CN101344784B - Standard operation time calculating device and standard operation time calculating method - Google Patents
Standard operation time calculating device and standard operation time calculating method Download PDFInfo
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- CN101344784B CN101344784B CN2008101295616A CN200810129561A CN101344784B CN 101344784 B CN101344784 B CN 101344784B CN 2008101295616 A CN2008101295616 A CN 2008101295616A CN 200810129561 A CN200810129561 A CN 200810129561A CN 101344784 B CN101344784 B CN 101344784B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
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Abstract
The invention provides a standard operation time calculation device and standard operation time calculation method. The standard operation time calculation device comprises a data storage part (3) that collects an actual accomplished number of the substrate processed in the completely executed operation and an actual accomplished data of the actual accomplished operation time that is needed by the completely executed operation, an event information collecting part (4) that collects the event information related to the event influenced by the operation time that is needed by the operation for processing the substrate, an operation sheet number collecting part (5) that collects the sheet number of the substrate processed in the unexecuted operation, and a standard operation time calculation part (6) that calculates the standard operation time needed by the unexecuted operation according to the actual achievement data, the event information and the sheet number. The invention can more accurately predict the running state of the manufacture processing device that executes the working of the production line in unexecuted operation when an event that influences the operation time happens.
Description
Technical field
The present invention relates to a kind of standard operation time computing device and standard operation Time Calculation method, standard operation time computing device and the standard operation Time Calculation method particularly the standard operation as the benchmark of the activity duration of handling a collection of substrate utilized during the time.
Background technology
In the manufacture process of semiconductor article, the multi-disc semiconductor wafer gathered with a collection of unit handle.As its processing mode, the sheet page that comprises process semiconductor wafers piecewise with gather a collection of or many batches of simultaneously treated batch types.As the operation of sheet page, example photo-mask process.As the operation of batch type, example chemical vapor deposition (chemical vapordeposition) or impurity DIFFUSION TREATMENT etc.In the treating apparatus of these manufacturing processes, setting is as the standard operation time of the benchmark of the activity duration of each batch, and this standard operation time is used to make line simulation or scheduling.
This activity duration is changed by the influence of the incident of the variation of the sheet number of wafer in for example criticizing, device operational situation, improvement etc.This standard operation time receives the working real result data from making in the line, be stored in the database, and these working real result data are carried out statistical treatment, calculates automatically.General method for quality control is adopted in this statistical treatment, with the distribution peak value as the standard operation time.Therefore, when not storing the data during a certain, the peak value that distributes can not appear.Therefore, be difficult to make the incident that the activity duration is exerted an influence to be reflected to this standard operation immediately on the time.Simulate or dispatch and hope under a lot of situation that event reflects and predicts in the line, hope to have automatically incident is reflected to the temporal method of standard operation.
Open the spy and to disclose the standard time calculation element that to infer standard time (goods and materials confinement time) accurately in the 2004-246628 communique.This standard time calculation element is used for the working real result data computation standard time according to production line, it is characterized in that, has the computing unit by the time and the working real result data computation standard time of not carrying out operation in the production line.
Inventor of the present invention recognizes following problem points.
Open in the method for 2004-246628 communique the spy; Owing to ask for the standard operation time by the peak value of storage DATA DISTRIBUTION through statistical treatment; Even therefore exist since follow the article treating process change batch in the sheet number of wafer changes, the operational situation variation of treating apparatus, processing power improvement etc. cause variation incident that the standard operation time is exerted an influence; Need the time till DATA DISTRIBUTION during to this incident reaches peak value, can't be reflected to the standard operation time immediately.And when the data in plant failure or the evaluation reach peak value on the contrary, can't avoid.In order to reflect, proofread and correct The above results, carry out the real result data parsing, need manually input to set thereafter, need the more time.
For example, under the situation of sheet page treating apparatus, the distribution after the incident is obtained histogrammic peak value when taking place before differently therein, and it is approximate to carry out straight line.Thus, there is activity duration, stop time situation of display abnormality value all.Under the situation of batch type treating apparatus, when taking place before the distribution ratio after the incident differently, all become activity duration, stop time two-stage sometimes and distribute.At this moment, in storage data number, become peak value before the incident sometimes, become peak value after the incident on the contrary, consequently, got exceptional value sometimes, sometimes can't obtain the standard operation time that needs.
Summary of the invention
The object of the present invention is to provide a kind of standard operation time computing device and standard operation Time Calculation method, more reasonably the standard operation time of the operation of computing substrate.
According to a viewpoint of the present invention, the standard operation time computing device has: data store, event information collection portion, operation sheet are counted collection portion and standard operation Time Calculation portion.Data store is collected real result sheet number and the real result data of the needed real result activity duration of operation that above-mentioned enforcement finishes that are illustrated in the substrate of handling in the operation of implementing to finish.Event information collection portion collects and the relevant event information of incident that the needed activity duration of the operation of treatment substrate is exerted an influence.The operation sheet is counted the sheet number that collection portion is collected in the substrate of not implementing to handle in the operation.Standard operation Time Calculation portion according to these real result data, event information and sheet number, calculates this and does not implement the needed standard operation time of operation.
According to other viewpoints of the present invention, standard operation Time Calculation method has: collection is illustrated in the real result sheet number of the substrate of handling in the operation of implementing to finish and the step of the real result data of the needed real result activity duration of operation that above-mentioned enforcement finishes; Collect the step of the event information relevant with the incident that the needed activity duration of the operation of treatment substrate is exerted an influence; Be collected in the step of the sheet number of the substrate of not implementing to handle in the operation; And, calculate this and do not implement the operation step of needed standard operation time according to these real result data, event information and sheet number.
