CN101349540B - Image regulating method and image viewfinding apparatus - Google Patents
Image regulating method and image viewfinding apparatus Download PDFInfo
- Publication number
- CN101349540B CN101349540B CN200710130600XA CN200710130600A CN101349540B CN 101349540 B CN101349540 B CN 101349540B CN 200710130600X A CN200710130600X A CN 200710130600XA CN 200710130600 A CN200710130600 A CN 200710130600A CN 101349540 B CN101349540 B CN 101349540B
- Authority
- CN
- China
- Prior art keywords
- image
- index curve
- contrast
- focuses
- sharpness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Te invention relates to an image adjusting process and an image acquisition device, wherein the adjusting process comprises calculating the target function value of an image for determining whether the corresponding positions of an imaging unit and an objective lens imaging are right or not in order to calibrate the imaging position of the imaging unit of the image acquisition device, and making a system obtain a clear fringe pattern image for conducting the three-dimension topogram measurement. Additionally the position of the imaging unit can be adjusted according to the imaging relationships for obtaining the clear image without interference fringe outside an interference and homology region, and the two-dimension flaw detection and size measurement for the image can be conducted aiming to the image.
Description
Technical field
The invention relates to a kind of image capture technology, refer in particular to a kind of image regulating method and image capture unit.
Background technology
White light interference system makes system have interference fringe at the sharp image that the object lens focusing place presents because of interfering framework, measures and Defect Detection and can't directly carry out two-dimensional.
In order to address this problem, in the prior art, U.S. Pat .Pat.No.7 as shown in Figure 1,068,376 disclosed interference system 1, it is to have a light source 10, a spectrophotometric unit 11, an interference objective unit 12 and an image-generating unit 13.This light source 10 can produce light beam and via collimation lens 14 to form a collimated light beam.This collimated light beam reflexes to interference objective unit 12 to form an object test light and a reference light via this spectrophotometric unit 11.This object test light goes back to this interference objective unit 12 and produce to interfere with reference to actinic light with this being projected to a determinand 100 surperficial back reflections, to form an interference light.This interference light is received by this image-generating unit 13 via this spectrophotometric unit 11 again, to form an interference fringe image.
In the aforesaid technology, it utilizes phase-shift method to calculate the three-dimensional appearance of determinand, an obtained sequential images carries out combinatorial operation during simultaneously with phase shift, to take out the composition of direct current in the image, the image of computing gained can be eliminated the influence of interference fringe, and surveys the image that uses as two-dimensional transversal inspection (amount).But, the method must be earlier via the bidimensional image that just can obtain not having interference fringe after the phase shift capture, and the phase shift capture is range limited, and need take time and carry out just can obtaining the required image of two-dimensional detection after the phase shift capture.
Summary of the invention
The objective of the invention is to, a kind of image regulating method and image capture unit are provided, it must be earlier via the bidimensional image that just can obtain not having interference fringe after the phase shift capture, the scope of phase shift capture is unrestricted, system can obtain interference fringe image clearly, measure to carry out three-dimensional appearance, and need not take time and carry out just can obtaining the required image of two-dimensional detection after the phase shift capture, according to imaging relations, can be adjusted to the picture cell position, to obtain to interfere the image of the extra-regional clear no interference fringe of the people having the same aspiration and interest, can carry out two-dimentional Defect Detection and dimension measurement at this image.
The invention provides a kind of image regulating method, it is characterized in that, it includes the following step:
Capture a sequence and interfere image;
Interfere image to try to achieve a sharpness to this sequence respectively and focus on index curve and contrast focusing index curve;
Seek the peak value that this sharpness focuses on index curve and this contrast focusing index curve respectively; And
Carry out an adjustment program and adjust relative position between the peak value that peak value that this sharpness focuses on the index curve and this contrast focus on the index curve, to obtain this sequence interference image clearly.
Wherein this adjustment program also includes the following step:
Set up this sequence and interfere the relation of the distance between the peak value that peak value that distance between video imaging position and capture position and this sharpness focus on the index curve and this contrast focus on the index curve; And
According to this relation, adjust the distance between this sequence interference video imaging position and capture position, make the peak value of this sharpness focusing index curve consistent with the peak that this contrast focuses on the index curve.
