CN101333015A - Recovery system and process for discharged water - Google Patents
Recovery system and process for discharged water Download PDFInfo
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- CN101333015A CN101333015A CNA2007100432772A CN200710043277A CN101333015A CN 101333015 A CN101333015 A CN 101333015A CN A2007100432772 A CNA2007100432772 A CN A2007100432772A CN 200710043277 A CN200710043277 A CN 200710043277A CN 101333015 A CN101333015 A CN 101333015A
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- discharge water
- processing procedure
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Abstract
The invention provides a recycling system of process discharge water; the system at least comprises a concentration tank, a recycling water tank and a centrifuge; the concentration tank is internally provided with a microfiltration membrane set, the microfiltration membrane set can fully concentrate the discharge water to form concentrated solution which is filled in the centrifuge; meanwhile, clear water is discharged and is filled in the recycling water tank; the centrifuge carries out solid-liquid separation to the concentrated solution, and solid is accumulated in a separating tube at the interior of the centrifuge. The invention also provides a recycling method of process discharge water. Compared with the prior art, the recycling system and the recycling method of the invention can fully utilize process discharge water, effectively save resources and lower production cost.
Description
Technical field
The present invention relates to manufacture of semiconductor, relate in particular to the recovery system and the method for processing procedure discharge water.
Background technology
In the discharge water of manufacture of semiconductor, contain the composition that can recycle usually, for example in brilliant back-grinding processing procedure discharge water, contain superfine Si powder composition, this composition can have to recycle to be worth as the starting material of wafer refining.Obtain pure substance but be difficult to sedimentation,, handle by being pressed into outer again the carrying of mud cake behind the dosing flocculating settling at present as wastewater treatment owing to this powder grain diameter of components is ultra-fine.
What present filter method was relatively more commonly used is membrane filtration technique, and this technology is the solid-liquid separation technique of physical property, does not need the processing of chemical.The filtering membrane basic classification is microfiltration membrane (MF), ultra-filtration membrane (UF) and nano filter membrane (NF).Microfiltration membrane is removed 0.05 μ m and above suspended solid, colloid and mushroom, and it has characteristics such as less energy-consumption, flow velocity be fast.Micro-filtration is the dynamic filtration process, and being trapped material can get rid of with concentrated solution, and unlikely obstruction film surface can be moved for a long time continuously.Microfiltration membrane can be held back particle and the impurity between the 0.1-1 micron, and microfiltration membrane allows macromolecular substance and soluble solid (inorganic salt) etc. to pass through, and the colloid that can stop suspended substance, bacterium, part bacterium and big scale passes through.
Now need a kind of system and method that utilizes filtering technique that the discharge water of processing procedure is reclaimed.
Summary of the invention
The object of the present invention is to provide a kind of recovery system and method for processing procedure discharge water, its useful component in can the efficient recovery discharge water.
For achieving the above object, the invention provides a kind of recovery system of processing procedure discharge water, this system comprises concentration basin at least, reclaims tank and whizzer; The built-in microfiltration membrane group of concentration basin, microfiltration membrane group fully concentrate discharge water and inject whizzer to form concentrated solution, give off clear water simultaneously and inject the recovery tank; Whizzer carries out solid-liquid separation to concentrated solution, and solid is accumulated in the separator tube of whizzer inside.
The present invention also provides a kind of recovery method of processing procedure discharge water, and this method comprises the steps: that a. at first injects concentration basin with the processing procedure discharge water; B. the processing procedure discharge water fully concentrates to form concentrated solution by the board-like microfiltration membrane group in the concentration basin and is deposited in the concentration basin, gives off clear water simultaneously and pumps into the recycle-water groove; C. start whizzer, concentrated solution is continuously pumped into whizzer and carries out solid-liquid separation to greatest extent, and centrifugal water outlet enters centrifugal tank continuously, and the centrifugal water outlet in the centrifugal tank re-injects concentration basin, and performing step b, solid then are accumulated in the separator tube of whizzer.
Compared with prior art, recovery system of the present invention and recovery method can make full use of the discharge water of processing procedure, effectively economize on resources, and reduce production costs.
Description of drawings
To the description of one embodiment of the invention, can further understand purpose, specific structural features and the advantage of its invention by following in conjunction with its accompanying drawing.Wherein, accompanying drawing is:
Fig. 1 is the synoptic diagram of the recovery system of processing procedure discharge water of the present invention.
Embodiment
As shown in Figure 1, recovery system provided by the invention mainly comprises concentration basin 11, reclaims tank 13, concentrates liquid bath 15, whizzer 17 and centrifugal tank 19.
Reclaim tank 13 and be used to store the clear water that filters out through the microfiltration membrane group.Concentrating liquid bath 15 is used for storing through the sedimentary concentrated solution in microfiltration membrane group filtration back.
Whizzer 17 is used for concentrated solution is carried out solid-liquid separation to greatest extent, and centrifugal water outlet enters centrifugal tank 19 continuously, and solid is accumulated in the separator tube (not shown) of whizzer 17 inside.
This system comprises that also the clear water after the micro-filtration module filtered is discharged into the product water pump 21 that reclaims in the tank 13, the concentrated solution that will contain the material that the micro-filtration module holds back pumps into the concentrate pump 23 in the concentrated solution groove 15, to concentrate the fresh feed pump 25 that concentrated solution in the liquid bath 15 pumps into whizzer 17, and go out water pump 27 what the water in the centrifugal tank 19 pumped into concentration basin 11.
The present invention also provides a kind of recovery method of processing procedure discharge water.At first the processing procedure discharge water is injected concentration basin 11, useful component in the processing procedure discharge water fully concentrates to form concentrated solution by the board-like microfiltration membrane group in the concentration basin 11 and is deposited in the concentration basin 11, give off clear water simultaneously, clear water pumps into recovery tank 13 by producing water pump 21.
The processing procedure discharge water continues by board-like microfiltration membrane group to start concentrate pump 23 concentrated solution in the concentration basin 11 is once pumped into concentrated liquid bath 15 after filtration for some time.
Start whizzer 17 then; to concentrate concentrated solution in the liquid bath 15 by fresh feed pump 25 is continuously pumped into whizzer 17 and carries out solid-liquid separation to greatest extent; centrifugal water outlet enters centrifugal tank 19 continuously; solid is accumulated in the separator tube of whizzer 17; reaching a certain amount of back (being no more than the separator tube volume) shuts down; unload separator tube and therefrom take out solid, packing gets final product behind the natural air drying.Centrifugal water outlet in the centrifugal tank 19 can pump into continuation execution recovery method in the concentration basin 11 by going out water pump 27.
In preferred embodiment of the present invention, whizzer 17 adopts high speed tubular-bowl centrifuge, 6 liters or 10 liters of its separator tube volumes, water passing capacity 1.2m
3/ h (cubic meter/hour), rotating speed 16000rpm (rev/min).
In preferred embodiment of the present invention, brilliant back-grinding water is reclaimed, contain the Si powder that to utilize again in the brilliant back-grinding water, the microfiltration membrane group that utilization of the present invention is arranged in the concentration basin 11 is filtered the concentrated solution that obtains clear water and contain Si powder, clear water injects and reclaims tank 13, and concentrated solution reaches solid-liquid two separation by whizzer 17, and centrifugal water outlet can re-inject in the concentration basin 11 and reclaim, and Si powder is collected in the separator tube of whizzer 17.Prove that by experiment in recovery system of the present invention and method, pure water and Si powder reclaim and reach 100%.
Recovery system of the present invention and recovery method can make full use of the discharge water of processing procedure, effectively economize on resources, and reduce production costs.
Claims (10)
1, a kind of recovery system of processing procedure discharge water is characterized in that: this system comprises concentration basin at least, reclaims tank and whizzer; The built-in microfiltration membrane group of concentration basin, microfiltration membrane group fully concentrate discharge water and inject whizzer to form concentrated solution, give off clear water simultaneously and inject the recovery tank; Whizzer carries out solid-liquid separation to concentrated solution, and solid is accumulated in the separator tube of whizzer inside.
2, the recovery system of a kind of processing procedure discharge water as claimed in claim 1, it is characterized in that: microfiltration membrane group bottom is provided with the continuous waterfall gas of pressurized air waterfall gas system, this waterfall gas system carries out the gas recoil by pressurized air to microfiltration membrane, makes the material of film surface adsorption break away from filter membrane.
