CN104609668A - Wastewater treatment method for chip production line - Google Patents
Wastewater treatment method for chip production line Download PDFInfo
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- CN104609668A CN104609668A CN201510037278.0A CN201510037278A CN104609668A CN 104609668 A CN104609668 A CN 104609668A CN 201510037278 A CN201510037278 A CN 201510037278A CN 104609668 A CN104609668 A CN 104609668A
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Abstract
The invention discloses a wastewater treatment method for a chip production line. The wastewater treatment method comprises the following steps: receiving wastewater from the chip production line, wherein the wastewater contains nanosized suspended particles; adding suspended matter sludge into the wastewater to adsorb the nanosized suspended particles in the wastewater so as to form over-microsized suspended particles; performing membrane bioreactor treatment on the wastewater to remove the suspended particles in the wastewater. With the adoption of the wastewater treatment method, a problem of very quick blockage of filter materials often caused by an excessively simple treatment mode in the prior art is solved.
Description
Technical field
The present invention relates to the technical field of wastewater treatment, particularly relate to a kind of method of wastewater treatment of chip production line.
Background technology
In semiconductor fabrication, the semi-conductor chip with various function is formed by techniques such as a series of photoetching, etching, deposition, ion implantation, grinding, cleanings, then described semi-conductor chip is carried out encapsulating and testing electrical property, and finally form end product.At present, in the manufacturing processed of semi-conductor chip, a large amount of trade effluents can be produced.
In existing wastewater treatment process, usually sequencing batch reactor (SBR) or biological contact oxidation process or BAF (BAF) is used alone, all can only carry out single process to waste water, such as filtering or microbial reaction or removal toxicity etc., because processing mode is too single, this problem usually causing medium to block very soon.Therefore, the space that is still improved of wastewater treatment.
Summary of the invention
Main purpose of the present invention is the method for wastewater treatment providing a kind of chip production line, too single with the processing mode solving prior art existence, this problem usually causing medium to block very soon.
For solving the problem, the embodiment of the present invention provides a kind of method of wastewater treatment of chip production line, comprises the steps: to receive the waste water coming from chip production line, comprises nano level suspended particulate in described waste water; In waste water, add suspended substance sludge material, to adsorb the nano-scale particle thing in waste water, form the suspended particulate of more than micron order; Membrane Bioreactor for Wastewater Treatment is carried out to described waste water, to remove the suspended particulate in waste water.
Wherein, the concentration of described suspended substance sludge material is 500-1200PPM.
Wherein, add the step of suspended substance sludge material in described waste water after comprise further: the concentration detecting described suspended substance sludge material; If the concentration of described suspended substance sludge material exceedes preset concentration, described suspended substance sludge material is discharged.
Wherein, described membrane bioreactor comprises hollow-fibre membrane.
Wherein, adding taking a step forward of the step of suspended substance sludge material and comprise: in waste water, add pH value Auto-regulator in described waste water, is slightly acidic, neutrality or weakly alkaline to make the pH value of described waste water; Waste water is filtered, with the particle object in filtering waste water.
Wherein, the scope of the pH value of described waste water is 6.5-8.5.
Wherein, described to waste water carry out filtration adopt strainer, the order number of wherein said strainer is 60-100 order.
Wherein, described described waste water is carried out to the step of Membrane Bioreactor for Wastewater Treatment after comprise further: in by the water purification after Membrane Bioreactor for Wastewater Treatment, add bacterial inhibitor, to suppress the bacteria breed in water purification.
Wherein, described bacterial inhibitor comprises clorox.
Wherein, the residual chlorine concentration of described clorox is 0.5-0.8PPM.
Wherein, described method of wastewater treatment comprises further: carry out air to described membrane bioreactor surface and wash away.
According to technical scheme of the present invention, by carrying out Membrane Bioreactor for Wastewater Treatment to described waste water, and before Membrane Bioreactor for Wastewater Treatment, add suspended substance sludge material.Thus, the effect of the recycling of water resources can be reached, and the situation that membrane bioreactor can be avoided to block occurs.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, and form a application's part, schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the schema of the method for wastewater treatment of chip production line according to a first embodiment of the present invention;
Fig. 2 is the schema of the method for wastewater treatment of chip production line according to a second embodiment of the present invention;
Fig. 3 is the schema of the method for wastewater treatment of chip production line according to a third embodiment of the present invention;
Fig. 4 is the schematic diagram of the Waste Water Treatment of chip production line according to a fourth embodiment of the present invention;
Fig. 5 is the schematic diagram of the Waste Water Treatment of chip production line according to a fifth embodiment of the present invention;
Fig. 6 is the schematic diagram of the Waste Water Treatment of chip production line according to a sixth embodiment of the present invention.
