CN101338930A - Air cleaning system purification chamber - Google Patents
Air cleaning system purification chamber Download PDFInfo
- Publication number
- CN101338930A CN101338930A CNA2008101281098A CN200810128109A CN101338930A CN 101338930 A CN101338930 A CN 101338930A CN A2008101281098 A CNA2008101281098 A CN A2008101281098A CN 200810128109 A CN200810128109 A CN 200810128109A CN 101338930 A CN101338930 A CN 101338930A
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- air outlet
- operating room
- transfer unit
- room
- fan
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Abstract
The present invention provides a purification chamber of an air cleaning system, the chamber comprising an operation chamber and a fan filtering unit. The operation chamber comprises a processor arranged in operation area and having a transmission unit for transmitting workpiece in the operation area; a path way extending across both sides of the operation chamber to allow the transmission unit to cross the path way; a sliding door capable of slidably opening and closing the operation area. The fan filtering unit is mounted on top surface of the operation chamber, and the fan filtering unit provides clean air forcibly to the operation chamber to generate vertical laminar flow, wherein the fan filtering unit has an air providing area opposite to whole area of the top surface of the operation chamber, and the operation chamber comprises a front air outlet arranged on front side of the operation chamber and a rear air outlet on rear side of the operation chamber.
Description
The application requires to be submitted on July 3rd, 2007 priority of the 2007-0066747 korean patent application of Korea S Department of Intellectual Property, and disclosing of this application is incorporated herein by reference.
Technical field
The present invention relates to a kind of clean room that is installed in the air cleaning system, more particularly, the clean room that relates to a kind of like this air cleaning system, wherein, the pressure that is produced by vertical laminar flow distributes in entire inner space equably, so that the whirlpool that occurs at the interior angle place minimizes, and suppresses air current flow to greatest extent along the transfer unit that is mounted with workpiece, so that the propagation of impurity minimizes and prevent the product defects that the infiltration owing to impurity produces.
Background technology
Usually, the camera model encapsulation mainly is constructed to chip on the film (COF) type, chip on board (COB) type and chip scale package (CSP) type.The camera model encapsulation of these types is according to manufactured with the similar technology of conventional semiconductors production line.That is, this camera model is encapsulated in the air cleaning system that keeps the height cleaning ambient and makes accurately.
Fig. 1 is the longitdinal cross-section diagram that traditional camera model encapsulation is shown.The camera model encapsulation 1 of Fig. 1 comprises lens barrel 10, shell 20 and plate 40.Lens barrel 10 has the lens L that is placed in its inner space, and is provided with cap 13, and this cap 13 is formed with lens opening 13a therein.Shell 20 has the internal thread 21 that combines with external screw thread 11 screw threads of lens barrel 10.In addition, plate 40 has installation imageing sensor 30 at one end, and an end of this imageing sensor 30 is fastened to the bottom of shell 20 by binding material.
Infrared ray (IR) filter is bonded in the inboard of shell 20.Window 42 is formed on a described end of plate 40, is exposed to the outside with the image-region with imageing sensor 30.In addition, connector 45 is arranged on the other end of plate 40, to be electrically connected to unshowned display unit.
Simultaneously, in the process of making this camera model encapsulation 1, penetrate into the image-region that the impurity (for example minute dust) that encapsulates in 1 can be bonded to IR filter 25 or imageing sensor 30.This causes black spot defect or color spot defective during image detection, thereby causes the image deflects that encapsulate, and produces a large amount of encapsulation waste products.
Therefore, in air cleaning system, carry out accurate manufacturing process, thus make penetrate into workpiece by in the amount of impurity minimize, in air cleaning system, remove dust in the air its inner space and keep clean by being incorporated into from the outside.Here, manufacturing process comprises: an end installation diagram image-position sensor that is welded on substrate 40 by flip-chip; The imageing sensor 30 of lead-in wire bonding secure bond; Substrate is bonded to the bottom and the settable cementitious material of shell 20 by binding material; With lens arrangement in lens barrel 10; IR filter 35 is attached on the shell 20; Lens barrel 10 screw threads are assembled on the shell 20; After finishing focusing, lens barrel 10 is fixed on the shell 20 by binding material.
Air cleaning system has a plurality of clean rooms 90 in the portion space that sets within it.Each all has the processing machine 73 that is arranged on wherein clean room 90, to carry out various accurate manufacturing process individually.
