CN101357305B - Preparation device and method of low-concentration gas of certain humidity - Google Patents
Preparation device and method of low-concentration gas of certain humidity Download PDFInfo
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- CN101357305B CN101357305B CN200810120730XA CN200810120730A CN101357305B CN 101357305 B CN101357305 B CN 101357305B CN 200810120730X A CN200810120730X A CN 200810120730XA CN 200810120730 A CN200810120730 A CN 200810120730A CN 101357305 B CN101357305 B CN 101357305B
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- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000001273 butane Substances 0.000 claims description 2
- QGJOPFRUJISHPQ-NJFSPNSNSA-N carbon disulfide-14c Chemical compound S=[14C]=S QGJOPFRUJISHPQ-NJFSPNSNSA-N 0.000 claims description 2
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- ATUOYWHBWRKTHZ-UHFFFAOYSA-N dimethylmethane Natural products CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 2
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 1
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Abstract
A preparation device of low-concentration gas with certain humidity consists of a capillary tube and a tee or two-way air-tight joint which are communicated with a carrier gas cylinder, a mass flow controller, a heating diffusion bottle, a humidity generating bottle and a gas mixing tank. The diffusion bottle is arranged in a heater and is communicated with the capillary tube by a capillary needle tube, and a diffusion gas control section with corresponding numbers and parameters is assembled and arranged according to the varieties and numbers of the prepared gas components. The gas mixing tank is provided with a hygrometer for real-time determination of the humidity of the prepared gas. As a diffusion-dilution type dynamic gas distribution method is adopted, the device of the invention can prepare the low-concentration gas with certain humidity, and is characterized by low cost, simple operation, low gas consumption, stable gas distribution, wide humidity regulation range, wide application, etc.
Description
Technical field
The invention belongs to the gas preparing technical field, relate to a kind of compound method and device of light concentration gas, specifically be meant a kind of device for formulating and compound method of utilizing material volatilization or the realization of distillation diffusion property to contain the light concentration gas of certain humidity.
Background technology
The light concentration gas that contains certain humidity is widely used in the experimental study and the examination and test of products.The low concentration specific gas that contains certain humidity can be used for the check calibration of the check of gas sensitive performance, analytical instrument etc., and low-concentration flue gas can be applicable to the check of fire, toxic gas alarm.In addition, light concentration gas can be widely used in environmental protection, national defence metrology and experimental study.In the gas sensitive development process, light concentration gas is essential as the material property check; In the check calibration of analytical instrument, the light concentration gas with steady concentration is related to the accuracy of checking calibration result; And in the environmental classes experimental study, because harmful gas concentration lower with respect to the industrial gas emission mouth in the atmospheric environment, often need to investigate degraded, the polluting property of light concentration gas, research and development have that operation is simple and easy, security good, the device for formulating and the method for the light concentration gas that contains certain humidity of with low cost, the stable advantages of higher of distribution are most important.
At present main air distributing method has static distribution method and dynamic air-distributing method.
Static distribution method mainly contains: weighing method, static capacity method, branch platen press etc.It is in a kind of high pressure or pressurizing vessel that a certain amount of unstripped gas is added known volume, charges into the diluent gas mixing again and makes, and takes agitating device such as fan to help that gas reaches balance in the container in case of necessity.Object gas concentration calculates according to adding unstripped gas and dilution tolerance and vessel volume.The advantage of this distribution method is that equipment is simple, processing ease, but because volatile source sampling amount restriction, this method can not realize the low concentration distribution of small size gas distributing chamber, the intermittent reaction experimental study that generally is used for large volume, in addition, because the absorption problem of gas distributing chamber, often configuration concentration and calculating concentration have certain deviation, especially bigger at preparation light concentration gas time error, and the gas concentration scope of preparation also is subjected to certain restriction, also is not suitable for the long situation of object gas large usage quantity or duration of ventilation requirement.
The dynamic air-distributing method mainly contains flow-rate ratio mixing method, osmosis, diffusion method, decides volumetric method, electrolysis etc.This method makes the unstripped gas of concentration known enter blender with carrier gas by constant ratio to mix, thereby continuously prepares and supply with object gas, calculates the concentration of object gas according to thinner ratio.The dynamic air-distributing method is applicable to the standard gas of preparation low concentration, can be used for the long occasion of large usage quantity or duration of ventilation requirement.A kind of multi-path infiltration type air distributing device (CN1765474A) has been introduced a kind of multi-path infiltration type air distributing device of being made up of background carrier gas source, gas gating system, gas flow control device, Room multi-cavity/pipe permeate chamber, gas collecting apparatus.Simple, the simple to operate and advantages such as mist that can prepare different size and/or variable concentrations simultaneously of this apparatus structure, but there is following deficiency in this method: osmos tube needs the balance long period in constant temperature system before use, and increasing osmos tube in time during with use can be tending towards exhausting, permeability is changed, and need constantly to change osmos tube; Adopt Room multi-cavity/pipe permeate chamber to make that osmos tube temperature and gas flow are regulated mutually when mixed gas compounding and become complicated; This method can not be prepared the gas with certain humidity.The quick dynamic air-distributing device of osmos tube (CN2421650Y) provides a kind of device and technology of utilizing the quick distribution of osmos tube, at the interior formula air distributing device that oozes, osmos tube, thermostatic chamber, gas circuit are combined as overall structure, realize the replacing of osmos tube by quick connection-peg, simple and compact for structure, easy to use, but preparation still need be changed osmos tube during gas with various, operate more loaded down with trivial detailsly, also can't prepare the gas of certain humidity.Be mixed gas and feeder (CN2555922Y) of high accuracy discloses a kind of high accuracy be mixed gas and feeder, utilize parallel gas circuit to realize the be mixed purpose of different mists of single cover air distributing device by the multidigit switching valve, it has the uniform and stable advantage of air feed for the bigger gas gas supply system that is mixed of flow, but this device is not suitable for the preparation that contains higher boiling (normal temperature liquid state) component mist.
To sum up, above-mentioned air distributing method is not to have problems such as gas circuit complexity, complex operation, operating cost height, technology be not mature enough, but have the preparation low concentration exactly or contain the light concentration gas difficulty of certain humidity big, can't prepare the higher boiling gas composition, the big distribution body type of carrier gas air consumption is limited and has the problem such as stable undesirable that causes by source of the gas, mass transfer, absorption etc.In view of the widespread demand of current light concentration gas in fields such as environmental protection, gas sensitive research and development, instrument testing calibration, safety in production, national defence metrology and scientific researches; it is low, simple to operate to invent a kind of cost, and the accurate air distributing device of low concentration that can prepare certain humidity requirement as required has remarkable economic efficiency and social benefit.
Summary of the invention
The present invention is directed to that present light concentration gas preparation difficulty is big, distribution is unstable, complicated operation is loaded down with trivial details, air consumption is big, the suitable gas type is limited, be difficult to prepare the technical problems such as gas with certain humidity, provide a kind of preparation of adopting diffusion dilution formula dynamic air-distributing method to contain the light concentration gas air distributing method and the device of certain humidity, have that cost is low, simple to operate, air consumption is little, distribution is stable, widely used characteristics.
The device for formulating that contains the light concentration gas of certain humidity provided by the invention partly is made up of carrier gas control section, diffusion gas control system part, humidity control section, dry air air path part and gas concentration mixed stability, and each part mentioned above is by capillary and threeway or the connection of two general formula air-tightness joints.The carrier gas control section comprises carrier gas steel cylinder and mass flow controller; Diffusion gas control system partly comprises heating diffusion vial and heater, and described heating diffusion vial is built in the heater of liquid level stabilizing, and only the port of export by the capillary needle tubing is connected with main body gas circuit capillary; The humidity control section comprises that bottle takes place for mass flow controller and humidity, and described humidity takes place to fill the distilled water of CL height in the bottle, and is built-in with the liquid level automatic control device, makes the air inlet capillary end be positioned at constant relatively position, liquid level below; The dry air air path part is to be communicated with mass flow controller by capillary; The gas concentration mixed stability is partly for mixing gas tank.Mixed gas tank disposes the humidity of hygrometer with The real time measure preparation gas.
