CN101359129A - On-line detecting device and on-line detecting method - Google Patents

On-line detecting device and on-line detecting method Download PDF

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Publication number
CN101359129A
CN101359129A CNA2007101434915A CN200710143491A CN101359129A CN 101359129 A CN101359129 A CN 101359129A CN A2007101434915 A CNA2007101434915 A CN A2007101434915A CN 200710143491 A CN200710143491 A CN 200710143491A CN 101359129 A CN101359129 A CN 101359129A
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China
Prior art keywords
film
light
measuring device
line measuring
orientation surface
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Pending
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CNA2007101434915A
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Chinese (zh)
Inventor
庄雅杰
吴建宏
杨昆炫
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BenQ Materials Corp
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Daxon Technology Inc
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Publication date
Application filed by Daxon Technology Inc filed Critical Daxon Technology Inc
Priority to CNA2007101434915A priority Critical patent/CN101359129A/en
Publication of CN101359129A publication Critical patent/CN101359129A/en
Pending legal-status Critical Current

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  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

Disclosed are an online detection device and an online detection method. The online detection device is used for detecting a thin film which is provided with an alignment surface. The online detection device comprises a steam generation component, a light-emitting unit and a feeding mechanism. The steam generation component is arranged towards the alignment surface. The steam generation component is used to form a steam film on the alignment surface. The light-emitting unit is arranged above the thin film and used to project the light onto the thin film. The feeding mechanism is used to guide the thin film to move relatively to the light-emitting unit. The light is reflected by the thin film to form the reflective light; through the receiving of the reflective light, the friction alignment state on the alignment surface is detected. The online detection method comprises the following steps: (a) when the thin film moves, a steam film is formed on the alignment surface; (b) the light is projected onto the thin film; and (c) the reflective light reflected by the thin film is received to detect the friction alignment state on the alignment surface.