Wherein this adjustment program also includes the following step:
Set up this sequence and interfere the relation of the distance between the peak value that peak value that distance between video imaging position and capture position and this sharpness focus on the index curve and this contrast focus on the index curve;
This relation is created as a related table; And
According to this related table, adjust the distance between this sequence interference video imaging position and capture position, make the peak value of this sharpness focusing index curve consistent with the peak that this contrast focuses on the index curve.
Wherein this sharpness focuses on the index curve for calculating the index of the intension value difference opposite sex between the image neighbor, to estimate the degree of image definition.
Wherein trying to achieve the rule that this sharpness focuses on the index curve is to be that spatial frequency distribution is differentiated rule, this spatial frequency distribution differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
Wherein this contrast focuses on the index curve for calculating the index of image pixel intension primary system score cloth, to estimate the degree of image contrast.
Wherein trying to achieve the rule that this contrast focuses on the index curve is to be that pixel intension primary system score cloth is differentiated rule, this pixel intension primary system score cloth differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
The present invention also provides a kind of image regulating method, it is characterized in that, it includes the following step:
Acquisition one no interference fringe image;
Respectively this no interference fringe image is tried to achieve a sharpness and focus on index curve and contrast focusing index curve;
Seek the peak value that this sharpness focuses on index curve and this contrast focusing index curve respectively; And
Carry out an adjustment program and adjust relative position between the peak value that peak value that this sharpness focuses on the index curve and this contrast focus on the index curve, do not have the interference fringe image clearly with acquisition.
The method that wherein captures this no interference fringe image is to move to outside the people having the same aspiration and interest zone that each position interferes in the capture visual field for capture focus that will not have the interference fringe image.
Wherein this sharpness focuses on the index curve for calculating the index of the intension value difference opposite sex between the image neighbor, to estimate the degree of image definition.
Wherein trying to achieve the rule that this sharpness focuses on the index curve is to be that spatial frequency distribution is differentiated rule, this spatial frequency distribution differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
Wherein this contrast focuses on the index curve for calculating the index of image pixel intension primary system score cloth, to estimate the degree of image contrast.
Wherein trying to achieve the rule that this contrast focuses on the index curve is to be that pixel intension primary system score cloth is differentiated rule, this pixel intension primary system score cloth differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
Wherein this adjustment program also includes the following step:
Set up the relation that distance between this no interference fringe video imaging position and capture position and this sharpness focus on the distance between the peak value of index curve and peak value that this contrast focuses on the index curve;
The peak value that focuses on the index curve with this contrast is that the center determines a scope; And
According to this relation, adjust the distance between this no interference fringe video imaging position and capture position, the peak value that makes this sharpness focus on the index curve does not fall within this scope, to present clear no interference fringe image.
The present invention provides a kind of image regulating method again, it is characterized in that, it includes the following step:
Image is interfered in acquisition one;
Focus on index and contrast focusing index to interfering image to try to achieve a sharpness respectively;
The record sharpness focuses on index and contrast focuses on index;
Adjust the image space of this interference image; And
Repeat above step, make this sharpness focusing index and this contrast focus on index and all be in peaked state.
Wherein this sharpness focuses on the index curve for calculating the index of the intension value difference opposite sex between the image neighbor, to estimate the degree of image definition.
Wherein trying to achieve the rule that this sharpness focuses on the index curve is to be that spatial frequency distribution is differentiated rule, this spatial frequency distribution differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
Wherein this contrast focuses on the index curve for calculating the index of the intension value difference opposite sex between image pixel, to estimate the degree of image contrast.
Wherein trying to achieve the rule that this contrast focuses on the index curve is to be that pixel intension primary system score cloth is differentiated rule, this pixel intension primary system score cloth differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
The invention provides a kind of image capture unit, it is characterized in that, comprising:
One light beam generator, it can produce a light beam;
One spectrophotometric unit, it can reflect this light beam, to form a folded light beam;
One interference mirror group, it can be modulated into this folded light beam one reference beam and and measure light beam, this measurement light beam is incident to the surface on the determinand, and reflexes to this interference mirror group and this reference beam closes light to form an interfering beam, enters to this spectrophotometric unit; And
One image-generating unit, it can receive this interfering beam by this spectrophotometric unit, and to form an image, the side idol of this image-generating unit is connected to one first actuator.