3, the recovery system of a kind of processing procedure discharge water as claimed in claim 1 is characterized in that: this system also comprises a concentrated liquid bath, is used to store through the microfiltration membrane group filter the concentrated solution that forms, and concentrated solution is injected whizzer.
4, the recovery system of a kind of processing procedure discharge water as claimed in claim 3 is characterized in that: also be provided with a concentrate pump in the middle of concentration basin and concentrated liquid bath.
5, the recovery system of a kind of processing procedure discharge water as claimed in claim 4 is characterized in that: the processing procedure discharge water continues, to start concentrate pump the concentrated solution in the concentration basin is once pumped into concentrated liquid bath after filtration for some time by board-like microfiltration membrane group.
6, the recovery system of a kind of processing procedure discharge water as claimed in claim 1 is characterized in that: this system also comprises a centrifugal tank, the centrifugal water outlet that produces when being used to store whizzer work.
7, the recovery system of a kind of processing procedure discharge water as claimed in claim 6 is characterized in that: the centrifugal water outlet in the centrifugal tank can be injected concentration basin and be reclaimed.
8, a kind of method that adopts the system as claimed in claim 1 to reclaim the processing procedure discharge water is characterized in that this method comprises the steps:
A. at first the processing procedure discharge water is injected concentration basin;
B. the processing procedure discharge water fully concentrates to form concentrated solution by the board-like microfiltration membrane group in the concentration basin and is deposited in the concentration basin, gives off clear water simultaneously and pumps into the recycle-water groove;
C. start whizzer, concentrated solution is continuously pumped into whizzer and carries out solid-liquid separation to greatest extent, and centrifugal water outlet enters centrifugal tank continuously, and the centrifugal water outlet in the centrifugal tank re-injects concentration basin, and performing step b, solid then are accumulated in the separator tube of whizzer.
9, the recovery method of a kind of processing procedure discharge water as claimed in claim 8 is characterized in that: in steps d, be accumulated in solid in the separator tube and reach and whizzer is shut down after a certain amount of, unload separator tube and therefrom take out solid, packing gets final product behind the natural air drying.
10, the recovery method of a kind of processing procedure discharge water as claimed in claim 8 is characterized in that: in step b, the processing procedure discharge water continues, the concentrated solution in the concentration basin to be pumped into to whizzer after filtration for some time by board-like microfiltration membrane group again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100432772A CN101333015B (en) | 2007-06-29 | 2007-06-29 | Recovery system and process for discharged water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100432772A CN101333015B (en) | 2007-06-29 | 2007-06-29 | Recovery system and process for discharged water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101333015A true CN101333015A (en) | 2008-12-31 |
| CN101333015B CN101333015B (en) | 2010-09-29 |
Family
ID=40195939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100432772A Expired - Fee Related CN101333015B (en) | 2007-06-29 | 2007-06-29 | Recovery system and process for discharged water |
Country Status (1)
| Country | Link |
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| CN (1) | CN101333015B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104609668A (en) * | 2015-01-23 | 2015-05-13 | 先达恩那社水处理工程（天津）有限公司 | Wastewater treatment method for chip production line |
| CN104671590A (en) * | 2015-01-23 | 2015-06-03 | 先达恩那社水处理工程（天津）有限公司 | Method for treating wastewater from chip production line |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002331456A (en) * | 2001-05-08 | 2002-11-19 | Kurita Water Ind Ltd | Recovering device of abrasive |
| CN1397501A (en) * | 2001-07-18 | 2003-02-19 | 中国科学院生态环境研究中心 | Process and equipment for reclaing sewage generated by wiping paper money printing plate |
-
2007
- 2007-06-29 CN CN2007100432772A patent/CN101333015B/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104609668A (en) * | 2015-01-23 | 2015-05-13 | 先达恩那社水处理工程（天津）有限公司 | Wastewater treatment method for chip production line |
| CN104671590A (en) * | 2015-01-23 | 2015-06-03 | 先达恩那社水处理工程（天津）有限公司 | Method for treating wastewater from chip production line |
| CN104671590B (en) * | 2015-01-23 | 2017-12-29 | 先达恩那社水处理工程（天津）有限公司 | The method of wastewater treatment of chip production line |
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| Publication number | Publication date |
|---|---|
| CN101333015B (en) | 2010-09-29 |
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