Description

On-line measuring device and online test method
Technical field
The present invention relates to a kind of on-line measuring device and online test method, and relate in particular to a kind of on-line measuring device and online test method that is used to detect the friction matching situation on orientation surface.
Background technology
Along with development of science and technology, liquid crystal panel is widely used in the electronic installation.Liquid crystal panel comprises at least one alignment film (alignment layer).Alignment film is arranged on the glass substrate, and alignment film has a plurality of grooves that are parallel to each other.Liquid crystal molecule is arranged according to the direction of these grooves.If the arrangement of liquid crystal molecule is neat more, the display effect of liquid crystal panel is good more.
In general, the groove of alignment film is to utilize following step to form.At first, the material of alignment film is coated on the substrate of colored filter (color filter) for example.Then, the material of baking alignment film.Then, the material of the alignment film that has toasted with the mode face of for example mechanical force mill (rubbing).Thus, on the surface of alignment film, form a plurality of grooves.
Generally speaking, if during the groove defectiveness of alignment film, the arrangement of liquid crystal molecule can't present consistance, thereby influences the display effect of liquid crystal panel.Do not do detection at alignment film especially in the present technology, and the detection more relevant with alignment film is after display panel is finished, takes out display panel, carry out the detection of display characteristic.In other words, the quality of alignment film can't detect immediately and learn.If have defective in the alignment film, the display panel of finishing then can't use.Production cost can improve accordingly, makes the time that display panel also can increase manufacturing again.
Summary of the invention
The present invention relates to a kind of on-line measuring device and online test method, it possesses the advantage that detects the film with orientation surface after the orientation friction immediately.Thus,, can find immediately and alignment processing, be affected with the manufacturing process of avoiding the back if there is defective in film.Secondly, the film with orientation surface does not need to expend man-hour or manpower taking-up yet when checking, to reduce the waste of material and manpower.
According to a first aspect of the invention, provide a kind of on-line measuring device, be used to detect film.Film has the orientation surface.On-line measuring device comprises steam production part, luminescence unit and conveying mechanism.The steam production part is provided with towards the orientation surface.The steam production part is used for forming vapor film on the orientation surface.Luminescence unit is arranged on the top of film, is used for throw light to film.Conveying mechanism is used to guide film to move with respect to luminescence unit.Light reflects to form reflected light by film, by receiving friction matching (rubbing) situation that reflected light detects the orientation surface.
According to on-line measuring device of the present invention, wherein this conveying mechanism comprises: at least one guide roller, contact this film, and move along the rotation direction of this guide roller to guide this film.
According to on-line measuring device of the present invention, wherein this guide roller moves along a direction, to adjust the part angle of inclination with respect to the horizontal plane that this film is subjected to this ray cast.
According to on-line measuring device of the present invention, wherein the scope at this angle of inclination is that 0 degree is to 90 degree.
According to on-line measuring device of the present invention, wherein this conveying mechanism comprises: two guide rollers, this guide roller are at a distance of a spacer segment setting, and corresponding to this interval, this guide roller contacts two surfaces of this film respectively to this ray cast to this film.
According to on-line measuring device of the present invention, wherein the rotatable crevice projection angle of this luminescence unit is adjusted the direction of this ray cast to this film.
According to on-line measuring device of the present invention, wherein the scope of this crevice projection angle is that 0 degree is to 180 degree.
According to on-line measuring device of the present invention, wherein this light is white light.
According to on-line measuring device of the present invention, wherein this light is green-yellow light, and the wavelength coverage of this light is 510nm~590nm.
According to on-line measuring device of the present invention, it is arranged in the darkroom.
According to on-line measuring device of the present invention, also comprise: drying part is provided with towards this orientation surface, to remove this vapor film.
According to on-line measuring device of the present invention, also comprise: at least one cleaning member is used to clean this orientation surface.
According to a second aspect of the invention, provide a kind of online test method, be used to detect film.Film has the orientation surface.At first, when film moves, on the orientation surface, form vapor film.Then, throw light is to film.Then, receive the reflected light of light, to detect friction matching (rubbing) situation on orientation surface by the film reflection.
According to online test method of the present invention, also comprise: adjust the part angle of inclination with respect to the horizontal plane that this film is subjected to this irradiate light.
According to online test method of the present invention, wherein the scope at this angle of inclination is that 0 degree is to 90 degree.
According to online test method of the present invention, also comprise: adjust the crevice projection angle of this ray cast to this film.
