CN101358918B - 用于进行石英增强的光声光谱测量的方法和气体传感器 - Google Patents
用于进行石英增强的光声光谱测量的方法和气体传感器 Download PDFInfo
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- CN101358918B CN101358918B CN2008102147823A CN200810214782A CN101358918B CN 101358918 B CN101358918 B CN 101358918B CN 2008102147823 A CN2008102147823 A CN 2008102147823A CN 200810214782 A CN200810214782 A CN 200810214782A CN 101358918 B CN101358918 B CN 101358918B
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- tuning fork
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N24/00—Investigating or analyzing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects
- G01N24/004—Using acoustical resonance, i.e. phonon interactions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Acoustics & Sound (AREA)
- High Energy & Nuclear Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07014498.5 | 2007-07-24 | ||
EP07014498.5A EP2019307B1 (en) | 2007-07-24 | 2007-07-24 | Method and gas sensor for performing quartz-enhanced photoacoustic spectroscopy |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101358918A CN101358918A (zh) | 2009-02-04 |
CN101358918B true CN101358918B (zh) | 2011-11-23 |
Family
ID=38683475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008102147823A Active CN101358918B (zh) | 2007-07-24 | 2008-07-24 | 用于进行石英增强的光声光谱测量的方法和气体传感器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7605922B2 (zh) |
EP (1) | EP2019307B1 (zh) |
JP (1) | JP4431622B2 (zh) |
KR (1) | KR20090010895A (zh) |
CN (1) | CN101358918B (zh) |
CA (1) | CA2638053A1 (zh) |
Families Citing this family (42)
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EP2092323A1 (en) * | 2006-11-10 | 2009-08-26 | Koninklijke Philips Electronics N.V. | Oscillator element for photo acoustic detector |
US7924423B2 (en) * | 2008-08-11 | 2011-04-12 | Ut-Battelle, Llc | Reverse photoacoustic standoff spectroscopy |
US7961313B2 (en) * | 2008-08-11 | 2011-06-14 | Ut-Battelle, Llc | Photoacoustic point spectroscopy |
US8194246B2 (en) * | 2008-08-11 | 2012-06-05 | UT-Battellle, LLC | Photoacoustic microcantilevers |
CN101551351B (zh) * | 2009-05-07 | 2012-06-20 | 郑俊褒 | 基于光催化技术的VOCs检测系统和检测方法及自洁净方法 |
US20110016962A1 (en) * | 2009-07-21 | 2011-01-27 | Baker Hughes Incorporated | Detector for Characterizing a Fluid |
DE102009028994B3 (de) * | 2009-08-28 | 2011-02-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum spektroskopischen Nachweis von Molekülen |
US20110072886A1 (en) * | 2009-09-30 | 2011-03-31 | Catherine Genevieve Caneau | Gas Sensor Based On Photoacoustic Detection |
US8448261B2 (en) * | 2010-03-17 | 2013-05-21 | University Of Tennessee Research Foundation | Mode synthesizing atomic force microscopy and mode-synthesizing sensing |
US20110231966A1 (en) * | 2010-03-17 | 2011-09-22 | Ali Passian | Scanning probe microscopy with spectroscopic molecular recognition |
US8080796B1 (en) | 2010-06-30 | 2011-12-20 | Ut-Battelle, Llc | Standoff spectroscopy using a conditioned target |
JP5669950B2 (ja) * | 2010-10-28 | 2015-02-18 | エンパイア テクノロジー ディベロップメント エルエルシー | 光音響センサー |
US8434366B2 (en) | 2010-12-15 | 2013-05-07 | Texas Instruments Incorporated | Active detection techniques for photoacoustic sensors |
CN102954948B (zh) * | 2011-08-26 | 2014-11-12 | 中国科学院安徽光学精密机械研究所 | 光声光谱气体传感器 |
CN102519904A (zh) * | 2011-12-13 | 2012-06-27 | 重庆大学 | 六氟化硫分解组分的自动恒温型光声检测装置及实验方法 |
CN103163080B (zh) * | 2011-12-14 | 2015-07-15 | 中国科学院合肥物质科学研究院 | 一种用于农田多种气体实时在线监测装置 |
US8848191B2 (en) | 2012-03-14 | 2014-09-30 | Honeywell International Inc. | Photoacoustic sensor with mirror |
CN103389270A (zh) * | 2012-05-11 | 2013-11-13 | 张妍 | 一种测量痕量气体浓度的装置及方法 |
US9535749B2 (en) | 2012-05-11 | 2017-01-03 | Infosys Limited | Methods for managing work load bursts and devices thereof |
CN103105365A (zh) * | 2013-01-16 | 2013-05-15 | 西安交通大学 | 一种基于石英微音叉光声效应的光声光谱遥测方法及装置 |
CN103175791B (zh) * | 2013-02-04 | 2015-03-04 | 山西大学 | 多石英晶振光谱测声器及采用该测声器的气体探测装置 |
CN103175790B (zh) * | 2013-02-04 | 2015-05-13 | 山西大学 | 双石英晶振光谱测声器及采用该测声器的气体探测装置 |
