itself and middle slide platform 23 couple with slide platform 23 in driving.In the present embodiment, actuating device 27 comprises a servomotor, and couples with middle slide platform 23 by a rack rails 28.When actuating device 27 runnings, slide platform 23 moves along rack rails 28 in can making, and then middle slide platform 23 moves with respect to lower slider platform 22, make roller 26 drive driver element 24 simultaneously, driver element 24 drives upper saddle platform 21 relative lower slider platforms 22 again, and the transmission that doubles driver element is apart from motion.
In the present embodiment, middle slide platform 23 can provide the bearing force of transfer station mechanism 2, and opposing is because upper saddle platform 21 moves the burden of the bending power (bending) that is produced with respect to lower slider platform 22.In addition, transfer station mechanism 2 can comprise a counterweight element E in addition, and it can be arranged at least one end (shown in Fig. 3 B) of lower slider platform 22, when protracting with opposing upper saddle platform 21, and the moment that centre-of gravity shift caused.In the present embodiment, counterweight element E is provided with the position only for illustrative, and it can be required and be arranged at preferable position to obtain suitable counterweight function according to reality.
The transfer station mechanism 2 of present embodiment is an example to transmit mask, and certainly, transfer station mechanism 2 also can transmit other object, for example is quartz conductor related elements (for example glass substrate, CF substrate and TFT substrate).Fig. 4 A and Fig. 4 B transmit the scheme drawing of mask for using transfer station mechanism 2, and wherein Fig. 4 A is a birds-eye view, and Fig. 4 B is a front elevation.Shown in Fig. 4 A and Fig. 4 B, present embodiment is an example with two mask storage bed 32a, 32b, and mask storage bed 32a, 32b are oppositely arranged, and transfer station mechanism 2 is positioned between the two. Mask storage bed 32a, 32b respectively have a plurality of Storage Boxes 321, and Storage Box is positioned at different height.
Illustrate at first how transfer station mechanism 2 is stored in mask M in the one specific storage box.Driving transfer station mechanism 2 by a jacking system F rises or descends to aim at the Storage Box that will put.In the present embodiment, jacking system F can have a platform, and lower slider platform 22 is fixedly linked on this platform, and when jacking system F started, this platform can make lower slider platform 22 and transfer station mechanism 2 rise or descend; Perhaps, jacking system F does not have platform, and direct drive lower slider platform 22 rises or descends.The upper saddle platform 21 of transfer station mechanism 2 protracts (can protract towards mask storage bed 32a or 32b) to corresponding Storage Box then, be transferred in the cooresponding Storage Box so that be placed in the mask of upper saddle platform 21, upper saddle platform 21 returns back to home position (position of not protracting) more then.
Illustrate again how transfer station mechanism 2 takes out mask in Storage Box.Driving transfer station mechanism 2 by jacking system F rises or descends to aim at cooresponding Storage Box, the upper saddle platform 21 of transfer station mechanism 2 protracts (can protract towards mask storage bed 32a or 32b) to corresponding Storage Box then, so that the mask that is placed in the Storage Box is transferred on the upper saddle platform 21, upper saddle platform 21 returns back to home position (position of not protracting) more then.Then transfer to chassis again mask is transferred to exposure machine, and the transfer also need not passing through of the mask between transfer station mechanism 2 and chassis mechanical arm as long as project forwardly in the chassis by the upper saddle platform 21 of transfer station mechanism 2, just can make mask be transferred on the chassis.
In addition; as shown in Figure 5; in another embodiment; transfer station of the present invention mechanism also can have mobile device W (for example wheel); it is arranged at the bottom side of lower slider platform 22; make transfer station mechanism 2 more can replace existing chassis, the transfer station mechanism 2 of this embodiment can directly move to exposure machine, and takes off mask or mask is installed to exposure machine from exposure machine.In addition, the upper saddle flat-bed of transfer station mechanism is of a size of and can adjusts, to adapt to the mask of different size.In addition, transfer station mechanism in addition can have a jacking system, can drive the upper saddle platform and or middle slide platform and or the lower slider platform rise or descend so that the upper saddle platform is transferred in the Storage Box of being scheduled to mask by rising or descending.
In sum, comprise the upper, middle and lower slide platform according to transfer station of the present invention mechanism, wherein, the relative lower slider platform of upper saddle platform, the transmission that doubles driver element is apart from motion, and three layers of relative storehouse of platform also can make bearing force increase, and deflection is diminished.With this, the upper saddle platform of transfer station mechanism can project forwardly in the chassis, makes mask be transferred to the upper saddle platform from chassis, projects forwardly in the mask storage bed by the upper saddle flat-bed then, more can be transferred in the Storage Box being placed in upper saddle flat-bed mask.In addition; mobile device (for example wheel) also can be installed additional in transfer station of the present invention mechanism; more can replace existing chassis; the transfer station mechanism of this form can directly take off mask or mask is mounted to exposure machine from exposure machine, and then cost-cutting and reduce the time and the artificial careless mistake risk of mask carrying more.In addition, the upper saddle flat-bed of present embodiment is of a size of can be adjusted adapting to the mask of different size, and then increases the comformability of transfer station mechanism, and reduces the process apparatus cost.