Wherein this image-generating unit may be selected to be CCD and CMOS is one kind of.
Wherein this first actuator be may be selected to be the actuator of motor driven and piezoelectric element actuator one of them, to adjust the position of this image-generating unit.
Wherein a side of this interference mirror group also is connected to one second actuator by chance, this second actuator may be selected to be the actuator of motor driven and piezoelectric element actuator one of them, to adjust the position of this interference mirror group.
Description of drawings
For making the auditor further cognitive and understanding be arranged to feature of the present invention, purpose and function, hereinafter the spy describes the relevant thin portion structure of device of the present invention and the theory reason of design, so that the auditor can understand characteristics of the present invention, detailed description is presented below, wherein:
Fig. 1 is existing interference system image capture unit synoptic diagram.
Fig. 2 implements the example schematic flow sheet for one of image regulating method of the present invention.
Fig. 3 implements example schematic for image capture unit of the present invention.
Fig. 4 A interferes image to adjust the flow process example schematic for the present invention for sequence.
Fig. 4 B interferes image-generating unit and this interference mirror group position view of image for capturing this sequence.
Fig. 4 C focuses on index curve and contrast focusing index curve synoptic diagram for the sharpness of being tried to achieve under the position of Fig. 4 B.
Fig. 4 D overlaps synoptic diagram for peak value that sharpness focuses on the index curve with the peak value of contrast focusing index curve.
Fig. 5 A is image and image shielding relation example schematic.
Fig. 5 B is the intensitometer numeric distribution synoptic diagram for image pixel.
Fig. 6 A adjusts another enforcement example schematic flow sheet that sequence is interfered image for the present invention.
Fig. 6 B is for being adjusted in the picture cell position process sharpness focusing index song and contrast focusing index curvilinear motion curve map.
Fig. 7 A adjusts the flow process example schematic for the present invention for the image of no interference fringe.
Fig. 7 B is image-generating unit and this interference mirror group position view for the no interference fringe image of acquisition.
Fig. 7 C be for the peak value that focuses on the index curve with contrast be the scope synoptic diagram of center decision.
Embodiment
See also shown in Figure 2ly, this figure implements the example schematic flow sheet for one of image regulating method of the present invention.Whether the spirit of this image regulating method is to calculate image and focuses on index, correct with the opposite position of judging image-generating unit and object lens capture, as the foundation of proofreading and correct.The step of this method 2 is as follows: at first carry out step 20 acquisition one sequential images.Carry out step 21 then and respectively this sequential images is tried to achieve sharpness focusing index curve and contrast focusing index curve.Then seek the peak value that this sharpness focuses on index curve and this contrast focusing index curve respectively with step 22.The last adjustment program of carrying out is again adjusted relative position between the peak value that peak value that this sharpness focuses on the index curve and this contrast focus on the index curve, with the acquisition sharp image.
In order to describe image regulating method of the present invention in detail, next earlier focus on index and do explanation with an example to obtain clearly the method for interference fringe image at adjusting.At first introduce image capture unit.See also shown in Figure 3ly, this figure is that image capture unit of the present invention implements example schematic.This image capture unit 3 has a light beam generator 30, a spectrophotometric unit 31, an interference mirror group 32 and an image-generating unit 33.This light beam generator 30, it is to produce a light beam 90.This spectrophotometric unit 31, it is to reflect this light beam 90, to form a folded light beam 91.This interference mirror group 32, it is this folded light beam 91 can be modulated into a reference beam 92 and to measure light beam 93, this measurement light beam 93 is incident to the surface on the determinand 100, and reflex to this interference mirror group 32 and this reference beam and close light forming an interfering beam 94, this interfering beam 94 penetrate again this spectrophotometric unit 31 to this image-generating unit 33 to produce image.
The one side idol of this image-generating unit 33 is connected to one first actuator 34.This image-generating unit 33 is to may be selected to be wherein a kind of of CCD and CMOS, but perhaps is the detector of other detected light intensity.This first actuator 34 be the actuator that may be selected to be motor driven, piezoelectric element (piezoelectric element, PZT) actuator one of them, and other can drive that image-generating unit is shifted, to adjust the position of this image-generating unit 33.In addition, a side of this interference mirror group 32 also is connected to one second actuator 35 by chance, its be may be selected to be the actuator of motor driven and piezoelectric element actuator one of them, to adjust the relative position of object lens 320 and determinand 100 in this interference mirror group 32.
