CN106198563A - A kind of thin film flaw on-Line Monitor Device and method thereof - Google Patents
A kind of thin film flaw on-Line Monitor Device and method thereof Download PDFInfo
- Publication number
- CN106198563A CN106198563A CN201610632352.8A CN201610632352A CN106198563A CN 106198563 A CN106198563 A CN 106198563A CN 201610632352 A CN201610632352 A CN 201610632352A CN 106198563 A CN106198563 A CN 106198563A
- Authority
- CN
- China
- Prior art keywords
- thin film
- light source
- roll shaft
- point
- flaw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A kind of thin film flaw on-Line Monitor Device and method thereof, including thin film, roll shaft and light source, roll shaft drags thin film walking, and light source is arranged on the optional position that can shine directly into effective irradiation position, has after the thin film of reflective contacts with each other with roller bearing and forms convex mirror form.The present invention utilize convex mirror can the principle of enlarged drawing picture, micron-sized pressure wound can be grade by reflection light amplification or even Centimeter Level projects, in order to quickly locking pressure wound position, processes rapidly.The present invention can the condition of production of on-line real time monitoring thin film, improve the yield rate of thin film.
Description
Technical field
The present invention relates to a kind of device and method monitoring thin film flaw, belong to thin film technique field.
Background technology
In the production process of optical grade thin film, thin film is dragged to rolling through dragging system, adheres to through certain at thin film
When foreign body or surface are with the dragging system of concavo-convex damage, at foreign body stress and drag under tension force effect, can be to optical grade thin film
The most small damage is caused on surface.Front concave or convex that finished product shows as longitudinally occurring continuously with constant spacing, the back side with
Front is concavo-convex contrary, and product surface out-of-flatness, this flaw is referred to as in the industry pressure wound.Affect the apparent mass of product, reduce
Yield rate.
In film manufacturing processes, grade or even micron-sized foreign body can cause pressure wound disadvantage, cause pressure wound to have
Disguise, for removing pressure wound, generally adopts with the following method:
One is online observational method: whether online observation dragging system surface has the foreign body that can cause pressure wound, so that it is determined that
Pressure wound position.The method drawback is, is limited by equipment operation, observed range and macroscopic thing, be only capable of during online production
Finding the pressure wound that bigger grade foreign body causes, the pressure wound causing micron order foreign body is inoperative.
Another kind is sectional sampling method: first according to pressure wound spacing, the approximate location that locking pads injured labor is raw, then takes segmentation to take
Sample censorship, further determines that and reduces the position range of pressure wound, be finally cleaned the dragging system of pressure wound in-scope.This
The drawback of method is: (1) is easily generated splinter, or artificial pollution in sampling process, and these foreign bodies are attached to dragging system
Upper meeting causes new pressure wound；(2) method taking sectional sampling easily produces fold in sample position, thus causes part, with
And come is part debris from fouling equipment, again result in new pressure wound, which forms vicious cycle: process pressure wound and break
Sheet processes new pressure wound；(3) in sampling process during frequent switching apparatus cases door, variations in temperature is big, is easily generated precipitation pad
Wound.(4) determine that pressure wound position needs the censorship of many sub-samplings, easily cause process waste.
Summary of the invention
The present invention is directed to the drawback of prior art, it is provided that a kind of thin film flaw on-Line Monitor Device and method thereof, it can be
The condition of production of thin film monitored in real time by line, improves the yield rate of thin film.
Of the present invention technical problem is that solves by the following technical programs:
A kind of thin film flaw on-Line Monitor Device, including roll shaft, light source and screen, the dragging of described roll shaft is coated on thereon
Thin film is walked, and light source is arranged on the position that can be irradiated to effective range of exposures, light source the light sent is radiated on thin film,
And reflex on screen, and the projection on view screen, thin film pressure wound can be found.
Above-mentioned thin film flaw on-Line Monitor Device, described light source is the luminous body of interval configuration, and described source outer is arranged
Light source cover.
Above-mentioned thin film flaw on-Line Monitor Device, described light source cover is hemispherical, and the cross sectional shape of described light source cover is for throwing
Thing line, described light source is arranged in parabolical focus.
Above-mentioned thin film flaw on-Line Monitor Device, the surface of described roll shaft and thin film is smooth, has reflective.