Embodiment
Main thought of the present invention is, based on by carrying out Membrane Bioreactor for Wastewater Treatment to described waste water, and before Membrane Bioreactor for Wastewater Treatment, adds suspended substance sludge material.Thus, the effect of the recycling of water resources can be reached, and the situation that membrane bioreactor can be avoided to block occurs.
For making the object, technical solutions and advantages of the present invention clearly, below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
According to embodiments of the invention, provide a kind of method of wastewater treatment of chip production line.
Fig. 1 is the schema of the method for wastewater treatment of chip production line according to a first embodiment of the present invention.
In step s 102, receive the waste water coming from chip production line, in described waste water, comprise nano level suspended particulate.Described nano level suspended particulate is such as silicon-dioxide, silica flour, metallics etc.
In step S104, in waste water, add suspended substance sludge material, to adsorb the nano-scale particle thing in waste water, form the suspended particulate of more than micron order.The suspended particulate (SS) of the waste water of discharging due to chip production line can contain very tiny particle and metal ion (such as SS<30), if directly carry out membrane bioreactor (MBR) process to described waste water, membrane bioreactor can be made easily to block.Therefore, by adding suspended substance sludge material, oarse-grained suspended substance sludge material can be allowed to adsorb the suspended particulate of the fine particle in waste water, membrane bioreactor can not be blocked.Wherein, the concentration of suspended substance sludge material is such as 500-1200PPM.Preferably, the concentration of suspended substance sludge material can be 800-1000PPM, to promote the effect of the suspended substance of the fine particle in suspended substance sludge material absorption waste water.Further, suspended substance sludge material can be sewage active sludge.
In step s 106, Membrane Bioreactor for Wastewater Treatment is carried out to described waste water, to remove the suspended particulate in waste water.That is, the process retained the active sludge in waste water and macromolecular substance is effectively to remove the chemical oxygen demand (COD) (COD) and suspended particulate (SS) etc. in waste water.Wherein, Membrane Bioreactor for Wastewater Treatment can comprise hollow-fibre membrane, and the material of hollow-fibre membrane can be polyvinylidene difluoride (PVDF) (PVDF), polyethylene (PE) or its matrix material.
Can produce the very trickle suspended particulate of a large amount of nano levels in chip production process, such as silicon-dioxide, silica flour, metallics etc., these nano level suspended particulate matters can all enter in waste water.Due to this waste water containing a large amount of nano level suspended particulate; if only use membrane bioreactor (MBR) to process waste water; the aperture of the as easy as rolling off a log blocking hollow-fibre membrane of nano level small suspended particulate and through hollow-fibre membrane; can affect and produce water water quality; and water side is produced in the inside that some nano level molecules can be blocked in hollow-fibre membrane; thus hollow-fibre membrane is thoroughly blocked, and can not matting regeneration, cause hollow-fibre membrane to be scrapped.Therefore, the present embodiment adopts before Membrane Bioreactor for Wastewater Treatment, adds suspended substance sludge material, to adsorb aforementioned nano level small suspended particulate to grow up into more than micron order, thus allow suspended particulates more than these micron orders can not enter aperture and the inside of hollow-fibre membrane, only rest on the surface of hollow-fibre membrane, and can not through hollow-fibre membrane.Then; can wash away further by carrying out air to membrane bioreactor surface (i.e. the surface of hollow-fibre membrane); the suspended particulate of more than aforementioned micron order is made to be deposited in bottom the membrane cisterna of Membrane Bioreactor for Wastewater Treatment; this ensure that and produce water water quality; and effectively solve hollow-fibre membrane blockage problem, thus protect hollow-fibre membrane simultaneously.
Fig. 2 is the schema of the method for wastewater treatment of chip production line according to a second embodiment of the present invention.
In step S202, receive the waste water coming from chip production line, in described waste water, comprise nano level suspended particulate.In step S204, in waste water, add suspended substance sludge material, to adsorb the nano-scale particle thing in waste water, form the suspended particulate of more than micron order.In step S210, Membrane Bioreactor for Wastewater Treatment is carried out to described waste water, to remove the suspended particulate in waste water.Wherein, step S202, the S204 of Fig. 2, the step S102 of S210 and Fig. 1, S104, S106 are same or similar, with reference to the explanation of the embodiment of figure 1, therefore can not repeat them here.