Then see also Fig. 4 A and cooperate shown in Figure 3ly, wherein Fig. 4 A interferes image to adjust the example schematic flow sheet for the present invention for sequence.This image regulating method 4 includes the following step: at first carry out step 40 acquisition one sequence and interfere image.Capture this sequence and interfere the mode of image, can interfere image with the sequence that obtains in people having the same aspiration and interest zone by the position of adjusting image-generating unit 33.Then, carry out step 41 again, interfere image to try to achieve a sharpness to this sequence respectively and focus on index curve and contrast focusing index curve.See also shown in Fig. 4 B and Fig. 4 C, wherein Fig. 4 B interferes image-generating unit and this interference mirror group position view of image for capturing this sequence; Fig. 4 C focuses on the index curve for the sharpness of being tried to achieve under the position of Fig. 4 B and contrast focuses on the index curve synoptic diagram.In Fig. 4 B, 990 is the position of object lens 320 capture focuses, and 991 is corresponding 990 image space.Label 7 is then represented an optical system, and it is can be corresponding to the assembly of light beam generator 30, spectrophotometric unit 31 and the part interference mirror group 32 of Fig. 3.One embodiment of this optical system 7 can be a microscope group.When imaging unit 33 is not when being positioned at correct image space, position 992 as shown in FIG., image-generating unit 33 will capture fuzzy sequence and interfere image.The sharpness that corresponded to this moment focuses on the index curve and contrast focuses on the index curve shown in Fig. 4 C.
Image evaluation index of the present invention is for focusing on desired value, and the rule of wherein calculating this sharpness focusing index curve is to can be spatial frequency distribution to differentiate rule, and sharpness focuses on the index curve for calculating the index of the intension value difference opposite sex between the image neighbor; Focus on index curve rule for calculating the index of image pixel intension primary system score cloth and calculate contrast, to estimate the degree of image contrast, for example: pixel intension primary system score cloth is differentiated rule.This pixel intension primary system score cloth differential method and this spatial frequency distribution differentiate that rule all may be selected to be correlation coefficient process (Multi-coefficientCorrelation), image difference method (Image Differentiation), gray-scale value peak valley depth method (Depth of Peaks and Valleys), image contrast method (Image Contrast), gray-scale statistical figure method (Histogram), frequency domain method (Frequency-domain Analysis), and other effectively differentiates rule.
Shown in Fig. 5 A example, image definition of the present invention is carried out the convolutional calculation of space difference with 80 pairs of images of cross shielding 81, the convolution and the definition values of image 31 for this reason.Particularly, the shape of this shielding 80 symmetry and mainly be the position of configure weights value a1-a8 and weight.Weight in this shielding 80 be multiply by each corresponding pixel value in weight position on individual image 81 in the convolution mode, and, move this shielding 80 positions, and do identical computing to computing next time with after the multiplied result addition.All operation results are added the General Logistics Department, can obtain the definition values of this individual image 81.In addition, the definition values of image 81 also can utilize the frequency-domain analysis of image to calculate it.
Shown in Fig. 5 B example, the image contrast is then by the intensitometer numeric distribution width of image pixel, be that (i.e. the distance to max pixel value 15b from minimum pixel value 15a, it is to utilize a threshold value Nth pixel quantity (pixel number) to be lower than the pixel value filtering of this threshold value Nth for the histogram distribution width 16 of image.) as the contrast of image.The intensity level of image gets by pixel intensity analytical calculation in the image, for example calculates the summation of each pixel intensity value in the image or calculates the average intensity value gained between neighbor in the imagery zone.The intensity level of image can be the mean flow rate or the maximum brightness value of pixel in the image.
In step 42, seek the peak value that this sharpness focuses on index curve and this contrast focusing index curve respectively.See also shown in Fig. 4 C, wherein FH interferes the contrast focusing index curve of image for this sequence, FT interferes the sharpness of image for this sequence and focuses on the index curve, H is the peak value that contrast focuses on the index curve, this peak can be considered the position that this sequence interferes image to occur, T is the peak value that sharpness focuses on the index curve, this peak can be considered the position that sharp image occurs, when the imaging relations of interference system is correct, H and T will be positioned at same position, and can obtain the image of sequence interference clearly in H or T position, when the imaging relations of interference system is incorrect, H and T will be positioned at diverse location, shown in Fig. 4 B.