Shown in Fig. 2 A and Fig. 2 B and Fig. 3 A to Fig. 3 C, clean room 90 comprises: operating room 70 has the processing machine of the portion of setting within it; Fan filter element 80 is arranged on the interior top surface of operating room 70, so that clean air is provided to the working region.Therefore, the clean air of free from dust is supplied forcibly can working exactly, and forms laminar flow to guarantee cleaning.
In addition, passage 74a and 74b are formed on two sidepieces of operating room 70, so that transfer unit 72 passes described passage.This passage can be formed by the guide rail that is installed on the loading platform, and workpiece is loaded onto on this loading platform.
Therefore, workpiece (for example, the encapsulation of film and camera) is passed to processing machine 73, with bonded, assembling with solidify.Simultaneously, the cleaned air that is filtered by the fan filter element is supplied to 70 inside, operating room from top to bottom, to guarantee cleaning.This allows to carry out various accurate technologies under the situation that does not have impurity to infiltrate.
But, under following situation, promptly in operating room 70, the air feed region that is forced downwardly the air supplied process through fan filter element 80 is relatively less than the top area of operating room, and deflection side, thereby hindered effective supply, direct adequate relief stratified flow under the whole top surface of operating room 70.Therefore, shown in Fig. 2 B and Fig. 3 A to Fig. 3 C, the place, angle produces eddy current, i.e. whirlpool phenomenon in the operating room.
Because this eddy current, the impurity in transfer unit 72 or processing machine 73 (for example Can Yu dust) can not be discharged into the outside, but upwards floating.This floating impurity penetrates in the workpiece, thereby has increased defective proportion.
In addition, struck on the transfer unit 72 by the laminar flow L that directly supplies downwards forcibly from fan filter element 80, and be directed into the both sides of operating room 70, be discharged into the outside by passage 74a and the 74b that extends through operating room 70.This is because passage 74a forms according to the relative big size of cross-sectional area than transfer unit with 74b.
Here, when laminar flow L when transfer unit 72 is directed and be discharged into the outside by passage 74a and 74b, impurity (for example remaining in the dust in the transfer unit) is upwards floating, and floating impurity is directed into the workpiece on the transfer unit 72, thereby has strengthened defective proportion.
And, to open under the situation at the Qianmen 76 on the front side that is arranged on operating room 70 the operator, the pressure balance in the operating room 70 is destroyed, thereby causes the remaining impurities in the zone of vortes interference to be directed on the workpiece of transfer unit 72.
Summary of the invention
An aspect of of the present present invention is to provide a kind of clean room of air cleaning system, wherein, the pressure that is produced by vertical laminar flow distributes in entire inner space equably, so that the whirlpool that occurs at the interior angle place minimizes, and suppress air current flow to greatest extent along the transfer unit that is mounted with workpiece, so that the propagation of impurity minimizes and prevents the product defects that the infiltration owing to impurity produces.
According to an aspect of the present invention, a kind of clean room of air cleaning system is provided, and this clean room comprises operating room and fan filter element. this operating room comprises: processing machine is arranged in the working region, in described working region, be placed with the transfer unit that transmits workpiece; Passage extends through the both sides of operating room, passes described passage to allow transfer unit; Sliding door opens and closes the working region slidably.The fan filter element is installed on the top surface of operating room.The fan filter element is fed to clean air in the operating room forcibly, to produce vertical laminar flow, wherein, the fan filter element has the corresponding air feed region in whole zone with the top surface of operating room, and the operating room comprises front air outlet on the front side that is separately positioned on the operating room and the back air outlet on the rear side, and front air outlet and back air outlet are towards with respect to the both direction guiding of the direction of transfer of transfer unit and the vertical laminar flow that discharging produces from the fan filter element.
Front air outlet and back air outlet can be respectively formed at the position of transfer unit equal height or be lower than the position of transfer unit.
One in front air outlet and the back air outlet can be formed by inhalator, and described inhalator comprises the suction fan that produces inhalation power when energising.
In front air outlet and the back air outlet each all can be formed by inhalator, and described inhalator comprises the suction fan that produces inhalation power when energising.
In front air outlet and the back air outlet each all can be formed by at least one opening, and described opening forms preliminary dimension at the front side and the rear side of operating room.
In front air outlet and the back air outlet each all can be formed by the porous plate with a plurality of holes, and described a plurality of holes are arranged in the front side and the rear side of operating room along the direction parallel with transfer unit.
