CN101339091B - 齐焦检查方法及齐焦检查仪 - Google Patents
齐焦检查方法及齐焦检查仪 Download PDFInfo
- Publication number
- CN101339091B CN101339091B CN2008100225211A CN200810022521A CN101339091B CN 101339091 B CN101339091 B CN 101339091B CN 2008100225211 A CN2008100225211 A CN 2008100225211A CN 200810022521 A CN200810022521 A CN 200810022521A CN 101339091 B CN101339091 B CN 101339091B
- Authority
- CN
- China
- Prior art keywords
- object lens
- parfocalization
- semi
- tested object
- reflecting prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Microscoopes, Condenser (AREA)
- Lenses (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008100225211A CN101339091B (zh) | 2008-08-14 | 2008-08-14 | 齐焦检查方法及齐焦检查仪 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008100225211A CN101339091B (zh) | 2008-08-14 | 2008-08-14 | 齐焦检查方法及齐焦检查仪 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101339091A CN101339091A (zh) | 2009-01-07 |
CN101339091B true CN101339091B (zh) | 2010-10-06 |
Family
ID=40213215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100225211A Active CN101339091B (zh) | 2008-08-14 | 2008-08-14 | 齐焦检查方法及齐焦检查仪 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101339091B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104122661B (zh) * | 2014-08-19 | 2017-03-01 | 重庆奥特光学仪器有限责任公司 | 显微镜光学物像无穷远齐焦校正装置及校正方法 |
US10254105B2 (en) * | 2016-12-05 | 2019-04-09 | Quality Vision International, Inc. | Exchangeable lens module system for probes of optical measuring machines |
CN110702614B (zh) * | 2019-11-05 | 2022-04-12 | 北京环境特性研究所 | 一种椭偏仪装置及其检测方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1030133A (zh) * | 1987-06-20 | 1989-01-04 | 陕西机械学院 | 可倾屏显微镜和可倾屏投影仪 |
US5015081A (en) * | 1987-09-30 | 1991-05-14 | Tokyo Kogaku Kikai Kabushiki Kaisha | Binocular microscope |
CN1395127A (zh) * | 2001-07-06 | 2003-02-05 | 中国计量科学研究院 | 共焦显微镜 |
CN201016713Y (zh) * | 2007-04-09 | 2008-02-06 | 上海远超微纳技术有限公司 | 具有空气轴承转台的光学定中仪 |
-
2008
- 2008-08-14 CN CN2008100225211A patent/CN101339091B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1030133A (zh) * | 1987-06-20 | 1989-01-04 | 陕西机械学院 | 可倾屏显微镜和可倾屏投影仪 |
US5015081A (en) * | 1987-09-30 | 1991-05-14 | Tokyo Kogaku Kikai Kabushiki Kaisha | Binocular microscope |
CN1395127A (zh) * | 2001-07-06 | 2003-02-05 | 中国计量科学研究院 | 共焦显微镜 |
CN201016713Y (zh) * | 2007-04-09 | 2008-02-06 | 上海远超微纳技术有限公司 | 具有空气轴承转台的光学定中仪 |
Non-Patent Citations (3)
Title |
---|
CN 1030133 A,说明书全文. |
JP特开2004-70239A 2004.03.04 |
JP特开2005-106797A 2005.04.21 |
Also Published As
Publication number | Publication date |
---|---|
CN101339091A (zh) | 2009-01-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100225923B1 (ko) | 이상 회절 간섭계 | |
US7345814B2 (en) | Microscope system and microscope focus maintaining device for the same | |
US6075646A (en) | Observation optical apparatus | |
CN102768024B (zh) | 一种基于分离反射镜组的共焦测量装置 | |
US7851735B2 (en) | Microscope automatic focusing device and method thereof | |
JPS58145911A (ja) | 反射光照明による透過光顕微鏡試験のための光学系 | |
US20220187161A1 (en) | Deflectometry Measurement System | |
CN103698896B (zh) | 一种精密针孔对准调试系统及方法 | |
CN103307969A (zh) | 白色光干涉测量装置 | |
US5309214A (en) | Method for measuring distributed dispersion of gradient-index optical elements and optical system to be used for carrying out the method | |
CN101339091B (zh) | 齐焦检查方法及齐焦检查仪 | |
JP6512673B2 (ja) | 偏心測定装置及び偏心測定方法 | |
CN107490851B (zh) | 手术显微镜左右变倍系统的光学检测装置及方法 | |
CN201359560Y (zh) | 齐焦检查仪 | |
JP5087386B2 (ja) | 顕微鏡 | |
JP2008215833A (ja) | 光学特性測定装置および光学特性測定方法 | |
CN101339002B (zh) | 大角度麦克尔逊式剪切散斑干涉仪 | |
JP5107547B2 (ja) | 干渉型表面形状測定装置 | |
US6307690B1 (en) | Microscope with light source | |
JP4434612B2 (ja) | 顕微鏡およびズーム対物レンズ | |
US20140320672A1 (en) | Method and Apparatus for Measuring Flange Back Focus and Calibrating Track Length Scales of Photographic Objective Lenses | |
Parks | Versatile autostigmatic microscope | |
CN216595770U (zh) | 一种光学变倍调焦系统的分划装置 | |
JPH07253545A (ja) | 微分干渉顕微鏡 | |
JP2011242702A (ja) | 結像光学系及び形状測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Parfocalization checking procedure and parfocalization checker Effective date of registration: 20180815 Granted publication date: 20101006 Pledgee: Bank of Nanjing, Limited by Share Ltd, Nanjing branch Pledgor: Nanjing Donglilai Photoelectric Industrial Co., Ltd. Registration number: 2018320000135 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200805 Granted publication date: 20101006 Pledgee: Bank of Nanjing Limited by Share Ltd. Nanjing branch Pledgor: DOMILIGHT OPTICS & ELECTRONICS ENTERPRISE Co.,Ltd. Registration number: 2018320000135 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right |