Interfere image in order to obtain clearly this sequence, carry out step 43 and set up the relation that this sequence is interfered the distance between the peak value that peak value that distance between video imaging position and capture position and this sharpness focus on the index curve and this contrast focus on the index curve.The concrete practice of abovementioned steps 43 can first mobile Fig. 3 image-generating unit 33, observe the variable in distance that the image contrast focuses on T between the peak value H of index curve FH and peak value that image definition focuses on index curve FT then.Through the inferior test of plural number, then can find this relation.Carry out step 44 more at last, according to this relation, adjust the distance between this sequence interference video imaging position and capture position, make the peak value of this sharpness focusing index curve consistent with the peak that this contrast focuses on the index curve, shown in Fig. 4 D, can obtain the image of sequence interference clearly to carry out the three-dimensional appearance reconstruction technique of white light interference.
Wherein adjust this image space and be the position of adjusting this image-generating unit 33; Adjusting this capture position then is the position of adjusting the object lens 320 of this interference mirror group 32.That is to say, the relation that image capture unit 3 among Fig. 3 can be found out according to step 43, itself automatically adjust the positions of object lens 320 or image-generating unit 33 by device 3, make peak value H overlap, obtain and interfere sequential images clearly to carry out the interference system adjustment with the position of T.Except aforesaid mode, in step 43, more this relation can be created as the table of comparisons, the system that makes in the future can be according to the information of setting up in the table of comparisons, automatically adjust the position of the object lens 320 of this image-generating unit 33 and interference mirror group 32, the peak value that makes this sharpness focus on the index curve overlaps with the peak that this contrast focuses on the index curve.
See also Fig. 6 A and cooperate shown in Figure 3ly, wherein Fig. 6 A is that another that adjust that sequence interferes image for the present invention implemented example schematic flow sheet.This method at first carry out step 50, and image is interfered in acquisition one.Obtain this interference image then as previously mentioned as for the image capture unit 3 that how to utilize Fig. 3, do not give unnecessary details at this.Next carry out step 51, respectively this interference image is tried to achieve a sharpness and focus on index and contrast focusing index.Then, carry out step 52, the record sharpness focuses on index and contrast focuses on index.Then carry out step 53, adjust the image space of this interference image.The adjustment mode of this step is for adjusting the position of image-generating unit 33.See also shown in Fig. 6 B, this figure is for being adjusted in the picture cell position process sharpness focusing index curve and contrast focusing index curvilinear motion curve map.In the process of adjusting, pass through step 54, repeat aforesaid step, the user observes the position that the peak-peak in the change curve occurs, make this sharpness focusing index and this contrast focus on index and all be in peaked state, can be interfered image clearly, to carry out the three-dimensional appearance reconstruction technique of white light interference.
See also Fig. 7 A and cooperate shown in Figure 3ly, wherein Fig. 7 A is that the present invention adjusts schematic flow sheet for the image of no interference fringe.This method 6 at first carry out step 60, on this image capture unit 3, be adjusted to the position of picture unit 33 and interference mirror group 32, the capture focus of the object lens 320 of this interference mirror group 32 is moved to the extra-regional capture of the people having the same aspiration and interest position 993 that each position interferes in the capture visual field, to obtain a no interference fringe image.See also shown in Fig. 7 B, the position of wherein adjusting image-generating unit 33 is to move between a scope R1 of its one-tenth image focus 991 front and back for adjusting this image-generating unit 33.Label 7 is then represented an optical system, and it is can be corresponding to the assembly of light beam generator 30, spectrophotometric unit 31 and the part interference mirror group 32 of Fig. 3.One embodiment of this optical system 7 can be a microscope group.The position of adjusting this interference mirror group 32 then is to make the capture focus of object lens 320 of interference mirror group 32 move to outside the people having the same aspiration and interest region R 0 that each position interferes in the capture visual field, to obtain the image of clear no interference fringe.
