CN101391460B - Device and method for cutting breakable substrate material - Google Patents
Device and method for cutting breakable substrate material Download PDFInfo
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- CN101391460B CN101391460B CN2008101683895A CN200810168389A CN101391460B CN 101391460 B CN101391460 B CN 101391460B CN 2008101683895 A CN2008101683895 A CN 2008101683895A CN 200810168389 A CN200810168389 A CN 200810168389A CN 101391460 B CN101391460 B CN 101391460B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The invention provides a device for disconnecting fragile base material and a method thereof. The device comprises a steam generating unit, a steam heating unit for reheating steam led out from the steam generating unit, and a heated steam jetting unit for jetting the heated steam discharged form the steam heating unit to the scribing line of the fragile base material, wherein fragile base material is disconnected by forming scribing line gap formed by expanding heated steam to the fragile base material. Since the steam heating unit reheats the steam generated by the steam generating unit and then the steam is jetted to the scribing line of the fragile base material, the reheated steam jetted to the scribing line has high and even temperature, thereby easily expanding the gap and obtaining improved disconnection effect.
Description
Technical field
The present invention relates to a kind of equipment and method that is used for cutting breakable substrate material, more particularly, relate to a kind of through the score line on the fragile base material being sprayed vapours is come cutting breakable substrate material with the expansion breach Apparatus for () and method therefor.
Background technology
Generally, form by unit base material as the base material of the base material of the LCD of flat-panel monitor, organic electroluminescence panel, transmission type projector and opaque projector from the preliminary dimension of cutting such as frangible mother metals such as glass (hereinafter being called " fragile base material ").
The cutting fragile base material comprises through push and move the score line that forms score line by the marking knife that forms such as materials such as diamonds along the line of cut on the fragile base material and forms operation, and through pushing fragile base material to apply moment of flexure or to cut off the disconnection operation of fragile base material through the breach (preferably hereinafter to be referred as " directly breach ") of expanding score line.In process of production, be used for the equipment that score line forms operation and be commonly referred to scoring equipment or scriber, and the equipment that is used to break off operation is called off device.Scoring equipment and off device can be bonded to each other and be one or moulding separately.
Simultaneously; The open communique No.2005-0095912 (hereinafter to be referred as " prior art ") of Korean Patent discloses a kind of base material splitting equipment (hereinafter to be referred as " scribing equipment "); It comprises that through to the score line uperize and expand the disconnecting apparatus of score line breach along the thickness direction of fragile base material, this score line forms device by score line and on fragile base material, forms.
As shown in Figure 1, according to the scribing equipment of prior art comprise the workbench 31 of placing fragile base material 1, at the guide rail 32 and 33 of the parallel layout in workbench 31 both sides, slidably be arranged in slide block 34 and 35 on guide rail 32 and 33 respectively, linear motor 37 and 38, levels that slide block 34 and 35 is slided along guide rail 32 and 33 remain on guide rod 36 between slide block 34 and 35 upper ends, slidably attach to the scribe head 20 of guide rod 36.
Further, control module comprise drive linear motor 37 and 38 first driver 41 with second driver 42, drive the motor 45 that is used to handle scribe head the 3rd driver 47, control the controller 44 of first to the 3rd driver 41,42 and 47 and be arranged in guide rail 32 neighbouring and detect the sensor 43 of slide block 34 positions.
The parts of above-mentioned NM Reference numeral 46 expressions are the ball-screws that rotated by the motor 45 that is used to handle scribe head, and guide rail 36 moves back and forth scribe head 20 in the rotation lower edge of ball-screw 46.
On the other hand, as shown in Figure 2, scribe head 20 comprise be equipped with press device (not shown) 22, be arranged in 22 below and be equipped with the cutter holder 27 and the disconnecting apparatus of marking knife 21.
Disconnecting apparatus is set to come cutting breakable substrate material 1 through the score line breach on the expansion fragile base material 1; What use in the prior art is steam generating unit 52; This steam generating unit 52 through the score line on the fragile base material 1 being sprayed uniform temperature steam so that fragile base material 1 expand, thereby along fragile base material 1 thickness direction expansion score line breach.
