CN101330281A - Single crystal substrate and cutting method thereof - Google Patents
Single crystal substrate and cutting method thereof Download PDFInfo
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- CN101330281A CN101330281A CNA2008101269363A CN200810126936A CN101330281A CN 101330281 A CN101330281 A CN 101330281A CN A2008101269363 A CNA2008101269363 A CN A2008101269363A CN 200810126936 A CN200810126936 A CN 200810126936A CN 101330281 A CN101330281 A CN 101330281A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02039—Characteristics of piezoelectric layers, e.g. cutting angles consisting of a material from the crystal group 32, e.g. langasite, langatate, langanite
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/0259—Characteristics of substrate, e.g. cutting angles of langasite substrates
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
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Abstract
Disclosed is a single crystal substrate and a cutting method thereof. A single crystal substrate includes a langasite substrate with a SAW propagation surface; and input and output IDTs having electrodes on the surface for launching and/or detecting surface acoustic waves, wherein a direction of surface wave propagation is parallel to an X'-axis, and the substrate further has an Z'-axis perpendicular to the surface and a Y'-axis parallel to the surface and perpendicular to the X'-axis, the langasite substrate having a crystal orientation defined by modified axes X, Y and Z, the relative orientation of axes X', Y' and Z' being defined by Euler anglesphi, theta and psi; wherein, phi is equal to or greater than 5 DEG C below zero and equal to or less than 5 DEG C; theta is equal to or greater than 70 DEG C and equal to or less than 90 DEG C; psi is equal to or greater than 85 DEG C and equal to or less than 95 DEG C; or phi is equal to or greater than 5 DEG C below zero and equal to or less than 5 DEG C; theta is equal to or greater than 20 DEG C and equal to or less than 40 DEG C; psi is equal to or greater than 5 DEG C and equal to or less than 25 DEG C; or phi is equal to zero DEG C; . Theta is equal to 168 DEG C and psi is equal to 90 DEG C.
Description
The application be that June 25, application number in 2003 are 03812150.6 the applying date, denomination of invention divides an application for the Chinese patent application of " single crystalline substrate and cutting method thereof ".
Technical field
The present invention relates to surface acoustic wave (SAW) device, more particularly relate to by optimum Cutting the orientation single crystalline substrate and the cutting method thereof that obtain, that have the parameters optimization feature of single crystalline substrate used in the SAW device are provided.
Technical background
In recent years, as the communication terminal of wireless communication apparatus, as on automobile telephone, the train and the mobile phone in street corner, its demand sharply rises in the whole world.For making mobile communication become possibility, network system itself needs all with the terminal that directly is connected the user that volume is little, in light weight, power consumption is low and performance is high.
In fact the small size parts that is used for terminal is the parts that help the portable terminal size to reduce.Especially, current in RF and IF application widely, as wireless, portable communication and cable TV, the SAW device is used as band pass filter, resonator, delay line and acoustic convolver.
In general, SAW is the matter wave that produces owing to particle movement when having heat from the outside, machinery and electric power, and exists only in solid and the liquid.
Basically, ripple can be divided into three kinds: compressional wave, and the direction of its medium wave propagation is parallel to the direction of particle displacement; Shear wave, the direction of its medium wave propagation is perpendicular to the direction of particle displacement (vibration); Shear wave obtains by adding level and vertical vector.
The method effective and the most commonly used that generates or detect the SAW device of being made by Piezoelectric Substrates is to make IDT (interdigital transducer) structure.IDT is arranged in parallel metal electrode on the Piezoelectric Substrates, and the pattern of this moment is similar to the time pulse pattern.
Most of IDT of each electrode makes by al deposition, and also improves proof voltage character with aluminium alloy sometimes.And Ti or special alloy also are used for improving the contact property of aluminium.Usually, the width range of the aluminium of use is at 0.5 μ m-15 μ m.
Fig. 1 is the perspective illustration of the SAW device of correlation technique.
As shown in Figure 1, when alternating signal voltage being added in input IDT101 and going up, have between other adjacent electrode of opposed polarity and can produce electric field, and produce piezoelectric effects on substrate 104 surfaces.As a result, substrate 104 surface generation distortion and SAW propagate along the both direction of input IDT101.