Return shown in Fig. 7 A, carry out step 61, respectively this no interference fringe image is tried to achieve a sharpness and focus on index curve and contrast focusing index curve.Then carry out, step 62, the sharpness of seeking this no interference fringe image respectively focuses on the peak value of index curve and this contrast focusing index curve.Carry out step 63 subsequently, set up the relation that distance between this no interference fringe video imaging position and capture position and this sharpness focus on the distance between the peak value of index curve and peak value that this contrast focuses on the index curve.Aforesaid step 61 to the mode of step 63 is the programs of interfering image as aforementioned adjustment sequence, does not give unnecessary details at this.
Obtain then carry out step 64 after the relation, the peak value that focuses on the index curve with this contrast is that the center determines a scope.See also shown in Fig. 7 C, this figure be for the peak value H that focuses on index curve FH with contrast be the scope D synoptic diagram of center decision.The size of this scope D is to decide according to user's needs.Afterwards, carry out step 65 again, adjust the distance between this no interference fringe video imaging position and capture position, the peak value T that makes this sharpness focus on index curve FT does not fall within this scope D, and can obtain does not have the interference fringe image clearly.Had and do not had the interference fringe image clearly, carried out bidimensional image Defect Detection and dimension measurement.
Only above-described, only be preferred embodiment of the present invention, when can not with the restriction scope of the invention.Be that every equalization of doing according to claim of the present invention changes and modification, will do not lose main idea of the present invention place, also do not break away from the spirit and scope of the present invention, the former capital should be considered as further enforcement situation of the present invention.
Comprehensively above-mentioned, image regulating method provided by the invention and image capture unit, can obtain arbitrarily and interfere the inside and outside sharp image in people having the same aspiration and interest zone, need not switch object lens and can carry out two-dimensional measurement and three-dimensional appearance measurement, make interference system have the dual-use function of two dimension and three-dimensional inspection (amount) survey.Therefore can satisfy the demand of industry, and then improve the competitive power of this industry, really meet the required condition that possesses of patent of invention method defined application invention, so propose the application of patent of invention in accordance with the law.
Claims (18)
1. image regulating method is characterized in that it includes the following step:
Capture a sequence and interfere image;
Interfere image to try to achieve a sharpness to this sequence respectively and focus on index curve and contrast focusing index curve;
Seek the peak value that this sharpness focuses on index curve and this contrast focusing index curve respectively; And
Carry out an adjustment program and adjust relative position between the peak value of peak value that this sharpness focuses on the index curve and this contrast focusing index curve;
Wherein, this adjustment program also includes the following step:
Set up this sequence and interfere the relation of the distance between the peak value that peak value that distance between video imaging position and capture position and this sharpness focus on the index curve and this contrast focus on the index curve; And
According to this relation, adjust the distance between this sequence interference video imaging position and capture position.
2. image regulating method as claimed in claim 1, it is characterized in that, it is consistent with the peak that this contrast focuses on the index curve that wherein this adjustment program also includes the peak value that makes this sharpness focus on the index curve, to obtain the step of this sequence interference image clearly.
3. image regulating method as claimed in claim 1 is characterized in that, wherein also includes the step that this relation is created as a related table.
4. image regulating method as claimed in claim 1 is characterized in that, wherein this sharpness focuses on the index curve for calculating the index of the intension value difference opposite sex between the image neighbor, to estimate the degree of image definition.
5. image regulating method as claimed in claim 1, it is characterized in that, wherein trying to achieve the rule that this sharpness focuses on the index curve is to be that spatial frequency distribution is differentiated rule, this spatial frequency distribution differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
6. image regulating method as claimed in claim 1 is characterized in that, wherein this contrast focuses on the index curve for calculating the index of image pixel intension primary system score cloth, to estimate the degree of image contrast.
7. image regulating method as claimed in claim 1, it is characterized in that, wherein trying to achieve the rule that this contrast focuses on the index curve is to be that pixel intension primary system score cloth is differentiated rule, this pixel intension primary system score cloth differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
8. image regulating method is characterized in that it includes the following step:
Acquisition one no interference fringe image;
Respectively this no interference fringe image is tried to achieve a sharpness and focus on index curve and contrast focusing index curve;
Seek the peak value that this sharpness focuses on index curve and this contrast focusing index curve respectively; And
Carry out an adjustment program and adjust relative position between the peak value of peak value that this sharpness focuses on the index curve and this contrast focusing index curve;
Wherein, this adjustment program also includes the following step:
Set up the relation that distance between this no interference fringe video imaging position and capture position and this sharpness focus on the distance between the peak value of index curve and peak value that this contrast focuses on the index curve;
The peak value that focuses on the index curve with this contrast is that the center determines a scope; And
According to this relation, adjust the distance between this no interference fringe video imaging position and capture position.