Steam generating unit 52 comprises and attaches to a main body 52a of 22, flexible hose 52b that steam therefrom passes through, attaches to the nozzle head 52c of cutter holder 27 and to the spray nozzle part 52d of fragile base material 1 uperize integratedly; Wherein the end of flexible pipe 52b is connected to main body 52a, and the other end is connected to nozzle head 52c.
Further, spray nozzle part 52d has the steam nozzle of the circle of being configured as, ellipse, rectangle or seam shape, and the score line uperize that marking knife 21 is formed is to heat.
Down in the face of use according to the crossed process of the above-mentioned scoring equipment of prior art with break off in addition simple declaration of operation.
At first, be placed into fragile base material 1 on the workbench 31 after, in move the crossed process that marking knife 21 forms score line along the line of cut on the fragile base material 1, the 3rd driver 47 drives the motor 45 of handling scribe head under the control of controller 44.Because handling the motor 45 of scribe head is activated; So scribe head 20 moves near the outermost end of line of cut on the fragile base material 1 (hereinafter referred to as " score line ") or moves to outside the end along guide rod 36, then along line of cut from fragile base material 1 line starting point move marking knife 21 and with marking knife 21 roof pressures on fragile base material 1 to form score line.
Breaking off operation carries out later in that fragile base material 1 has been applied said crossed process; Wherein when score line uperize that steam generating unit 52 steam nozzle through spray nozzle part 52d forms crossed process; Since the steam that sprayed penetrate score line breach---this breach is the opening of microunit; Capillarity during through expansion, breach is to the dorsal part expansion of fragile base material 1.Thereby according to prior art, can need not mechanically to apply moment of flexure along score line just can cutting breakable substrate material 1.
On the other hand, though above-mentioned prior art is not open, the main body 52a of steam generating unit 52 has usually: inside has the chamber of predetermined space, is furnished with nozzle to utilize compressed air with the water ejection chamber at the sidepiece of chamber; And heater, thereby it is arranged in chamber and nozzle through adding hot water the water droplet of nozzle ejection is vaporized.
Thereby the water that flows into chamber through compressed air scatters when passing nozzle and is small water droplet, and water droplet is vaporized in the chamber by the heater heating, and the steam nozzle through spray nozzle part sprays to score line then.
Yet; According to prior art; Although heater is arranged in around nozzle and the chamber, because the water of normal temperature and compressed air pass nozzle then apace constantly from outside supply nozzle; The temperature of water droplet is also not high enough, thereby makes part not have the water droplet and the steam of vaporization to be present in the chamber together.Therefore, it is not high enough and inhomogeneous that the steam nozzle through spray nozzle part sprays to the temperature of steam of score line, thereby make the breach of score line evenly to expand.
Further, do not have the water droplet of vaporization to accumulate on the chamber base plate in the chamber and boil, thereby produce huge noise by the chamber base plate of heater heating.And, because the water droplet ejection of the steam nozzle through spray nozzle part together with steam sometimes, so that stain appears in the surface of fragile base material.
Summary of the invention
In order to overcome aforesaid prior art problem; An object of the present invention is to provide a kind of equipment that is used for cutting breakable substrate material; This equipment comes evenly expansion breach through the heated vapor of the score line on the fragile base material being sprayed constantly uniform temperature, and a kind of method of cutting breakable substrate material is provided.
Further; Another object of the present invention provides a kind of equipment that is used for cutting breakable substrate material; Thereby this equipment can not produce noise because of boiling through preventing that when vaporizing water droplet is residual; And make and can not have drop in the steam through steam is heated again, and then steam is sprayed to the trace line, thereby avoid producing stain on the fragile base material surface.
In order to achieve the above object, the equipment that is used for cutting breakable substrate material according to the present invention comprises: steam generation device; Be used for the steam of drawing from said steam generation device is heated, makes that the temperature of steam of the score line spray to said fragile base material is high and evenly and not contains the steam heater of drop; With the heated vapor injection apparatus that is used for the heated vapor of discharging from said steam heater is sprayed to the score line of said fragile base material.Wherein, break off said fragile base material through the score line breach that utilizes said heated vapor to expand to form on the said fragile base material.
In the said equipment, steam generation device and steam heater can communicate with each other through tube connector.
Further, steam generation device can comprise: first chamber attaches to first chamber and utilizes compressed air to inject liquid into the nozzle assembly in first chamber; With the drop that is ejected into by nozzle assembly in first chamber is heated so that the primary heater of its vaporization.
Further, nozzle assembly can also be provided with control and be ejected into drop size or the control valve of speed in first chamber, and primary heater is facing to the nozzle assembly in first chamber simultaneously.
Further, at the equipment that is used for cutting breakable substrate material according to the present invention, steam heater can comprise second chamber of the steam that reception is drawn from steam generation device and the secondary heater that the steam that receives second chamber is heated.
In the said equipment; First chamber is facing to the sidepiece of the nozzle bore of nozzle assembly partial at least; The sidepiece sealing that this open side can be heated by secondary heater on second chamber; And the sidepiece of this second chamber transfers heat in first chamber, and the sidepiece of second chamber can play the effect of primary heater thus.
Further, second chamber has the attemperator that prevents that internal temperature from descending, and this attemperator can be the porous ceramics that attaches to all inwalls except that the part of the open side of sealing first chamber.
And second chamber can attach to scribe head, and the adiabatic block with insulation effect can insert between second chamber and the scribe head.
Further; At the equipment that is used for cutting breakable substrate material according to the present invention; The block that can be used to spray heated vapor through the disposed outside at the sidepiece of the tap that has the heated vapor that is used for discharging second chamber forms the heated vapor injection apparatus, and can be formed with that an end is connected with tap at that sidepiece facing to second chamber side of the block that is used to spray heated vapor and the other end leads to the otch of fragile base material.
Further; At the equipment that is used for cutting breakable substrate material according to the present invention; Can guide rod slidably be arranged along the guide rail that be arranged parallel to each other in the workbench both sides of placing fragile base material, and can movably be furnished with at least one or a plurality of steam generation device or steam heater and be furnished with the heated vapor injection apparatus along guide rod.
Further; At the equipment that is used for cutting breakable substrate material according to the present invention; Can nozzle unit slidably be arranged along the guide rail that is arranged parallel to each other in the workbench both sides of placing fragile base material, and the heated vapor injection apparatus can be communicated with nozzle unit.
In yet another aspect, the method according to cutting breakable substrate material of the present invention comprises: (i) utilize steam generation device to produce steam; (ii) the steam of introducing steam heater from said steam generation device is heated, make that the temperature of steam of the score line that sprays to said fragile base material is high and evenly and not contain drop; And (iii) utilize the heated vapor injection apparatus will spray to the score line of said fragile base material by the heated vapor of said steam heater heating.Wherein, break off said fragile base material through the score line breach that utilizes heated vapor to expand to form on the said fragile base material.
In the method for cutting breakable substrate material, can on fragile base material, mark in the line of cut, through carrying out (i) to (iii) coming cutting breakable substrate material, perhaps can be after marking line of cut on the fragile base material, through carrying out (i) to (iii) coming cutting breakable substrate material.
Simultaneously; In the method that is used for the equipment or the cutting breakable substrate material of cutting breakable substrate material according to the present invention; The steam that steam generation device produces can be wet saturated steam or dry saturated steam, and the heated vapor that is heated by steam heater can be dry saturated steam or superheated steam.
Description of drawings
Fig. 1 is traditional scoring equipment view;
Fig. 2 is the sketch map of traditional off device;
Fig. 3 is the stereogram that is used for the equipment of cutting breakable substrate material according to of the present invention;
Fig. 4 is the side view that is used for the equipment of cutting breakable substrate material shown in Fig. 3;
Fig. 5 is the upward view that is used for the equipment of cutting breakable substrate material shown in Fig. 3;
Fig. 6 is the cross sectional representation of part " A " among Fig. 4.
The specific embodiment
With reference to the accompanying drawings illustrative embodiments of the present invention is described in detail, simultaneously identical with prior art configuration is no longer described here.What supply reference is, in the accompanying drawings, Fig. 3 is the stereogram that is used for the equipment of cutting breakable substrate material according to of the present invention, and Figure 4 and 5 are respectively the side view and the upward views of equipment shown in Fig. 3, and Fig. 6 is with the cross sectional representation of the part of " A " expression among Fig. 4.
Thereby the equipment that is used for cutting breakable substrate material according to embodiment of the present invention is designed to come cutting breakable substrate material through the breach that heated vapor is sprayed to score line expansion score line.
Shown in Fig. 3 to 6, the equipment that is used for cutting breakable substrate material comprises steam generation device, the steam heater that the steam of drawing from steam generation device is heated again and the heated vapor injection apparatus that will spray to the score line on the fragile base material from the heated vapor that steam heater is discharged.
Steam generation device comprises first chamber 100, attach to first chamber 100 and utilize compressed air to inject liquid into nozzle assembly 300 in first chamber 100, make the primary heater that is ejected into the drop vaporization in first chamber 100 through nozzle assembly 300 facing to nozzle assembly 300 and through heating.
As shown in Figure 5; Nozzle assembly 300 comprises the liquid jet hole 310 and air jet hole 320 that is arranged opposite to each other; Wherein liquid jet hole 310 is connected to outside feed flow source through flexible pipe etc., and air jet hole 320 is connected to the external compression air generator through flexible pipe etc.
Thereby; The compressed air of introducing nozzle assembly 300 through air jet hole 320 makes the liquid that is stored in the outside feed flow source pass through liquid jet hole 310 flow nozzle parts 300, so liquid becomes small drop and is ejected in first chamber 100 when passing nozzle bore (not shown).Thereafter, drop is separated into more small drop and vaporizes through heat exchange simultaneously when the primary heater that collides consumingly facing to nozzle assembly 300.
The above-mentioned Reference numeral of not mentioning 330 expressions are arranged at the control valve of nozzle assembly 300, and control valve 330 is being controlled through nozzle bore and is being ejected into drop size or speed in first chamber 100.
Simultaneously, first chamber 100 is local or whole opening facing to the sidepiece (hereinafter being called " open side ") of nozzle assembly 300, and open side is preferably sealed by second chamber 200 of steam heater (hereinafter description).
In this configuration, preferably with that sidepieces of sealing first chamber 100 open side on second chamber 200 as primary heater.
Thereby; The drop that nozzle bore through nozzle assembly 300 sprays looses facing to the sidepiece time-division of being heated of liquid droplets and is more small drop colliding second chamber 200 consumingly, and vaporizes fast because of the internal temperature of first chamber 100 and with the be heated increase of heat exchange area of sidepiece of second chamber 200 simultaneously.Further, steam is meant the wet saturated steam that contains steam and liquid, or only contains the dry saturated steam of steam.
The secondary heater 400 of the steam second chamber 200 that simultaneously, is set to the steam heater that the steam that produces in first chamber 100 of steam generation device heats is again comprised the steam that reception is drawn from first chamber 100 and heating second chamber 200.
In this configuration, first chamber 100 and second chamber 200 communicate with each other through tube connector 700, thereby the steam that produces in the chamber 100 of winning can be input in second chamber 200.In order to realize this configuration, be formed with inlet in a side of tube connector 700 and be input in the tube connector 700 with the steam that produces in first chamber 100, be formed with outlet steam is entered second chamber 200 at opposite side simultaneously.In this embodiment of the present invention, the outer peripheral face that is arranged in the tube connector 700 of first chamber 100 connects the otch 710 that forms useful work inlet.
The steam of introducing second chamber 200 through tube connector 700 is heated into heated vapor again by secondary heater 400.This heated vapor is meant dry saturated steam (only containing steam) or through heating the superheated steam that dry saturated steam produces again.
On the other hand; The inside of second chamber 200 and surface are by secondary heater; For example be arranged in the heater 400 in second chamber 200; Maintain very high temperature, thereby, scribe head 500 or the scribe head 500 that attaches to second chamber 200 slidably attached guide rod receive the influence of the heat of second chamber 200 easily.
Thereby as shown in Figure 3, in this embodiment of the present invention, the adiabatic block that preferably will have insulation effect inserts between second chamber 200 and the scribe head 500 to hinder heat effects.
Further, preferably second chamber 200 has the internal temperature that prevents to be improved by heater 400 attemperator because of reducing with the external heat exchange.Attemperator can be through being attached to the inwall of second chamber 200 or being obtained by the locular wall itself that porous ceramics forms second chamber 200 such as heat-insulating materials such as porous ceramics.Yet, also can adopt other configuration or other material, as long as they can be incubated.Yet, because that sidepiece of sealing first chamber 100 open side plays primary heater on second chamber 200, so this sidepiece of second chamber 200 is not provided with attemperator.
Simultaneously, in second chamber, discharge through tap 210, and the heated vapor of discharging is sprayed to the score line of fragile base material through heated vapor injection apparatus (see figure 6) by the heated vapor of secondary heater heating.
The heated vapor injection apparatus can be through directly attached or be connected to steam heater and obtain via flexible pipe etc. with common nozzle assembly.Yet, as shown in Figure 6, in this embodiment according to the present invention, be formed with tap 210 facing to the sidepiece of tube connector 700 at second chamber 200, the heated vapor injection apparatus is arranged in the outside that second chamber 200 has that sidepiece of tap 210.
The heated vapor injection apparatus is arranged in the outside that second chamber 200 has that sidepiece of tap 210 through the block 800 that will be used to spray heated vapor and have an otch 810 and obtains, and wherein an end of otch 810 connects tap 210 and the other end leads to fragile base material.
Thereby; Heated vapor in second chamber 200 is discharged through tap 210, the heated vapor of passing tap 210 between this sidepiece of the otch 810 of the block 800 that is used to spray heated vapor and second chamber 200 through spraying to the score line on the fragile base material.
Down in the face of describing according to the operation of equipment that is used for cutting breakable substrate material of embodiment of the present invention.
At first, form score line, come cutting breakable substrate material thereby spray heated vapor expansion breach with the said equipment along the score line on the fragile base material then through move the marking knife that attaches to scribe head 500 along the line of cut on the fragile base material.
In this equipment, generate heated vapor through the steam that is produced with steam heater heating steam generation device after, heated vapor is sprayed to the score line on the fragile base material through the heated vapor injection apparatus.
More specifically, in steam generation device, the liquid that will be stored in outside feed flow source by pressure-air is introduced injector arrangement 300, when this liquid passes nozzle assembly 300, is dispersed into small drop and is ejected in first chamber 100.
The drop that is sprayed is vaporized because of the internal temperature and the primary heater of first chamber 100.
Primary heater is the sidepiece that is heated of the open side of first chamber 100 that sealing surface faces toward nozzle assembly 300 on second chamber 200; The fine droplet that is ejected in first chamber 100 through nozzle assembly 300 is dispersed into more small drop when colliding the sidepiece of second chamber 200 consumingly, and simultaneously heat exchange is quick vaporizes because of the sidepiece that is heated of the internal temperature of first chamber 100 and second chamber 200 carries out.The drop size that sprays from nozzle assembly 300 is more little, and the cross section increase of heat exchange is many more, thereby makes correspondingly vaporization fast of drop.Here the size of drop or speed receive the control of the control valve 330 that attaches to nozzle assembly 300 1 sides.
On the other hand; The steam that produces in first chamber continuously flows into second chamber 200 of steam heater through tube connector 700; And by heater 400 heating, heated vapor is through discharging facing to formed tap 210 on the opposite side that is connected side with the tube connector 700 of second chamber 200 then.
Through the heated vapor injection apparatus; Promptly the otch 810 of the block 800 through being used to spray heated vapor will spray to the score line on the fragile base material through the heated vapor that the tap 210 of second chamber 200 is discharged; Wherein, this block 800 is arranged in the outside that second chamber 200 has that sidepiece of tap 210.
Spray to the breach of the heated vapor of the score line on the fragile base material along the thickness direction expansion score line of fragile base material, thus cutting breakable substrate material.
Describe down in the face of method according to the cutting breakable substrate material of embodiment of the present invention.The order cutting breakable substrate material also can be applied to line and finish the back cutting breakable substrate material when both can be applied to mark line of cut on the fragile base material according to the method for the cutting breakable substrate material of embodiment of the present invention.
Method according to the cutting breakable substrate material of embodiment of the present invention comprises:
(i) utilize steam generation device to produce steam;
(ii) utilize steam heater that the steam that steam generation device produces is heated again; And
(iii) utilize the heated vapor injection apparatus that the score line on the fragile base material is sprayed heated vapor,
The steam that is wherein produced by steam generation device is wet saturated steam or dry saturated steam, and the steam that is heated by steam heater is dry saturated steam or superheated steam.
Though above to describing in detail according to the equipment that is used for cutting breakable substrate material of embodiment of the present invention and the method for cutting breakable substrate material; But the present invention is not limited to this embodiment, should be understood that the remodeling that under situation about not deviating from aspect the present invention, can make preparations for sowing.
That is to say that except glass baseplate, mentioned fragile base material can be quartz substrate, sapphire substrate, semiconductor wafer, ceramic base material or the like among the present invention.Further, the liquid that is used to produce steam can be water and any material, as long as it has the attribute that can expand the breach on the fragile base material, such as conducting heat and expansion characteristics.
Further; Though as an example, the equipment that in embodiment of the present invention, will be used for cutting breakable substrate material combines with scribe head, can arrange the guide rod that is used for this equipment; This guide rod is independent of the guide rod that scribe head is followed along the guide rail slippage, and with this equipment in this guide rod.
According to this configuration, the heated vapor injection apparatus can slide along guide rod; Yet, can substitute the heated vapor injection apparatus is fixed in guide rod, the otch 810 that can arrange the nozzle assembly that the width (the Y direction among Fig. 1) along guide rod extends and will be used to spray the block 800 of heated vapor is connected with nozzle assembly.Alternative is to arrange that nozzle assembly makes it to slide along guide rail rather than guide rod, and the heated vapor injection apparatus is arranged above that.
Further, first chamber 100 of steam generation device and steam heater and second chamber 200 are corresponding one by one each other in embodiments of the present invention; Yet depending on the scribble method and the size of fragile base material can have other various combinations.For example, can the serial or parallel connection mode two second chambers 200 be connected to one first chamber 100.
In this configuration, first chamber 100 and second chamber 200 can each intervals, and wherein first chamber 100 and second chamber 200 have separately independently that firing equipment is enough to.
Equipment that is used for cutting breakable substrate material and cutting breakable substrate material method according to the invention described above; Because the steam that steam generation device produces sprays to the score line on the fragile base material after receiving heating again of steam heater again; It is high and evenly to spray to the temperature of heated vapor of score line, the disconnection effect that can expand breach like a cork and be improved thus.
Further, owing to do not contain drop in the steam of steam heater heating, thus though heated vapor is sprayed to the score line on the fragile base material, can not produce stain in fragile base material yet, thus the production qualification rate improved.
Further; Owing to the fine droplet in first chamber that is ejected into steam generation device is dispersed into more small drop when colliding primary heater consumingly; And because of vaporizing fast with the heat exchange area increase of primary heater; So do not have water droplet residue, thereby prevent the noise that causes because of boiling.
Though it is illustrated with reference to illustrative embodiments of the present invention; But be noted that those of ordinary skill, under the situation that does not deviate from spirit and scope of the invention defined in the appended claims and equivalent thereof, can make various remodeling said embodiment for technical field under the present invention.
Claims (22)
1. equipment that is used for cutting breakable substrate material comprises:
Steam generation device;
Be used for the steam of drawing from said steam generation device is heated, makes that the temperature of steam of the score line spray to said fragile base material is high and evenly and not contains the steam heater of drop; With
Be used for spraying to the heated vapor injection apparatus of the score line of said fragile base material from the heated vapor that said steam heater is discharged,
Wherein, break off said fragile base material through the score line breach that utilizes said heated vapor to expand to form on the said fragile base material.
2. equipment as claimed in claim 1, wherein, said steam generation device and said steam heater communicate with each other through tube connector.
3. equipment as claimed in claim 2, wherein, said steam generation device comprises:
First chamber;
Attach to said first chamber and utilize compressed air to inject liquid into the nozzle assembly in said first chamber; With
Drop to being ejected into by said nozzle assembly in said first chamber heats so that the primary heater of its vaporization.
4. equipment as claimed in claim 3, wherein, said nozzle assembly also is provided with control and is ejected into the size of the drop in said first chamber or the control valve of speed.
5. equipment as claimed in claim 3, wherein, said primary heater is facing to the said nozzle assembly in said first chamber.
6. equipment as claimed in claim 3, wherein, said steam heater comprises:
Second chamber of the steam that reception is drawn from said steam generation device; With
The secondary heater that the steam that receives in said second chamber is heated.
7. equipment as claimed in claim 6, wherein, said first chamber is facing to the sidepiece of the nozzle bore of said nozzle assembly opening at least partly,
The sidepiece sealing that said open side is heated by said secondary heater on said second chamber, and
The said sidepiece of said second chamber transfers heat in said first chamber, and the said sidepiece of said thus second chamber plays the effect of said primary heater.
8. equipment as claimed in claim 7, wherein, said second chamber has the attemperator that prevents that internal temperature from descending, and
Said attemperator is the porous ceramics that attaches to all inwalls except that the part of the open side of sealing said first chamber.
9. equipment as claimed in claim 6, wherein, said tube connector has had the otch of inlet effect at its outer peripheral face place that is arranged in the sidepiece of said first chamber, and has the outlet that is used for steam is entered said second chamber in the other side.
10. equipment as claimed in claim 6, wherein, said heated vapor injection apparatus comprises the block that is used to spray heated vapor, said block is installed in the place, outside of a side that having of said second chamber is used to discharge the tap of heated vapor, and
Be formed with between the said side facing to the surface of the said side of said second chamber and said second chamber of said block that an end is connected with said tap and the other end leads to the otch of said fragile base material.
11. equipment as claimed in claim 2, wherein, said steam heater comprises:
Second chamber of the steam that reception is drawn from said steam generation device; With
The secondary heater that the steam that receives in said second chamber is heated.
12. equipment as claimed in claim 11, wherein, said heated vapor injection apparatus comprises the block that is used to spray heated vapor, and said block is installed in the place, outside of a side that having of said second chamber is used to discharge the tap of heated vapor, and
Be formed with between the said side facing to the surface of the said side of said second chamber and said second chamber of said block that an end is connected with said tap and the other end leads to the otch of said fragile base material.
13. like each described equipment in the claim 1 to 12, wherein, the steam that is produced by said steam generation device is wet saturated steam or dry saturated steam.
14. like each described equipment in the claim 1 to 12, wherein, the heated vapor that is heated by said steam heater is dry saturated steam or superheated steam.
15. equipment as claimed in claim 6, wherein, said second chamber attaches to scribe head, and
Adiabatic block with insulation effect inserts between said second chamber and the said scribe head.
16. like each described equipment in the claim 1 to 12, wherein, slidably be furnished with guide rod along the guide rail that is arranged parallel to each other in the workbench both sides of placing said fragile base material, and
Movably be furnished with said steam generation device and said steam heater one of them and said heated vapor injection apparatus at least along said guide rod.
17. like each described equipment in the claim 1 to 12, wherein, slidably be furnished with nozzle unit along the guide rail that is arranged parallel to each other in the workbench both sides of placing said fragile base material, and
Said heated vapor injection apparatus is communicated with said nozzle unit.
18. the method for a cutting breakable substrate material comprises:
(i) utilize steam generation device to produce steam;
(ii) the steam of introducing steam heater from said steam generation device is heated, make that the temperature of steam of the score line that sprays to said fragile base material is high and evenly and not contain drop; And
(iii) utilize the heated vapor injection apparatus will spray to the score line of said fragile base material by the heated vapor of said steam heater heating,
Wherein, break off said fragile base material through the score line breach that utilizes heated vapor to expand to form on the said fragile base material.
19. method as claimed in claim 18, wherein, on said fragile base material, mark line of cut in, through carrying out (i) to (iii) breaking off said fragile base material.
20. method as claimed in claim 18, wherein, after marking line of cut on the said fragile base material, through carrying out (i) to (iii) breaking off said fragile base material.
21. like each described method in the claim 18 to 20, wherein, the steam that is produced by said steam generation device is wet saturated steam or dry saturated steam.
22. like each described method in the claim 18 to 20, wherein, the heated vapor that is heated by said steam heater is dry saturated steam or superheated steam.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2008-0036751 | 2008-04-21 | ||
| KR1020080036751 | 2008-04-21 | ||
| KR1020080036751A KR100890360B1 (en) | 2008-04-21 | 2008-04-21 | Breaking apparatus for fragile substrate and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101391460A CN101391460A (en) | 2009-03-25 |
| CN101391460B true CN101391460B (en) | 2012-09-05 |
Family
ID=40492069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101683895A Expired - Fee Related CN101391460B (en) | 2008-04-21 | 2008-10-30 | Device and method for cutting breakable substrate material |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100890360B1 (en) |
| CN (1) | CN101391460B (en) |
| TW (1) | TW200944484A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3556600A (en) * | 1968-08-30 | 1971-01-19 | Westinghouse Electric Corp | Distribution and cutting of rocks,glass and the like |
| JP2000218536A (en) * | 1999-01-28 | 2000-08-08 | Tokyo Seimitsu Co Ltd | Heat exchange method and device for working fluid |
| CN1758993A (en) * | 2003-01-29 | 2006-04-12 | 三星宝石工业株式会社 | Substrate dividing apparatus and method for dividing substrate |
| WO2007059251A2 (en) * | 2005-11-15 | 2007-05-24 | Carnegie Institution Of Washington | New diamond uses/applications based on single-crystal cvd diamond produced at rapid growth rate |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060121624A (en) * | 2005-05-25 | 2006-11-29 | 엘지.필립스 엘시디 주식회사 | Cutting apparatus for cutting liquid crystal display panel |
| KR100960468B1 (en) | 2005-12-29 | 2010-05-28 | 엘지디스플레이 주식회사 | Method of cutting liquid crystal display panel and method of fabricating liquid crystal display panel using the same |
-
2008
- 2008-04-21 KR KR1020080036751A patent/KR100890360B1/en not_active IP Right Cessation
- 2008-10-30 CN CN2008101683895A patent/CN101391460B/en not_active Expired - Fee Related
- 2008-10-31 TW TW097141962A patent/TW200944484A/en unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3556600A (en) * | 1968-08-30 | 1971-01-19 | Westinghouse Electric Corp | Distribution and cutting of rocks,glass and the like |
| JP2000218536A (en) * | 1999-01-28 | 2000-08-08 | Tokyo Seimitsu Co Ltd | Heat exchange method and device for working fluid |
| CN1758993A (en) * | 2003-01-29 | 2006-04-12 | 三星宝石工业株式会社 | Substrate dividing apparatus and method for dividing substrate |
| WO2007059251A2 (en) * | 2005-11-15 | 2007-05-24 | Carnegie Institution Of Washington | New diamond uses/applications based on single-crystal cvd diamond produced at rapid growth rate |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100890360B1 (en) | 2009-03-25 |
| TW200944484A (en) | 2009-11-01 |
| CN101391460A (en) | 2009-03-25 |
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