The fan filter element can comprise at least one filter and at least one air supply fan, described filter is set to the whole zone across the top surface of operating room, described air supply fan be arranged on described filter above, with force air that will cleaning be fed in the operating room.
The size of each passage can equate with the area of the longitudinal cross-section of the transfer unit that is mounted with workpiece.
Sliding door can be installed in the rear side that is provided with the back air outlet of the front side that is provided with front air outlet or the operating room of operating room.
Description of drawings
By the detailed description of carrying out below in conjunction with accompanying drawing, above-mentioned and others of the present invention, characteristics and other advantage will become and should be readily appreciated that more, wherein:
Fig. 1 is the longitdinal cross-section diagram that traditional camera model encapsulation is shown;
Fig. 2 A and Fig. 2 B show the clean room of traditional air cleaning system, and wherein, Fig. 2 A is a topology view, and Fig. 2 B is the view that air current flow is shown;
Fig. 3 A to Fig. 3 C is the sectional view that the clean room of traditional air cleaning system is shown;
Fig. 4 is the topology view that illustrates according to the clean room of the air cleaning system of exemplary embodiment of the present invention;
Fig. 5 is the view that the laminar flow in the clean room according to an exemplary embodiment of the present invention is shown;
Fig. 6 A to Fig. 6 C shows clean room according to an exemplary embodiment of the present invention, and wherein, Fig. 6 A is the view in transverse section of watching from the top, and Fig. 6 B is from the longitdinal cross-section diagram of watching previously, and Fig. 6 C is the longitdinal cross-section diagram of watching from the side.
The specific embodiment
Now, describe exemplary embodiment of the present invention with reference to the accompanying drawings in detail.
Fig. 4 is the topology view that illustrates according to the clean room of the air cleaning system of exemplary embodiment of the present invention.Fig. 5 is the view that the laminar flow in the clean room according to an exemplary embodiment of the present invention is shown.Fig. 6 A and Fig. 6 B show clean room according to an exemplary embodiment of the present invention, and wherein, Fig. 6 A is the view in transverse section of watching from the top, and Fig. 6 B is from the longitdinal cross-section diagram of watching previously, and Fig. 6 C is the longitdinal cross-section diagram of watching from the side.
Shown in Fig. 6 A to Fig. 6 C, the clean room 100 of present embodiment comprises operating room 110 and fan filter element 120.Operating room 110 is provided with the working region of the preliminary dimension of carrying out relevant work.Air after 120 supplies of fan filter element are filtered keeps clean with the inner space of guaranteeing operating room 110.
And operating room 110 113 is provided with the sliding door 119 that is used for freely opening and closing the working region in the front side, but the invention is not restricted to this.Sliding door 119 can be arranged on the rear surface 114 of operating room 110.
In addition, the passage 115a of preliminary dimension and 116a form the both sides 115 and 116 that extend through operating room 110, thereby the transfer unit 118 that is used to transmit workpiece can freely pass passage 115a and 116a.
Here, each the size of lateral cross section of passage 115a and 116a substantially all equates with the size of the longitudinal cross-section of transfer unit 118, thereby guarantees that the transfer unit that is mounted with workpiece passes passage 115a and 116a without hindrance.
That is to say that the interval between transfer unit 118 and passage 115a and the 116a is minimized respectively, cross described interval with the air communication in the working region that prevents to be fed to operating room 110 substantially and be discharged into the outside.Therefore, this has suppressed laminar flow is directed into operating room 110 along transfer unit 118 the both sides that are formed with passage 115a and 116a.
This fan filter element 120 comprises the corresponding air feed region in whole zone with the top surface 111 of operating room 110, with allow laminar flow from the operating room 110 whole top surface 111 by directly guiding downwards.This just guarantees to form uniform pressure distribution in the working region of operating room 110.As a result, eddy current appears in 110 the interior angle place in the operating room that has so fundamentally prevented to cause owing to pressure distribution is inhomogeneous, i.e. the whirlpool of air-flow.
Here, fan filter element 120 comprises at least one filter 122 and at least one air supply fan 124.Filter 122 is arranged on the whole top surface 111 of operating room 110.Air supply fan 124 is arranged on the filter 122, is fed in the operating room 110 with the clean air that will not have impurity forcibly.
Simultaneously, front air outlet 131 and back air outlet 132 are separately positioned on the front side 113 and the rear side 114 of operating room 110, being directed to the laminar flow guiding the operating room 110 and being discharged into the both sides of transfer unit 118 from fan filter element 120.