9. image regulating method as claimed in claim 8 is characterized in that, the method that wherein captures this no interference fringe image is to move to outside the people having the same aspiration and interest zone that each position interferes in the capture visual field for capture focus that will not have the interference fringe image.
10. image regulating method as claimed in claim 8 is characterized in that, wherein this sharpness focuses on the index curve for calculating the index of the intension value difference opposite sex between the image neighbor, to estimate the degree of image definition.
11. image regulating method as claimed in claim 8, it is characterized in that, wherein trying to achieve the rule that this sharpness focuses on the index curve is to be that spatial frequency distribution is differentiated rule, this spatial frequency distribution differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
12. image regulating method as claimed in claim 8 is characterized in that, wherein this contrast focuses on the index curve for calculating the index of image pixel intension primary system score cloth, to estimate the degree of image contrast.
13. image regulating method as claimed in claim 8, it is characterized in that, wherein trying to achieve the rule that this contrast focuses on the index curve is to be that pixel intension primary system score cloth is differentiated rule, this pixel intension primary system score cloth differentiate rule may be selected to be correlation coefficient process, image difference method, gray-scale value peak valley depth method, image contrast method, gray-scale statistical figure method and frequency domain method one of them.
14. image regulating method as claimed in claim 8 is characterized in that, wherein this adjustment program also includes the peak value of this sharpness focusing index curve is not fallen within this scope, to present clear no interference fringe image.
15. an image capture unit is characterized in that, comprising:
One light beam generator, it can produce a light beam;
One spectrophotometric unit, it can reflect this light beam, to form a folded light beam;
One interference mirror group, it can be modulated into this folded light beam one reference beam and and measure light beam, this measurement light beam is incident to the surface on the determinand, and reflexes to this interference mirror group and this reference beam closes light to form an interfering beam, enters to this spectrophotometric unit; And
One image-generating unit, it can receive this interfering beam by this spectrophotometric unit, to form an image, the one side idol of this image-generating unit is connected to one first actuator, this first actuator is according to a relation, adjust the position of this image-generating unit and the distance between the capture position, it is consistent with the peak that this contrast focuses on the index curve to make this sharpness focus on the peak value of index curve, and this relation is the relation of interfering the distance between the peak value of peak value that distance between video imaging position and capture position and this sharpness focus on the index curve and this contrast focusing index curve for sequence.
16. image capture unit as claimed in claim 15 is characterized in that, wherein this image-generating unit may be selected to be wherein a kind of of CCD and CMOS.
17. image capture unit as claimed in claim 15 is characterized in that, wherein this first actuator be may be selected to be the actuator of motor driven and piezoelectric element actuator one of them, to adjust the position of this image-generating unit.
