CN101385986A - Clean bench and method of producing raw material for single crystal silicon - Google Patents
Clean bench and method of producing raw material for single crystal silicon Download PDFInfo
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- CN101385986A CN101385986A CNA2008102133695A CN200810213369A CN101385986A CN 101385986 A CN101385986 A CN 101385986A CN A2008102133695 A CNA2008102133695 A CN A2008102133695A CN 200810213369 A CN200810213369 A CN 200810213369A CN 101385986 A CN101385986 A CN 101385986A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/12—Production of homogeneous polycrystalline material with defined structure directly from the gas state
- C30B28/14—Production of homogeneous polycrystalline material with defined structure directly from the gas state by chemical reaction of reactive gases
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/12—Etching in gas atmosphere or plasma
Abstract
The invention relates to a clean bench and a method of producing raw material for single crystal silicon. A clean bench comprises a worktable on which polycrystalline silicon is placed, a box part which includes side plates to surround three sides except a front face of a working space above the worktable, and a ceiling plate which covers an upper side of the working space. Supplying holes are formed in the ceiling plate of the box part, which supply clean air onto an upper surface of the worktable. An ionizer is provided, which ionizes the clean air supplied from the supplying holes to the working space and removes static electricity on the worktable. Suction holes are formed in the side plate of the box part, which suction air from the working space.
Description
The present invention requires the priority of Japanese patent application No.2007-229211 (September 4 2007 applying date) and Japanese patent application No.2008-168497 (June 27 2008 applying date), is incorporated herein these contents.
Invention field
[0001]
The present invention relates to when making monocrystalline silicon, choose the superclean bench (Network リ one Application ベ Application チ) of use and have the manufacture method of the raw material for single crystal silicon of this cleaning chemical industry preface in the size of the polysilicon that uses as fused raw material or the branch of quality.
Background technology
[0002]
In general, when creating the polysilicon of monocrystalline silicon raw material, the unstrpped gas that contains chlorosilane gas and hydrogen is contacted with the silicon plug of heating.On the surface of silicon plug, separate out, it is broken into the block of suitable size or blocks into the shaft-like as raw material of specific length with cylindric.Deliver to monocrystalline silicon manufacturing works with packaged state.In addition, before the packaging operation, by the size or the quality of sorting polysilicon hand-manipulated.This sorting operational example is as carrying out in the superclean bench shown in the TOHKEMY 2005-279576 communique.Possess in this superclean bench Jie by the high-performance filter of using to gas to being formed at the SS that operating space on the operating desk provides the pressure fan of air and sucks air from the operating space.Utilize this pressure fan and SS,, keep the cleanliness factor on the operating desk by in the operating space, supplying with pure air constantly.Thus, when the sorting polysilicon, when preventing impurity adhering on polysilicon, by the mobile micropowder of removing polysilicon itself of pure air.That is, attempt to improve the quality of the polysilicon of manufacturing.
[0003]
When carrying out the branch selection operation of the size of polysilicon or quality in superclean bench, when micropowder was charged, the micropowder Electrostatic Absorption was on polysilicon.Thus, have and to remove micropowder by pure air mobile, can't obtain required problem of removing effect.
[0004]
The present invention finishes in view of this problem, its purpose is to be provided in the superclean bench that the size of carrying out polysilicon and quality divide selection operation, prevent that micropowder from attached on the polysilicon, can provide the superclean bench of the polysilicon quality of keeping manufacturing and the manufacture method of raw material for single crystal silicon owing to static.
Summary of the invention
[0005]
In order to solve above-mentioned problem, the present invention proposes following means.
That is, polysilicon branch of the present invention selects for use superclean bench to possess the operating desk of carrying polysilicon; With three the side plate of operating space, top encirclement except the front and the casing of the top board above the overlapping operation space that have with respect to the aforesaid operations platform; Be arranged on the above-mentioned top board of above-mentioned casing, form the supply hole of supply pure air above above-mentioned operating desk simultaneously, has electro-dissociator, the above-mentioned pure air ionization that this electro-dissociator will be supplied with to above-mentioned operating space from above-mentioned supply hole, remove the static on the aforesaid operations platform, on the above-mentioned side plate of above-mentioned casing, form the SS that sucks air in the aforesaid operations space.