According to this standard operation time computing device and standard operation Time Calculation method; When the incident that the activity duration is exerted an influence takes place; Can infer the standard operation time of not implementing operation that will implement in the future more accurately, prediction is more accurately implemented this and is not implemented the manufacturing treating apparatus operational situation of the production line of operation.
The purpose of foregoing invention, effect, characteristics can be able to clearly through the record with reference to the embodiment of the accompanying drawing of enclosing.
Description of drawings
Fig. 1 is the block diagram of the standard operation time computing device of expression an embodiment of the invention.
Fig. 2 representes the real result data.
Fig. 3 presentation of events kind of information table.
Fig. 4 is the histogram that expression sheet number belongs to the frequency distribution of the activity duration shown in other real result data of a level.
Fig. 5 be expression average operation sheet number and peak value correlationship, represent the chart of peak value with respect to the regression straight line of average operation sheet number.
Fig. 6 is the histogram that the frequency of the stop time of expression batch type operation distributes.
Fig. 7 is the histogram that the frequency in the processing time of expression batch type operation distributes.
Fig. 8 is the process flow diagram of the standard operation Time Calculation method of expression an embodiment of the invention.
Fig. 9 is that the expression peak value is with respect to the comparative example of the regression straight line of average operation sheet number and the chart of embodiment.
The histogram of the embodiment that the frequency of the activity duration of the batch type operation when Figure 10 is the presentation of events generation distributes.
Figure 11 is expression operation sheet number and the correlationship of activity duration, represent the chart of activity duration with respect to the regression straight line of operation sheet number.
Embodiment
Following with reference to description of drawings embodiment of the present invention.The standard operation time computing device 1 of an embodiment of the invention is computing machines, and is as shown in Figure 1, and a plurality of computer programs are installed.That is, standard operation time computing device 1 has not shown CPU, memory storage, input media and output unit.This CPU carries out and is installed in the computer program in the standard operation time computing device 1, controls its memory storage, input media and output unit.This computer program of this memory device stores, the information that temporary transient storage is generated by this CPU.This input media is operated by the user, and generation information is input to this CPU with this information.As this input media, mobile memory driver, keyboard are for example arranged.This mobile memory driver reads the information that is stored in the mobile memory, and this information is outputed to this CPU.This keyboard is operated by the user, generates text line, and this text line is outputed to this CPU.The information that this output unit will be generated by CPU is with can be by the mode of User Recognition to output.As this output unit, mobile memory driver, display are for example arranged.This mobile memory driver will be recorded in mobile memory by the information that this CPU generates.This display has display surface, will be presented on this display surface by the picture that this CPU generates.
The event database 2, data store 3, event information collection portion 4, the operation sheet that are equipped with in the standard operation time computing device 1 as computer program are counted collection portion 5 and standard operation Time Calculation portion 6.Event database 2 is stored in the kind of event information table in the memory storage with the mode that can carry out information processing through other computer programs.Data store 3 is collected the real result data from input media.Event information collection portion 4 is from input media Collection Events information.The operation sheet is counted collection portion 5 and is collected operation sheet number from input media.Standard operation Time Calculation portion 6 is with reference to the kind of event information table by event database 2 storages; The event information of collecting according to the real result data of collecting, by event information collection portion 4 and count the operation sheet number that collection portion 5 collects, basis of calculation activity duration by the operation sheet by data store 3.
Fig. 2 representes the real result data by data store 3 collections.These real result data 11 generate one with respect to an operation.Real result data 11 are represented several 15, the activity duration 16 of operation 12, type of device 13, time implementation date 14, operation sheet respectively.
The operation of semiconductor substrate is handled in operation 12 identifications.As this operation, semiconductor lithography operation, chemical vapor deposition (chemical vapor deposition) operation, impurity DIFFUSION TREATMENT operation are for example arranged.Type of device 13 expressions are represented in sheet page operation or the batch type operation by the form of the operation of operation 12 identifications.The device by the operation of operation 12 identifications is implemented in type of device 13 identification, represent the device group under this device title, represent number and the treatment conditions of this device setting of number machine of this device.Implement the time on date that Time of Day 14 expressions are implemented by the operation of operation 12 identifications.Operation sheet several 15 is illustrated in the sheet number of the substrate of handling in the operation by operation 12 identifications.Activity durations 16 expression is by the needed time of operation of operation 12 identifications, particularly representes stop time and processing time when operation by operation 12 identifications is the batch type operation.Represent to implement in the required activity duration of this operation the out-of-operation time of device of this operation this stop time.This processing time is represented the time of the device running of this operation of enforcement in this activity duration.
At this moment, data store 3 will be input to the real result data recording of standard operation time computing device 1 and be stored in the memory storage by the user.
Fig. 3 representes the kind of event information table that write down with the mode that can carry out information processing by event database 2.This kind of event information table 21 is set up corresponding with data separation condition 23 and fixed factors 24 incident identification 22.That is, any key element in the incident identification 22 is corresponding with a key element in the data separation condition 23, and is corresponding with a key element in the fixed factors 24.Incident identification 22 identification is to the incident that the needed activity duration of the operation of treatment substrate exerts an influence, and representes the treatment conditions that device was set when the title of this incident, device that this incident takes place and this incident produced.As this incident, for example there is the processing power of plant failure, treating apparatus to improve.23 expressions of data separation condition judge whether the real result data of being collected by data store 3 receive the condition by the events affecting of incident identification 22 identifications.This condition represent this incident to the activity duration exert an influence during or this incident should the activity duration when activity duration is exerted an influence the scope of (or stop time, the processing time) value that can obtain.The upper and lower bound of this scope is constant or the function of this sheet number that is independent of the sheet number of the handled substrate of this operation.The algorithm of basis of calculation activity duration when having the real result data that satisfy by the condition shown in the data separation condition 23 in the real result data that fixed factors 24 expression is collected by data store 3, expression cuts in square or the degree of tilt.
