CN101349870A - Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform - Google Patents
Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform Download PDFInfo
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- CN101349870A CN101349870A CNA2008100414942A CN200810041494A CN101349870A CN 101349870 A CN101349870 A CN 101349870A CN A2008100414942 A CNA2008100414942 A CN A2008100414942A CN 200810041494 A CN200810041494 A CN 200810041494A CN 101349870 A CN101349870 A CN 101349870A
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Abstract
The invention discloses a two-freedom motor execution mechanism and a six-freedom micro-motion stage thereof. The two-freedom motor execution mechanism comprises a base, a voice coil motor, two horizontal linear motors and horizontal motor guide rails, wherein the voice coil motor and each horizontal linear motor are respectively provided with a stator and a rotor, the base is fixedly connected with the stator of the voice coil motor, the rotor of the voice coil motor is connected with the horizontal motion guide rails via an air floatation decouple unit, the two horizontal linear motors are symmetrically arranged according to the central shaft of the two-freedom motor execution mechanism, whose stators are fixedly connected with the base and the rotors are fixedly connected with the horizontal motion guide rails. The six-freedom micro-motion stage comprises three two-freedom motor execution mechanisms mounted on a base and distanced of 120 degrees. The invention uses integrated two-freedom motor execution mechanisms to realize the six-freedom adjustment of the micro-motion stage, having high adjusting accuracy, high integrality, good control property and compact structure.
Description
Technical field
The present invention relates to a kind of micropositioner structure, relate in particular to a kind of electric machine actuating mechanism and use its 6-freedom micro-motion platform.
Background technology
Micropositioner is mainly used in the very high occasion of positioning accuracy request, and little stroke fine setting and location under especially a plurality of stations are as semiconductor manufacturing and optics and image alignment.Prior art discloses several micropositioner structures, yet these structures exist some weak point, specifies as follows:
1. U.S. Pat 006054784A: this patent disclosure the six degree of freedom Principles of Regulation and the motor layout thereof of an exposure desk.This ultimate principle is by the Lorentz motor-driven, level is distributed on to the motor of regulating on three points of 120 °, and vertical adjusting motor is distributed between the horizontal motor, also is 120 ° of distributions.This uniform symmetrical structure that presents helps the control of selection of Motor and exposure desk, but it is big to take up room, and is unfavorable for integrated.
2. Chinese patent CN2580470Y: this patent disclosure a kind of 3 freedom degree ultra-precise locating platform.This stage body inside is equilateral triangle and is fixed with three groups of piezoelectric ceramics pre-tightening mechanisms independently separately.This compact conformation, precision is higher; But can only control three degree of freedom, piezoelectric ceramics easily generates heat, and also is difficult for carrying out thermostatic control.
3. Chinese patent CN2629926Y: this patent disclosure a kind of three-degree-of-freedom precision-positioning workbench, utilize the piezoelectric ceramics pressurised driving in its structural design, compliant mechanism connects, and pastes strain-ga(u)ge transducer and carries out closed-loop control.This device can only be adjusted three degree of freedom, and range of adjustment is little.
Summary of the invention
In view of this, technical matters to be solved by this invention provides a kind of have six-freedom degree and the enough high micropositioner that can carry out integrated assembling again of precision.
For solving the problems of the technologies described above, the present invention at first provides a kind of two-freedom degree electric machine actuating mechanism, and it comprises: pedestal, voice coil motor, two horizontal linear motors, and horizontal moving guide rail; Described voice coil motor and described each horizontal linear motor all have stator and mover; Described pedestal is fixedlyed connected with the voice coil motor stator, described voice coil motor mover is connected with described horizontal moving guide rail by air supporting decoupling zero unit, described two horizontal linear motors are symmetric configuration about the central shaft of this two-freedom degree electric machine actuating mechanism, and the stator of two horizontal linear motors is all fixedlyed connected with pedestal, and the mover of two horizontal linear motors is fixedlyed connected with described horizontal moving guide rail.
Further, described base interior is equipped with the annular air camel, and when described voice coil motor moved in pedestal, described air supporting pad played guide effect.
Further, described air supporting decoupling zero unit is made up of the spherical air-bearing pad and the universal ball joint that are complementary, forms a cylinder vibration-proof structure between described vertical electric mover and the spherical air-bearing pad, and described universal ball joint can be done relative motion in horizontal guide rail.