In step S206, detect the concentration of described suspended substance sludge material.Because adding of suspended substance sludge material may be a large amount of and persistence, if and the excessive concentration of suspended substance sludge material, may affect the effect that suspended substance sludge material adsorbs short grained suspended particulate, whether the concentration therefore detecting suspended substance sludge material further exceedes preset concentration.Wherein, because the concentration of suspended substance sludge material is preferably 800-1000PPM, therefore described preset concentration can be set as 1000PPM.
In step S208, if the concentration detecting suspended substance sludge material exceedes preset concentration, then suspended substance sludge material is discharged.That is, by discharge suspended substance sludge material, to reduce the concentration of suspended substance sludge material.Further, in discharge process, still can continue the concentration detecting suspended substance sludge material, if the concentration detecting suspended substance sludge material does not exceed preset concentration, then stop discharging suspended substance sludge material.Thus, the concentration of suspended substance sludge material can be remained between 500-1200PPM, and be preferably 800-1000PPM.
Fig. 3 is the schema of the method for wastewater treatment of chip production line according to a third embodiment of the present invention.In the present embodiment, step S102, the S104 of step S302, S308, S310 and Fig. 1, S106, same or similar, with reference to the explanation of the embodiment of figure 1, therefore can not repeat them here.
In step s 302, receive the waste water coming from chip production line, in described waste water, comprise nano level suspended particulate.
In step s 304, adding pH value Auto-regulator in waste water, is slightly acidic, neutrality or weakly alkaline to make the pH value of described waste water.That is, by adding pH value Auto-regulator in waste water, and after mixing fully, making the pH value of waste water for neutral or close neutral, the growth of microorganism or bacterium can be beneficial to.The waste water discharged due to chip production line is acid, and therefore described pH value Auto-regulator can comprise alkaline matter, such as sodium hydroxide (NaOH), and the pH value of waste water is adjusted between 6.5-8.5.
In step S306, described waste water is filtered, with the particle object in filtering waste water.That is, the waste water of strainer to the aforementioned PH of adding Auto-regulator can be adopted to filter, and the order number of this strainer can be 60-100 order, for by the macrobead object filtering in waste water, such as sharp object, hair, chip etc., enter follow-up process to avoid macrobead object.
In step S308, in waste water, add suspended substance sludge material, to adsorb the nano-scale particle thing in waste water, form the suspended particulate of more than micron order.In step S310, Membrane Bioreactor for Wastewater Treatment is carried out to waste water, to remove the suspended particulate in waste water.
In step S312, bacterial inhibitor in the water purification after passing through Membrane Bioreactor for Wastewater Treatment, to suppress the bacteria breed in water purification.Wherein, described bacterial inhibitor can comprise clorox, and the residual chlorine concentration of described clorox can be 0.5-0.8PPM.Preferably, described residual chlorine concentration can be 0.6PPM, makes the better effects if that anti-bacteria grows.
By the waste water handled by the method for wastewater treatment of aforementioned chip production line, may be used for the cooling tower of chip factory, washing tower, general utility appliance or ultrapure water system processing procedure, thus reach the effect of the recycling of water resources.
According to embodiments of the invention, provide a kind of Waste Water Treatment of chip production line.
Fig. 4 is the schematic diagram of the Waste Water Treatment of chip production line according to a fourth embodiment of the present invention.The Waste Water Treatment 400 of chip production line comprises purification tank for liquid waste 410.
Purification tank for liquid waste 410 is for receiving the waste water discharged from chip production line, nano level suspended particulate is comprised in described waste water, and in purification tank for liquid waste 410, be configured with adjustment aeration assembly 420, aerobic microorganism 430, suspended substance sludge material 440 and filtering membrane 450, to increase the dissolved oxygen amount of waste water, the nano-scale particle thing in waste water in culturing micro-organisms and active sludge, absorption waste water, the suspended particulate forming more than micron order and the suspended particulate removed in waste water.Furthermore, the waste water in purification tank for liquid waste 410 is sequentially by regulating aeration assembly 420, aerobic microorganism 430 and suspended substance sludge material 440 and filtering membrane 450 to process.
