CN101408737A - 一种平台式曝光影像检测装置及检测方法 - Google Patents
一种平台式曝光影像检测装置及检测方法 Download PDFInfo
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- CN101408737A CN101408737A CNA2008102173283A CN200810217328A CN101408737A CN 101408737 A CN101408737 A CN 101408737A CN A2008102173283 A CNA2008102173283 A CN A2008102173283A CN 200810217328 A CN200810217328 A CN 200810217328A CN 101408737 A CN101408737 A CN 101408737A
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CN2008102173283A CN101408737B (zh) | 2008-11-13 | 2008-11-13 | 一种平台式曝光影像检测方法 |
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CN101408737A true CN101408737A (zh) | 2009-04-15 |
CN101408737B CN101408737B (zh) | 2011-05-04 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102722086A (zh) * | 2011-06-28 | 2012-10-10 | 清华大学 | 一种无接触式单自由度定位装置及其同步运动控制方法 |
CN108073044A (zh) * | 2016-11-07 | 2018-05-25 | 俞庆平 | 一种柔性材料的双面曝光方法及装置 |
CN108303863A (zh) * | 2018-03-19 | 2018-07-20 | 合肥芯碁微电子装备有限公司 | 一种用于大倍率光刻设备光学系统的辅助dmd调平装置 |
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2008
- 2008-11-13 CN CN2008102173283A patent/CN101408737B/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102722086A (zh) * | 2011-06-28 | 2012-10-10 | 清华大学 | 一种无接触式单自由度定位装置及其同步运动控制方法 |
CN108073044A (zh) * | 2016-11-07 | 2018-05-25 | 俞庆平 | 一种柔性材料的双面曝光方法及装置 |
CN108303863A (zh) * | 2018-03-19 | 2018-07-20 | 合肥芯碁微电子装备有限公司 | 一种用于大倍率光刻设备光学系统的辅助dmd调平装置 |
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CN101408737B (zh) | 2011-05-04 |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: LIAONING HANS-GRONHI TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: SHENZHEN HAN S DIGITAL IMAGING TECHNOLOGY CO., LTD. Effective date: 20120418 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20120418 Address after: 518057 No. 9 West West Road, Nanshan District hi tech park, Shenzhen, Guangdong Co-patentee after: Hans-Gronhi Graphic Technology Co., Ltd. Patentee after: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen Address before: No. 5 road 518057 in Guangdong province Shenzhen city Nanshan District high tech park of Pine Hill Factory District No. 8 Co-patentee before: Shenzhen Han's Digital Imaging Technology Co., Ltd. Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |
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C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110504 Termination date: 20121113 |