Further, adopt spring to be connected between described horizontal guide rail and the pedestal; Described horizontal guide rail also has two convex structures.
The present invention also provides a kind of 6-freedom micro-motion platform, and it comprises three above-mentioned two-freedom degree electric machine actuating mechanisms, and on the uniform base that is installed on described 6-freedom micro-motion platform of 120 ° of described three two-freedom degree electric machine actuating mechanisms.
Further, described three two-freedom degree electric machine actuating mechanisms, its tangential movement direction radially overlaps with described 6-freedom micro-motion platform; Perhaps its tangential movement direction is radially vertical with described 6-freedom micro-motion platform; Perhaps its tangential movement direction and described 6-freedom micro-motion platform radially have angle.
Compared with prior art, the present invention uses integrated two-freedom degree electric machine actuating mechanism, carries out the six degree of freedom of micropositioner and regulates, its degree of regulation height, integration is good, and control performance is good, compact conformation is convenient to wiring, is mainly used in the high precision focusing and leveling control of exposure desk.
Description of drawings
Fig. 1 is the decomposition texture synoptic diagram of two-freedom degree electric machine actuating mechanism of the present invention.
Fig. 2 is the perspective view of two-freedom degree electric machine actuating mechanism of the present invention.
Fig. 3 is the cut-open view of two-freedom degree electric machine actuating mechanism of the present invention.
Fig. 4 is a two-freedom degree electric machine actuating mechanism air bearing structure synoptic diagram of the present invention.
Fig. 5, Fig. 6 and Fig. 7 are respectively three kinds of schematic layout patterns of two-freedom degree electric machine actuating mechanism in the 6-freedom micro-motion platform of the present invention.
Embodiment
Provide a preferred embodiment of the present invention according to Fig. 1～Fig. 7 below, and described in detail, purpose is to make those skilled in the art be easier to understand architectural feature of the present invention, rather than is used for limiting scope of the present invention.
The invention provides a kind of two-freedom degree electric machine actuating mechanism and corresponding 6-freedom micro-motion platform.Be illustrated in figure 2 as two-freedom degree electric machine actuating mechanism, 120 ° of three such topworkies are distributed on (as Fig. 5, Fig. 6, Fig. 7) on the base, can form the micropositioner of a six degree of freedom.What this micropositioner was realized is that little stroke six degree of freedom is regulated, and promptly X, Y, Z rotatablely move to tangential movement and θ x, θ y, θ z.Vertical adjustment stroke is ± 1.5mm, and level to adjustment stroke is ± 1.5mm, and bearing accuracy is in 20nm, and vertical control accuracy is within 50nm.
Fig. 1 is the decomposition texture synoptic diagram of two-freedom degree electric machine actuating mechanism of the present invention, please cooperate with reference to Fig. 2 and Fig. 3, this two-freedom degree electric machine actuating mechanism comprises: pedestal 1, vertical annular air camel 2, vertical voice coil motor stator 3, vertical voice coil motor mover 4, spherical air-bearing pad 5, horizontal moving guide rail 6, spring 7, horizontal linear electric mover 8, horizontal linear motor stator 9, and the band level is to pneumatically supported universal ball joint 10.Wherein, spherical air-bearing pad 5 and the universal ball joint 10 common air supporting decoupling zero unit of forming.
The motion process of two-freedom degree electric machine actuating mechanism such as Fig. 4, voice coil motor drive catenary motion, during mover 4 catenary motions, produce certain thickness air film by air supporting between annular air camel 2 and the electric mover 4, form two air bearing A, realization Z to motion.The motion positions precision height of voice coil motor, controllability is good.Cylinder 401 inflation backs form gas-bearing formation D superstructure are played damping effect, and certain Z can be arranged to driving function.According to the vertical action of control signal voice coil motor, cylinder can be adjusted the position of oneself automatically according to action, and the compensation of delay displacement can also realize the static weight compensation simultaneously by vibration damping, reduces the burden of voice coil motor.Form spherical air bearing B by air supporting between spherical air-bearing pad 5 and the universal ball joint 10, realized the motion compensation of rotating.Two horizontal linear motor-driven levels are to motion, the stator of two horizontal linear motors is fixedlyed connected with pedestal, also fixedly connected simultaneously with the stator of vertical motor, like this, vertical driving and level are in same aspect to driving and drive, reduce the height of whole actuator, be convenient to cut down the number of intermediate links, improved control accuracy.Adopt two horizontal linear motors also to be convenient to the assurance level, guarantee that motion steadily to the power output symmetry.The decoupling zero of motion has been realized in gap between horizontal linear electric mover and the stator to a certain extent.When level produces certain thickness gas mould by air supporting, formation air bearing C between upper surface and the horizontal moving guide rail 6 of when motion universal ball joint 10.Between the mover 8 of horizontal linear motor and the stator 9 Z to Y to all having ± gap of 3mm, horizontal guide rail 6 and universal ball joint 10 X to, Y between the mobile decoupling between two actuators of can realizing superposeing in the scope of fine motion is also arranged ± gap of 3mm.
