CN101350608A - SAW filter for regulating center frequency of magnetic field and preparation method thereof - Google Patents
SAW filter for regulating center frequency of magnetic field and preparation method thereof Download PDFInfo
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- CN101350608A CN101350608A CNA2008101196678A CN200810119667A CN101350608A CN 101350608 A CN101350608 A CN 101350608A CN A2008101196678 A CNA2008101196678 A CN A2008101196678A CN 200810119667 A CN200810119667 A CN 200810119667A CN 101350608 A CN101350608 A CN 101350608A
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Abstract
The present invention relates to a sound surface wave filter which is used for regulating the center frequency of a magnetic field, and a preparation method thereof, and relates to a structure of the sound surface wave filter and preparation method thereof. The preparation method is characterized in that ion implantation or doped transition metal is adopted to prepare a piezoelectric material with ferromagnetism; the piezoelectric material and an interdigital electrode form a basic filter unit; the basic filter unit is arranged in, on the side of or on the end face of a micro solenoid; then the basic filter unit and the micro solenoid form the sound surface wave filter, which can change the center frequency while working, according to the real-time communication status.
Description
Technical field
The present invention relates to a kind of Surface Acoustic Wave Filter, Surface Acoustic Wave Filter of centre frequency and preparation method thereof is regulated in particularly a kind of magnetic field, belongs to wireless telecommunications device technology field.
Background technology
Surface Acoustic Wave Filter has that volume is little, in light weight, frequency range is wide and low cost and other advantages, is widely used in fields such as information, electronics, transducer.By Surface Acoustic Wave Filter basic principle (A.A.Oliner as can be known, Acoustic Surface Waves, Springer-Verlag, 1978), traditional Surface Acoustic Wave Filter prepares interdigital electrode (being interdigital transducer) in piezoelectric material surface, piezoelectric and interdigital electrode constitute the Surface Acoustic Wave Filter basic functional units, and Surface Acoustic Wave Filter is made in extraction electrode, encapsulation then at last.This filter possesses specific frequency response characteristic and physical characteristic after having determined piezoelectric and interdigital electrode figure, centre frequency no longer can be regulated.The development of current high-tech is had higher requirement to the performance and the function of device, as requires device multifunction, integrated degree higher.The frequency of real time altering Surface Acoustic Wave Filter has a great deal of practical meanings, and for example in electronic countermeasures, changes centre frequency and can avoid enemy's electronic jamming, guarantee that contact is unimpeded.
Traditional Surface Acoustic Wave Filter is if the change centre frequency then need be changed device, and this lacks operability in actual applications.Because integrated a lot of electronic devices encapsulate then in the work unit.Changing device need remove this device, does not possess professional means and is difficult to smooth execution.
The result of investigation does not also find to adopt the patent of magnetic field guide sound surface wave device (comprising Surface Acoustic Wave Filter) operating characteristic (comprising centre frequency) at present, Liu's equality people once proposed a kind of method (application number: 200510022674.2 that changes the Surface Acoustic Wave Filter centre frequency, publication number: CN1992518): it is characterized in that selecting for use the lithium tetraborate single crystal sheet as the wafer material of making SAW (Surface Acoustic Wave) device, when design and making, make the center frequency ratio nominal mean frequency of SAW (Surface Acoustic Wave) device chip that overgauge be arranged, the SAW (Surface Acoustic Wave) device that is soaked in water then chip, adjust the Cycle Length of interdigital of SAW (Surface Acoustic Wave) device, reduce or eliminate described overgauge.
Summary of the invention
The present invention is directed to the needs that need real time altering in the wireless telecommunications process or regulate the filter operating frequency, propose a kind of Surface Acoustic Wave Filter that can regulate centre frequency with magnetic field.
Technical scheme of the present invention is as follows:
First kind of technical scheme of the present invention is:
The Surface Acoustic Wave Filter of centre frequency is regulated in a kind of magnetic field, comprise by piezoelectric 2 and be arranged on the primary filter unit that the interdigital electrode 3 on the piezoelectric constitutes, it is characterized in that: described Surface Acoustic Wave Filter also comprises miniature solenoid 1, and described primary filter unit is placed in the miniature solenoid 1; Described piezoelectric adopts has ferromagnetic piezoelectric.
Second kind of technical scheme of the present invention is:
The Surface Acoustic Wave Filter of centre frequency is regulated in a kind of magnetic field, comprise by piezoelectric 2 and be arranged on the primary filter unit that the interdigital electrode 3 on the piezoelectric constitutes, it is characterized in that: described Surface Acoustic Wave Filter also comprises miniature solenoid 1, and described primary filter unit is placed on miniature solenoidal side; Described piezoelectric adopts has ferromagnetic piezoelectric.
The third technical scheme of the present invention is:
The Surface Acoustic Wave Filter of centre frequency is regulated in a kind of magnetic field, comprise by piezoelectric 2 and be arranged on the primary filter unit that the interdigital electrode 3 on the piezoelectric constitutes, it is characterized in that: described Surface Acoustic Wave Filter also comprises miniature solenoid 1, and described primary filter unit is placed on miniature solenoidal end face; Described piezoelectric adopts has ferromagnetic piezoelectric.
In the technique scheme, described piezoelectric adopts has ferromagnetic zinc oxide, aluminium nitride, lithium niobate, lithium tantalate, potassium niobate or potassium tantalate.
The present invention also provides the magnetic field described in first kind of technical scheme to regulate the preparation method of the Surface Acoustic Wave Filter of centre frequency, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed in the miniature solenoid;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
The present invention also provides the magnetic field described in second kind of technical scheme to regulate the preparation method of the Surface Acoustic Wave Filter of centre frequency, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed on a miniature solenoid side;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
The present invention also provides the magnetic field described in the third technical scheme to regulate the preparation method of the Surface Acoustic Wave Filter of centre frequency, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed on a miniature solenoid end face;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
In preparation method of the present invention, described piezoelectric adopts zinc oxide, aluminium nitride, lithium niobate, lithium tantalate, potassium niobate or potassium tantalate.
The Surface Acoustic Wave Filter that centre frequency is regulated in the magnetic field that the present invention proposes can change centre frequency in the course of the work, can in practice, change the frequency range of communication, numeral transmission so as required, for example: under different weathers and orographic condition, signal transmission as primary frequency has obstacle, then can adopt filter of the present invention, regulate centre frequency (being operating frequency) to the more reliable frequency range of a certain signal transmission; In electronic countermeasures, the enemy is as disturbing in a certain frequency range at our communication, and then we can adopt filter of the present invention, regulates centre frequency, avoids the frequency band that the enemy disturbs.
Description of drawings
Fig. 1 is the structural representation of first kind of embodiment of the present invention, and the primary filter unit that piezoelectric 2 and interdigital electrode 3 are constituted is placed on miniature solenoid the inside.
Fig. 2 a, 2b are the structural representation of second kind of embodiment of the present invention, and the primary filter unit that is made of piezoelectric 2 and interdigital electrode 3 is placed on miniature solenoid side.
Fig. 3 a, 3b are the structural representation of second kind of embodiment of the present invention, and the primary filter unit that is made of piezoelectric 2 and interdigital electrode 3 is placed on miniature solenoid end face.
Among the figure: the miniature solenoid of 1-; The 2-piezoelectric; The 3-interdigital electrode.
Embodiment
Below in conjunction with accompanying drawing principle of the present invention, concrete structure and preparation process are further described,
Fig. 1 is the structural representation of first kind of embodiment of the present invention, comprise by piezoelectric 2 and be arranged on the primary filter unit that the interdigital electrode 3 on the piezoelectric constitutes, described Surface Acoustic Wave Filter also comprises miniature solenoid 1, and described primary filter unit is placed in the miniature solenoid 1; Described piezoelectric adopts has ferromagnetic piezoelectric.
The preparation method of the Surface Acoustic Wave Filter of centre frequency is regulated in magnetic field described in first kind of technical scheme, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed in the miniature solenoid;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
Fig. 2 a, 2b are the structural representation of second kind of embodiment of the present invention, comprise by piezoelectric 2 and be arranged on the primary filter unit that the interdigital electrode 3 on the piezoelectric constitutes, described Surface Acoustic Wave Filter also comprises miniature solenoid 1, described primary filter unit is placed on miniature solenoidal side, wherein 2a represents that interdigital electrode is back to miniature solenoid in the primary filter unit, 2b represents that interdigital electrode is in the face of miniature solenoid in the primary filter unit, and described piezoelectric adopts has ferromagnetic piezoelectric.
The preparation method of the Surface Acoustic Wave Filter of centre frequency is regulated in magnetic field described in second kind of technical scheme, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed on a miniature solenoid side;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
Fig. 3 a, 3b are the structural representation of the third embodiment of the present invention, comprise by piezoelectric 2 and be arranged on the primary filter unit that the interdigital electrode 3 on the piezoelectric constitutes, described Surface Acoustic Wave Filter also comprises miniature solenoid 1, described primary filter unit is placed on miniature solenoidal end face, wherein 3a represents that primary filter unit plane parallel is in miniature solenoid axis, 3b represents plane, primary filter unit perpendicular to miniature solenoid axis, and described piezoelectric adopts has ferromagnetic piezoelectric.
The preparation method of the Surface Acoustic Wave Filter of centre frequency is regulated in magnetic field described in the third technical scheme, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed on a miniature solenoid end face;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
In the technique scheme, described piezoelectric adopts has ferromagnetic zinc oxide, aluminium nitride, lithium niobate, lithium tantalate, potassium niobate or potassium tantalate.
Claims (7)
1. the Surface Acoustic Wave Filter of centre frequency is regulated in a magnetic field, comprise by piezoelectric (2) and be arranged on the primary filter unit that the interdigital electrode (3) on the piezoelectric constitutes, it is characterized in that: described Surface Acoustic Wave Filter also comprises miniature solenoid (1), and described primary filter unit is placed in the miniature solenoid (1); Described piezoelectric adopts has ferromagnetic piezoelectric.
2. the Surface Acoustic Wave Filter of centre frequency is regulated in a magnetic field, comprise by piezoelectric (2) and be arranged on the primary filter unit that the interdigital electrode (3) on the piezoelectric constitutes, it is characterized in that: described Surface Acoustic Wave Filter also comprises miniature solenoid (1), and described primary filter unit is placed on miniature solenoidal side; Described piezoelectric adopts has ferromagnetic piezoelectric.
3. the Surface Acoustic Wave Filter of centre frequency is regulated in a magnetic field, comprise by piezoelectric (2) and be arranged on the primary filter unit that the interdigital electrode (3) on the piezoelectric constitutes, it is characterized in that: described Surface Acoustic Wave Filter also comprises miniature solenoid (1), and described primary filter unit is placed on miniature solenoidal end face; Described piezoelectric adopts has ferromagnetic piezoelectric.
4, the Surface Acoustic Wave Filter according to claim 1,2 or 3 described a kind of magnetic fields adjusting centre frequencies is characterized in that: described piezoelectric adopts has ferromagnetic zinc oxide, aluminium nitride, lithium niobate, lithium tantalate, potassium niobate or potassium tantalate.
5. the preparation method of the Surface Acoustic Wave Filter of centre frequency is regulated in a magnetic field as claimed in claim 1, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed in the miniature solenoid;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
6. the preparation method of the Surface Acoustic Wave Filter of centre frequency is regulated in a magnetic field as claimed in claim 2, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed on a miniature solenoid side;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
7. the preparation method of the Surface Acoustic Wave Filter of centre frequency is regulated in a magnetic field as claimed in claim 3, it is characterized in that this method comprises the steps:
1) mode that adopts ion to inject at the piezoelectric plane of crystal is injected Co, Cr, V, Fe, Cu or Ni element, makes piezoelectric have ferromagnetism, or mix in piezoelectric Co, Cr, V, Fe, Cu or Ni, makes piezoelectric have ferromagnetism;
2) in step 1) resulting have on the ferromagnetic piezoelectric prepare interdigital electrode, constitute the primary filter unit;
3) with step 2) in the preparation the primary filter unit be placed on a miniature solenoid end face;
4) logical direct current in miniature solenoid is regulated size of current and direction, makes the centre frequency of filter take place just be offset or negative bias moves.
8. regulate the preparation method of the Surface Acoustic Wave Filter of centre frequency according to claim 5,6 or 7 described magnetic fields, it is characterized in that: described piezoelectric adopts zinc oxide, aluminium nitride, lithium niobate, lithium tantalate, potassium niobate or potassium tantalate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101196678A CN101350608B (en) | 2008-09-05 | 2008-09-05 | SAW filter for regulating center frequency of magnetic field and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008101196678A CN101350608B (en) | 2008-09-05 | 2008-09-05 | SAW filter for regulating center frequency of magnetic field and preparation method thereof |
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| CN101350608B CN101350608B (en) | 2011-03-30 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163687A (en) * | 2010-12-10 | 2011-08-24 | 清华大学 | High-voltage electrical response zinc oxide flexible pressure sensor and manufacturing method thereof |
| CN102386885A (en) * | 2011-06-20 | 2012-03-21 | 清华大学 | Surface acoustic wave filter with high mechanical coupling factor and low insertion loss and special piezoelectric film thereof |
| CN111934644A (en) * | 2020-07-31 | 2020-11-13 | 杭州见闻录科技有限公司 | Interdigital electrode structure, manufacturing method thereof and surface acoustic wave device with interdigital electrode structure |
-
2008
- 2008-09-05 CN CN2008101196678A patent/CN101350608B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163687A (en) * | 2010-12-10 | 2011-08-24 | 清华大学 | High-voltage electrical response zinc oxide flexible pressure sensor and manufacturing method thereof |
| CN102386885A (en) * | 2011-06-20 | 2012-03-21 | 清华大学 | Surface acoustic wave filter with high mechanical coupling factor and low insertion loss and special piezoelectric film thereof |
| CN111934644A (en) * | 2020-07-31 | 2020-11-13 | 杭州见闻录科技有限公司 | Interdigital electrode structure, manufacturing method thereof and surface acoustic wave device with interdigital electrode structure |
| CN111934644B (en) * | 2020-07-31 | 2021-11-02 | 见闻录(浙江)半导体有限公司 | Interdigital electrode structure, manufacturing method thereof and surface acoustic wave device with interdigital electrode structure |
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| CN101350608B (en) | 2011-03-30 |
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