Effect of this device each several part and gas flow process are as follows: the carrier gas of discharging in the carrier gas steel cylinder of carrier gas control section is split into three the tunnel through three-way connection, is respectively source gas gas circuit, moisture road and dry gas road.Carrier gas forms the dilution carrier gas with constant flow rate in the gas gas circuit of source after mass flow controller is accurately controlled flow, and through the capillary needle tubing port of export of main body capillary flow to diffusion gas control system part, carrier gas forms the air-blowing carrier gas with constant flow rate in the moisture road after mass flow controller is accurately controlled flow, and the air inlet capillary end is blown in the distilled water in bottle takes place humidity, the space forms the carrier gas with 100% humidity in the bottle on liquid level top, and the carrier gas on dry gas road forms the pure dilution carrier gas with constant flow rate after mass flow controller is accurately controlled flow; Gas source material gas of evaporating after heating diffuses to space in the bottle on gas source material top in the heating diffusion vial, and the saturated vapor pressure gas of formation diffuses to the port of export through the capillary needle tubing; The gas of the port of export enters mixed gas tank together through main body gas circuit capillary under the dilution purging effect of the dilution carrier gas with target flow of the port of export of flowing through; The dilution carrier gas that liquid level top 100% humidity in the bottle takes place humidity continues from the capillary gas outlet that bottle takes place humidity to enter mixed gas tank through connecting the capillary that bottle and mixed gas tank take place humidity under the inside and outside differential pressure effect; Above-mentioned three road gases promptly form the light concentration gas with certain humidity behind the mixed stability in mixing gas tank.
Heater of the present invention is the equipment that constant temperature water bath, thermostat water bath, constant temperature electric heating cover, multifunction constant temperature circulator bath equipment or intelligent high low temperature bath of liquid groove etc. can accurately be controlled temperature.
Heating diffusion vial of the present invention adopts non-adsorptivity or low absorbability temperature-resistant materials such as quartz, polytetrafluoroethylene (PTFE), glass.The heating diffusion vial is immersed in water-bath or below the bath of liquid liquid level, perhaps is wrapped in fully in the heater, only is communicated with main gas circuit by the capillary needle tubing, and a plurality of heating diffusion vial are placed gas with various source material.
Capillary needle tubing of the present invention is tightly connected with diffusion vial for the hard capillary of the similar injection needle that adopts stainless steel, and at the embedded latex plug in the thin bore of bottleneck exit, silica gel plug etc. to improve air-tightness.Realize that by two general formula joints the capillary needle tubing port of export is connected with the main body gas circuit is capillaceous, the length of capillary needle tubing is 3～20cm, and internal diameter is 0.1～0.8mm.
Bottle takes place and adopts a glass, quartz, stainless steel or polytetrafluoroethylene (PTFE) etc. that carrier gas is had not adsorb or the material of low adsorption capacity in humidity of the present invention, it is relative constant to realize the interior liquid level of bottle with automatic water-replenishing device to be built-in with automatic liquid level modulator in the bottle, bottle mouth position is embedded with air-tightness rubber stopper or latex plug, and realizes that by the air inlet capillary and the capillary of giving vent to anger humidity bottle takes place is connected with the air-tightness of mass flowmenter and mixed gas tank respectively.
Caliber size capillaceous and the length that is used for source gas gas circuit each several part connection of the present invention can require select according to the preparation gas concentration, by changing capillary length and caliber, can effectively realize the regulation and control of gas concentration.Source gas gas circuit capillary total length is (80～250) * N cm (N is the number of component kind in the gas of required preparation), and internal diameter is 0.1～2.0mm.
The capillary that is used for the connection of device each several part of the present invention adopts unstrpped gas, carrier gas inertia and non-absorption or low sorbing material (as stainless steel, polytetrafluoroethylene (PTFE), quartz, copper or brass, glass and aluminium etc.), can require to realize capillaceous being used in combination of unlike material type according to source gas, carrier gas kind and preparation, can be according to source gas and gas of carrier gas character in gas circuit separately and mix the capillary that gas circuit adopts only material type.