As Fig. 5～shown in Figure 7, three two-freedom degree electric machine actuating mechanisms are distributed on the micropositioner base plate 11 for 120 °, horizontal moving guide rail is fixedlyed connected with micropositioner wafer-supporting platform 12, promptly constituted 6-freedom micro-motion platform of the present invention.The level of three groups of electric machine actuating mechanisms makes up X, Y, the θ z three degree of freedom that can regulate wafer-supporting platform to motion, and wherein X is for to move to forward and reverse along coordinate X, and Y is for to move to forward and reverse along coordinate Y, and θ z rotates around the Z axle; Between mover 8 by air film C, horizontal linear motor and the stator 9 Z to and Y to ± gap, horizontal guide rail 6 and the universal ball joint 10 of 3mm X to, Y between the gap, realize micropositioner X to, Y to, θ z to mobile decoupling.The combination of the catenary motion of three groups of electric machine actuating mechanisms can be regulated the θ x of micropositioner, θ y and Z three degree of freedom, and wherein θ x is the rotation around X-axis, and θ y is the rotation around Y-axis, and Z is for vertically being that Z moves up and down; By producing spherical air bearing B between air bearing A, spherical air-bearing pad 5 and the universal ball joint 10, realize the θ x of micropositioner, θ y, Z to mobile decoupling.Air cylinder structure 401 has been realized the vibration-damping function to micropositioner.Spring structure 7 increased Z to damping, can the balance air floating structure to the power that horizontal guide rail 6 produces, eliminate the deadweight of micropositioner, strengthen the control performance of micropositioner.The micropositioner compact conformation that two-freedom degree electric machine actuating mechanism supports, easy for installation, stressed even, adjustment stroke is big.
120 ° uniform can three kinds of forms, Fig. 5 is that the motion vertical of horizontal linear motor is in wafer-supporting platform 12 radiuses, Fig. 6 is that the tangential movement direction of horizontal linear motor overlaps with wafer-supporting platform 12 radiuses, Fig. 7 has a certain degree for the direction of motion and wafer-supporting platform 12 radial directions of horizontal linear motor, but three electric machine actuating mechanism angulations are identical, for example all are 30 °.Different installation forms provides more choices for wiring, design, assembling.
The micropositioner structure drives by two-freedom degree electric machine actuating mechanism, can carry out the fine setting of six degree of freedom.
Foregoing description only is the description to preferred embodiment of the present invention, is not any qualification to the scope of the invention, and any change, modification that the those of ordinary skill in field of the present invention is done according to above-mentioned disclosure all belong to the protection domain of claims.
Claims (9)
1, a kind of two-freedom degree electric machine actuating mechanism is characterized in that, comprising: pedestal, voice coil motor, two horizontal linear motors, and horizontal moving guide rail; Described voice coil motor and described each horizontal linear motor all have stator and mover; Described pedestal is fixedlyed connected with the voice coil motor stator, described voice coil motor mover is connected with described horizontal moving guide rail by air supporting decoupling zero unit, described two horizontal linear motors are symmetric configuration about the central shaft of this two-freedom degree electric machine actuating mechanism, and the stator of two horizontal linear motors is all fixedlyed connected with pedestal, and the mover of two horizontal linear motors is fixedlyed connected with described horizontal moving guide rail.
2, two-freedom degree electric machine actuating mechanism as claimed in claim 1 is characterized in that, described base interior is equipped with the annular air camel, and when described voice coil motor moved in pedestal, described air supporting pad played guide effect.
3, two-freedom degree electric machine actuating mechanism as claimed in claim 1, it is characterized in that, described air supporting decoupling zero unit is made up of the spherical air-bearing pad and the universal ball joint that are complementary, form a cylinder vibration-proof structure between described vertical electric mover and the spherical air-bearing pad, described universal ball joint can be done relative motion in horizontal guide rail.
4, two-freedom degree electric machine actuating mechanism as claimed in claim 1 is characterized in that, adopts spring to be connected between described horizontal guide rail and the pedestal.
5, two-freedom degree electric machine actuating mechanism as claimed in claim 1 is characterized in that, described horizontal guide rail also has two convex structures.
6, a kind of 6-freedom micro-motion platform, it is characterized in that, comprise three as each described two-freedom degree electric machine actuating mechanism in the claim 1 to 5, and on the uniform base that is installed on described 6-freedom micro-motion platform of 120 ° of described three two-freedom degree electric machine actuating mechanisms.
7,6-freedom micro-motion platform as claimed in claim 6 is characterized in that, described three two-freedom degree electric machine actuating mechanisms, and its tangential movement direction radially overlaps with described 6-freedom micro-motion platform.
8,6-freedom micro-motion platform as claimed in claim 6 is characterized in that, described three two-freedom degree electric machine actuating mechanisms, and its tangential movement direction is radially vertical with described 6-freedom micro-motion platform.
9,6-freedom micro-motion platform as claimed in claim 6 is characterized in that, described three two-freedom degree electric machine actuating mechanisms, and its tangential movement direction and described 6-freedom micro-motion platform radially have angle.
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| CNB2008100414942A CN100573340C (en) | 2008-08-07 | 2008-08-07 | Two-freedom degree electric machine actuating mechanism and corresponding 6-freedom micro-motion platform |
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| CNB2008100414942A CN100573340C (en) | 2008-08-07 | 2008-08-07 | Two-freedom degree electric machine actuating mechanism and corresponding 6-freedom micro-motion platform |
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| CN101349870A true CN101349870A (en) | 2009-01-21 |
| CN100573340C CN100573340C (en) | 2009-12-23 |
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| CN102394548A (en) * | 2011-09-22 | 2012-03-28 | 北京航空航天大学 | Voice coil vibration isolating/vibration suppressing structure and control method thereof |
| CN102444669A (en) * | 2010-10-15 | 2012-05-09 | 上海微电子装备有限公司 | Gas floating cushion for gas floating bearing |
| CN102109766B (en) * | 2009-12-25 | 2012-12-12 | 上海微电子装备有限公司 | Decoupling mechanism and exposure machine using same |
| CN102866596A (en) * | 2012-09-26 | 2013-01-09 | 哈尔滨工业大学 | Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe |
| CN102141734B (en) * | 2010-01-28 | 2013-01-16 | 上海微电子装备有限公司 | Gravity compensator and micropositioner adopting same |
| CN103551862A (en) * | 2013-10-31 | 2014-02-05 | 东莞固高自动化技术有限公司 | Direct-driven micromotion platform |
| CN103592824A (en) * | 2013-11-29 | 2014-02-19 | 中国科学院光电技术研究所 | Two-degree-of-freedom high-precision large-stroke air-flotation workpiece table |
| CN104385261A (en) * | 2014-09-30 | 2015-03-04 | 西安电子科技大学 | Translation device with three degrees of freedom in space and method |
| TWI476065B (en) * | 2012-11-01 | 2015-03-11 | Univ Southern Taiwan Sci & Tec | Co-planar platform mechanism |
| CN108225700A (en) * | 2017-12-16 | 2018-06-29 | 渤海大学 | A kind of MEMS micro-structure four-axle type exciting banks by Piezoelectric Ceramic |
| WO2019085901A1 (en) * | 2017-10-31 | 2019-05-09 | 上海微电子装备（集团）股份有限公司 | Mobile platform moving mechanism, mobile platform system and photoetching device |
| CN111082596A (en) * | 2019-12-23 | 2020-04-28 | 安徽机电职业技术学院 | Two-degree-of-freedom actuating mechanism of motor and multi-directional micropositioner with two degrees of freedom thereof |
| CN112756996A (en) * | 2020-12-29 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom adjusting device |
| CN114413134A (en) * | 2022-02-23 | 2022-04-29 | 上海隐冠半导体技术有限公司 | Gravity compensation device and motion platform |
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| US6054784A (en) * | 1997-12-29 | 2000-04-25 | Asm Lithography B.V. | Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device |
| CN2580470Y (en) * | 2002-11-18 | 2003-10-15 | 哈尔滨工业大学博实精密测控有限责任公司 | Three freedom super fine positioning platform |
| CN2629926Y (en) * | 2003-07-08 | 2004-08-04 | 哈尔滨工业大学博实精密测控有限责任公司 | Three-free-degree precise positioning work bench |
| CN1887686A (en) * | 2006-07-20 | 2007-01-03 | 天津大学 | Two-freedom air-floated precisely locating platform for IC packaging |
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2008
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| CN102109766B (en) * | 2009-12-25 | 2012-12-12 | 上海微电子装备有限公司 | Decoupling mechanism and exposure machine using same |
| CN102141734B (en) * | 2010-01-28 | 2013-01-16 | 上海微电子装备有限公司 | Gravity compensator and micropositioner adopting same |
| CN102444669A (en) * | 2010-10-15 | 2012-05-09 | 上海微电子装备有限公司 | Gas floating cushion for gas floating bearing |
| CN102444669B (en) * | 2010-10-15 | 2014-03-26 | 上海微电子装备有限公司 | Gas floating cushion for gas floating bearing |
| CN102394548A (en) * | 2011-09-22 | 2012-03-28 | 北京航空航天大学 | Voice coil vibration isolating/vibration suppressing structure and control method thereof |
| CN102866596A (en) * | 2012-09-26 | 2013-01-09 | 哈尔滨工业大学 | Micro-positioner of vertical decoupling gravity compensator provided with corrugated pipe |
| TWI476065B (en) * | 2012-11-01 | 2015-03-11 | Univ Southern Taiwan Sci & Tec | Co-planar platform mechanism |
| CN103551862A (en) * | 2013-10-31 | 2014-02-05 | 东莞固高自动化技术有限公司 | Direct-driven micromotion platform |
| CN103551862B (en) * | 2013-10-31 | 2016-05-25 | 东莞固高自动化技术有限公司 | Direct-drive type micromotion platform |
| CN103592824B (en) * | 2013-11-29 | 2015-04-22 | 中国科学院光电技术研究所 | Two-degree-of-freedom high-precision large-stroke air-flotation workpiece table |
| CN103592824A (en) * | 2013-11-29 | 2014-02-19 | 中国科学院光电技术研究所 | Two-degree-of-freedom high-precision large-stroke air-flotation workpiece table |
| CN104385261A (en) * | 2014-09-30 | 2015-03-04 | 西安电子科技大学 | Translation device with three degrees of freedom in space and method |
| CN104385261B (en) * | 2014-09-30 | 2016-04-27 | 西安电子科技大学 | There is translation device and the method for space three-freedom |
| WO2019085901A1 (en) * | 2017-10-31 | 2019-05-09 | 上海微电子装备（集团）股份有限公司 | Mobile platform moving mechanism, mobile platform system and photoetching device |
| CN108225700A (en) * | 2017-12-16 | 2018-06-29 | 渤海大学 | A kind of MEMS micro-structure four-axle type exciting banks by Piezoelectric Ceramic |
| CN111082596A (en) * | 2019-12-23 | 2020-04-28 | 安徽机电职业技术学院 | Two-degree-of-freedom actuating mechanism of motor and multi-directional micropositioner with two degrees of freedom thereof |
| CN111082596B (en) * | 2019-12-23 | 2022-04-15 | 安徽机电职业技术学院 | Freedom degree multi-azimuth micropositioner comprising two-freedom degree actuating mechanism |
| CN112756996A (en) * | 2020-12-29 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom adjusting device |
| CN114413134A (en) * | 2022-02-23 | 2022-04-29 | 上海隐冠半导体技术有限公司 | Gravity compensation device and motion platform |
| CN114413134B (en) * | 2022-02-23 | 2022-07-08 | 上海隐冠半导体技术有限公司 | Gravity compensation device and motion platform |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |