CN101400820A - 用于制造热障层的方法和用于构件的热障层 - Google Patents

用于制造热障层的方法和用于构件的热障层 Download PDF

Info

Publication number
CN101400820A
CN101400820A CN200780008381.6A CN200780008381A CN101400820A CN 101400820 A CN101400820 A CN 101400820A CN 200780008381 A CN200780008381 A CN 200780008381A CN 101400820 A CN101400820 A CN 101400820A
Authority
CN
China
Prior art keywords
thermal barrier
barrier coatings
during
coating
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200780008381.6A
Other languages
English (en)
Inventor
T·科萨克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rolls Royce Solutions GmbH
Original Assignee
MTU Motoren und Turbinen Union Friedrichshafen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MTU Motoren und Turbinen Union Friedrichshafen GmbH filed Critical MTU Motoren und Turbinen Union Friedrichshafen GmbH
Publication of CN101400820A publication Critical patent/CN101400820A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/542Controlling the film thickness or evaporation rate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01DNON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12Blades
    • F01D5/28Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288Protective coatings for blades
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00Manufacture
    • F05D2230/30Manufacture with deposition of material
    • F05D2230/31Layer deposition
    • F05D2230/313Layer deposition by physical vapour deposition
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00Manufacture
    • F05D2230/30Manufacture with deposition of material
    • F05D2230/31Layer deposition
    • F05D2230/314Layer deposition by chemical vapour deposition
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00Manufacture
    • F05D2230/90Coating; Surface treatment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/60Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611Coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24174Structurally defined web or sheet [e.g., overall dimension, etc.] including sheet or component perpendicular to plane of web or sheet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

本发明涉及一种用于在一个构件上借助气相沉积法制造陶瓷热障层(10)的方法,所述构件用于压缩机部件和涡轮机部件,其中该方法包括下列步骤:a)准备一种用于沉积在构件(18)上的陶瓷蒸气;b)将陶瓷蒸气沉积在构件(18)上,以便构成一个柱状或杆状构造的热障层,其中各柱或杆(12)基本上垂直于一个构件表面(16)定向;和c)在方法步骤b)期间这样地改变至少一个方法参数,使得得到的热障层包括一些柱或杆(12),它们具有交替地逐渐缩小的和逐渐增大的直径(d、D)。本发明还涉及一种用于构件(16)的热障层,所述构件用于压缩机部件和涡轮机部件,其中热障层(10)由一个柱状或杆状构造的陶瓷热障层构成,并且各柱或杆(12)基本上垂直于一个构件表面(16)定向。按照本发明,各柱或杆(12)具有交替地逐渐缩小和逐渐增大的直径(d、D)。