[0006]
By above-mentioned superclean bench, pure air is supplied to three besieged operating desks except the front from supply port on, utilize near the air of SS sucking above the operating desk, thus operating desk above remain in the clean environment.Thus, can highly keep the purity of the polysilicon that becomes the sorting operand on the operating desk.As a result, can prevent with the polysilicon to be that the quality of the monocrystalline silicon made of raw material reduces.
[0007]
In addition, in the superclean bench of the present invention, utilize electro-dissociator with the pure air ionization, blow to operating desk above.This pure air becomes positive and negative air ion, when the micropowder of polysilicon is charged, and the static generation charge neutrality of the negative ions of this pure air and micropowder.Thereby, remove micropowder with static.Then, removed the micropowder of static, can not utilize the mobile SS that is sucked into of pure air, removed from operating desk attached on the polysilicon owing to lost its adhesive force.As mentioned above, can easily remove micropowder.The result can keep to heavens with the polysilicon quality of the monocrystalline silicon that is the raw material manufacturing.
[0008]
And then, with the pure air that utilizes electro-dissociator to become positive and negative air ion blow to operating desk above, the static of the micropowder of polysilicon is removed, thereby can easily be removed micropowder.As a result, can improve with the polysilicon quality of the monocrystalline silicon that is the raw material manufacturing.
[0009]
The access that is communicated with between above-mentioned SS and the above-mentioned supply hole can also be set, have: supply with the pressure fan of pure air and, above-mentioned filter and above-mentioned pressure fan are set on above-mentioned access from remove the filter of micropowder by the above-mentioned pure air of above-mentioned pressure fan supply to above-mentioned operating space.
[0010]
At this moment, utilize the filter will be, carry out pure air being delivered to air circulation on the operating desk from supply hole with pressure fan from SS inhaled air cleaningization.Thus, can keep cleanliness factor above the operating desk more to heavens.
[0011]
Above-mentioned filter comprises and is arranged on above-mentioned pressure fan upstream side, removes 1st filter of particle diameter greater than the powder of given size; Be arranged on above-mentioned pressure fan downstream, remove the 2nd filter of the powder that has passed through above-mentioned the 1st filter.
[0012]
Here, when above operating desk when being sucked micropowder that the hole inhaled air is removed and directly entering pressure fan, can cause obstacle to the driving of pressure fan.But, among the present invention, on the access that is communicated with between SS and the pressure fan, the 1st filter is set.Therefore, owing to can utilize the 1st filter that micropowder is positively removed, therefore can not cause obstacle from the air of sending into pressure fan to pressure fan.In addition, air Jie who sends from pressure fan is imported into supply hole by the high-performance filter, therefore can very improve the cleanliness factor that supplies to the pure air above the operating desk.
[0013]
In addition, the manufacture method of monocrystalline silicon raw material of the present invention possesses: the silicon that the reaction of the unstrpped gas by containing chlorosilane gas and hydrogen is separated out rod-like polycrystal silicon is separated out operation; With the fragmentation of above-mentioned rod-like polycrystal silicon, the operation of blocking making the broken process of a plurality of chunk polysilicons or above-mentioned rod-like polycrystal silicon blocked the shaft-like polysilicon of making specific length; The washing procedure that uses acid to remove attached to the impurity of these above-mentioned polysilicon surfaces; Thereby impregnated in the pure water groove is removed residual acid from the surface of above-mentioned polysilicon dipping operation by the above-mentioned polysilicon after will washing; To drop into the drying process of drying machine from the above-mentioned polysilicon that above-mentioned pure water groove is mentioned; Remove static from dried above-mentioned polysilicon surface, with the clean chemical industry preface of above-mentioned polysilicon cleaningization, in the above-mentioned clean chemical industry preface, on the aforesaid operations platform of above-mentioned superclean bench, above-mentioned polysilicon is contacted, with above-mentioned polysilicon cleaningization with above-mentioned pure air.