18. image capture unit as claimed in claim 15, it is characterized in that, wherein a side of this interference mirror group also is connected to one second actuator by chance, this second actuator may be selected to be the actuator of motor driven and piezoelectric element actuator one of them, to adjust the position of this interference mirror group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710130600XA CN101349540B (en) | 2007-07-18 | 2007-07-18 | Image regulating method and image viewfinding apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710130600XA CN101349540B (en) | 2007-07-18 | 2007-07-18 | Image regulating method and image viewfinding apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101349540A CN101349540A (en) | 2009-01-21 |
| CN101349540B true CN101349540B (en) | 2011-06-29 |
Family
ID=40268414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710130600XA Active CN101349540B (en) | 2007-07-18 | 2007-07-18 | Image regulating method and image viewfinding apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101349540B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4175282A4 (en) * | 2020-06-25 | 2023-11-22 | FUJIFILM Corporation | Information processing device, operation method for same, and operation program for same |
| EP4175283A4 (en) * | 2020-06-25 | 2023-11-22 | FUJIFILM Corporation | Information processing device, and operating method and operating program for same |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5397190B2 (en) * | 2009-11-27 | 2014-01-22 | ソニー株式会社 | Image processing apparatus, image processing method, and program |
| TWI500963B (en) * | 2010-06-29 | 2015-09-21 | Chroma Ate Inc | An image capturing device and method |
| CN102313524B (en) * | 2010-07-05 | 2013-09-18 | 致茂电子(苏州)有限公司 | Image acquiring device and method |
| CN101949692A (en) * | 2010-09-07 | 2011-01-19 | 天津大学 | Microstructure topography test system and method based on white light phase shift interferometry |
| BR112017022277B1 (en) * | 2015-04-22 | 2022-07-26 | Nippon Steel Corporation | APPARATUS AND METHOD FOR SHAPE MEASUREMENT |
| CN105043302B (en) * | 2015-07-30 | 2017-07-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of single width carrier fringe pattern image quality monitors method of adjustment in real time |
| CN108107051B (en) * | 2017-12-19 | 2020-03-31 | 无锡先导智能装备股份有限公司 | Lithium battery defect detection system and method based on machine vision |
| CN109974577B (en) * | 2019-04-25 | 2020-12-08 | 业成科技（成都）有限公司 | Wave surface interferometer and correction method thereof |
| CN113587812B (en) * | 2021-07-28 | 2023-10-27 | 海信视像科技股份有限公司 | Display equipment, measuring method and device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7068376B2 (en) * | 2002-04-19 | 2006-06-27 | Zygo Corporation | Interferometry method and apparatus for producing lateral metrology images |
| CN1991341A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Interference pattern automatic focusing and automatic detection method |
-
2007
- 2007-07-18 CN CN200710130600XA patent/CN101349540B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7068376B2 (en) * | 2002-04-19 | 2006-06-27 | Zygo Corporation | Interferometry method and apparatus for producing lateral metrology images |
| CN1991341A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Interference pattern automatic focusing and automatic detection method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4175282A4 (en) * | 2020-06-25 | 2023-11-22 | FUJIFILM Corporation | Information processing device, operation method for same, and operation program for same |
| EP4175283A4 (en) * | 2020-06-25 | 2023-11-22 | FUJIFILM Corporation | Information processing device, and operating method and operating program for same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101349540A (en) | 2009-01-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101349540B (en) | Image regulating method and image viewfinding apparatus | |
| JP6469368B2 (en) | Machine vision inspection system and method for performing high speed focused height measurement operation | |
| KR101264955B1 (en) | Method and system for object reconstruction | |
| US6229913B1 (en) | Apparatus and methods for determining the three-dimensional shape of an object using active illumination and relative blurring in two-images due to defocus | |
| JP5354254B2 (en) | Shape measuring apparatus and method, and program | |
| CN109883391B (en) | Monocular distance measurement method based on digital imaging of microlens array | |
| WO2018042424A1 (en) | Optical detection of vibrations | |
| US20140192234A1 (en) | Method for generating and evaluating an image | |
| JP5369564B2 (en) | Shape measuring device | |
| CN105258673B (en) | A kind of target ranging method based on binocular synthetic aperture focusing image, device | |
| US8237933B2 (en) | Method for image calibration and apparatus for image acquiring | |
| CN106204524A (en) | A kind of method and device of evaluation image quality | |
| JP2022524255A (en) | Optical device test methods and equipment | |
| WO2014011182A1 (en) | Convergence/divergence based depth determination techniques and uses with defocusing imaging | |
| JP5369563B2 (en) | Shape measuring device | |
| CN107888836A (en) | A kind of push-broom type remote sensing camera focus adjustment method based on auxiliary focal plane | |
| Chan et al. | Enhancement of phase detection for autofocus | |
| US10096113B2 (en) | Method for designing a passive single-channel imager capable of estimating depth of field | |
| JP4743773B2 (en) | Edge detection method, apparatus, and program | |
| WO2013185936A1 (en) | Apparatus and method for estimating a property of a surface using speckle imaging | |
| US11004229B2 (en) | Image measurement device, image measurement method, imaging device | |
| JPH06102197A (en) | Surface flaw detection method | |
| EP3504524B1 (en) | Optical detection of vibrations | |
| CN110543843B (en) | Human eye positioning and size calculating algorithm based on forward oblique projection and backward oblique projection | |
| KR101157791B1 (en) | Optic microscope with automatic focusing system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |