CN101393427A - Cue system and method for cleaning wafer box - Google Patents
Cue system and method for cleaning wafer box Download PDFInfo
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- CN101393427A CN101393427A CNA200710046058XA CN200710046058A CN101393427A CN 101393427 A CN101393427 A CN 101393427A CN A200710046058X A CNA200710046058X A CN A200710046058XA CN 200710046058 A CN200710046058 A CN 200710046058A CN 101393427 A CN101393427 A CN 101393427A
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- wafer cassette
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- clean prompting
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Abstract
The invention provides a system for prompting to clean a wafer box and a method for cleaning the wafer box. The prompt system is arranged in production and manufacturing software to prompt operators to clean wafer boxes which enter cleaning prompt time range and is provided with an identification module, the identification module reads in corresponding lot-number and the time needing be cleaned through an information read/write device, the production and manufacturing software stores the lot-number and the time needing be cleaned of the wafer box as well as the position information on the production line and the corresponding lot-number respectively. Manual control cleaning of the wafer box in the prior art has the problem of heavy workload, low efficiency and easily extended using of the wafer box. The prompt system stores the corresponding cleaning prompt start value within the cleaning prompt time range first, counts the wafer boxes entering the cleaning prompt time range according to the present time, the cleaning prompt start value and the time needing be cleaned, and then retrieves and outputs the counted lot-number, the time needing be cleaned and the position information of the wafer box. The system can save labor power greatly and avoid the extended using of the wafer box.
Description
Technical field
The present invention relates to the cleaning of wafer cassette, relate in particular to a kind of wafer cassette clean prompting system and method.
Background technology
In field of semiconductor manufacture, the wafer cassette (POD) that carries wafer is using the regular period (can determine according to the production line actual state, be generally 2 to 3 months this period) back just need clean, and this regular period is the cleaning frequency.When cleaning, need wafer cassette is taken apart, soon the identification module (being generally intelligent label or label made of paper) of wafer cassette, the members such as door, fixator and pin of wafer cassette are taken apart, can be placed on then in the parts placement of cleaning in the deionized water and clean in deionized water and by ultrasound wave, the parts that can not get wet with an organic solvent carry out wiping.After finishing cleaning with each component-assembled, and wafer cassette defective chosen keep in repair, the line that then flawless wafer cassette put into production uses, when identification module is intelligent label, need in the identification module of wafer cassette, to write corresponding batch numbering (each wafer cassette has unique batch numbering) and need scavenging period (time adds the cleaning frequency when equaling to write) by card read/write apparatus (intelligent label read write line), when identification module is paper labels, needs on this paper labels, to indicate batch label and need scavenging period.
When the wafer cassette that the need on the production line are cleaned is cleaned, need to go on the production line need scavenging period (being indicated on intelligent label or the paper labels) by checking each wafer cassette to find out the wafer cassette that those need clean by manual type, because the wafer cassette quantity on the production line is very many, and be distributed on each operation, thereby cause operator's workload excessive, adopt manual type to search those wafer cassette that need clean simultaneously and easily produce artificial careless omission, thereby wafer cassette occurring cross to have needed scavenging period but also in the phenomenon of exceeding the time limit to use, so will exist the contaminated hidden danger of production line.
Therefore, how to provide a kind of wafer cassette clean prompting system and method, become the technical matters that industry needs to be resolved hurrily to save manpower and to avoid the expired use of wafer cassette.
Summary of the invention
The object of the present invention is to provide a kind of wafer cassette clean prompting system and method, can save manpower greatly and avoid the expired use of wafer cassette by described prompt system and method.
The object of the present invention is achieved like this: a kind of wafer cassette clean prompting system, lift-launch produces in all one's life and makes in the software, being used for prompting operation person cleans the wafer cassette that enters the clean prompting time range on the production line, this wafer cassette has an identification module, this identification module writes corresponding batch numbering and needs scavenging period by a card read/write apparatus when wafer cassette enters production line, this manufacturing software writes card read/write apparatus batch numbering of identification module and needs scavenging period to be stored to an identifying information database, and with wafer cassette on production line positional information and corresponding batch numbering real-time update be stored to a location database, this prompt system comprises: a prompting startup value memory module is used to store the pairing clean prompting startup of this clean prompting time range value; One statistics module is used for according to the current time, points out the need scavenging period of being stored in startup value clean prompting startup value that memory module is stored and the identifying information database to count the wafer cassette that enters the clean prompting time range; One acquisition module is used for numbering, need scavenging period and positional information from identifying information database and criticizing of the location database acquisition wafer cassette correspondence that statistical module counted; And an output module, be used to export the data that acquisition module captures and clean in view of the above with prompting operation person.