Description

用于制造热障层的方法和用于构件的热障层
技术领域
本发明涉及一种用于在一个构件上借助气相沉积法制造陶瓷热障层的方法,所述构件用于压缩机部件和涡轮机部件,以及一种用于构件的热障层,所述构件用于压缩机部件和涡轮机部件,其中热障层通常由一个柱状或杆状构造的陶瓷热障层构成并且各柱或杆基本上垂直于一个构件表面定向。本发明还涉及一种构件,它用于压缩机部件和涡轮机部件,该构件包括一个金属基质和一个至少部分地涂敷到金属基质上的热障层。
背景技术
由现有技术已知各种不同的用于在构件上制造陶瓷热障层的方法,构件特别用于压缩机部件和涡轮机部件。在此将一个陶瓷层或通过等离子体喷射法(Plasmaspritzverfahren)或借助物理气相沉积法(PVD)涂敷到构件上。通过应用物理气相沉积法,特别是电子束气相法(Elektronenstrahlbedampfung)(EB-PVD),形成具有杆形或柱形的结构的陶瓷层。各柱或杆在此沿其长度具有恒定的厚度。柱或杆的柱状下层结构也是均匀的。这样制成的陶瓷热障层相对于通过热喷射过程制成的热障层具有的优点是,它们由于柱状结构具有一种改进的热交变稳定性。并且各个杆或柱允许杆接缝的膨胀和收缩,而不产生在极端情况下可以导致热障层的各个部分的剥落的应力。通过在所述的构件上附加涂覆热障陶瓷层,降低了构件材料温度继而保持其强度。作为陶瓷材料,在此通常采用包括不同稳定剂的氧化锆,特别是氧化钇。由DE 601 03 526 T2、DE 693 18 856 T2以及US专利文件No.4,321,311 A、4,401,697 A、4,405,659 A以及5,514,482已知一些用于制造陶瓷热障层的方法和一些用于压缩机部件和涡轮机部件的金属构件的相应的热障层。
但这些已知的用于制造陶瓷热障层的方法以及由此制成的热障层的不利之处是,通过采用物理气相沉积法产生相当密的柱状或杆状的结构。但相当大的密度不利地促进了在陶瓷热障层内的热流。
发明内容
因此本发明的目的在于,提供一种此类的用于构件的热障层,它具有特别明显降低的热导率。
此外本发明的目的在于,提供一种此类的用于制造陶瓷热障层的方法,其中得到的热障层具有明显的、特别降低的热导率。
本发明的另一目的在于,提供一种用于压缩机部件和涡轮机部件的构件,它包括一个金属基质和一个至少部分地涂敷到金属基质上的热障层,其中热障层具有比已知的热障层特别明显降低的热导率。
通过一种按照权利要求1的特征的方法、一种按照权利要求15的特征的热障层和一种按照权利要求20的特征的构件达到上述目的。
本发明的有利的实施形式描述在各相应的从属权利要求中。
一种按本发明的用于在一个用于压缩机部件和涡轮机部件的构件上制造陶瓷热障层的方法包括一种气相沉积法,具有下列方法步骤:a)准备一种用于沉积在构件上的陶瓷蒸气;b)将陶瓷蒸气沉积在构件上,以便构成一个柱状或杆状构造的热障层,其中各柱或杆基本上垂直于一个构件表面定向;和c)在方法步骤b)期间这样地改变至少一个方法参数,使得得到的热障层包括一些柱或杆,它们具有交替地逐渐缩小的和逐渐增大的直径。气相沉积法特别涉及一种物理气相沉积法,如例如一种电子束气相沉积法。但也可设想使用一种阴极溅射法或一种电弧蒸发法以及CVD法。通过气相沉积法的应用确保,形成的热障层柱状或杆状地构造并因此仍保持这类构造的陶瓷热障层的已知的优点。按照本发明,形成的柱或杆具有交替地逐渐缩小的和逐渐增大的直径。通过交替地逐渐缩小的和逐渐增大的直径,在热障层的层形成过程中,在各个柱或杆之间形成许多小孔,它们有助于明显减小热流继而明显降低形成的热障层的热导率。在此逐渐缩小的和逐渐增大的直径的特征也特别应被理解为各邻接的柱或杆至少部分地沿其长度不接触和不平行地延伸。同样的情况适用于可能出现的下层结构。并且有利的是,各个杆或柱的小的直径大大地阻止了热流,从而由此也导致形成的热障层的热导率的显著降低。
在本发明方法的其他的有利的实施形式中,在一个涂层室,特别是一个真空室中实施该方法。在此将待涂层的构件引入涂层室中并且在其上沉积陶瓷热障层。通常至少在待涂层的构件表面上对构件进行加热或预热。