The event information of being collected by event information collection portion 4 is presentation of events identifying information, perhaps presentation of events identifying information, data separation condition, fixed factors only.At this moment, standard operation Time Calculation portion 6 calculates the pairing data separation condition of incident identification of being collected by event information collection portion 4 with reference to kind of event information table 21 from data separation condition 23.Real result data 11 are divided into before the incident real result data after the real result data and incident.The real result data are formed by the real result data that do not satisfy this data separation condition that calculates in the real result data 11 before this incident.The real result data are formed by the real result data that satisfy this data separation condition that calculates in the real result data 11 after this incident.
Standard operation Time Calculation portion 6 is a plurality of ranks with real result data staging before the incident when the type of device 13 expression sheet page operations of real result data 11, generates according to other each other a plurality of data of level of these a plurality of levels.These a plurality of ranks are represented respectively and the relevant interval of operation sheet number.For example, as classification, for example have and carry out classification in this wise with 1-5 sheet, 6-10 sheet, 11-15 sheet, 16-20 sheet, 21-25 sheet handling the sheet number of criticizing.This data and real result data 11 are likewise represented operation 12, type of device 13, time implementation date 14, operation sheet several 15 and activity duration 16 respectively.Belong in these a plurality of ranks other a plurality of data of a level by incident before operation sheet several 15 in the real result data be included in these other real result data of level and form.In addition, other length of an interval degree of this level of expression also can be different each other.And other stage division of level is fixing, batch the sheet number relate under the situation such as multiple, also can be according to each changed condition.
The frequency that standard operation Time Calculation portion 6 and then calculating belong to other a plurality of data of level in these a plurality of ranks distributes.It is 31 as shown in Figure 4 that this frequency distributes, and the frequency (data number of packages) of expression data goes out a plurality of with respect to the activity duration according to these a plurality of other each level calculation of level.Standard operation Time Calculation portion 6 is according to the frequency rank data before the 31 calculating incidents that distribute.The rank data calculate one according to each frequency distribution 31 before this incident, represent average operation sheet number and peak value 32.This average operation sheet numerical table shows the mean value of the operation sheet number shown in this data.The mean value of peak value 32 these data of expression.In addition, peak value 32 also can be represented other typical values different with mean value.As this typical value the suitably definite value of middle number, pattern, user is for example arranged.
Fig. 5 representes the correlationship of this average operation sheet number and peak value 32, promptly be illustrated in scatter in the space that this average operation sheet number and peak value generate rank data 35-1～35-u before a plurality of incidents (u=2,3,4 ...) and scatter diagram.In example shown in Figure 5; Be that mean value that the sheet number belongs to other sheet number of handling batch of level of 21-25 sheet is 24.41; Likewise, the mean value that belongs to the sheet number that the processing of 16-20 sheet criticizes is 18.10, and the mean value that belongs to the sheet number that the processing of 11-15 sheet criticizes is 13.69 situation.Rank data 35-i before each incident (i=1,2,3 ..., u) average operation sheet number of expression and peak value 32.Fig. 5 and then expression regression straight line.This regression straight line 36 with the average pairing value of operation sheet number of rank data 35-i before the incident and incident before the mode of square minimum of difference of peak value of rank data 35-i calculated.
That is, standard operation Time Calculation portion 6 utilizes least square method, based on rank data computation regression straight line 36 before these a plurality of incidents.Standard operation Time Calculation portion 6 and then according to processing time of each sheet before standard stop time and the incident before the regression straight line 36 calculating incidents.What standard was represented regression straight line 36 crosscut peak value axles stop time before this incident cuts square 37, promptly is equivalent to average operation sheet number and is 0 point.The processing time of each sheet is represented the degree of tilt with respect to average operation sheet number of regression straight line 36 before this incident.
The real result data likewise are classified as a plurality of ranks with real result data 11 whole before standard operation Time Calculation portion 6 and the incident, generate according to other each other a plurality of data of level of these a plurality of levels.Standard operation Time Calculation portion 6 then calculates the frequency that belongs to other a plurality of data of level in these a plurality of ranks and distributes, based on these frequency Distribution calculation rank data.These rank data go out one according to this each frequency Distribution calculation, represent average operation sheet number and peak value.This average operation sheet numerical table shows the mean value of the operation sheet number shown in this data.This peak value is represented the mean value of this data.
Standard operation Time Calculation portion 6 is with reference to kind of event information table 21; When the pairing fixed factors of being collected by event information collection portion 4 of incident identification is represented to cut square, based on the processing time of standard stop time and this each sheet of rank data computation before this incident.The processing time of this each sheet is represented the degree of tilt of the straight line different with regression straight line 36.With standard stop time before this section square and this incident consistent mode and these rank data the average pairing value of operation sheet number and these rank data peak value difference square the mode of minimum calculate this straight line.The operation sheet number that collection portion 5 collects, basis of calculation activity duration are counted according to the processing time of standard stop time, this each sheet before this incident and by the operation sheet by standard operation Time Calculation portion 6.Before this this incident of standard operation time representation standard stop time and processing time and.This processing time is represented the processing time of this each sheet and amassing of this operation sheet number.