Described adjustment aeration assembly 420 can comprise gas blower, to provide suitable air capacity by gas blower, to increase the dissolved oxygen amount in waste water, can be beneficial to follow-up microorganism and the cultivation of active sludge.Described dissolved oxygen amount can be 1-2PPM.Further, by waste water by with in purification tank for liquid waste 410 aerobic microorganism 420 contact, culturing micro-organisms and active sludge in waste water can be beneficial to.
The suspended particulate of the waste water of discharging due to chip production line can contain very tiny particle and metal ion (such as SS<30), if directly processed described waste water by filtering membrane 450, filtering membrane 450 can be made easily to block.Therefore, by being configured with suspended substance sludge material 440 in purification tank for liquid waste 410, oarse-grained suspended substance sludge material 440 can being allowed to adsorb the suspended particulate of the fine particle in waste water, filtering membrane 450 can not be blocked.Wherein, the concentration of suspended substance sludge material 440 is such as 500-1200PPM.Preferably, the concentration of suspended substance sludge material 440 can be 800-1000PPM, to promote the effect of the suspended particulate of the fine particle in suspended substance sludge material absorption waste water.Further, suspended substance sludge material can be sewage active sludge.
In addition, filtering membrane 450 can comprise membrane bioreactor, and membrane bioreactor can comprise hollow-fibre membrane, and the material of hollow-fibre membrane can be polyvinylidene difluoride (PVDF) (PVDF), polyethylene (PE) or its matrix material, for the process retained the active sludge in waste water and macromolecular substance, to remove chemical oxygen demand (COD) in waste water and suspended substance.
Fig. 5 is the schematic diagram of the Waste Water Treatment of chip production line according to a fifth embodiment of the present invention.The Waste Water Treatment 500 of chip production line comprises purification tank for liquid waste 510 and discharge equipment 520.Wherein, purification tank for liquid waste 510 is same or similar with the purification tank for liquid waste 410 of Fig. 4, therefore with reference to the explanation of the embodiment of figure 4, therefore can not repeat them here.
Discharge equipment 520 is for discharging described suspended substance sludge material when the concentration of the suspended substance sludge material in described purification tank for liquid waste exceeds preset concentration.Wherein, discharge equipment 520 is such as check valve, and can be arranged at the bottom of purification tank for liquid waste 510 or at least side of cell body.That is, by unlatching or the closedown of discharge equipment 520, the concentration of the suspended substance sludge material in adjustable purification tank for liquid waste 510.Wherein, because the concentration of suspended substance sludge material is preferably 800-1000PPM, therefore described preset concentration can be set as 1000PPM.
Furthermore, purification tank for liquid waste 510 also can include detector, and in the configurable purification tank for liquid waste 510 of detector, for detecting the concentration of the suspended substance sludge material in purification tank for liquid waste 510, and the open and close of control discharge device 520.Because adding of suspended substance sludge material may be a large amount of and persistence, if and the excessive concentration of suspended substance sludge material, may affect suspended substance sludge material adsorb the effect of short grained suspended particulate or hinder the treatment effect of purification tank for liquid waste 510 pairs of waste water, whether the concentration therefore by detector detection suspended substance sludge material exceedes preset concentration.
In addition, in discharge process, detector still can continue the concentration detecting suspended substance sludge material.If when the concentration of detector detection suspended substance sludge material does not exceed preset concentration, then control discharge device 520 is closed, to stop discharging suspended substance sludge material.Thus, the concentration of suspended substance sludge material can be remained between 500-1200PPM, and be preferably 800-1000PPM.
Fig. 6 is the schematic diagram of the Waste Water Treatment of chip production line according to a sixth embodiment of the present invention.The Waste Water Treatment 600 of chip production line comprises waste water receiving pipeline 610, purification tank for liquid waste 620 and water purification output channel 630.Wherein, purification tank for liquid waste 620 is same or similar with the purification tank for liquid waste 410 of Fig. 4, therefore with reference to the explanation of the embodiment of figure 4, therefore can not repeat them here.
Waste water receiving pipeline 610 is for receiving the waste water discharged from chip production line, nano level suspended particulate is comprised in described waste water, and waste water receiving pipeline 610 comprises pH value Auto-regulator 611 and strainer 612 further, for regulating the pH value in waste water and filtering waste water.That is, waste water receiving pipeline 610 can add pH value Auto-regulator in the waste water flow through, with composite waste and pH value Auto-regulator, make the pH value of waste water in neutral or close neutral (such as slightly acidic or weakly alkaline), can be beneficial to the growth of microorganism or bacterium.Wherein, the waste water discharged due to chip production line is acid, and therefore described pH value instrumentality can comprise alkaline matter, such as sodium hydroxide (NaOH), and the pH value of waste water is adjusted between 6.5-8.5.