The above only is an illustrative, but not is restricted.Anyly do not break away from spirit of the present invention and category, and, all should be contained in the scope of appended claim its equivalent modifications of carrying out or change.
Claims (8)
1. transfer station mechanism comprises:
One upper saddle platform;
Once slide platform has a diff-H with this upper saddle platform;
Slide platform in one is established with this upper saddle platform and this lower slider platform cunning by a slide rail respectively and is connected; And
One driver element, it is drive belt or driving chain, this driver element couples with this middle slide platform, and the part of this driver element and this upper saddle platform are affixed, drive this driver element by slide platform in this and make the relative lower slider platform of upper saddle platform, the transmission that doubles this driver element is apart from motion.
2. transfer station as claimed in claim 1 mechanism, wherein should in slide platform be coupled to this driver element by two rollers.
3. transfer station as claimed in claim 2 mechanism, wherein said two rollers lay respectively at the two ends of slide platform in this.
4. transfer station as claimed in claim 1 mechanism, wherein this transfer station mechanism also comprises:
One actuating device, coupling with slide platform in this should middle slide platform to drive.
5. transfer station as claimed in claim 4 mechanism, wherein this actuating device by a rack rails with should in slide platform couple.
6. transfer station as claimed in claim 1 mechanism, wherein this transfer station mechanism also comprises:
One counterweight element is arranged at this lower slider flat-bed one end, when protracting to resist this upper saddle platform, and the moment that centre-of gravity shift caused.
7. transfer station as claimed in claim 1 mechanism, wherein this transfer station mechanism also comprises:
One mobile device is arranged at this lower slider flat-bed bottom side.
8. transfer station as claimed in claim 1 mechanism, wherein this transfer station mechanism also comprises:
One jacking system drives this lower slider platform and rises or descend.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101846591A CN101417747B (en) | 2008-12-11 | 2008-12-11 | Conveyer table mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101846591A CN101417747B (en) | 2008-12-11 | 2008-12-11 | Conveyer table mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101417747A CN101417747A (en) | 2009-04-29 |
| CN101417747B true CN101417747B (en) | 2011-11-23 |
Family
ID=40628779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101846591A Expired - Fee Related CN101417747B (en) | 2008-12-11 | 2008-12-11 | Conveyer table mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101417747B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109969699A (en) * | 2018-12-21 | 2019-07-05 | 杭州佳菱机械制造有限公司 | A kind of injection mould processing track transport vehicle system |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6318538B1 (en) * | 1999-02-16 | 2001-11-20 | Ushiodenki Kabushiki Kaisha | Device for treatment of a substrate |
| US20050036877A1 (en) * | 2003-04-16 | 2005-02-17 | Daihen Corporation | Linear moving mechanism and transfer robot using the same |
| CN1594048A (en) * | 2003-09-08 | 2005-03-16 | 鸿富锦精密工业（深圳）有限公司 | Base plate moving and carrying device |
| CN1613147A (en) * | 2002-01-08 | 2005-05-04 | 东京毅力科创株式会社 | Semiconductor processing system and semiconductor carrying mechanism |
| CN1929108A (en) * | 2005-09-05 | 2007-03-14 | 东京毅力科创株式会社 | Conveying chamber, substrate processing device, and substrate disorder detection method |
| CN1326227C (en) * | 2003-05-30 | 2007-07-11 | 东京毅力科创株式会社 | Substrate conveying device and conveying method, and vacuum disposal device |
| CN1994841A (en) * | 2006-01-06 | 2007-07-11 | 东京毅力科创株式会社 | Substrate convey device and substrate support |
| CN100360763C (en) * | 2003-02-21 | 2008-01-09 | 山特维克坦罗克有限公司 | Telescopic feed beam for rock drill and method of measuring rock drill travel |
-
2008
- 2008-12-11 CN CN2008101846591A patent/CN101417747B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6318538B1 (en) * | 1999-02-16 | 2001-11-20 | Ushiodenki Kabushiki Kaisha | Device for treatment of a substrate |
| CN1613147A (en) * | 2002-01-08 | 2005-05-04 | 东京毅力科创株式会社 | Semiconductor processing system and semiconductor carrying mechanism |
| CN100360763C (en) * | 2003-02-21 | 2008-01-09 | 山特维克坦罗克有限公司 | Telescopic feed beam for rock drill and method of measuring rock drill travel |
| US20050036877A1 (en) * | 2003-04-16 | 2005-02-17 | Daihen Corporation | Linear moving mechanism and transfer robot using the same |
| CN1326227C (en) * | 2003-05-30 | 2007-07-11 | 东京毅力科创株式会社 | Substrate conveying device and conveying method, and vacuum disposal device |
| CN1594048A (en) * | 2003-09-08 | 2005-03-16 | 鸿富锦精密工业（深圳）有限公司 | Base plate moving and carrying device |
| CN1929108A (en) * | 2005-09-05 | 2007-03-14 | 东京毅力科创株式会社 | Conveying chamber, substrate processing device, and substrate disorder detection method |
| CN1994841A (en) * | 2006-01-06 | 2007-07-11 | 东京毅力科创株式会社 | Substrate convey device and substrate support |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101417747A (en) | 2009-04-29 |
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| PB01 | Publication | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111123 Termination date: 20201211 |
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| CF01 | Termination of patent right due to non-payment of annual fee |