[0014]
In addition, the manufacture method of monocrystalline silicon raw material of the present invention possesses: the silicon that the reaction of the unstrpped gas by containing chlorosilane gas and hydrogen is separated out rod-like polycrystal silicon is separated out operation; With the fragmentation of above-mentioned rod-like polycrystal silicon, the operation of blocking making the broken process of a plurality of chunk polysilicons or above-mentioned rod-like polycrystal silicon blocked the shaft-like polysilicon of making specific length; The washing procedure that uses acid to remove attached to the impurity of these above-mentioned polysilicon surfaces; Thereby impregnated in the pure water groove is removed residual acid from the surface of above-mentioned polysilicon dipping operation by the above-mentioned polysilicon after will washing; To drop into the drying process of drying machine from the above-mentioned polysilicon that above-mentioned pure water groove is mentioned; Remove static from dried above-mentioned polysilicon surface, carry out the clean chemical industry preface of cleaningization, in the above-mentioned clean chemical industry preface, passing through the above-mentioned polysilicon of placement on operating desk, above above-mentioned polysilicon the Ionized pure air of supply the time, discharge from the side of aforesaid operations platform, thereby above-mentioned polysilicon is contacted with above-mentioned pure air, remove static.
[0015]
The polysilicon of Zhi Zaoing can utilize Ionized pure air that the micropowder of polysilicon surface is removed by this method.As a result, can improve quality as raw material for single crystal silicon.
Description of drawings
Fig. 1 is the summary pie graph of the superclean bench of an embodiment of the present invention.
Fig. 2 is the mobile side cross-sectional view of air of this superclean bench unit of expression.
Silicon when Fig. 3 makes raw material for single crystal silicon for expression is separated out the summary sectional view of the used reacting furnace of operation.
The rod-like polycrystal silicon that Fig. 4 will take out from reacting furnace for expression is broken into the front elevation of block state.
Fig. 5 is illustrated in the illustraton of model that on the operating desk of Fig. 1 superclean bench chunk polysilicon is carried out the state of cleaningization.
The specific embodiment
[0016]
Below, with reference to the superclean bench unit of description of drawings as superclean bench embodiment of the present invention.Fig. 1 is the front view of the superclean bench unit of present embodiment, the side cross-sectional view that Fig. 2 flows for the air of representing the superclean bench unit.Superclean bench unit 30 as shown in Figure 1,2 superclean benches 1 that are formed with inscape symmetrically are set up in parallel and form.Superclean bench 1 roughly is formed with the operating desk 2 and case (casing) 4 formations of operating space 3 by upside.Case 4 have operating desk 2 and 3 inboards, operating space (Fig. 2 right side) side plate 8a, be positioned at the side that contacts with 2 superclean benches 1 opposition side side plate 8b and cover the top board 16 of these side plates 8a, 8b top.
[0017]
[0018]
Case 4 has and surrounds operating desk 2 from the side and cover their top board 16 with side plate 8a, the 8b of operating space 3 with from the top.The inside of case 4 is configured as roughly empty shape.This case 4 extends in vertical direction, makes 2 sides of side plate 8a, 8b and operating desk 2 join.And case 4 is provided with the 4b of portion by inner 4a of the portion that vertically is provided with that is provided with aftermentioned pressure fan 11 and top above it and constitutes as shown in Figure 2, and described top is provided with the 4b of portion and is configured in portion 4a top vertically is set, and makes top board 16 from overlapping operation space, top 3.
[0019]
The inside of the 4a of the portion that vertically is provided with of the side plate 8a of these operating desk 2 inboards is the access 7 that extends up and down as shown in Figure 2.Access 7 is in the lower opening of side plate 8a, is connected with the side 2b peristome of the operating desk access 5 of aforesaid operations platform 2, forms connecting portion 9.And, on access 7, be formed on above the operating desk 2 that the 4a of portion side plate 8a vertically is set near the SS 10a of opening.In addition, form on the access 7 side around ultra-clean unit 30, on the operating desk 2 of side plate 8b near the also SS 10b of opening.