In addition, strainer 612 such as can be arranged at the water outlet of waste water receiving pipeline 610, and the waste water after filtering is delivered to purification tank for liquid waste 620 and carries out follow-up process.Strainer 612 for filtering waste water, with the particle object in filtering waste water, such as sharp object, hair, chip etc., thus the hollow-fibre membrane avoiding that particle object to enter in purification tank for liquid waste 620 wearing and tearing or destroys in purification tank for liquid waste 620.Wherein, the order numerical example of strainer is as being 60-100 order.
Water purification output channel 630 connects purification tank for liquid waste 620, to export the water purification after the filtration of described filtering membrane 450.Furthermore, water purification output channel 630 can comprise bacterial inhibitor, for suppressing the bacteria breed in water purification.Wherein, described bacterial inhibitor can comprise clorox, and the residual chlorine concentration of described clorox can be 0.5-0.8PPM, and preferably, described residual chlorine concentration can be 0.6PPM.(0.5-0.8PPM is a large concept, but scope or numerical value more specifically between 0.5-0.8PPM, also need contriver to provide some examples, such as 0.6 or 0.7, or 0.6-0.7), make the better effects if that anti-bacteria grows.
In sum, according to technical scheme of the present invention, by carrying out Membrane Bioreactor for Wastewater Treatment to described waste water, and before Membrane Bioreactor for Wastewater Treatment, add suspended substance sludge material.Thus, the effect of the recycling of water resources can be reached, and the situation that membrane bioreactor can be avoided to block occurs.
The foregoing is only embodiments of the invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within right of the present invention.
Claims (11)
1. a method of wastewater treatment for chip production line, is characterized in that, comprises the steps:
Receive the waste water coming from chip production line, in described waste water, comprise nano level suspended particulate;
In waste water, add suspended substance sludge material, to adsorb the nano-scale particle thing in waste water, form the suspended particulate of more than micron order;
Membrane Bioreactor for Wastewater Treatment is carried out to described waste water, to remove the suspended particulate in waste water.
2. the method for wastewater treatment of chip production line according to claim 1, is characterized in that, the concentration of described suspended substance sludge material is 500-1200PPM.
3. the method for wastewater treatment of chip production line according to claim 1, is characterized in that, comprises further after adding the step of suspended substance sludge material in described waste water:
Detect the concentration of described suspended substance sludge material;
If the concentration of described suspended substance sludge material exceedes preset concentration, described suspended substance sludge material is discharged.
4. the method for wastewater treatment of chip production line according to claim 1, is characterized in that, described membrane bioreactor comprises hollow-fibre membrane.
5. the method for wastewater treatment of chip production line according to claim 1, is characterized in that, adds taking a step forward of the step of suspended substance sludge material and comprise in described waste water:
In waste water, add pH value Auto-regulator, be slightly acidic, neutrality or weakly alkaline to make the pH value of described waste water;
Waste water is filtered, with the particle object in filtering waste water.
6. the method for wastewater treatment of chip production line according to claim 5, is characterized in that, the scope of the pH value of described waste water is 6.5-8.5.
7. the method for wastewater treatment of chip production line according to claim 5, is characterized in that, described to waste water carry out filtration adopt strainer, the order number of wherein said strainer is 60-100 order.
8. the method for wastewater treatment of chip production line according to claim 1, is characterized in that, described described waste water is carried out to the step of Membrane Bioreactor for Wastewater Treatment after comprise further:
Bacterial inhibitor is added, to suppress the bacteria breed in water purification in by the water purification after Membrane Bioreactor for Wastewater Treatment.
9. the method for wastewater treatment of chip production line according to claim 8, is characterized in that, described bacterial inhibitor comprises clorox.
10. the method for wastewater treatment of chip production line according to claim 9, is characterized in that, the residual chlorine concentration of described clorox is 0.5-0.8PPM.
The method of wastewater treatment of 11. chip production lines according to claim 1, it is characterized in that, described method of wastewater treatment comprises further:
Carry out air to described membrane bioreactor surface to wash away.
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| CN201510037278.0A CN104609668A (en) | 2015-01-23 | 2015-01-23 | Wastewater treatment method for chip production line |
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Cited By (1)
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Application publication date: 20150513 |