CN101408716B - 曝光影像偏差的辅助校正装置 - Google Patents
曝光影像偏差的辅助校正装置 Download PDFInfo
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- CN101408716B CN101408716B CN2008102173955A CN200810217395A CN101408716B CN 101408716 B CN101408716 B CN 101408716B CN 2008102173955 A CN2008102173955 A CN 2008102173955A CN 200810217395 A CN200810217395 A CN 200810217395A CN 101408716 B CN101408716 B CN 101408716B
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2008102173955A CN101408716B (zh) | 2008-11-19 | 2008-11-19 | 曝光影像偏差的辅助校正装置 |
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CN2008102173955A CN101408716B (zh) | 2008-11-19 | 2008-11-19 | 曝光影像偏差的辅助校正装置 |
Publications (2)
Publication Number | Publication Date |
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CN101408716A CN101408716A (zh) | 2009-04-15 |
CN101408716B true CN101408716B (zh) | 2010-11-10 |
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CN2008102173955A Expired - Fee Related CN101408716B (zh) | 2008-11-19 | 2008-11-19 | 曝光影像偏差的辅助校正装置 |
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Families Citing this family (1)
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CN102207690A (zh) * | 2011-05-20 | 2011-10-05 | 合肥芯硕半导体有限公司 | 一种多slm曝光和数据处理方法 |
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CN101408716A (zh) | 2009-04-15 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: LIAONING HANS-GRONHI TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: SHENZHEN HAN'S DIGITAL IMAGING TECHNOLOGY CO., LTD. Effective date: 20120412 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20120412 Address after: 518020 No. 9 West West Road, Nanshan District hi tech park, Shenzhen, Guangdong Co-patentee after: Hans-Gronhi Graphic Technology Co., Ltd. Patentee after: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen Address before: No. 5 road 518020 in Guangdong province Shenzhen city Nanshan District high tech park of Pine Hill Factory District No. 8 Co-patentee before: Shenzhen Han's Digital Imaging Technology Co., Ltd. Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101110 Termination date: 20151119 |
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EXPY | Termination of patent right or utility model |