[0020]
In addition, be arranged on pressure fan 11 that the 4a of portion upper interior vertically is set according to the mode that closing surface 12 that the 4a of portion and top be provided with the 4b of portion joins vertically is set and disposes with cutting off.Pressure fan 11 have suction vertically be provided with access 7 in the 4a of portion air, deliver to the top function in the 4b of portion be set.And (upstream side of pressure fan 11) is provided with micropowder and removes filter (the 1st filter) 13 between the pressure fan 11 and SS 10a, 10b of access 7.Remove filter 13 from SS 10a, 10b and operating desk SS 2c inhaled air by micropowder and be sent to pressure fan 11.Micropowder is removed filter 13 and is removed for example above particulate of particle diameter 10 μ m.
[0021]
The top is provided with the 4b of portion and is formed with the mode that the 4a of portion becomes one vertically is set by closing surface 12 according to being situated between.The top is provided with in the inside of the 4b of portion and is provided with flat high-performance filter 15, makes below closing surface 12 (downstream of pressure fan 11) have the interval of regulation.In the present embodiment, high-performance filter 15 comprises removes, can obtain the roughly HEPA filter of 100% cleanliness factor with atomic fine particle contained in the ventilating air (for example more than the particle diameter 0.3 μ m).The air that portion 4b inside is set above Jie is delivered to by pressure fan 11 is situated between and becomes clean air by this high-performance filter 15.
[0022]
In addition, by above overlapping operation space 3 above be provided with on the top board 16 of portion, punching has a plurality of holes.These a plurality of holes become the supply hole 16a that pure air is supplied to operating space 3.Finally be supplied to the below of operating space 3 equably from a plurality of supply hole 16a of top board 16 by the air of high-performance filter 15.In addition, on the downside (faces of operating space 3 sides) of top board 16, be provided with illumination such as a plurality of (present embodiment is 4) fluorescent lamp 17.Illumination is 17 in the horizontal direction with the arranged spaced of equalization, the whole zone of operating surface 2a of the operating desk 2 that makes it possible to throw light on.
[0023]
Downside (faces of operating space 3 sides) at top board 16 is provided with electro-dissociator 20, and its a plurality of illuminations 17 with as above configuration are set up in parallel.Electro-dissociator 20 disposes according to the nozzle 20a mode down that a plurality of (in the present embodiment being 8) are arranged at electro-dissociator 20.Electro-dissociator 20 for example has with corona discharge etc. will be supplied to a part of negative ionsization of the pure air of operating space 3 from the supply hole 16a of top board 16, the function of supplying with from nozzle 20a.As this electro-dissociator 20, as long as the pure air ionization for example except corona discharge, can also be able to be utilized the variety of way of using ultraviolet ray, grenz ray, radioactive substance etc.
[0024]
Then, illustrate that the superclean bench unit 30 that uses formation like this creates the method for the polysilicon of monocrystalline silicon raw material.
This manufacture method possesses following operation: the silicon that the reaction of the unstrpped gas by containing chlorosilane gas and hydrogen is separated out rod-like polycrystal silicon is separated out operation; With the fragmentation of rod-like polycrystal silicon, make the broken process of a plurality of chunk polysilicons or rod-like polycrystal silicon blocked into the operation of blocking that specific length obtains shaft-like polysilicon; The washing procedure that uses acid to remove attached to the impurity of these polysilicon surfaces; Thereby impregnated in the dipping operation that the pure water groove is removed residual acid by the polysilicon after will washing; To drop into the drying process of drying machine from the polysilicon that the pure water groove is mentioned; Remove the clean chemical industry preface that static carries out cleaningization from dried polysilicon surface; For the polysilicon of these cleaningizations being delivered to monocrystalline silicon manufacturing works, the packaging process of packaging polycrystalline.