Device of the present invention can increase in the dry gas road quantity of diffusion gas control system part in actual implementation process, with the low concentration mixing distribution of the multiple gases that realizes certain humidity.
The job step that apparatus of the present invention are prepared the light concentration gas of certain humidity is: (1) selects the gas device for formulating of the diffusion gas control system part of respective number setting, the capillary needle tubing that is fit to and caliber capillaceous, length, material according to object gas component kind preparation requirement, with the gas source material pack into the heating diffusion vial in, diffusion vial is built in the heater and keeps the heater liquid level relatively stable, accurately controls the temperature of gas source material appointment in the diffusion vial by heater.(2) distilled water of suitable level takes place to hold in the bottle in humidity, opens automatic water level controller and automatic water-replenishing device.(3) open carrier gas steel cylinder Pressure gauge and be adjusted to convenient pressure, adjusting source gas gas circuit, moisture road and dry gas road mass flow controller are to desired flow, according to source gas gas circuit flow and by regulating and control moisture road and dry gas road mass flow controller registration ratio to realize the regulation and control of humidity.(4) the dilution carrier gas with certain flow through main body gas circuit capillary flow to the capillary needle tubing port of export, with the dilution of source gas purging and continue to enter mixed gas tank through main body gas circuit capillary; Carrier gas with certain humidity enters mixed gas tank through the capillary with the gas concentration mixing portion, and after the system that treats was stable, the gas that mixes gas tank outlet was light concentration gas.
Gas source material of the present invention is one or more in volatile organic matter and the inorganic matter.The organic gas source material of volatilization comprises the methane halides, the ethane halides, the propane halides, the butane halides, pentane and halides thereof, hexane and halides thereof, heptane and halides thereof, octane and halides, nonane and halides thereof, decane and halides thereof, the cycloalkane and the halides thereof of 5 (containing) above carbon atoms, the olefines and the halides thereof of 5 (containing) above carbon atoms, alcohols, aldehydes, ethers, benzene and benzene series thing, phenol and halides thereof, freon, furans and naphthalene.The inorganic gas source material of volatilization comprises hydrogen chloride, hydrogen fluoride, carbon disulfide, iodine vapor, mercury vapour and ammonia.
The temperature that heater of the present invention is accurately controlled gas source material appointment in the diffusion vial is 10～200 ℃.
Apparatus of the present invention can be used for the occasion that the required indoor microenvironment such as environmental chamber, simulant building, automobile and submarine bay of gas-chromatography, GC/MS, PTR-MS instrument and equipment, examination and test of products test, environment protection and monitoring, scientific experiment etc. need light concentration gas.
Advantage of the present invention is:
1, stable, exit concentration changed less than ± 5% when system normally moved.Distribution concentration is low, can prepare gas concentration less than 0.01mg/m
3
2, applied widely, adopt this method to expand the gas source material of distribution, can realize utilizing pure liquid gas source material or solid crystals gas source material to prepare the organic and inorganic gas of corresponding light-concentration volatile.
3, can accurately prepare the low concentration list kind gas of certain humidity or contain the mist of multiple component as required, humidity range is 0～90%, can regulate the conversion gas humidity continuously.
4, adopt diffusion dilution formula dynamic air-distributing method, the continous-stable service life reaches more than the 48h, and can effectively overcome the adsorpting factor influence by feeding the dilution carrier gas in advance.The gas dilution proportion is wide, can regulate the conversion gas concentration continuously.
5, adopt mass flow controller accurately to control each gas circuit gas flow, realize the mass flow control of gas, the gas of preparation is not subjected to the influence of environment temperature and pressure.
6, adopt bath heat (comprising hydro-thermal and solvent heat), improved the temperature of thermostat, can prepare single gas or the mist of planting that contains the higher boiling component.
7, the diffusion gas control system part of respective number can be set according to object gas component kind number, simple to operation, and diffusion vial can be reused.
8, gas consumption is economized, and only needs 0.5～1h can realize stable operation, and air consumption is little.
9, simple to operate, safe and efficient, operating cost is low.