并且还可以在方法步骤b)期间输入氧气和惰性气体,并且在方法步骤c)期间至少一个方法参数的改变包括在涂层期间或在涂层室中改变氧气和/或惰性气体的分压力。在此可以调节分压力和经由气流的总压力或泵功率。
但也可以在方法步骤b)期间移动待涂层的构件,并且在方法步骤c)期间至少一个方法参数的改变包括在涂层期间改变构件运动的方式和/或构件速度。在此可以特别转动构件,从而在方法步骤c)期间至少一个方法参数的改变包括在涂层期间改变转速。此外还可以,在方法步骤c)期间至少一个方法参数的改变包括在涂层期间改变陶瓷蒸气到构件上的沉积率。最后可以在涂层期间改变压力或在涂层室中在方法步骤c)期间改变至少一个方法参数。通过所述措施,产生按照本发明的陶瓷热障层的层结构,其中形成的各柱或杆沿其纵伸具有交替地逐渐缩小的和逐渐增大的直径。
在本发明方法的另一种有利的实施形式中,陶瓷蒸气或采用的陶瓷材料包括氧化锆、氧化钇或一种由其组成的混合物。也可设想其他的陶瓷材料。通常以一个在1μm与400μm之间的厚度沉积热障层,但也可设想不同的层厚。
在本发明方法的另一种有利的实施形式中,在待涂层的构件表面与热障层之间至少部分地构成一个粘附层。粘附层在此包括MCrAlY渗铝的/Al强化的表面或Pt/Al。在此可以借助已知的热喷射法、电镀处理法、扩散处理法或借助物理气相沉积法涂覆粘附层。并且在本发明方法的另一实施形式中,可以在待涂层的构件表面与粘附层之间至少部分地构成一个氧化铝中间层。
一种本发明的热障层由陶瓷材料构成并且具有一个柱状或杆状的结构或晶粒结构,其中各柱或杆基本上垂直于一个构件表面定向。按照本发明,各柱或杆沿其纵伸具有逐渐缩小的和逐渐增大的直径。各个柱或杆的晶界(Korngrenzen)在此可以至少部分地彼此接触,在各个柱或杆之间有利地构成一些小孔腔。通过按照本发明的各个柱或杆的结构或构成,明显地降低了热障层的热导率,因为各个杆的小的直径大大地阻止了热流。并且在热障层内构成的小孔显著地减小了热流。
在热障层的一种有利的实施形式中,热障层的陶瓷材料包括氧化锆、氧化钇或一种由其组成的混合物。但同样可设想使用其他的适合的陶瓷材料构成热障层。热障层通常具有一个在1μm与400μm之间的厚度,同时也可设想不同的厚度。
一种按照本发明的用于压缩机部件和涡轮机部件的构件包括一个金属基质和一个至少部分地涂敷到金属基质上的按本发明的热障层,如以上所述。一个相应涂层的构件由于按照本发明的明显降低的热导率而在具有相应较高的寿命的同时具有一个明显较小的磨损率。
在本发明构件的其他有利的实施形式中,可以在基质与热障层之间至少部分地构成一个特别包括MCrAlY和Pt/Al的粘附层。并且还可以在基质与粘附层之间至少部分地构成一个氧化铝中间层。本发明的构件特别是一个燃气涡轮发动机的组成部分。
附图说明
由以下对一个图示的实施例的描述得出本发明的其他的优点、特征和细节。其中:
图1一个具有按现有技术的热障层的构件的示意剖视图;以及
图2一个具有按照本发明的热障层的构件的示意剖视图。
具体实施方式
图1示出一个包括一个其上设置的热障层22的构件或一个金属基质18的示意剖视图。一个特别包括MCrAlY或Pt/Al的粘附层20构成在热障层22与构件表面16之间。可以看出,热障层22具有一种柱状或杆状的结构,其中各个柱或杆24基本上垂直于构件表面定向。在这种情况下,各不同的柱24的晶界26、28沿杆24的纵伸彼此接触。由此产生一种相当密的柱状结构,它促进在陶瓷热障层22内的热流。
图2示出一种陶瓷热障层10的示意剖视图,它被涂覆到或沉积到构件18的一个构件表面16上。可以看出,热障层10再次由一些柱或杆12构成,它们基本上垂直于构件表面16定向。不同于图1中所示的已知的柱结构,图2中所示的柱或杆12沿其纵伸具有交替地具有逐渐缩小和逐渐增大的直径d、D。可以看出,各个杆的晶界30至少部分地彼此接触,但在各个柱或杆12之间构成许多成形空腔14。通过在各个杆或各个柱中的小的直径d,大大地阻止了在热障层10内的热流。并且通过各小孔14明显减小了热障层10的密度,从而借此也明显减小在热障层10内的热流。

Claims (24)

1.用于在一个构件上制造陶瓷热障层的方法,所述构件用于压缩机部件和涡轮机部件,所述方法包括一种气相沉积法,具有下列方法步骤:
a)准备一种用于沉积在构件上的陶瓷蒸气;
b)将陶瓷蒸气沉积在构件上,以便构成一个柱状或杆状构造的热障层(10),其中各柱或杆(12)基本上垂直于一个构件表面(10)定向;和
c)在方法步骤b)期间这样地改变至少一个方法参数,使得得到的热障层(10)包括一些柱或杆(12),它们具有交替地逐渐减小的和逐渐增大的直径(d、D)。
2.按照权利要求1所述的方法,其特征在于,气相沉积法是一种物理气相沉积法(PVD)。
3.按照权利要求2所述的方法,其特征在于,物理气相沉积法(PVD)是一种电子束气相沉积法(EB-PVD)、一种阴极溅射法或一种电弧蒸发法。
4.按照上述权利要求之一所述的方法,其特征在于,在一个涂层室,特别是一个真空室中实施该方法。
5.按照上述权利要求之一所述的方法,其特征在于,在方法步骤b)期间输入氧气和惰性气体,并且在方法步骤c)期间至少一个方法参数的改变包括在涂层期间或在涂层室中改变氧气和/或惰性气体的分压力。
6.按照上述权利要求之一所述的方法,其特征在于,在方法步骤b)期间移动待涂层的构件,并且在方法步骤c)期间至少一个方法参数的改变包括在涂层期间改变构件运动的方式和/或构件速度。
7.按照权利要求6所述的方法,其特征在于,转动构件,并且在方法步骤c)期间至少一个方法参数的改变包括在涂层期间改变转速。
8.按照上述权利要求之一所述的方法,其特征在于,在方法步骤c)期间至少一个方法参数的改变包括在涂层期间改变陶瓷蒸气到构件上的沉积率。
9.按照上述权利要求之一所述的方法,其特征在于,在方法步骤c)期间至少一个方法参数的改变包括在涂层期间或在涂层室中改变压力。
10.按照上述权利要求之一所述的方法,其特征在于,陶瓷蒸气或陶瓷材料包括氧化锆、氧化钇或一种由其组成的混合物。
11.按照上述权利要求之一所述的方法,其特征在于,以一个在1μm与500μm之间的厚度沉积热障层。
12.按照上述权利要求之一所述的方法,其特征在于,在待涂层的构件表面(16)与热障层(10)之间至少部分地构成一个粘附层(20)。
13.按照权利要求12所述的方法,其特征在于,粘附层具有MCrAlY和/或Pt/Al,或由其构成,和/或是Al强化的或渗铝的。
14.按照权利要求12或13所述的方法,其特征在于,在待涂层的构件表面(16)与粘附层(20)之间至少部分地构成一个氧化铝中间层。
15.用于构件的热障层,所述构件用于压缩机部件和涡轮机部件,其中热障层由一个柱状或杆状构造的陶瓷热障层(10)构成,并且各柱或杆(12)基本上垂直于一个构件表面(16)定向;其特征在于,柱或杆(12)具有交替地逐渐缩小的和逐渐增大的直径(d、D)。
16.按照权利要求15所述的热障层,其特征在于,各个柱或杆(12)的晶界至少部分地彼此接触。
17.按照权利要求15或16所述的热障层,其特征在于,在各个柱或杆(12)之间构成一些小孔腔(14)。
18.按照权利要求15至17之一所述的热障层,其特征在于,热障层(10)的陶瓷材料包括氧化锆、氧化钇或一种由其组成的混合物。
19.按照权利要求15至18之一所述的热障层,其特征在于,热障层(10)具有一个在1μm与500μm之间的厚度。
20.构件,用于压缩机部件和涡轮机部件,所述构件包括一个金属基质(18)和一个至少部分地涂敷到金属基质(18)上的按照权利要求15至19之一所述的热障层(10)。
21.按照权利要求20所述的构件,其特征在于,在基质(18)与热障层(10)之间至少部分地构成一个粘附层(20)。
22.按照权利要求21所述的构件,其特征在于,粘附层(20)包括MCrAlY和/或是Al强化的或渗铝的。
23.按照权利要求21或22所述的构件,其特征在于,在基质(18)与粘附层(20)之间至少部分地构成一个氧化铝中间层。
24.按照权利要求19至23之一所述的构件,其特征在于,所述构件是一个燃气涡轮发动机的组成部分。
CN200780008381.6A 2006-03-09 2007-03-02 用于制造热障层的方法和用于构件的热障层 Pending CN101400820A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006010860.4 2006-03-09
DE102006010860A DE102006010860A1 (de) 2006-03-09 2006-03-09 Verfahren zur Herstellung einer Wärmedämmschicht und Wärmedämmschicht für ein Bauteil