Above-mentioned thin film flaw on-Line Monitor Device, the access point of thin film and roll shaft is the point of contact A between thin film and roll shaft, abjection
Point is another point of contact B between thin film and roll shaft, and the range of exposures of light source is: A point is along the C point of thin film epitaxy 1～3cm to B point
Any one panel region between the D point of thin film epitaxy 8～12cm.
Above-mentioned thin film flaw on-Line Monitor Device, described screen is the thin plate of surfacing, wall or curtain.
The on-line monitoring method of above-mentioned thin film flaw device, opens light source, and the light of light source is launched to along roll shaft operation
On thin film, then reflex on screen；If thin film has pressure wound, then the light being radiated on pressure wound point reflects through the roll shaft of convex surface
After, the pressure wound image of amplification can be formed on screen.
Above-mentioned thin film flaw on-line monitoring method, the directional light that light is uniform luminance that described light source is launched.
Above-mentioned thin film flaw on-line monitoring method, the light that described light source is launched is radiated at two that thin film is tangent with roll shaft
Between point of contact.
The invention have the advantages that
The present invention arranges detection device on the production line of thin film, and described detection device makes thin film move with the rotation of roll shaft
Dynamic, launch Ray Of Light in roll shaft side and expose on thin film.Owing to roll shaft is cylindrical, smooth surface, roll shaft can be considered one
Individual convex mirror, after light source is irradiated to thin film, roll shaft and thin film all have reflective, and the light of convex mirror maps to screen
On, the reflective projection of amplification can be formed, such that it is able to by micron-sized pressure wound tenfold, amplify, pressure wound just can be held very much Radix Achyranthis Bidentatae
Change places and be observed out, in order to quickly locking pressure wound position, process rapidly.
Accompanying drawing explanation
Fig. 1 is present configuration schematic diagram；
Fig. 2 is roll shaft camber reflection schematic diagram of the present invention；
Fig. 3 is light-source structure schematic diagram of the present invention.
In figure, each label is expressed as: 1, thin film, and 2, screen, 3, roll shaft, 4, light source, 5, light source cover.
Detailed description of the invention
Refering to accompanying drawing 1, the present invention includes roll shaft 3, light source 4 and screen 2, and roll shaft 3 drags and is coated on thin film 1 row thereon
Walking, light source 4 is arranged on the optional position that can be irradiated to effective range of exposures, light source the light sent is radiated on thin film,
And reflex on screen 2, and the projection on view screen, thin film pressure wound can be found.The range of exposures of light source 4 is: thin film 1 and roller
The access point of axle 3 is the point of contact A between thin film 1 and roll shaft 3, and abjection point is another point of contact B, the A point edge between thin film 1 and roll shaft 3
The C point of thin film epitaxy 1～3cm to B point along the D point of thin film epitaxy 8～12cm between arbitrary panel region.
Observe for the ease of operator, when operator irradiates the C point of thin film 1 with light source 4, first can be appreciated that the one of pressure wound
Individual metastable reflective projection, when pressure wound is with the access point A of operating to thin film 1 and roll shaft 3, due to the destruction thin film of pressure wound
Flatness, make thin film local deformation, the reflective projection of light source 4 can observe the local shape of exaggerated thin film 1 on screen
Become image, thus judge the existence of pressure wound.
When the access point A fore-and-aft distance that light source irradiation position distance thin film 1 is contacted with roll shaft 3 is excessive, pressure wound does not also have
There is generation, it is impossible to well utilize the access point A of thin film 1 and roll shaft 3 to produce reflective projection image and observe, cause light simultaneously
The waste of line.
Pressure wound on thin film 1, along with operating, after departing from roll shaft 3, loses foreign body stress, by extraneous factor (temperature, tension force
Deng) impact, have a reduction of certain flatness, but at the abjection point B of thin film 1 and roll shaft 3 along before thin film epitaxy 8～12cm,
Flatness reduction is inconspicuous, and pressure wound still can be by source reflection projective amplification, so that it is determined that the position of pressure wound.