Here, front air outlet 131 and back air outlet 132 can be formed on the position of transfer unit 118 basic identical height or be lower than the position of transfer unit 118, thereby the laminar flow L that collides the top surface of transfer unit 118 can be directed to the both sides with respect to the direction of transfer of transfer unit 118 naturally.
And each of front air outlet 131 and back air outlet 132 can be respectively formed by at least one opening of the preliminary dimension of front side 113 that extends through operating room 110 and rear side 114.Therefore, air-flow L1 that separates and the L2 that is separated and is directed along the both sides of transfer unit 118 can be discharged naturally by the pressure reduction between inside and outside.
In this case, front air outlet 131 and back air outlet 132 be according to the formation of punching abreast of the direction of transfer with transfer unit 118, and be shaped as square.But the invention is not restricted to this.Each can be formed front air outlet 131 and back air outlet 132 by the porous plate with a plurality of through hole (not shown)s, and described a plurality of through holes are arranged in the front side and the rear side of operating room 110 along the direction parallel with transfer unit 118.
In addition, front air outlet 131 and back air outlet 132 are provided with suction fan 133 and 134, produce inhalation power respectively when energising, and respectively air-flow L1 and the L2 that separates are discharged into the outside forcibly.Therefore, air-flow L1 that separates that is separated and is directed along both sides and the L2 outside that can be discharged into operating room 110 forcibly with respect to the direction of transfer of transfer unit 118. Suction fan 133 and 134 is set at respectively on the inhalator 133a and 134a of front air outlet 131 and 132 extensions of back air outlet.
Under the situation of the fan filter element 120 of operation setting in the clean room 100 that as above constructs, extraneous air is drawn in the operating room 110 forcibly by air supply fan 124, and when through filter 122, be removed impurity, be fed to formation laminar flow L in the operating room 110 then forcibly.
Here, fan filter element 120 has the corresponding air feed region in whole zone with the top surface 111 of operating room 110.Therefore, laminar flow L allows in the operating room 100 inner space pressure to distribute equably, and forms vertical air-flow.
In this case, the uniform pressure distribution that is fed to the laminar flow L in the operating room 110 has prevented fundamentally that in the operating room eddy current appears in 110 interior angle, and prevents that impurity from swimming near the interior angle of operating room 110.As a result, this just prevents that impurity from penetrating in the workpiece that is loaded on the transfer unit 118, thus the defective of causing.
Next, the laminar flow L of entire inner space that is fed to operating room 110 equably bumps with the transfer unit 118 that transmits workpiece in operating room 110, is individually formed air-flow L1 and L2 separately along the both sides with respect to the direction of transfer of transfer unit 118 then.
As shown in Figure 5, air-flow L1 that these separate and L2 are guided naturally towards front air outlet 131 and the back air outlet 132 that the front side 113 that penetrates operating room 110 and rear side 114 forms, and the outside that is discharged into operating room 110 by front air outlet 131 and back air outlet 132 as only exhaust outlet.
And by being installed in the suction fan 133 and 134 on front air outlet 131 and the back air outlet 132 respectively, air-flow L1 that separates and L2 can be discharged into the outside forcibly, to guarantee discharged air efficiently.
That is to say that air-flow L1 that separates that separates along the both sides with respect to the direction of transfer of transfer unit 18 and L2 only are discharged into the outside by front air outlet and back air outlet.This is basic identical with the size of the longitudinal cross-section of the transfer unit 118 that is mounted with workpiece because of the sectional dimension of each of the both sides 115 that penetrate operating room 110 and 116 passage 115a that form and 116a, and transfer unit 118 freely passes each of passage 115a and 116a.This minimizes the interval between transfer unit 118 and passage 115a and the 116a, is discharged at interval by this fully to stop most of laminar flow L.In addition, front air outlet 131 and back air outlet 132 form on the front side of operating room 110 and rear side and are lower than transfer unit 118, and the front side of described operating room 110 and rear side are relative with the air-flow L1 and the L2 that separate that separate along the both sides with respect to the direction of transfer of transfer unit 18.
Therefore, the impurity that remains on the top surface of transfer unit 118 is not floating along the direction of transfer of transfer unit 118, but is discharged into the outside with air-flow L1 that separates that separates along both sides and L2 by front air outlet and back air outlet.This guarantees that floating impurity seldom penetrates in the workpiece, thereby prevents the defective that occurs in work and transmittance process.
As mentioned above, according to exemplary embodiment of the present invention, laminar flow is fed to fan filter element in the operating room has the corresponding air feed region in whole zone with the top surface of operating room.In addition, front air outlet and back air outlet are set at the front side and the rear side of operating room,, are arranged on the both sides with respect to the direction of transfer of transfer unit, being discharged into the outside from the laminar flow of fan filter element supply that is.This allows in the entire inner space of operating room, and the pressure distribution of the laminar flow of supply is even downwards from the top surface of operating room.Therefore, guaranteed to minimize in the appearance of the interior angle place of operating room eddy current.In addition, by being arranged on along front air outlet and back air outlet with respect to the both sides of the direction of transfer of transfer unit, laminar flow is discharged into the outside.Therefore, when laminar flow when transfer unit is directed, floating impurity is minimized.This has just reduced the product defects that causes owing to the impurity that is incorporated in the workpiece significantly and has improved reliability of products.
Though show and described the present invention, it should be appreciated by those skilled in the art that and under the situation that does not break away from the scope and spirit of the present invention that are defined by the claims, can make amendment and be out of shape in conjunction with exemplary embodiment.
Claims (9)
1, a kind of clean room of air cleaning system comprises:
The operating room comprises:
Processing machine is arranged in the working region, in described working region, is placed with the transfer unit that transmits workpiece;
Passage extends through the both sides of operating room, passes described passage to allow transfer unit;
Sliding door opens and closes the working region slidably;
The fan filter element is installed on the top surface of operating room, and the fan filter element is fed to clean air in the operating room forcibly, producing vertical laminar flow,
Wherein, the fan filter element has the corresponding air feed region in whole zone with the top surface of operating room,
And, the operating room comprises front air outlet on the front side that is separately positioned on the operating room and the back air outlet on the rear side, and front air outlet and back air outlet are towards with respect to the both direction guiding of the direction of transfer of transfer unit and the vertical laminar flow that discharging produces from the fan filter element.
2, clean room as claimed in claim 1, wherein, front air outlet and back air outlet are respectively formed at the position of transfer unit equal height or are lower than the position of transfer unit.
3, clean room as claimed in claim 1, wherein, one in front air outlet and the back air outlet is formed by inhalator, and described inhalator comprises the suction fan that produces inhalation power when energising.
4, clean room as claimed in claim 1, wherein, each in front air outlet and the back air outlet forms by inhalator, and described inhalator comprises the suction fan that produces inhalation power when energising.
5, clean room as claimed in claim 1, wherein, each in front air outlet and the back air outlet forms by at least one opening, and described opening forms preliminary dimension at the front side and the rear side of operating room.
6, clean room as claimed in claim 1, wherein, each in front air outlet and the back air outlet forms by the porous plate with a plurality of holes, and described a plurality of holes are arranged in the front side and the rear side of operating room along the direction parallel with transfer unit.
7, clean room as claimed in claim 1, wherein, the fan filter element comprises at least one filter and at least one air supply fan, described filter is set to the whole zone across the top surface of operating room, described air supply fan be arranged on described filter above, with force air that will cleaning be fed in the operating room.
8, clean room as claimed in claim 1, wherein, the size of each passage equates with the area of the longitudinal cross-section of the transfer unit that is mounted with workpiece.
9, clean room as claimed in claim 1, wherein, sliding door is installed in the rear side that is provided with the back air outlet of the front side that is provided with front air outlet or the operating room of operating room.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20070066747 | 2007-07-03 | ||
| KR10-2007-0066747 | 2007-07-03 | ||
| KR1020070066747 | 2007-07-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101338930A true CN101338930A (en) | 2009-01-07 |
| CN101338930B CN101338930B (en) | 2012-04-18 |
Family
ID=40213060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101281098A Expired - Fee Related CN101338930B (en) | 2007-07-03 | 2008-07-03 | Air cleaning system purification chamber |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN101338930B (en) |
| TW (1) | TW200902810A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105652790B (en) * | 2014-11-30 | 2018-08-07 | 沈阳芯源微电子设备有限公司 | A kind of micro environment control system |
-
2008
- 2008-07-02 TW TW097124833A patent/TW200902810A/en unknown
- 2008-07-03 CN CN2008101281098A patent/CN101338930B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| TW200902810A (en) | 2009-01-16 |
| CN101338930B (en) | 2012-04-18 |
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