Publications (1)

Publication Number Publication Date
CN101400820A true CN101400820A (zh) 2009-04-01

Family

ID=38038055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200780008381.6A Pending CN101400820A (zh) 2006-03-09 2007-03-02 用于制造热障层的方法和用于构件的热障层

Country Status (7)

Country Link
US (1) US20090075024A1 (zh)
EP (1) EP2002029A1 (zh)
JP (1) JP2009529606A (zh)
CN (1) CN101400820A (zh)
CA (1) CA2643823A1 (zh)
DE (1) DE102006010860A1 (zh)
WO (1) WO2007118439A1 (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102971446A (zh) * 2010-07-06 2013-03-13 斯奈克玛 用于涡轮叶片的、具有带间隔开的柱体的柱状结构的热障
CN107937874A (zh) * 2017-10-17 2018-04-20 广西大学 一种在铌合金表面制备Pt‑Al高温防护涂层的方法
CN108130515A (zh) * 2017-12-08 2018-06-08 中国航发动力股份有限公司 一种长寿命热障涂层的制备方法
CN108713007A (zh) * 2016-03-14 2018-10-26 西门子股份公司 具有外陶瓷层的cmc

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007043791A1 (de) * 2007-09-13 2009-04-02 Mtu Aero Engines Gmbh Verfahren zur Herstellung einer Wärmedämmschicht und Wärmedämmschicht
US20100304037A1 (en) * 2009-06-01 2010-12-02 United Technologies Corporation Thermal Barrier Coatings and Application Methods
CN103552311B (zh) * 2013-10-23 2015-08-05 沈阳黎明航空发动机(集团)有限责任公司 一种用于单晶高温合金的防护涂层及其制备方法
DE102015206332A1 (de) * 2015-04-09 2016-10-13 Siemens Aktiengesellschaft Verfahren zur Herstellung einer Korrosionsschutzschicht für Wärmedämmschichten aus hohlen Aluminiumoxidkugeln und äußerster Glasschicht und Bauteil
DE102016206968A1 (de) * 2016-04-25 2017-10-26 Siemens Aktiengesellschaft Hitzeschild mit äußerster Yttriumoxidbeschichtung, Verfahren zur Herstellung und Produkt
FR3055351B1 (fr) * 2016-08-25 2019-11-08 Safran Procede de realisation d'un systeme barriere thermique sur un substrat metallique d'une piece de turbomachine
CN111996492A (zh) * 2020-08-28 2020-11-27 昆明理工大学 一种氧化锆掺杂铌酸钆非晶高温陶瓷涂层的制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4321311A (en) * 1980-01-07 1982-03-23 United Technologies Corporation Columnar grain ceramic thermal barrier coatings
US4405659A (en) * 1980-01-07 1983-09-20 United Technologies Corporation Method for producing columnar grain ceramic thermal barrier coatings
US4401697A (en) * 1980-01-07 1983-08-30 United Technologies Corporation Method for producing columnar grain ceramic thermal barrier coatings
US5514482A (en) * 1984-04-25 1996-05-07 Alliedsignal Inc. Thermal barrier coating system for superalloy components
US5350599A (en) * 1992-10-27 1994-09-27 General Electric Company Erosion-resistant thermal barrier coating
US6365236B1 (en) * 1999-12-20 2002-04-02 United Technologies Corporation Method for producing ceramic coatings containing layered porosity
US6492038B1 (en) * 2000-11-27 2002-12-10 General Electric Company Thermally-stabilized thermal barrier coating and process therefor
US7413798B2 (en) * 2003-04-04 2008-08-19 Siemens Power Generation, Inc. Thermal barrier coating having nano scale features