In above-mentioned wafer cassette clean prompting system, when the need scavenging period of wafer cassette and the difference of current time were not more than this clean prompting startup value, this wafer cassette entered this clean prompting time range.
In above-mentioned wafer cassette clean prompting system, this manufacturing software is manufacturing execution system software.
In above-mentioned wafer cassette clean prompting system, this identification module is an intelligent label.
In above-mentioned wafer cassette clean prompting system, this card read/write apparatus is the intelligent label read write line.
The present invention also provides a kind of and carries out the method for wafer cassette clean prompting by above-mentioned wafer cassette clean prompting system, and this method may further comprise the steps: the pairing clean prompting startup of (1) store washing prompt time scope value; (2) count the wafer cassette that enters the clean prompting time range according to the need scavenging period of being stored in current time, the clean prompting startup value of being stored and the identifying information database; (3) from identifying information database and location database, capture the criticizing of wafer cassette correspondence that is counted and number, need scavenging period and positional information; (4) the data output that is captured is cleaned in view of the above with prompting operation person.
In above-mentioned wafer cassette clean prompting method, in step (2), the difference of need scavenging period and current time is not more than the wafer cassette statistics of this clean prompting startup value for entering the wafer cassette of clean prompting time range.
With the cleaning by manual type management and control wafer cassette in the prior art exist workload greatly with easily cause the expired use of wafer cassette to be compared, wafer cassette clean prompting system of the present invention and method store the clean prompting startup value of corresponding clean prompting time range, and according to clean prompting startup value, current time and need scavenging period count the wafer cassette that enters the clean prompting time range, and then capture this wafer cassette correspondence batch the numbering, need scavenging period and positional information, at last the information output that is captured is cleaned in view of the above with prompting operation person, so human cost can be saved in a large number, the phenomenon of having avoided the wafer cassette that artificial careless omission caused to exceed the time limit to use.
Description of drawings
Wafer cassette clean prompting system of the present invention and method are provided by following embodiment and accompanying drawing.
Fig. 1 is the block scheme of wafer cassette clean prompting of the present invention system;
Fig. 2 is the process flow diagram of wafer cassette clean prompting method of the present invention.
Embodiment
Below will be described in further detail wafer cassette clean prompting system of the present invention and method.
Referring to Fig. 1, wafer cassette clean prompting of the present invention system 1 carries to produce in all one's life and makes in the software (not shown), being used for prompting operation person cleans the wafer cassette that enters the clean prompting time range on the production line, described wafer cassette has an identification module (not shown), described identification module writes corresponding batch numbering and needs scavenging period by a card read/write apparatus (not shown) when wafer cassette enters production line, described manufacturing software writes card read/write apparatus batch numbering of identification module and needs scavenging period to be stored to identifying information database 20, and with wafer cassette on production line positional information and corresponding batch numbering real-time update be stored to location database 21, described wafer cassette clean prompting system 1 comprises prompting startup value memory module 10, statistical module 11, acquisition module 12 and output module 13.Below the above-mentioned member of wafer cassette clean prompting of the present invention system 1 is elaborated.
Prompting startup value memory module 10 is used to store the pairing clean prompting startup of described clean prompting time range value.In the present embodiment, when the need scavenging period of wafer cassette and the difference of current time were not more than described clean prompting startup value, described wafer cassette entered described clean prompting time range, and described clean prompting startup value is 7 days or 14 days.
In the present embodiment, described identification module is an intelligent label, and described card read/write apparatus is the intelligent label read write line, and described manufacturing software is manufacturing execution system (Manufacturing ExecutionSystem; Be called for short MES) software, the described current time is the standard time in described time zone, is on September 7th, 2007 at this.
For further highlighting principle of the present invention and effect, the existing cleaning on June 18th, 2007, on June 20th, 2007 and on June 25th, 2007 respectively with three wafer cassette P1, P2 and P3 finishes and the line that puts into production is that example describes.At first card read/write apparatus writes batch numbering (for example being respectively 00101,00162 and 00218) of wafer cassette P1, P2 and P3 correspondence in identification module, and writes the need scavenging period (for example it is respectively on September 18th, 2007, on September 20th, 2007 and on September 25th, 2007) of wafer cassette P1, P2 and P3 in identification module according to the cleaning frequency (for example being 3 months) of line time and wafer cassette of putting into production; After this manufacturing software writes card read/write apparatus batch numbering of identification module and needs scavenging period to be stored to identifying information database 20, and with wafer cassette on production line positional information and corresponding batch numbering real-time update be stored to location database 21, for example when the current time (on September 7th, 1), wafer cassette P1, P2 and P3 just store the information that wafer cassette P1, P2 and P3 are positioned at etching, oxidation or ion injecting process respectively at etching, oxidation or ion injecting process in this location database 21; Then point out the pairing clean prompting startup of startup value memory module 10 store washing prompt time scopes value (for example being 14 days), statistical module 11 is according to current time (being on September 7th, 2007), the need scavenging period of being stored in clean prompting startup value (promptly 14 days) of being stored in the prompting startup value memory module 10 and the identifying information database (promptly is respectively on September 18th, 2007, on September 20th, 2007 and on September 25th, 2007), count wafer cassette P1 and P2 and enter the clean prompting time range, this moment acquisition module 12 can be from identifying information database 20 and location database 21 batch numbering (being 00101 and 00162) of wafer cassette P1 and P2 correspondence, need scavenging period (on September 18th, 2007, on September 20th, 2007) and positional information (being etching and oxidation operation), by output module 13 those information are exported to such as showing on LCDs or the light emitting diode (LED) display screen with prompting operation person at last and arrange as early as possible to clean.
Referring to Fig. 2, wafer cassette clean prompting method of the present invention at first carries out step S20, the pairing clean prompting startup of store washing prompt time scope value.
Then continue step S21, count the wafer cassette that enters the clean prompting time range according to the need scavenging period of being stored in current time, the clean prompting startup value of being stored and the identifying information database, wherein, the wafer cassette statistics that the need scavenging period and the difference of current time of wafer cassette is not more than described clean prompting startup value is for entering the wafer cassette of clean prompting time range.
Then continue step S22, from identifying information database and location database, capture the criticizing of wafer cassette correspondence that is counted and number, need scavenging period and positional information.
Then continue step S23, the data output that is captured is cleaned in view of the above with prompting operation person.In the present embodiment, export the data that captured to liquid crystal display or lbd display unit shows.
In sum, wafer cassette clean prompting system of the present invention and method are provided with the clean prompting startup value of corresponding clean prompting time range, and according to clean prompting startup value, current time with need scavenging period count the wafer cassette that enters the clean prompting time range, and then capture described wafer cassette correspondence batch numbering, need scavenging period and positional information, at last the information output that is captured is cleaned in view of the above with prompting operation person, so human cost can be saved in a large number, the phenomenon of having avoided the wafer cassette that artificial careless omission caused to exceed the time limit to use.
Claims (7)
1, a kind of wafer cassette clean prompting system, lift-launch produces in all one's life and makes in the software, being used for prompting operation person cleans the wafer cassette that enters the clean prompting time range on the production line, this wafer cassette has an identification module, this identification module writes corresponding batch numbering and needs scavenging period by a card read/write apparatus when wafer cassette enters production line, this manufacturing software writes card read/write apparatus batch numbering of identification module and needs scavenging period to be stored to an identifying information database, and with wafer cassette on production line positional information and corresponding batch numbering real-time update be stored to a location database, it is characterized in that, this prompt system comprises: a prompting startup value memory module is used to store the pairing clean prompting startup of this clean prompting time range value; One statistics module is used for according to the current time, points out the need scavenging period of being stored in startup value clean prompting startup value that memory module is stored and the identifying information database to count the wafer cassette that enters the clean prompting time range; One acquisition module is used for numbering, need scavenging period and positional information from identifying information database and criticizing of the location database acquisition wafer cassette correspondence that statistical module counted; And an output module, be used to export the data that acquisition module captures and clean in view of the above with prompting operation person.
2, wafer cassette clean prompting as claimed in claim 1 system is characterized in that, when the need scavenging period of wafer cassette and the difference of current time were not more than this clean prompting startup value, this wafer cassette entered this clean prompting time range.
3, wafer cassette clean prompting as claimed in claim 1 system is characterized in that this manufacturing software is manufacturing execution system software.
4, wafer cassette clean prompting as claimed in claim 1 system is characterized in that this identification module is an intelligent label.
5, as claim 1 or 4 described wafer cassette clean prompting systems, it is characterized in that this card read/write apparatus is the intelligent label read write line.
6, a kind of method of carrying out the wafer cassette clean prompting by wafer cassette clean prompting as claimed in claim 1 system is characterized in that this method may further comprise the steps: the pairing clean prompting startup of (1) store washing prompt time scope value; (2) count the wafer cassette that enters the clean prompting time range according to the need scavenging period of being stored in current time, the clean prompting startup value of being stored and the identifying information database; (3) from identifying information database and location database, capture the criticizing of wafer cassette correspondence that is counted and number, need scavenging period and positional information; (4) the data output that is captured is cleaned in view of the above with prompting operation person.
7, wafer cassette clean prompting method as claimed in claim 6 is characterized in that, in step (2), the difference of need scavenging period and current time is not more than the wafer cassette statistics of this clean prompting startup value for entering the wafer cassette of clean prompting time range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710046058XA CN101393427B (en) | 2007-09-17 | 2007-09-17 | Cue system and method for cleaning wafer box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710046058XA CN101393427B (en) | 2007-09-17 | 2007-09-17 | Cue system and method for cleaning wafer box |
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| Publication Number | Publication Date |
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| CN101393427A true CN101393427A (en) | 2009-03-25 |
| CN101393427B CN101393427B (en) | 2011-06-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200710046058XA Expired - Fee Related CN101393427B (en) | 2007-09-17 | 2007-09-17 | Cue system and method for cleaning wafer box |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103854963A (en) * | 2012-11-30 | 2014-06-11 | 无锡华润上华科技有限公司 | Wafer cleaning equipment-based product tracking method and system |
| CN105448786A (en) * | 2014-06-13 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Wafer box assembly and system, and method for monitoring wafer manufacturing process |
| CN114548708A (en) * | 2022-01-30 | 2022-05-27 | 弥费实业(上海)有限公司 | Empty wafer box management method and device, computer equipment and storage medium |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389781A (en) * | 2018-03-05 | 2018-08-10 | 广东先导先进材料股份有限公司 | The method of clean and reuse wafer cassette or casey |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100271764B1 (en) * | 1997-12-24 | 2000-12-01 | 윤종용 | Developer for semiconductor device fabrication and its controling method |
| CN1218369C (en) * | 2002-05-13 | 2005-09-07 | 台湾积体电路制造股份有限公司 | Method for reducing defect of chemical and mechanical grinding to produce coppor and grinding slurry residual |
-
2007
- 2007-09-17 CN CN200710046058XA patent/CN101393427B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103854963A (en) * | 2012-11-30 | 2014-06-11 | 无锡华润上华科技有限公司 | Wafer cleaning equipment-based product tracking method and system |
| CN105448786A (en) * | 2014-06-13 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Wafer box assembly and system, and method for monitoring wafer manufacturing process |
| CN105448786B (en) * | 2014-06-13 | 2018-07-10 | 中芯国际集成电路制造(上海)有限公司 | A kind of wafer case assembly, system and the method for monitoring silicon wafer process |
| CN114548708A (en) * | 2022-01-30 | 2022-05-27 | 弥费实业(上海)有限公司 | Empty wafer box management method and device, computer equipment and storage medium |
| CN114548708B (en) * | 2022-01-30 | 2022-08-26 | 弥费实业(上海)有限公司 | Empty wafer box management method and device, computer equipment and storage medium |
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| CN101393427B (en) | 2011-06-01 |
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