According to online test method of the present invention, wherein the scope of this crevice projection angle is that 0 degree is to 180 degree.
According to online test method of the present invention, wherein in this step (b), this light is white light.
According to online test method of the present invention, wherein in this step (b), this light is green-yellow light, and the wavelength coverage of this light is 510nm~590nm.
According to online test method of the present invention, it carries out in the darkroom.
According to online test method of the present invention, also comprise: remove this vapor film; With this orientation surface of cleaning.
For foregoing of the present invention can be become apparent, preferred embodiment cited below particularly, and in conjunction with the accompanying drawings, be described below in detail:
Description of drawings
Figure 1A shows the side view according to the on-line measuring device of first embodiment of the invention.
The luminescence unit that Figure 1B shows Figure 1A is arranged on the synoptic diagram of a side on corresponding orientation surface.
Fig. 2 shows the synoptic diagram of the luminescence unit rotation crevice projection angle of Figure 1A.
Fig. 3 shows the synoptic diagram that the guide roller of Figure 1A is arranged in another way.
Fig. 4 shows the process flow diagram according to the online test method of first embodiment of the invention.
Fig. 5 shows the side view according to the on-line measuring device of second embodiment of the invention.
Fig. 6 A shows the synoptic diagram that the guide roller along continuous straight runs of Fig. 5 moves.
Fig. 6 B shows the synoptic diagram that the guide roller of Fig. 5 moves in the vertical direction.
Embodiment
The invention provides a kind of on-line measuring device and online test method, it utilizes steam production part, luminescence unit and the conveying mechanism of on-line measuring device to cooperatively interact, and comes friction matching (rubbing) situation on the orientation surface of online detection film.In an embodiment of the present invention to on-line measuring device and utilize the online test method of this on-line measuring device to elaborate.Secondly, the diagram among the embodiment has been omitted unnecessary assembly, and shows the assembly of part in the mode of relatively simplifying, so that know demonstration technical characterstic of the present invention.
First embodiment
Referring to Figure 1A, it shows the side view according to the on-line measuring device 200 of first embodiment of the invention.On-line measuring device 200 is used to detect film 260.Film 260 has orientation surface 261.On-line measuring device 200 comprises steam production part 210, luminescence unit 220 and conveying mechanism 230.
Steam production part 210 is provided with towards orientation surface 261.Steam production part 210 is used for forming vapor film 211 on orientation surface 261.Luminescence unit 220 is arranged on the top of film 260, is used for throw light 221 to film 260.Conveying mechanism 230 is used to guide film 260 to move with respect to luminescence unit 220.Light 221 reflects to form reflected light 223 by film 260, by receiving friction matching (rubbing) situation that reflected light 223 detects orientation surface 261.
In the present embodiment, the steam production part 210 of on-line measuring device 200, luminescence unit 220 and conveying mechanism 230 cooperatively interact, and detect the friction matching situation of the film 260 with orientation surface 261 continuously.Thus, if there is defective in film 260, alignment processing is affected to avoid back manufacturing process immediately.
The optical principle of utilizing the on-line measuring device 200 of present embodiment detects orientation surface 261 and whether has defective.Therefore, on-line measuring device 200 preferably is arranged in the darkroom, with the effect of the influence of the light around avoiding detection.
Shown in Figure 1A, the on-line measuring device 200 of present embodiment also comprises drying part 240 and at least one cleaning member 250.Drying part 240 is provided with towards orientation surface 261, to remove vapor film 211.Cleaning member 250 is used to clean orientation surface 261.Can increase the possibility that airborne particle (particle) is attached to film 260 because vapor film 211 is formed on the film 260, so cleaning member 250 can be removed the particle that is attached to film 260.Preferably, shown in Figure 1A, the on-line measuring device 200 of present embodiment comprises two cleaning members 250, and these two cleaning members 250 are separately positioned on two face side of film 260, with cleaning orientation surface 261 and opposite with orientation surface 261 surface.In the present embodiment, cleaning member 250 for example utilizes hyperacoustic vibration, comes air pressurized.Then, air pressurized blowed to film 260 after, again the particle suction is left the surface of film 260, with the surface of cleaning film 260.
As for the luminescence unit 220 of present embodiment for example Halogen lamp LED, fluorescent light or mercury vapor lamp.In addition, in the present embodiment, for example in artificial mode, by testing staff's 700 direct visual inspection reflected light 223 to detect film 260.221 of light are for example white light or green-yellow light preferably, and the wavelength coverage of green-yellow light is 510nm~590nm, so that human eye receives and distinguish the defective on orientation surface 261.Secondly, shown in Figure 1A, luminescence unit 220 is arranged on the side with respect to orientation surface 261.Yet the luminescence unit 220 of present embodiment also optionally is arranged on a side on corresponding orientation surface 261.Referring to Figure 1B, its luminescence unit 220 that shows Figure 1A is arranged on the synoptic diagram of a side on corresponding orientation surface 261.Luminescence unit 220 direct throw lights 221 detect to orientation surface 261.
In the present embodiment, luminescence unit 220 rotatable crevice projection angles are to adjust the direction of ray cast to film 260.Referring to Fig. 2, its luminescence unit 220 that shows Figure 1A rotates the synoptic diagram of crevice projection angle θ 1.In the present embodiment, the scope of crevice projection angle θ 1 can be 0 the degree to 180 the degree, in the practical application scope of crevice projection angle θ 1 preferably 0 the degree to 120 the degree.Be the position that dots before luminescence unit 220 rotates in Fig. 2, and represent position after luminescence unit 220 rotates crevice projection angle θ 1 with solid line.After luminescence unit 220 rotates crevice projection angle θ 1, to compare with the direction of original light 221 projections, light 225 can project on the film 260 from other direction accordingly.227 of reflected light behind light 225 contact membranes 260 can be used for detecting the friction matching situation on the orientation surface 261 of film 260, and the orientation defective that allows testing staff 700 can more clearly observe orientation surface 261 increases the accuracy that detects thus.In the present embodiment, the rotation of luminescence unit 220 for example utilizes artificial mode to rotate luminescence unit 220 or utilizes electromechanical equipment that luminescence unit 220 is rotated automatically.
In addition, shown in Figure 1A, the conveying mechanism 230 of on-line measuring device 200 for example comprises four guide rollers 231,233,235 and 237.Guide roller 231,233,235 and 237 contact membranes 260 utilize the rotation of these guide rollers 231,233,235 and 237 to guide film 260 and move.In the present embodiment, guide roller 231 and guide roller 233 are at a distance of a spacer segment setting, and two opposite surfaces of guide roller 231 and guide roller 233 difference contact membranes 260.Project film 260 corresponding to the interval as for light 221.
Though in the present embodiment, guide roller 231 shown in Figure 1A and 233 arrangement mode make film 260 be subjected to the part of light 221 projections perpendicular to surface level, yet other can allow the film 260 that is attached with vapor film 211 be subjected to the arrangement mode that light 221 throws, and all can be applicable to herein.For example, referring to Fig. 3, the synoptic diagram that its guide roller 231 and 233 that shows Figure 1A is arranged in another way.In Fig. 3, the part that film 260 is subjected to light 221 projection is with respect to having a tilt angle theta 2 at surface level, and the scope of this tilt angle theta 2 for example 0 degree to 90 degree.Thus, the friction matching situation on the orientation surface 261 of film 260 also can be by different angle inspections, to increase the accuracy that detects.Similarly, the luminescence unit 220 in Fig. 3 also optionally is arranged on a side opposite with orientation surface 261, the demand of looking the user.
Below just do an explanation according to the online test method of first embodiment of the invention, the online test method of present embodiment for example utilizes above-mentioned on-line measuring device 200 to detect the friction matching situation on the orientation surface 261 of film 260.Referring to Figure 1A and Fig. 4, Fig. 4 shows the process flow diagram according to the online test method of first embodiment of the invention simultaneously.
At first, in step 1001, when film 260 moves, on orientation surface 261, form vapor film 211.Utilize steam production part 210 to form vapor film 211 in the present embodiment, and utilize conveying mechanism 230 guiding films 260 to move.In this step, formation vapor film 211 is the orientation defectives in order to allow testing staff 700 can more clearly observe orientation surface 261 on orientation surface 261, to improve the effect that detects.
Then, in step 1003, throw light 221 is to film 260.Utilize luminescence unit 220 throw lights 221 in the present embodiment.Then, in step 1005, receive the reflected light 223 of light 221, detect the friction matching situation on orientation surface 261 by film 260 reflections.Because the online test method of present embodiment is whether to have defective by the orientation surface 261 that optical mode detects film 260, so this online test method is preferably carried out in the darkroom.Secondly, in the present embodiment, reflected light 223 for example utilizes artificial mode, and by testing staff's 700 direct visual inspections, 221 of light are white light or green-yellow light preferably, and the wavelength coverage of green-yellow light is 510nm~590nm.
Then, in step 1007, remove vapor film 211.Because step 1001 forms vapor film 211 on orientation surface 261, so step 1007 is for dry orientation surface 261, so that the carrying out of the manufacturing process of back.Present embodiment utilizes towards the drying part 240 on orientation surface 261 and removes vapor film 211.
Then, in step 1009, cleaning orientation surface 261.Can increase the possibility of particle because step 1001 forms vapor film 211 on film 260, so the carrying out of step 1009 can be removed attached to the particle on the film 260 attached to film 260.Present embodiment utilizes the surface of at least one cleaning member 250 cleaning film 260, thus, can then carry out the manufacturing process such as adhered film 260.
In the present embodiment, online test method also optionally comprises the step of adjustment ray cast to the crevice projection angle of film.As shown in Figure 2, light 221 can be adjusted the position by luminescence unit 220, projects the crevice projection angle θ 1 of film 260 with change.This step can constantly be carried out in detection according to the demand that detects, to improve the accuracy that detects.In the present embodiment, the scope of crevice projection angle θ 1 for example be 0 the degree to 180 the degree, in the practical application scope of crevice projection angle θ 1 preferably 0 the degree to 120 the degree.The above-mentioned flow process that is according to the online test method of first embodiment of the invention.