Refering to accompanying drawing 2, the smooth surface of roll shaft 3 of the present invention, because roll shaft 3 has certain reflective, thin film 1 is same
There is reflective, add after roll shaft 3 is wrapped up by thin film 1 and form convex mirror form.Convex mirror makes reflection light send out relative to incident illumination
The principle dissipated, so that image amplifies, micron-sized pressure wound can be grade by reflection light amplification or even Centimeter Level projects, in order to
Quickly locking pressure wound position, processes rapidly.
Refering to accompanying drawing 3, described light source 4 is outside arranges light source cover 5, and described light source cover 5 is hemispherical, the cross section of light source cover 5
Being shaped as parabola, described light source 4 is arranged in parabolical focus, and light source 4 becomes in-line to be uniformly distributed, or light source 4 is
A piece luminous tube, arranges light source cover 5 outside luminous tube, cross sectional shape is parabola, and luminous tube is arranged on the line of nodes of light source cover 5
On.After so the light of injection impinges upon on thin film, being the directional light of a piece of brightness uniformity, directional light has boundary line, so
During observation thin film, one section of ground of the one of thin film 1 section can be carried out Continuous Observation, finer can look for pressure wound.
In thin film 1 production process, thin film 1 is supported dragging by roll shaft 3, has contacted thin film 1 with roll shaft 3 with light source 4
Effect observation scope is irradiated through row, and its reflection light forms a stable projection amplified by curved surface.If with the presence of foreign body, screen
Reflective projection will produce on curtain 2 exaggerated thin film 1 local deformation projection.
Claims (9)
1. a thin film flaw on-Line Monitor Device, it is characterised in that include roll shaft (3), light source (4) and screen (2), described roller
Axle (3) drags and is coated on thin film thereon (1) walking, and light source (4) is arranged on the position that can be irradiated to effective range of exposures, by
The light that light source sends is radiated on thin film and reflexes on screen (2), and the projection on view screen can find film pad
Wound.
Thin film flaw on-Line Monitor Device the most according to claim 1, it is characterised in that described light source is interval configuration
Luminous body, the outside of described light source (4) arranges light source cover (5).
Thin film flaw on-Line Monitor Device the most according to claim 2, it is characterised in that the cross section of described light source cover (5)
Being shaped as parabola, described light source (4) is arranged in parabolical focus.
Thin film flaw on-Line Monitor Device the most according to claim 3, it is characterised in that described roll shaft (3) and thin film (1)
Surface be smooth, there is reflective.
Thin film flaw on-Line Monitor Device the most according to claim 4, it is characterised in that thin film (1) connects with roll shaft (3)
Access point is the point of contact A between thin film (1) and roll shaft (3), and abjection point is another point of contact B between thin film (1) and roll shaft (3), light source
(4) effective range of exposures is: between A point is along the C point of thin film epitaxy 1～3cm to B point along the D point of thin film epitaxy 8～12cm
Any one panel region.
6. want the thin film flaw on-Line Monitor Device described in 5 according to right, it is characterised in that described screen (2) is surfacing
Thin plate, wall or curtain.
7. use a thin film flaw on-line monitoring method for device, its feature as described in right any one of claim 1-6
Being, using device as described in right any one of claim 1-6, open light source (4), the light of light source (4) is launched to edge
The thin film (1) that roll shaft (3) runs is upper, then reflex on screen；If thin film (1) has pressure wound, then it is radiated at the light on pressure wound point
Line, can be at the upper pressure wound image forming amplification of screen (2) after the roll shaft (3) of convex surface reflects.
Thin film flaw on-line monitoring method the most according to claim 7, it is characterised in that the light that described light source (4) is launched
Line is the directional light of uniform luminance.
Thin film flaw on-line monitoring method the most according to claim 8, it is characterised in that the light that described light source (4) is launched
Line is radiated between thin film and tangent two point of contacts of roll shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610632352.8A CN106198563B (en) | 2016-08-04 | 2016-08-04 | Film flaw online monitoring device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610632352.8A CN106198563B (en) | 2016-08-04 | 2016-08-04 | Film flaw online monitoring device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106198563A true CN106198563A (en) | 2016-12-07 |
| CN106198563B CN106198563B (en) | 2020-05-12 |
Family
ID=57498630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610632352.8A Active CN106198563B (en) | 2016-08-04 | 2016-08-04 | Film flaw online monitoring device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106198563B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112840206A (en) * | 2018-09-06 | 2021-05-25 | 日立安斯泰莫株式会社 | Surface measuring method, component manufacturing method, component inspection method, and component measuring device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1461947A (en) * | 2002-05-31 | 2003-12-17 | 住友化学工业株式会社 | Method and device for investigating polarization film |
| CN101359129A (en) * | 2007-08-01 | 2009-02-04 | 达信科技股份有限公司 | On-line detecting device and on-line detecting method |
| CN101363973A (en) * | 2007-08-06 | 2009-02-11 | 达信科技股份有限公司 | On-line detecting device and on-line detecting method |
-
2016
- 2016-08-04 CN CN201610632352.8A patent/CN106198563B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1461947A (en) * | 2002-05-31 | 2003-12-17 | 住友化学工业株式会社 | Method and device for investigating polarization film |
| CN101359129A (en) * | 2007-08-01 | 2009-02-04 | 达信科技股份有限公司 | On-line detecting device and on-line detecting method |
| CN101363973A (en) * | 2007-08-06 | 2009-02-11 | 达信科技股份有限公司 | On-line detecting device and on-line detecting method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112840206A (en) * | 2018-09-06 | 2021-05-25 | 日立安斯泰莫株式会社 | Surface measuring method, component manufacturing method, component inspection method, and component measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106198563B (en) | 2020-05-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206057213U (en) | A kind of device of on-line monitoring thin film flaw | |
| CN103424343B (en) | Optical particle detecting device and particle detecting method | |
| AU2013203817B2 (en) | Monitoring device for monitoring a surface of a roll of a roller crusher, a high pressure roller crusher, a sizer, use of a monitoring device, a method for monitoring a surface of a roll of a roller crusher, and a computer program | |
| EP1990624A3 (en) | Apparatus and method for evaluating an optical system | |
| CN106198563A (en) | A kind of thin film flaw on-Line Monitor Device and method thereof | |
| JP2009506813A (en) | Stent automatic inspection device and automatic inspection method | |
| Do et al. | Vision-based surface defect inspection of metal balls | |
| JP2017136212A5 (en) | ||
| EP1686609A3 (en) | Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus | |
| BR112022011740A2 (en) | TREATMENT DEVICE FOR PERFORMING A TREATMENT OPERATION ON AN INDIVIDUAL, SYSTEM, METHOD FOR DETERMINING WHETHER A TREATMENT DEVICE IS IN CONTACT WITH THE SKIN AND COMPUTER PROGRAM PRODUCT | |
| WO2019064810A1 (en) | Appearance inspection device and appearance inspection method | |
| JP2003329606A (en) | Inner surface inspection device | |
| CN108396537B (en) | Photoelectric cloth inspecting machine capable of adjusting tension | |
| US20190339199A1 (en) | Method for observing an object | |
| US10867379B2 (en) | Method and apparatus for optically inspecting a mold for manufacturing ophthalmic lenses for possible mold defects | |
| JP6951439B2 (en) | Surface inspection method, surface inspection equipment and product manufacturing method | |
| JP2009294033A (en) | Horn monitor of pantograph | |
| JPH07234187A (en) | Method and device for detecting surface detect of glass substrate | |
| ITTV20120151A1 (en) | APPARATUS FOR DETECTING VISUAL DEFECTS | |
| JPWO2018168510A1 (en) | Cylindrical surface inspection device and cylindrical surface inspection method | |
| CZ30554U1 (en) | A device for high-speed monitoring of the process of production of nanofibres by electrostatic spinning | |
| JPH06129995A (en) | Optical inspection device for surface defect | |
| JP2012173194A (en) | Surface inspection device, surface inspection method, and film manufacturing devise | |
| JP5696582B2 (en) | Running yarn inspection method and yarn manufacturing method | |
| JP4794383B2 (en) | Rubber hose appearance inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220225 Address after: 223800 100 meters south of the intersection of Yongjin road and Kexing Road, development zone, Sucheng District, Suqian City, Jiangsu Province Patentee after: Photoelectric materials Co.,Ltd. Address before: 071054, 6 Kennan Avenue, Baoding, Hebei Patentee before: CHINA LUCKY Group Corp. |