Standard operation Time Calculation portion 6 is when the pairing fixed factors 24 expression degree of tilt of the incident identification of being collected by event information collection portion 4, based on processing time of this each sheet and this rank data basis of calculation stop time.This standard is represented the square that cuts of the straight line different with regression straight line 36 stop time.With the difference of the peak value of the average pairing value of operation sheet number of consistent mode of the processing time of each sheet before this degree of tilt and this incident and these rank data and these rank data square the minimum mode of minimum value calculate this straight line.Standard operation Time Calculation portion 6 according to this standard stop time, this incident before each sheet processing time and count the operation sheet number that collection portion 5 collects, basis of calculation activity duration by the operation sheet.Before this this incident of standard operation time representation standard stop time and processing time and.This processing time is represented the processing time of this each sheet and amassing of this operation sheet number.
During the type of device 13 expression batch type operations of standard operation Time Calculation portion 6 expression real result data 11, calculates the frequency distribution 41 of the stop time shown in activity duration 16 of these real result data 11 as shown in Figure 6.Standard operation Time Calculation portion 6 distributed for 41 basis of calculation stop times according to frequency.This standard is represented the mean value of the stop time shown in the frequency distribution 41 stop time.The frequency that the processing time shown in activity duration 16 of these real result data 11 as shown in Figure 7 is then calculated by standard operation Time Calculation portion 6 distributes 42.Standard operation Time Calculation portion 6 distributed for 42 basis of calculation processing times according to frequency.The mean value in the processing time shown in this standard treated time representation frequency distribution 42.Standard operation Time Calculation portion 6 is according to standard stop time and standard treated Time Calculation standard operation time.This standard operation time representation standard stop time and standard treated time with.
Fig. 8 representes the standard operation Time Calculation method of an embodiment of the invention.The user at first generates real result data according to each operation, is input to standard operation time computing device 1.This real result data representation type of device, time implementation date, operation sheet number and activity duration.At this moment, the user calculates the activity duration of real result data according to the time till the time on operation time Start Date to end of job date of this operation.In addition, the activity duration also can calculate according to other data.As these data, for example begin the time till operation time Start Date of this operation for time Close Date from the preceding operation of the time till operation time Start Date to operation time Start Date of next operation of same goods and materials of this operation, same goods and materials.When the user is the batch type operation in this operation, and then measure processing time and stop time, with adding this processing time and stop time the real result data to according to each this operation.The real result data storage that standard operation time computing device 1 will be imported is to memory storage (step S1).
During the incident that exerts an influence in the activity duration of taking place operation, the user generates the event information relevant with this incident, and this event information is input to standard operation time computing device 1.This event information representes to discern the incident identification of this incident.Standard operation time computing device 1 is stored in memory storage (step S2) with this incident identification.
The user during time, imports the job information relevant with this operation at the standard operation of wanting to obtain the operation that will carry out.This job information is represented the type of device and the operation sheet number of this operation.This type of device is represented the form (in operation of sheet page or the batch type operation) of this operation, and the device of this operation is implemented in identification, represent the device group under this device title, represent number and the treatment conditions of this device setting of number machine of this device.Standard operation time computing device 1 temporarily is stored in memory storage (step S3) with this job information.
Standard operation time computing device 1 is the draw-out device type real result data consistent with the type of device of in step S3, collecting from a plurality of real result data of among step S1, importing.The real result data of 1 pair of this extraction of standard operation time computing device are carried out statistical treatment (step S4).
At this moment, standard operation time computing device 1 calculates the pairing condition of incident identification of in step S3, collecting from data separation condition 23 with reference to kind of event information table 21.The real result data that standard operation time computing device 1 utilizes this condition to extract are divided into before the incident real result data after the real result data and incident.The real result data are formed by the real result data that do not satisfy this condition in the real result data before this incident.The real result data are formed by the real result data that satisfy this condition in the real result data after this incident.
When standard operation time computing device 1 is represented the operation of sheet page at the device information of this job information, real result data before the incident are classified as a plurality of ranks about operation sheet number, generate according to other each other a plurality of data of level of these a plurality of levels.The frequency that standard operation time computing device 1 and then calculating belong to other a plurality of data of level in these a plurality of ranks distributes.Standard operation time computing device 1 according to this frequency Distribution calculation incident before the rank data.The rank data are represented average operation sheet number and peak value according to one of each frequency Distribution calculation before this incident.Standard operation time computing device 1 utilizes least square method, based on rank data computation regression straight line 36 before these a plurality of incidents.Standard operation time computing device 1 and then according to processing time of each sheet before standard stop time and the incident before the regression straight line 36 calculating incidents.
The real result data likewise are classified into a plurality of ranks with the whole of real result data about operation sheet number before standard operation time computing device 1 and the incident, generate according to other each other a plurality of data of level of these a plurality of levels.Standard operation time computing device 1 then calculates the frequency that belongs to other a plurality of data of level in these a plurality of ranks and distributes, according to these frequency Distribution calculation rank data.These rank data distribute according to this frequency each calculate one, represent average operation sheet number and peak value.
Standard operation time computing device 1 calculates the pairing key element of incident identification of in step S3, collecting with reference to kind of event information table 21 from fixed factors 24.
When standard operation time computing device 1 is represented to cut square in this key element, based on the processing time of standard stop time and this each sheet of rank data computation before this incident.The processing time of this each sheet is represented the degree of tilt of the straight line different with regression straight line 36.With standard consistent mode stop time before this section square and this incident, and the mode of square minimum of the difference of the peak value of the average pairing value of operation sheet number of these rank data and these rank data is calculated this straight line.Standard operation time computing device 1 according to this incident before standard stop time, this each sheet processing time and count the operation sheet number that collection portion 5 collects, basis of calculation activity duration (step S5) by the operation sheet.Before this this incident of standard operation time representation standard stop time and processing time and.This processing time is represented the processing time of each sheet and amassing of this operation sheet number.