[0025]
Silicon is separated out operation according to so-called Siemens Method, as shown in Figure 3, at first makes for example switch on heating and generate heat into the condition of high temperature of the silicon plugs 41 that vertically are arranged in the reacting furnace 40.Then, the unstrpped gas that is supplied in the reacting furnace 40 from unstrpped gas supply pipe 42 is contacted with silicon plug 41, it is bar-shaped by reduction reaction polysilicon R to be separated out into around it.Gas in the reacting furnace 40 is expelled to the outside from blast pipe 43.
Broken process produces fracture by the rod-like polycrystal silicon R that is separated out the operation making by silicon is for example implemented heating, quenching, gives thermal shock.Then, utilize hammer that this rod-like polycrystal silicon R is knocked fragmentation, make chunk polysilicon C shown in Figure 4.
Block operation and rod-like polycrystal silicon R is blocked into specific length, make the operation of shaft-like polysilicon for using diamond tool.
The operation of washing procedure for removing from block or shaft-like polysilicon attached to lip-deep impurity with the cleaning solution that contains nitric acid and fluoric acid.The dipping operation is removed the operation of residual acid for washed polysilicon is immersed in the pure water groove.
Drying process is that the polysilicon after dipping is finished drops in the vacuum drier, from the dewatered operation of polysilicon surface.
[0026]
Clean chemical industry preface uses above-mentioned superclean bench unit 30 that Ionized pure air is contacted with polysilicon, thereby removes micropowder from the surface of polysilicon.That is, at first on the operating desk 2 of superclean bench 1, place polysilicon.Then, supply with Ionized pure air, aspirate, discharge from the side of operating desk 2 simultaneously from the top of operating desk 2.Thus, pure air is contacted with polysilicon with above the operating desk 2, remove static, micropowder is discharged along flowing of air.
With chunk polysilicon C is object description should cleaning chemical industry preface the time, as shown in Figure 5, places the film 52 of the polyethylene system that is similarly on the dish 51 of polyethylene system, places a plurality of polysilicon C on this film 52.This dish 51 is placed on the operating desk 2 of superclean bench 1, supplies with Ionized pure air from the top of superclean bench 1.Under this state, for each polysilicon C, check size, outward appearance on one side, carry out sorting on one side, be contained in the packaging bag 53 of polyethylene system.
[0027]
In the superclean bench 1 of the superclean bench unit 30 of present embodiment, pressure fan 11 is situated between and by high-performance filter 15 pure air is supplied to operating space 3.Being located at SS 10a, the 10b of 3 bottoms, operating space and operating desk SS 2c inhaled air is situated between and is delivered to the air circulation of pressure fan 11 by operating desk access 5 and access 7.Thus, therefore the air that is supplied to operating space 3 can remain on operating space 3 in the very clean environment owing to obtained roughly 100% cleanliness factor by high-performance filter 15 before it.Therefore, the polysilicon that becomes the sorting object is placed in the high environment of cleanliness factor for a long time, so foreign matter can not sneaked into, can keep its purity to heavens.Thereby, can prevent with the polysilicon to be that the quality of the monocrystalline silicon made of raw material reduces.
[0028]
In addition, in the present embodiment, the electro-dissociator 20 of the downside (faces of operating space 3 sides) by being arranged at top board 16, a part of ionization of the pure air that will supply with from supply hole 16a.This pure air becomes positive and negative air ion, and when the micropowder of polysilicon was charged, static was removed in the static generation charge neutrality of negative ions and micropowder by this pure air.And, remove the micropowder of static and lost its adhesive force.Thus, micropowder can be attached on the polysilicon, is sucked hole 10a, 10b or operating desk SS 2c sucks by pure air mobile.As a result, micropowder is removed with operating space 3 above operating desk 2.From the above mentioned, can remove the static of micropowder, easily micropowder is removed from operating desk 2.Thus, can keep the quality of the monocrystalline silicon that is the raw material manufacturing to heavens with the polysilicon.
[0029]
With above operating desk 2 and operating space 3 micropowder that is sucked into the polysilicon that the air of SS 10a, 10b or operating desk SS 2c is removed directly enter pressure fan 11, then can cause obstacle to the driving of pressure fan 11.But, in the present embodiment, between SS 10a, the 10b of access 7 and pressure fan 11, micropowder is set and removes filter 13.Therefore, owing to utilizing micropowder to remove filter 13 micropowder is positively removed from the air that enters pressure fan 11.As a result, can not cause obstacle, can repeat air circulation pressure fan 11.