In the present embodiment, on-line measuring device and online test method are used for the manufacturing process at film 260, and direct-on-line detects its orientation surface 261, are present in the defective on orientation surface 261 with real-time discovery.Thus, when finding defective, can carry out corresponding processing immediately, defective produces to avoid on a large scale.Secondly, but because whether the orientation surface 261 of on-line measuring device 200 On line inspection films 260 has defective, therefore compare with traditional testing mechanism, the on-line measuring device 200 of present embodiment can reduce production costs and the time.In addition, do not need to expend man-hour or manpower when checking film 260 yet and take out film 260, to reduce the waste of material and manpower.
Second embodiment
The difference of the present embodiment and first embodiment is the design of guide roller.Referring to Fig. 5, it shows the side view according to the on-line measuring device 300 of second embodiment of the invention.In the present embodiment, the guide roller 331 of on- line measuring device 300 and 333 can move along a direction with respect to luminescence unit 320 respectively, be subjected to the part tilt angle theta 3 with respect to the horizontal plane that light 321 throws to adjust film 360, and the scope of this tilt angle theta 3 for example is that 0 degree is to 90 degree.
Above-mentioned mentioned guide roller 331 and 333 movably direction for example moves with horizontal direction H1 along vertical direction V1 and moves.Referring to Fig. 6 A and Fig. 6 B, Fig. 6 A shows the synoptic diagram that the guide roller 333 along continuous straight runs H1 of Fig. 5 move, and Fig. 6 B illustrates the synoptic diagram that the guide roller 331 of Fig. 5 moves along vertical direction V1.In Fig. 6 A and Fig. 6 B, dotted line is used to represent the position before guide roller moves, and solid line is used to represent the position after guide roller moves.As shown in Figure 6A, guide roller 333 moves along horizontal direction H1, and the film 360 that contacts with guide roller 333 also changes the position accordingly.That is to say that the part tilt angle theta 3 with respect to the horizontal plane that film 360 is subjected to light 321 projections becomes tilt angle theta 31.In addition, shown in Fig. 6 B, guide roller 331 vertically V1 moves, and the film 360 that contacts with guide roller 331 also changes the position.That is to say that film 360 is subjected to the part tilt angle theta 3 with respect to the horizontal plane of light 321 projections promptly can change into tilt angle theta 32 accordingly.Thus, can whether have defective with further detection orientation surface 361 from different direction throw lights 321 by mobile guide roller 331 or 333.
Though in the present embodiment, guide roller 333 along continuous straight runs H1 move (as shown in Figure 6A), guide roller 331 moves (shown in Fig. 6 B) along vertical direction V1, yet guide roller 333 also can move along vertical direction V1, and guide roller 331 also can move along horizontal direction H1, looks user's demand.In addition, the luminescence unit among Fig. 5 320 also optionally is arranged on the film 360 side opposite with orientation surface 361.
The online test method that present embodiment on-line measuring device 300 is also used according to first embodiment detects film 360.That is to say that on-line measuring device 300 can detect the friction matching situation of film 360 in real time according to step 1001 to the step 1009 of Fig. 4, its detailed steps repeats no more in this omission.In addition, because the guide roller 331 and the guide roller 333 of present embodiment can for example be that vertical direction V1 or horizontal direction H1 move along a direction, therefore, when the on-line measuring device 300 of application present embodiment detects, except that the described step of above-mentioned Fig. 4, also can carry out the step of mobile guide roller 331 or guide roller 333, to adjust the part tilt angle theta 3 with respect to the horizontal plane that film 360 is subjected to light 321 irradiations.Thus, the light 321 shown in Fig. 6 A or Fig. 6 B can different directions project on the film 360, to detect the friction matching situation on orientation surface 361.
On-line measuring device that the above embodiment of the present invention is disclosed and online test method, it utilizes conveying mechanism, steam production part and luminescence unit to cooperatively interact, and detects the film with orientation surface continuously.Conveying mechanism is used to guide film and moves, and the steam production part is used for forming vapor film on the orientation surface, luminescence unit then throw light to film.Thus, when receiving ray cast, can learn the friction matching situation on orientation surface, have the defective on orientation surface with real-time discovery to the reflected light of film.Compare with traditional checking mechanism, so not only can reduce production costs and the time, also do not need to expend man-hour or manpower when checking film and take out film, to reduce the waste of material and manpower.
In sum, though the present invention discloses as above with preferred embodiment, so it is not to be used to limit the present invention.Those skilled in the art without departing from the spirit and scope of the present invention, can do various changes and modification.Therefore, protection scope of the present invention is when being as the criterion with the scope that claims were defined.
The primary clustering symbol description
200,300: on-line measuring device 210: the steam production part
211: vapor film 220,320: luminescence unit
221,225,321: light 223,227: reverberation
230: conveying mechanism
231,233,235,237,331,333: guide roller
240: drying part 250: cleaning member
260,360: film 261,361: the orientation surface
700: testing staff H1: horizontal direction
V1: vertical direction θ 1: crevice projection angle
θ 2, θ 3, θ 31, θ 32: angle of inclination

Claims (10)

1. an on-line measuring device is used to detect film, and described film has the orientation surface, and described on-line measuring device comprises:
The steam production part is provided with towards described orientation surface, and described steam production part is used for forming vapor film on described orientation surface;
Luminescence unit is arranged on the top of described film, is used for throw light to described film; And
Conveying mechanism is used to guide described film to move with respect to described luminescence unit;
Wherein, described light reflects to form reflected light by described film, by receiving the friction matching situation that described reflected light detects described orientation surface.
2. on-line measuring device according to claim 1, wherein said conveying mechanism comprises:
At least one guide roller contacts described film, moves along the rotation direction of described guide roller to guide described film.
3. on-line measuring device according to claim 2, wherein said guide roller moves along a direction, to adjust the part angle of inclination with respect to the horizontal plane that described film is subjected to described ray cast.
4. on-line measuring device according to claim 3, the scope at wherein said angle of inclination are that 0 degree is to 90 degree.
5. on-line measuring device according to claim 3, wherein said conveying mechanism comprises:
Two guide rollers, described guide roller is provided with at interval at a distance of one, and corresponding to described interval, described guide roller contacts two surfaces of described film respectively to described ray cast to described film.
6. on-line measuring device according to claim 1, wherein said luminescence unit turns crevice projection angle, adjusts the direction of described ray cast to described film.
7. on-line measuring device according to claim 6, the scope of wherein said crevice projection angle are that 0 degree is to 180 degree.
8. on-line measuring device according to claim 1, wherein said light is white light.
9. on-line measuring device according to claim 1, wherein said light is green-yellow light, the wavelength coverage of described light is 510nm~590nm.
10. an online test method is used to detect film, and described film has the orientation surface, and described online test method comprises:
(a) when described film moves, on described orientation surface, form vapor film;
(b) throw light is to described film; And
(c) receive the reflected light of described light, detect the friction matching situation on described orientation surface by described film reflection.
CNA2007101434915A 2007-08-01 2007-08-01 On-line detecting device and on-line detecting method Pending CN101359129A (en)

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CNA2007101434915A CN101359129A (en) 2007-08-01 2007-08-01 On-line detecting device and on-line detecting method

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Application Number Priority Date Filing Date Title
CNA2007101434915A CN101359129A (en) 2007-08-01 2007-08-01 On-line detecting device and on-line detecting method

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CN101359129A true CN101359129A (en) 2009-02-04

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106198563A (en) * 2016-08-04 2016-12-07 中国乐凯集团有限公司 A kind of thin film flaw on-Line Monitor Device and method thereof
CN107255875A (en) * 2017-08-17 2017-10-17 京东方科技集团股份有限公司 A kind of orientation detection method and orientation detection means

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106198563A (en) * 2016-08-04 2016-12-07 中国乐凯集团有限公司 A kind of thin film flaw on-Line Monitor Device and method thereof
CN107255875A (en) * 2017-08-17 2017-10-17 京东方科技集团股份有限公司 A kind of orientation detection method and orientation detection means

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