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102971446A (zh) * 2010-07-06 2013-03-13 斯奈克玛 用于涡轮叶片的、具有带间隔开的柱体的柱状结构的热障
CN102971446B (zh) * 2010-07-06 2015-11-25 斯奈克玛 用于涡轮叶片的、具有带间隔开的柱体的柱状结构的热障
CN108713007A (zh) * 2016-03-14 2018-10-26 西门子股份公司 具有外陶瓷层的cmc
CN107937874A (zh) * 2017-10-17 2018-04-20 广西大学 一种在铌合金表面制备Pt‑Al高温防护涂层的方法
CN108130515A (zh) * 2017-12-08 2018-06-08 中国航发动力股份有限公司 一种长寿命热障涂层的制备方法

Also Published As

Publication number Publication date
JP2009529606A (ja) 2009-08-20
CA2643823A1 (en) 2007-10-25
DE102006010860A1 (de) 2007-09-13
WO2007118439A1 (de) 2007-10-25
US20090075024A1 (en) 2009-03-19
EP2002029A1 (de) 2008-12-17

Similar Documents

Publication Publication Date Title
CN101400820A (zh) 用于制造热障层的方法和用于构件的热障层
US5846605A (en) Coated Article
US6740393B1 (en) DLC coating system and process and apparatus for making coating system
US6054184A (en) Method for forming a multilayer thermal barrier coating
Parameswaran et al. Titanium nitride coating for aero engine compressor gas path components
US9133543B2 (en) Coating material for aluminum die casting mold and method for manufacturing the same
TWI576449B (zh) 沈積層系統於基材上的塗佈方法及具有層系統的基材
CN103805996A (zh) 一种金属材料表面先镀膜再渗氮的复合处理方法
CN1986891A (zh) 高强度镍-铂-铝-铪粘结层
EP2258889B1 (en) Method and apparatus for applying a thermal barrier coating
CN103160797A (zh) 纳米陶瓷涂层、沉积有该涂层的压铸模具及其制备方法
TWI547366B (zh) 具有硬質膜層的不銹鋼製品及其製備方法
JP2005281865A (ja) 物品を保護する方法及び関連する組成
EP0972853A1 (en) Article having a thermal barrier coating based on a phase-stable solid solution of two ceramics and apparatus and method for making the article
US20150014179A1 (en) Cmas-inert thermal barrier layer and method for producing the same
CN107873064B (zh) 通过使用基于氮化钼的涂层的磨损和/或摩擦减少
US20090075023A1 (en) Method for producing thermal barrier coating and a thermal barrier coating
Wellman et al. The effect of TBC morphology and aging on the erosion rate of EB-PVD TBCs
CN108165929A (zh) 一种自愈合涂层及其制备方法与应用
RU2541261C2 (ru) Способ формирования нанокомпозитного покрытия на поверхности изделия
CN109312445A (zh) 保护不含铪的镍基单晶超合金部件免受腐蚀和氧化的方法
CN110158030A (zh) 涂布的基材
CN103184414A (zh) 硬质涂层及其形成方法
KR20140028581A (ko) 멀티레이어 코팅층 및 코팅방법
RU2677043C1 (ru) Способ получения износостойкого покрытия на основе интерметаллида системы Ti-Al

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20090401