When standard operation time computing device 1 is represented degree of tilt in this key element, based on processing time of this each sheet and this rank data basis of calculation stop time.This standard is represented the square that cuts of the straight line different with regression straight line 36 stop time.With the consistent mode of processing time of each sheet before this degree of tilt and this incident, and the mode of square minimum of the difference of the peak value of the average pairing value of operation sheet number of these rank data and these rank data is calculated this straight line.Standard operation time computing device 1 is counted the operation sheet number that collection portion 5 collects, basis of calculation activity duration (step S5) according to the processing time of this standard stop time, this each sheet and by the operation sheet.Before this this incident of standard operation time representation standard stop time and processing time and.This processing time is represented the processing time of each sheet and amassing of this operation sheet number.
When standard operation time computing device 1 was represented the batch type operation at the device information of this job information, the frequency of calculating the stop time of these real result data distributed, according to this frequency Distribution calculation standard stop time.The frequency that standard operation time computing device 1 then calculates the processing time of these real result data distributes, based on this frequency Distribution calculation standard treated time.Standard operation time computing device 1 is based on standard stop time and standard treated Time Calculation standard operation time (step S5).This standard operation time representation standard stop time and standard treated time with.
When Fig. 9 representes that the type of device of this job information is represented the operation of sheet page, the regression straight line that the comparative example of the standard operation Time Calculation method through this embodiment calculates.Fig. 9 is the data that the data after the incident (several batches, average sheet number be 8.56) are appended to Fig. 5, the example that the influence of incident is estimated.The incident that is independent of is calculated this regression straight line 51.That is, in this comparative example, standard operation time computing device 1 is classified into a plurality of ranks with the whole of real result data about operation sheet number, generates according to other each other a plurality of data of level of these a plurality of levels.The frequency that standard operation time computing device 1 and then calculating belong to other a plurality of data of level in these a plurality of ranks distributes.Standard operation time computing device 1 is according to these frequency Distribution calculation rank data.These rank data are represented average operation sheet number and peak value according to one of each frequency Distribution calculation.Standard operation time computing device 1 utilizes least square method, based on these a plurality of rank data computation regression straight lines 36.
This regression straight line 51 cuts square sometimes and is expressed as negative when being calculated like this.Standard is expressed as negative stop time when utilizing regression straight line 51 to be calculated, be irrational.When this irrational standard of standard operation time utilization is calculated stop time, be irrational.
Fig. 9 and then expression are through the embodiment of the straight line of the standard operation Time Calculation method calculating of this embodiment.This straight line 52 is fixed factors when representing to cut square, the regression straight line that the standard operation Time Calculation method through this embodiment calculates.At this moment, straight line 52 can not produce the situation that square is represented negative of cutting.Therefore, through utilizing straight line 52, standard can not represented negative stop time, and is more reasonable, and the standard operation time is more reasonable.This straight line 53 is fixed factors when representing degree of tilt, the regression straight line that the standard operation Time Calculation method through this embodiment calculates.At this moment, straight line 53 can not produce the situation that square is represented negative of cutting.Therefore, through utilizing straight line 53, standard can not represented negative stop time, and is more reasonable, and the standard operation time is more reasonable.
When Figure 10 represented that the type of device of this job information is represented the batch type operation, the frequency in the processing time that the standard operation Time Calculation method through this embodiment calculates distributed.When this frequency distribution 61 was illustrated in the incident generation, the processing time was the situation of irrational distribution (two-stage distribution).The standard treated time is irrational when utilizing frequency distribution 61 to be calculated.This irrational standard treated time of standard operation time utilization is irrational when being calculated.
The standard operation Time Calculation method of this embodiment; When the pairing data separation condition of the event information of in step S2, collecting is represented the scope of the value that the processing time can get; Utilization except the processing time less than the real result data of the lower limit 62 of this scope and processing time greater than the real result data the real result data of the upper limit 63 of this scope, basis of calculation processing time.That is, this data separation condition has represented to remove the real result data of the downside X% of whole real result data, has removed the real result data conditions of upside Y%.During by appropriate design, this standard treated time can utilize the real result data of reasonable distribution to calculate in this scope.According to the real result data that such utilization is distinguished by the data separation condition, the standard treated time that calculates is more reasonable, and this standard treated time of standard operation time utilization is when being calculated, and is more reasonable.
Data separation condition and then also can represent the scope of the value that can get stop time.At this moment; Standard operation Time Calculation method of this embodiment and data separation condition represent the processing time scope situation likewise; The real result data that are not included in the real result data in this scope stop time have been removed in utilization, basis of calculation stop time.When this scope of appropriate design, this standard operation time can utilize the real result data computation of reasonable distribution to come out.So, through utilizing the real result of being distinguished by the data separation condition, the standard that calculates is more reasonable stop time, and is more reasonable when this standard of standard operation time utilization is calculated stop time.
The standard operation Time Calculation of calculating like this can reflect makes wire condition, manufacturing treating apparatus operational situation.Therefore; Through using this standard operation time; Can make and make the wire condition, make the prediction that the treating apparatus operational situation changes arbitrarily, can once use repeatedly production line simulation and the scheduling of different standard operation time, also can tackle the incident in the small-scale production line.
And then according to this action, the user can make standard operation time computing device 1 distinguish the real result data through incident identification being input in the standard operation time computing device 1, there is no need the computational data distinguishing condition.That is, standard operation time computing device 1 can make the user operation of standard operation during the time of calculating the incident of considering easier.
The standard operation Time Calculation method of other embodiments of the present invention, the Event Information Table registration of collecting among the step S2 in the above-mentioned embodiment is according to distinguishing condition.That is, the user calculates and judges that whether the real result data receive the condition of this condition influence, are input to standard operation time computing device 1 when each generation incident.Standard operation time computing device 1 utilizes this data separation condition, and these real result data are divided into before the incident real result data after the real result data and incident.According to this standard operation Time Calculation method, standard operation time computing device 1 does not need recording events kind of information table, more easily design.
The standard operation Time Calculation method of other embodiments of the present invention is replaced as other computing method with the computing method of the regression straight line that calculates among the step S4 in the above-mentioned embodiment.That is, shown in figure 11 when the type of device of the job information that standard operation time computing device 1 is collected in step S3 is expressed as the operation of sheet page, utilize least square method, calculate regression straight line 72 based on real result data before these a plurality of incidents 71.Standard operation time computing device 1 and then based on processing time of each sheet before standard stop time and the incident before the regression straight line 72 calculating incidents.
Standard operation time computing device 1 is with reference to kind of event information table 21, by calculating the pairing key element of incident identification of in step S3, collecting in the fixed factors 24.
When standard operation time computing device 1 representes to cut square in this key element, according to real result data after real result data and the incident before standard stop time, the incident before this incident, the processing time of calculating each sheet.The processing time of this each sheet is represented the degree of tilt of the straight line different with regression straight line 72.Mode with square minimum of the difference of activity duration of the pairing value of operation sheet number of data in the real result data after real result data before standard stop time before this section square and this incident consistent mode and the incident and the incident and these data is calculated this straight line.Standard operation time computing device 1 according to this incident before standard stop time, this each sheet processing time and count the operation sheet number that collection portion 5 collects, basis of calculation activity duration by the operation sheet.Before this this incident of standard operation time representation standard stop time and processing time and.This processing time is represented the processing time of this each sheet and amassing of this operation sheet number.
When standard operation time computing device 1 is represented degree of tilt in this key element, according to real result data after real result data and the incident before processing time of this each sheet, the incident, basis of calculation stop time.This standard is represented the square that cuts of the straight line different with regression straight line 72 stop time.Mode with square minimum of the difference of activity duration of the pairing value of operation sheet number of data in the real result data after real result data and the incident before consistent mode of the processing time of each sheet before this degree of tilt and this incident and the incident and these data is calculated this straight line.Standard operation time computing device 1 according to this standard stop time, this incident before each sheet processing time and count the operation sheet number that collection portion 5 collects, basis of calculation activity duration by the operation sheet.Before this this incident of standard operation time representation standard stop time and processing time and.This processing time is represented the processing time of this each sheet and amassing of this operation sheet number.
According to this action, need the real result data be divided into a plurality of ranks, more easily basis of calculation stop time, more easily design standards activity duration calculation element 1.
Abovely describe the present invention, but the present invention is not limited in above-mentioned embodiment with reference to embodiment.Those skilled in the art can carry out understandable various change to structure of the present invention or detailed part within the scope of the invention.
For example can above-mentioned embodiment be made up each other.Event database 2, data store 3, event information collection portion 4, operation sheet are counted the part of collection portion 5 and standard operation Time Calculation portion 6 or all also can be realized by circuit.
Claims (12)
1. standard operation time computing device has:
Data store is collected the real result sheet number and the real result data of the needed real result activity duration of operation that above-mentioned enforcement finishes that are illustrated in the substrate of handling in the operation of implementing to finish;
Event information collection portion collects and the relevant event information of incident that the needed activity duration of the operation of treatment substrate is exerted an influence;
The operation sheet is counted collection portion, collects the operation sheet number as the sheet number of the substrate of in not implementing operation, handling; And
Above-mentioned enforcement the needed standard operation time of operation according to above-mentioned real result data, above-mentioned event information and above-mentioned operation sheet number, calculated by standard operation Time Calculation portion, it is characterized in that,
Above-mentioned standard operation time representation stop time and processing time with,
The above-mentioned processing time is represented processing time long-pending of above-mentioned operation sheet number and each sheet,
Above-mentioned event information is represented condition and fixed factors,
Above-mentioned standard operation Time Calculation portion; Be independent of real result data after the incident that satisfies above-mentioned condition in the above-mentioned real result data; Real result data before the incident that does not satisfy above-mentioned condition in the above-mentioned real result data are carried out statistical treatment; Stop time before the processing time of each sheet and the incident before the calculating incident
The processing time of above-mentioned each sheet,
When the said fixing key element is represented degree of tilt, represent the processing time of preceding each sheet of above-mentioned incident,
When the said fixing key element is represented to cut square, represent processing time based on each sheet after the incident that calculate stop time before the whole and above-mentioned incident of above-mentioned real result data,
Above-mentioned stop time,
When the said fixing key element is represented degree of tilt, stop time after the incident that expression calculated based on processing time of each sheet before the whole and above-mentioned incident of above-mentioned real result data,
When the said fixing key element representes to cut square, represent stop time before the above-mentioned incident.