Description of drawings
The single gas device for formulating schematic diagram of planting that contains certain humidity among Fig. 1, the present invention
What Fig. 2, the present invention had certain humidity contains n kind (n is between 1～10) component gases device for formulating system schematic
Bottle takes place in 1-carrier gas steel cylinder, 2-mass flow controller (comprising: source gas gas circuit mass flow controller 21, moisture road mass flow controller 22, dry gas road mass flow controller 23), 3-capillary needle tubing, 4-heating diffusion vial, 5-heater, 6-main body gas circuit capillary, 7-humidity among the figure, 8-mixes gas tank, 9-hygrometer
The specific embodiment
The present invention is described in more detail below in conjunction with accompanying drawing and specific embodiment, but not as the restriction to the technical scheme that the present invention relates to.
Embodiment 1
The device preparation of application drawing 1 contains the low concentration toluene of certain humidity:
Low concentration toluene device for formulating each several part material and parameter are as follows in the present embodiment: 1-carrier gas steel cylinder is the air steel cylinder; 21, the range of 22-mass flow controller is 0～1.5L/min; The range of 23-mass flow controller is 0～2L/min; The length of 3-capillary needle tubing is 5～8cm, and internal diameter is 0.2～0.3mm; 4-heating diffusion vial adopts quartzy material, and volume is 200～250ml; The 5-heater is the multifunction constant temperature water bath, and the bath temperature scope is 30～65 ℃; The 6-capillary is according to the carrier gas control section, diffusion gas control system part, the dry air air path part, the order that part and gas concentration mixed stability part take place humidity adopts stainless steel successively, polytetrafluoroethylene (PTFE), aluminium and polytetrafluoroethylene (PTFE) material, the capillary of each section gas circuit connects by the airtight stainless joint of two general formulas, internal diameter is respectively stainless steel capillary 0.4～1mm, polytetrafluoroethylene capillary 0.4～1.2mm, aluminium capillary 0.3～0.8mm, diffusion gas control system part long capillary tube 95～150cm, bottle takes place 7-humidity, and airtight and volume is 1～1.2L for oral area, the distilled water of the about 0.7～0.8L of interior Sheng;
The low concentration toluene preparation process that contains certain humidity in the present embodiment is as follows: toluene is packed in the 4-heating diffusion vial, open the 5-heater and be warming up to assigned temperature, open 1-carrier gas steel cylinder (air steel cylinder), open and regulate 21,22, the 23-mass flow controller is to target flow, wherein the flow of 21-mass flow controller is 0.05L/min, 22, the flow summation of 23-mass flow controller is 0.2L/min, 22, the ratio of the flow of 23-mass flow controller (FRMFC22/FRMFC23) can be regulated according to desired moisture level, stablizes 0.5～1h.
Distribution is three times altogether, and distribution the results are shown in Table 1.
Table 1 contains the low concentration toluene distribution result of certain humidity
Embodiment 2
Preparation contains the low concentration benzene of certain humidity, the mist of toluene:
That utilizes that accompanying drawing 2 has certain humidity contains n kind (n is between 1～10) component gases device for formulating system, and the quantity of diffusion gas control system part is 2 in the device, and 2 heating diffusion vial volumes are 200～250ml; The length of two capillary needle tubings is 8～12cm, and internal diameter is 0.2～0.3mm; Capillary is according to the carrier gas control section, diffusion gas control system part benzene gas circuit, diffusion gas control system part toluene gas circuit, the dry air gas circuit, the order that part and gas concentration mixed stability part take place humidity adopts polytetrafluoroethylene (PTFE) successively, brass, stainless steel, stainless steel, polytetrafluoroethylene (PTFE) and polytetrafluoroethylene (PTFE) material, each section capillary connects by the airtight stainless joint of two general formulas, internal diameter is respectively stainless steel capillary 0.4～0.8mm, brass capillary 0.2～1.0mm, polytetrafluoroethylene capillary 0.3～0.9mm, polytetrafluoroethylene (PTFE) 0.3～1.1mm, diffusion gas control system part capillary total length is 200～250cm.
The mist preparation process of low concentration benzene, toluene is as follows in the present embodiment: benzene, toluene are respectively charged in 2 heating bottles, the intensification water-bath is to assigned temperature, open air steel cylinder 1, open and regulate 21,22, the 23-mass flow controller is to target flow, wherein the flow of 21-mass flow controller is 0.05L/min, 22, the flow summation of 23-mass flow controller is 0.2L/min, 22, the flow proportional of the flow of 23-mass flow controller (FRMFC22/FRMFC23) can be regulated according to desired moisture level, stablizes 0.5～1h.Distribution is three times altogether, and the benzene distribution the results are shown in Table 2, and the toluene distribution the results are shown in Table 3.
Table 2 contains the low concentration benzene distribution result of certain humidity
Table 3 contains the low concentration toluene distribution result of certain humidity
By table 1～5 as seen, adopt device of the present invention, can realize the distribution of light concentration gas, distribution concentration is low to moderate 0.2mg/m
3, relative error is less than ± 5%, and the distribution humidity range is 0～90%, and relative error is less than ± 6%.
Claims (9)
1. the device for formulating that contains the light concentration gas of certain humidity, partly be made up of carrier gas control section, diffusion gas control system part, humidity control section, dry air air path part and gas concentration mixed stability, each part mentioned above is by capillary and threeway or the connection of two general formula air-tightness joints; It is characterized in that: the carrier gas control section comprises carrier gas steel cylinder (1) and the 1st mass flow controller (21); The 2nd mass flow controller (22); The 3rd mass flow controller (23); Diffusion gas control system partly comprises heating diffusion vial (4) and heater (5), and described heating diffusion vial (4) is built in the heater (5) of liquid level stabilizing, and only the port of export by capillary needle tubing (3) is connected with main body gas circuit capillary; The humidity control section is that bottle (7) takes place humidity, and described humidity takes place to fill the distilled water of CL height in the bottle (7), and is built-in with liquid level automatic control device and automatic water-replenishing device; Dry air air path part capillary is communicated with the 3rd mass flow controller (23); The gas concentration mixed stability is partly for mixing gas tank (8).
2. the device for formulating that contains the light concentration gas of certain humidity according to claim 1, it is characterized in that: the each several part effect and the gas flow process of device for formulating are as follows: the carrier gas of discharging in the carrier gas steel cylinder (1) of carrier gas control section, be split into three the tunnel through three-way connection, by the 1st mass flow controller (21); The 2nd mass flow controller (22); The 3rd mass flow controller (23) is accurately controlled flow and is formed the carrier gas with constant flow rate, be respectively source gas gas circuit, moisture road and dry gas road, carrier gas is through capillary needle tubing (3) port of export of main body capillary flow to diffusion gas control system part in the gas gas circuit of source, carrier gas is blown in the distilled water through capillary in the moisture road, the space forms the carrier gas with 100% humidity in the bottle on liquid level top, and the carrier gas on dry gas road is the pure dilution carrier gas with constant flow rate; The gas that the gas source material evaporates after heating in heating diffusion vial (4) diffuses to space in the bottle on gas source material top, and the saturated vapor pressure gas of formation diffuses to the port of export through capillary needle tubing (3); The gas of the port of export enters mixed gas tank (8) together through main body gas circuit capillary under the dilution purging effect of the dilution carrier gas with target flow of the port of export of flowing through; Bottle dilution carrier gas of (7) interior liquid level top 100% humidity takes place in humidity, and the capillary that continues through connecting humidity generation bottle (7) and mixed gas tank (8) from the capillary gas outlet of humidity generation bottle under the inside and outside differential pressure effect enters mixed gas tank (8); Above-mentioned three road gases promptly form the light concentration gas with certain humidity behind the mixed stability in mixing gas tank (8).
3. the device for formulating that contains the light concentration gas of certain humidity according to claim 1, it is characterized in that: described heater (5) can accurately be controlled temperature for constant temperature water bath, thermostat water bath, constant temperature electric heating cover, multifunction constant temperature circulator bath equipment or intelligent high low temperature bath of liquid groove; A plurality of heaters (5) constitute multichannel constant temperature bath thermic devices.
4. the device for formulating that contains the light concentration gas of certain humidity according to claim 1, it is characterized in that: described heating diffusion vial (4) adopts quartz, polytetrafluoroethylene (PTFE) or glass material, heating diffusion vial (4) is immersed in water-bath or below the bath of liquid liquid level, or be wrapped in fully in the heater (5), a plurality of heating diffusion vial (4) are placed gas with various source material.
5. the device for formulating that contains the light concentration gas of certain humidity according to claim 1, it is characterized in that: bottle (7) takes place and adopts glass, quartz, stainless steel or polytetrafluoroethylene (PTFE) material in described humidity, it is relative constant to realize the interior liquid level of bottle with automatic water-replenishing device to be built-in with automatic liquid level modulator in the bottle, bottle mouth position is embedded with air-tightness rubber stopper or latex plug, and realizes that by the air inlet capillary and the capillary of giving vent to anger humidity bottle takes place is connected with the air-tightness of the 2nd mass flow controller (22) and mixed gas tank respectively.
6. the compound method of the light concentration gas that contains certain humidity of the described device of claim 1, its operating procedure is:
1. select the gas device for formulating of the diffusion gas control system part of respective number setting, the capillary needle tubing (3) that is fit to and caliber capillaceous, length, material according to object gas component kind preparation requirement, the gas source material is packed in heating diffusion vial (4), diffusion vial is built in the heater (5) and keeps heater (5) liquid level relatively stable, accurately controls the temperature of gas source material appointment in the diffusion vial by heater (5);
2. the distilled water of suitable level takes place to hold in the bottle (7) in humidity, opens liquid level automatic control device and automatic water-replenishing device;
3. open carrier gas steel cylinder (1) Pressure gauge and be adjusted to convenient pressure, regulate the 1st mass flow controller (21) on source gas gas circuit, moisture road and dry gas road respectively; The 2nd mass flow controller (22); The 3rd mass flow controller (23) is to desired flow, realizes the regulation and control of humidity according to source gas gas circuit flow and moisture road, dry gas road mass flow ratio;
4. the dilution carrier gas that has certain flow to capillary needle tubing (3) port of export, enters mixed gas tank (8) with dilution of source gas purging and continuation through main body gas circuit capillary through main body gas circuit capillary flow; Carrier gas with certain humidity enters mixed gas tank (8) through the capillary with gas concentration mixed stability part, after the system that treats is stable, and the humidity of hygrometer (9) monitoring gas, the gas that mixes gas tank (8) outlet is the light concentration gas that contains certain humidity.
7. the compound method that contains the light concentration gas of certain humidity according to claim 6 is characterized in that: at first regulate and control to determine source gas gas circuit the 1st mass flow controller (21) registration respectively according to the gas concentration of need preparation; Secondly determine moisture road the 2nd mass flow controller (22) and dry gas road the 3rd mass flow controller (23) registration summation; The flow proportional FR of the 2nd mass flow controller (22) and the 3rd mass flow controller (23) is regulated in the last gas humidity requirement of preparation as required
MFC22/ FR
MFC23
8. the compound method that contains the light concentration gas of certain humidity according to claim 6 is characterized in that: the temperature of described gas source material appointment is 10～200 ℃, and distribution humidity range al is 0＜al≤90%, and relative error is less than ± 6%.
9. the compound method that contains the light concentration gas of certain humidity according to claim 6 is characterized in that: described gas source material is more than one in volatile organic matter and the inorganic matter; Volatile organic matter comprise methane halides, ethane halides, propane halides, butane halides, pentane or its halides, hexane or its halides, heptane or its halides, octane or its halides, nonane or its halides, decane or its halides, carbon atom quantity more than or equal to the cycloalkane more than 5 or its halides, carbon atom quantity more than or equal to the alkene more than 5 or its halides, alcohol, aldehyde, ether, benzene, freon, furans or naphthalene; The volatility inorganic matter comprises hydrogen chloride, hydrogen fluoride, carbon disulfide, iodine vapor, mercury vapour or ammonia.
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