[0030]
So after the polysilicon of cleaningization, be packaged in the Polythene Bag, deliver to monocrystalline silicon manufacturing works through packaging process.This polysilicon is supplied to as the raw material of monocrystalline silicon manufacturing.As mentioned above, owing to pass through the surface cleaningization of the clean chemical industry preface of superclean bench, therefore can make high-quality monocrystalline silicon with polysilicon.
[0031]
More than, the superclean bench unit 30 of using present embodiment superclean bench 1 has been described, but the present invention is not limited thereto, can be in the scope that does not break away from the technology of the present invention thought appropriate change.
Cleaningization for chunk polysilicon in the embodiment is illustrated, but can also be made as the polysilicon of raw material for single crystal silicon through rod-like polycrystal silicon being made the broken process of chunk polysilicon or making arbitrary operation of blocking operation of the shaft-like polysilicon of specific length.In addition, during for shaft-like polysilicon, in clean chemical industry preface, for example each shaft can be placed on the film 52, pass through visual examination etc., be contained in the packaging bag respectively while brush pure air.
As above set forth and preferred implementation of the present invention be described, be interpreted as its be representative of the present invention and and unrestricted the present invention.Only otherwise break away from purport of the present invention or scope, can increase, omit, replace and other changes.Therefore, the present invention is not limited to foregoing description, only is subjected to the qualification of right claimed range.
Claims (5)
1. superclean bench, it possesses:
The operating desk of carrying polysilicon; With
Have three the side plate of operating space, top encirclement except the front and the casing of the top board above the overlapping operation space with respect to the aforesaid operations platform; It is characterized in that,
Be arranged on the above-mentioned top board of above-mentioned casing, form the supply hole of supply pure air above above-mentioned operating desk simultaneously,
Have electro-dissociator, the above-mentioned pure air ionization that this electro-dissociator will be supplied with to above-mentioned operating space from above-mentioned supply hole, remove the static on the aforesaid operations platform,
On the above-mentioned side plate of above-mentioned casing, form the SS that sucks air in the aforesaid operations space.
2. the described superclean bench of claim 1, wherein,
Also be provided with the access that is communicated with between above-mentioned SS and the above-mentioned supply hole,
Have:
To above-mentioned operating space supply with pure air pressure fan and
Remove the filter of micropowder from the above-mentioned pure air of supplying with by above-mentioned pressure fan,
Above-mentioned filter and above-mentioned pressure fan are set on above-mentioned access.
3. the described superclean bench of claim 2, above-mentioned filter comprises:
Be arranged on above-mentioned pressure fan upstream side, remove 1st filter of particle diameter greater than the powder of given size; With
Be arranged on above-mentioned pressure fan downstream, remove the 2nd filter of the powder that has passed through above-mentioned the 1st filter.
4. the manufacture method of raw material for single crystal silicon, it possesses:
The silicon that the reaction of the unstrpped gas by containing chlorosilane gas and hydrogen is separated out rod-like polycrystal silicon is separated out operation;
With the fragmentation of above-mentioned rod-like polycrystal silicon, the operation of blocking making the broken process of a plurality of chunk polysilicons or above-mentioned rod-like polycrystal silicon blocked the shaft-like polysilicon of making specific length;
The washing procedure that uses acid to remove attached to the impurity of these above-mentioned polysilicon surfaces;
Thereby impregnated in the pure water groove is removed residual acid from the surface of above-mentioned polysilicon dipping operation by the above-mentioned polysilicon after will washing;
To drop into the drying process of drying machine from the above-mentioned polysilicon that above-mentioned pure water groove is mentioned;
Remove static from dried above-mentioned polysilicon surface, the clean chemical industry preface with above-mentioned polysilicon cleaningization is characterized in that,
In the above-mentioned clean chemical industry preface, on the aforesaid operations platform of each described superclean bench of claim 1～3, above-mentioned polysilicon is contacted, with above-mentioned pure air with above-mentioned polysilicon cleaningization.