US9677907B2 (en) * | 2013-03-14 | 2017-06-13 | Itron Inc | Intelligent receptacle |
US20140373599A1 (en) * | 2013-06-25 | 2014-12-25 | Texas Instruments Incorporated | Detection and locking to the absorption spectra of gasses using quartz enhanced photoacoustic sprectroscopy |
CN103293107A (zh) * | 2013-06-28 | 2013-09-11 | 中国科学院半导体研究所 | 基于石英音叉增强气体光声光谱的空气湿度动态检测装置 |
CN103472002B (zh) * | 2013-09-27 | 2016-03-02 | 山东大学 | 一种光纤激光器腔内光声光谱气体检测系统 |
US20150201005A1 (en) * | 2014-01-10 | 2015-07-16 | Data Accelerator Ltd. | Data deployment and statistics tracking |
CN103837226B (zh) * | 2014-03-17 | 2016-01-20 | 山西大学 | 双谐振腔光声光谱测声器及采用该测声器的气体探测装置 |
CN104280340B (zh) * | 2014-10-28 | 2016-08-03 | 山西大学 | 基于led光源并采用电学调制相消法的气体探测装置及方法 |
CN104697934A (zh) * | 2015-03-20 | 2015-06-10 | 山东大学 | 一种石英音叉双光束系统测量气体浓度的方法 |
US10444199B2 (en) | 2016-04-08 | 2019-10-15 | The Chinese University Of Hong Kong | Evanescent-wave quartz-enhanced photoacoustic sensor with resonator elements |
CN106124411B (zh) * | 2016-06-29 | 2018-10-19 | 内江师范学院 | 一种宽光谱型光声光谱痕量物质远距离探测装置及方法 |
CA3069429A1 (en) * | 2017-07-11 | 2019-01-17 | Saudi Arabian Oil Company | Photoacoustic gas detection |
US10228322B2 (en) * | 2017-07-13 | 2019-03-12 | Cymer LLC | Apparatus for and method of sensing fluorine concentration |
CN108593763B (zh) * | 2018-03-26 | 2021-03-30 | 山东大学 | 一种基于石英音叉频分解调的多组分气体实时检测装置 |
US11754533B2 (en) | 2018-05-11 | 2023-09-12 | Carrier Corporation | Photoacoustic detection system with clocked tuning fork positions |
EP3761006A1 (en) | 2019-07-03 | 2021-01-06 | Nokia Technologies Oy | Photoacoustic apparatus and methods |
CN111735797B (zh) * | 2020-07-08 | 2023-04-07 | 安徽大学 | 一种基于超薄二维半导体材料涂敷石英音叉的气体传感器 |
KR102426648B1 (ko) | 2020-10-20 | 2022-07-29 | 한국과학기술연구원 | 집적형 광음향 가스 센서 및 이의 제조방법 |
CN113552212B (zh) * | 2021-06-23 | 2023-03-28 | 暨南大学 | 径向腔石英增强光声光谱测声器及其气体探测装置 |
CN113567377B (zh) * | 2021-07-29 | 2024-03-26 | 安徽大学 | 一种基于石英音叉的免校准波长调制气体检测装置及方法 |
CN114018829B (zh) * | 2021-10-27 | 2024-05-10 | 国网四川省电力公司电力科学研究院 | 一种音叉共振增强的双光梳多组分气体检测系统 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3911276A (en) * | 1974-10-18 | 1975-10-07 | Diax Corp | Laser spectroscopy |
US4058725A (en) * | 1975-04-04 | 1977-11-15 | Aine Harry E | Infrared absorption spectrometer employing a dual optoacoustic detector |
DK160590C (da) * | 1988-09-12 | 1991-09-16 | Fls Airloq As | Fremgangsmaade til detektering af en gasart ved hjaelp af fotoakustisk spektroskopi |
DE69735411T2 (de) * | 1996-10-09 | 2006-09-07 | Symyx Technologies, Inc., Santa Clara | Infrarot-spektroskopie und abbildung von bibliotheken |
US7245380B2 (en) * | 2002-06-10 | 2007-07-17 | William Marsh Rice University | Quartz-enhanced photoacoustic spectroscopy |
US7387021B2 (en) * | 2005-05-24 | 2008-06-17 | Baker Hughes Incorporated | Method and apparatus for reservoir characterization using photoacoustic spectroscopy |
EP1896690B1 (en) * | 2005-05-24 | 2011-12-14 | Baker Hughes Incorporated | A method and apparatus for reservoir characterization using photoacoustic spectroscopy |
EP1750116B1 (en) * | 2005-08-04 | 2013-04-17 | Axetris AG | Gas concentration detection method and device |
-
2007
- 2007-07-24 EP EP07014498.5A patent/EP2019307B1/en active Active
-
2008
- 2008-01-08 US US11/970,570 patent/US7605922B2/en active Active
- 2008-07-17 KR KR1020080069452A patent/KR20090010895A/ko not_active Application Discontinuation
- 2008-07-17 CA CA002638053A patent/CA2638053A1/en not_active Abandoned
- 2008-07-18 JP JP2008187050A patent/JP4431622B2/ja active Active
- 2008-07-24 CN CN2008102147823A patent/CN101358918B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009031282A (ja) | 2009-02-12 |
US20090027677A1 (en) | 2009-01-29 |
KR20090010895A (ko) | 2009-01-30 |
EP2019307A1 (en) | 2009-01-28 |
JP4431622B2 (ja) | 2010-03-17 |
US7605922B2 (en) | 2009-10-20 |
CA2638053A1 (en) | 2009-01-24 |
EP2019307B1 (en) | 2018-10-03 |
CN101358918A (zh) | 2009-02-04 |
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