2. standard operation time computing device has:
Data store is collected the real result sheet number and the real result data of the needed real result activity duration of operation that above-mentioned enforcement finishes that are illustrated in the substrate of handling in the operation of implementing to finish;
Event information collection portion collects and the relevant event information of incident that the needed activity duration of the operation of treatment substrate is exerted an influence;
The operation sheet is counted collection portion, collects the operation sheet number as the sheet number of the substrate of in not implementing operation, handling; And
Above-mentioned enforcement the needed standard operation time of operation according to above-mentioned real result data, above-mentioned event information and above-mentioned operation sheet number, calculated by standard operation Time Calculation portion,
This standard operation time computing device also has event database, and event sets is set up corresponding form stores in memory storage with set of circumstances and fixed factors set,
Above-mentioned standard operation Time Calculation portion is with reference to above table; By calculating the condition corresponding in the above-mentioned set of circumstances with above-mentioned event information; Calculate the fixed factors corresponding in the said fixing elements combination with above-mentioned event information; Be independent of real result data after the incident that satisfies above-mentioned condition in the above-mentioned real result data; Real result data before the incident that does not satisfy above-mentioned condition in the above-mentioned real result data are carried out statistical treatment, stop time before the processing time of each sheet and the incident before the calculating incident
The processing time of above-mentioned each sheet,
When the said fixing key element is represented degree of tilt, represent the processing time of preceding each sheet of above-mentioned incident,
When the said fixing key element is represented to cut square, represent processing time based on each sheet after the incident that calculate stop time before the whole and above-mentioned incident of above-mentioned real result data,
Above-mentioned stop time,
When the said fixing key element is represented degree of tilt, stop time after the incident that expression calculated based on processing time of each sheet before the whole and above-mentioned incident of above-mentioned real result data,
When the said fixing key element representes to cut square, represent stop time before the above-mentioned incident.
3. standard operation time computing device according to claim 1 and 2 is characterized in that,
Above-mentioned standard operation Time Calculation portion,
Represent the rank data of average operation sheet number and peak value based on above-mentioned real result data computation,
Based on rank data before the incident of average operation sheet number and incident previous peaks before the real result data computation presentation of events before the above-mentioned incident,
Above-mentioned peak value is represented the above-mentioned real result sheet number of above-mentioned real result in the activity duration belonged to that the rank real result activity duration shown in other rank real result data of a level is carried out statistical treatment and the statistic that calculates,
Above-mentioned average operation sheet numerical table shows the rank real result sheet number shown in the rank real result data described in the above-mentioned real result sheet number carried out statistical treatment and the statistic that calculates,
Above-mentioned incident previous peaks is represented the time shown in the real result data before the above-mentioned incident in the above-mentioned rank real result activity duration is carried out statistical treatment and the statistic that calculates,
Average operation sheet numerical table shows the sheet number shown in the real result data before the above-mentioned incident in the above-mentioned rank real result sheet number is carried out statistical treatment and the statistic that calculates before the said incident,
Before the said incident before stop time, the said incident processing time of each sheet calculated according to regression straight line, said regression straight line based on above-mentioned incident before average operation sheet number and above-mentioned incident previous peaks and calculated,
After the above-mentioned incident processing time of each sheet based on above-mentioned rank data and above-mentioned incident before stop time calculated,
After the above-mentioned incident stop time based on above-mentioned rank data and above-mentioned incident before processing time of each sheet calculated.
4. standard operation time computing device according to claim 1 and 2 is characterized in that,
Above-mentioned real result data and then represent the time on date that operation that above-mentioned enforcement finishes is performed,
Above-mentioned condition represent that above-mentioned incident takes place during,
After the above-mentioned incident real result data be included in above-mentioned time on date in the above-mentioned real result data above-mentioned during in data,
Before the above-mentioned incident real result data be not included in above-mentioned time on date in the above-mentioned real result data above-mentioned during in data.
5. standard operation time computing device according to claim 1 and 2 is characterized in that,
Above-mentioned condition is represented scope,
The real result data are the data that are included in above-mentioned real result activity duration in the above-mentioned real result data in the above-mentioned scope after the above-mentioned incident,
The preceding real result data of above-mentioned incident are the above-mentioned real result activity duration in the above-mentioned real result data not to be included in the data in the above-mentioned scope.
6. standard operation time computing device according to claim 1 and 2 is characterized in that,
Above-mentioned real result data finish operation when being the batch type operation in above-mentioned enforcement, also represent real result stop time and real result processing time,
Above-mentioned stop time is above-mentioned when not implement operation be above-mentioned batch type operation, the statistic that expression calculates carrying out statistical treatment the stop time shown in the real result data before the above-mentioned incident of above-mentioned real result in stop time,
The above-mentioned processing time is above-mentioned when not implementing operation and being the batch type operation, expression to above-mentioned real result in the processing time before the above-mentioned incident processing time shown in the real result data carry out statistical treatment and the statistic that calculates.
7. standard operation Time Calculation method has:
Collection is illustrated in the real result sheet number of the substrate of handling in the operation of implementing to finish and the step of the real result data of the needed real result activity duration of operation that above-mentioned enforcement finishes;
Collect the step of the event information relevant with the incident that the needed activity duration of the operation of treatment substrate is exerted an influence;
Collection is as the step of the operation sheet number of the sheet number of the substrate of in not implementing operation, handling; And
According to above-mentioned real result data, above-mentioned event information and above-mentioned number, calculate the above-mentioned operation step of needed standard operation time of not implementing,
This standard operation Time Calculation method is characterised in that,
Above-mentioned standard operation time representation stop time and processing time with,
The above-mentioned processing time is represented processing time long-pending of above-mentioned operation sheet number and each sheet,
Above-mentioned event information is represented condition and fixed factors,
And then have following steps: be independent of real result data after the incident that satisfies above-mentioned condition in the above-mentioned real result data; Real result data before the incident that does not satisfy above-mentioned condition in the above-mentioned real result data are carried out statistical treatment; Stop time before the processing time of each sheet and the incident before the calculating incident
The processing time of above-mentioned each sheet,
When the said fixing key element is represented degree of tilt, represent the processing time of preceding each sheet of above-mentioned incident,
When the said fixing key element is represented to cut square, represent processing time based on each sheet after the incident that calculate stop time before the whole and above-mentioned incident of above-mentioned real result data,
Above-mentioned stop time,
When the said fixing key element is represented degree of tilt, stop time after the incident that expression calculated based on processing time of each sheet before the whole and above-mentioned incident of above-mentioned real result data,
When the said fixing key element representes to cut square, represent stop time before the above-mentioned incident.
8. standard operation Time Calculation method has:
Collection is illustrated in the real result sheet number of the substrate of handling in the operation of implementing to finish and the step of the real result data of the needed real result activity duration of operation that above-mentioned enforcement finishes;
Collect the step of the event information relevant with the incident that the needed activity duration of the operation of treatment substrate is exerted an influence;
Collection is as the step of the operation sheet number of the sheet number of the substrate of in not implementing operation, handling; And
According to above-mentioned real result data, above-mentioned event information and above-mentioned number, calculate the above-mentioned operation step of needed standard operation time of not implementing,
This standard operation Time Calculation method is characterised in that,
Also have following steps: with reference to event sets is set up corresponding form with set of circumstances and fixed factors set; By calculating the condition corresponding in the above-mentioned set of circumstances with above-mentioned event information; Calculate the fixed factors corresponding in the said fixing elements combination with above-mentioned event information; Be independent of real result data after the incident that satisfies above-mentioned condition in the above-mentioned real result data; Real result data before the incident that does not satisfy above-mentioned condition in the above-mentioned real result data are carried out statistical treatment, stop time before the processing time of each sheet and the incident before the calculating incident
The processing time of above-mentioned each sheet,
When the said fixing key element is represented degree of tilt, represent the processing time of preceding each sheet of above-mentioned incident,
When the said fixing key element is represented to cut square, represent processing time based on each sheet after the incident that calculate stop time before the whole and above-mentioned incident of above-mentioned real result data,
Above-mentioned stop time,
When the said fixing key element is represented degree of tilt, stop time after the incident that expression calculated based on processing time of each sheet before the whole and above-mentioned incident of above-mentioned real result data,
When the said fixing key element representes to cut square, represent stop time before the above-mentioned incident.
9. according to claim 7 or 8 described standard operation Time Calculation methods, it is characterized in that,
Also have following steps: represent the rank data of average operation sheet number and peak value based on above-mentioned real result data computation, based on rank data before the incident of average operation sheet number and incident previous peaks before the real result data computation presentation of events before the above-mentioned incident,
Above-mentioned peak value is represented the above-mentioned real result sheet number of above-mentioned real result in the activity duration belonged to that the rank real result activity duration shown in other rank real result data of a level is carried out statistical treatment and the statistic that calculates,
Above-mentioned average operation sheet numerical table shows the rank real result sheet number shown in the rank real result data described in the above-mentioned real result sheet number carried out statistical treatment and the statistic that calculates,
Above-mentioned incident previous peaks is represented the time shown in the real result data before the above-mentioned incident in the above-mentioned rank real result activity duration is carried out statistical treatment and the statistic that calculates,
Average operation sheet numerical table shows the sheet number shown in the real result data before the above-mentioned incident in the above-mentioned rank real result sheet number is carried out statistical treatment and the statistic that calculates before the said incident,
Before the said incident before stop time, the said incident processing time of each sheet calculated according to regression straight line, said regression straight line based on above-mentioned incident before average operation sheet number and above-mentioned incident previous peaks and calculated,
After the above-mentioned incident processing time of each sheet based on above-mentioned rank data and above-mentioned incident before stop time calculated,
After the above-mentioned incident stop time based on above-mentioned rank data and above-mentioned incident before processing time of each sheet calculated.
10. according to claim 7 or 8 described standard operation Time Calculation methods, it is characterized in that,
Above-mentioned real result data and then represent the time on date that operation that above-mentioned enforcement finishes is performed,
Above-mentioned condition represent that above-mentioned incident takes place during,
After the above-mentioned incident real result data be included in above-mentioned time on date in the above-mentioned real result data above-mentioned during in data,
Before the above-mentioned incident real result data be not included in above-mentioned time on date in the above-mentioned real result data above-mentioned during in data.
11. according to claim 7 or 8 described standard operation Time Calculation methods, it is characterized in that,
Above-mentioned condition is represented scope,
The real result data are the data that are included in above-mentioned real result activity duration in the above-mentioned real result data in the above-mentioned scope after the above-mentioned incident,
The preceding real result data of above-mentioned incident are the above-mentioned real result activity duration in the above-mentioned real result data not to be included in the data in the above-mentioned scope.
12. according to claim 7 or 8 described standard operation Time Calculation methods, it is characterized in that,
Above-mentioned real result data finish operation when being the batch type operation in above-mentioned enforcement, also represent real result stop time and real result processing time,
Above-mentioned stop time is above-mentioned when not implement operation be above-mentioned batch type operation, the statistic that expression calculates carrying out statistical treatment the stop time shown in the real result data before the above-mentioned incident of above-mentioned real result in stop time,
The above-mentioned processing time is above-mentioned when not implementing operation and being the batch type operation, expression to above-mentioned real result in the processing time before the above-mentioned incident processing time shown in the real result data carry out statistical treatment and the statistic that calculates.
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