5. the manufacture method of raw material for single crystal silicon, it possesses:
The silicon that the reaction of the unstrpped gas by containing chlorosilane gas and hydrogen is separated out rod-like polycrystal silicon is separated out operation;
With the fragmentation of above-mentioned rod-like polycrystal silicon, the operation of blocking making the broken process of a plurality of chunk polysilicons or above-mentioned rod-like polycrystal silicon blocked the shaft-like polysilicon of making specific length;
The washing procedure that uses acid to remove attached to the impurity of these above-mentioned polysilicon surfaces;
Thereby impregnated in the pure water groove is removed residual acid from the surface of above-mentioned polysilicon dipping operation by the above-mentioned polysilicon after will washing;
To drop into the drying process of drying machine from the above-mentioned polysilicon that above-mentioned pure water groove is mentioned;
Remove static from dried above-mentioned polysilicon surface, carry out the clean chemical industry preface of cleaningization, it is characterized in that,
In the above-mentioned clean chemical industry preface, the above-mentioned polysilicon of placement on operating desk the Ionized pure air of supply the time, is discharged from the side of aforesaid operations platform, thereby above-mentioned polysilicon is contacted with above-mentioned pure air above above-mentioned polysilicon, removes static.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310248647.1A CN103341368B (en) | 2007-09-04 | 2008-09-02 | The manufacture method of superclean bench and raw material for single crystal silicon |
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007229211 | 2007-09-04 | ||
| JP2007229211 | 2007-09-04 | ||
| JP2007-229211 | 2007-09-04 | ||
| JP2008-168497 | 2008-06-27 | ||
| JP2008168497 | 2008-06-27 | ||
| JP2008168497A JP4941415B2 (en) | 2007-09-04 | 2008-06-27 | Clean bench |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310248647.1A Division CN103341368B (en) | 2007-09-04 | 2008-09-02 | The manufacture method of superclean bench and raw material for single crystal silicon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101385986A true CN101385986A (en) | 2009-03-18 |
| CN101385986B CN101385986B (en) | 2013-07-24 |
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| CN201310248647.1A Active CN103341368B (en) | 2007-09-04 | 2008-09-02 | The manufacture method of superclean bench and raw material for single crystal silicon |
| CN2008102133695A Expired - Fee Related CN101385986B (en) | 2007-09-04 | 2008-09-02 | Clean bench and method of producing raw material for single crystal silicon |
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| CN201310248647.1A Active CN103341368B (en) | 2007-09-04 | 2008-09-02 | The manufacture method of superclean bench and raw material for single crystal silicon |
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| Country | Link |
|---|---|
| JP (1) | JP4941415B2 (en) |
| KR (1) | KR101424288B1 (en) |
| CN (2) | CN103341368B (en) |
| TW (1) | TWI422717B (en) |
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Family Cites Families (15)
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| US4827371A (en) * | 1988-04-04 | 1989-05-02 | Ion Systems, Inc. | Method and apparatus for ionizing gas with point of use ion flow delivery |
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- 2008-09-02 CN CN201310248647.1A patent/CN103341368B/en active Active
- 2008-09-02 KR KR1020080086458A patent/KR101424288B1/en active IP Right Grant
- 2008-09-02 CN CN2008102133695A patent/CN101385986B/en not_active Expired - Fee Related
- 2008-09-03 TW TW097133745A patent/TWI422717B/en not_active IP Right Cessation
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20090024632A (en) | 2009-03-09 |
| TW200918694A (en) | 2009-05-01 |
| CN103341368B (en) | 2016-04-13 |
| JP4941415B2 (en) | 2012-05-30 |
| KR101424288B1 (en) | 2014-07-31 |
| TWI422717B (en) | 2014-01-11 |
| JP2009078961A (en) | 2009-04-16 |
| CN103341368A (en) | 2013-10-09 |
| CN101385986B (en) | 2013-07-24 |
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