Fig. 2 is the schematic diagram in the distortion of Piezoelectric Substrates inside that explanation is caused by SAW according to correlation technique.
As shown in the figure, when SAW propagated, substrate deformed and SAW transmits in the mode of mechanical energy.
Then, the energy when the reciprocal piezoelectric effect of the output IDT102 of opposite side utilization from this energy formation to each electrode detects the SAW propagation.
On the other hand, in order to limit unnecessary reflected wave, the two ends on substrate 104 surfaces are coated with sound absorption body 103.
About the sound absorption body, can adopt rubber, silica gel, photosensitive film or polyamide, and its coating shape also is different.
Therefore, the SAW Devices Characteristics depends on and is used for the I/O IDT pattern of switching electrical signals to mechanical energy or mechanical energy to the signal of telecommunication and the size of how to regulate pattern.
SAW device with above structure is usually as band pass filter.This application helps to reduce weight and size, raising reliability and reduces power consumption very much.The SAW filter that the typical case uses is a shear wave SAW filter, and it has with preset space length and is placed in two IDT on the Piezoelectric Substrates, the resonance filter and the associated filters that have resonator are housed on Piezoelectric Substrates.
In order to develop the SAW filter, the technology that relates to electrode design, composition, SMD encapsulation, RF feature measurement and be used for the circuit design of impedance matching should organically be linked to each other and make it systematization.
Usually, quartzy, lithium niobate (LiNbO
3), ST-quartz and lithium tantalate (LiTaO
3) be used to make the SAW single crystalline substrate of the pattern that is used to propagate SAW.
The character of these piezoelectric monocrystal substrates of propagation surface sound wave has a strong impact on the SAW filter because produce also, and it is very important setting up specific orientation and correspondingly cut substrate at different character.
The character of considering is SAW speed, SAW coupling coefficient, can flow angle (power flow angle) (pfa), diffraction or wave beam spreading coefficient, γ (gamma) or the temperature coefficient that postpones.According to these character, the SAW device may maybe can not obtain radio frequency (radio frequency).
Particularly the first-order lag temperature coefficient is very responsive for frequency change in these character, thereby the SAW device is very high as the availability of temperature sensor.
Fig. 3 is the SAW device schematic diagram that is used as temperature sensor in the correlation technique.
As shown in Figure 3, input IDT and output IDT are arranged on single crystalline substrate.When input IDT was applied voltage, the signal of telecommunication is converted into mechanical energy and SAW propagates along single crystalline substrate.At this moment, if temperature change, then the SAW frequency of Chuan Boing also can change.Then, now for the change of mechanical energy form the SAW of frequency on output IDT, be converted back to the signal of telecommunication and output from here.
By amplifier output signal frequency is amplified, and this amplifying signal wireless transmission.When this transmits when being received, the frequency of measuring-signal, and detect (or induction) temperature corresponding with frequency.
With the Eulerian angles of single crystal quartz substrate, promptly φ=0 °, θ=15.7 ° and ψ=0 ° are applied to the SAW device, obtain following result.
Vs(km/s)＝3.948582，Vo(km/s)＝3.95077，K
2(％)＝0.1108，pfa(deg)＝0，tcd(ppm/C)＝0.25181，tcd2(10
-9/C
2)＝-1.8167，loss_s(dB/λ)＝0.0003059，loss_o(dB/λ)＝0.0003297。
Herein, Vs and Vo are respectively the phase velocity on finite sum open (freedom) surface, K
2Be coupling coefficient, pfa can flow the angle, and tcd and tcd2 are respectively single order and second order delay temperature coefficient, and loss_s and loss_o are respectively the propagation losses of finite sum open surface.
On the other hand, with lithium tantalate (LiTaO
3) Eulerian angles of single crystalline substrate, promptly φ=10 °, θ=23.6 ° and ψ=78.8 ° are applied to the SAW device, obtain following result.
Vs(km/s)＝2.969688，Vo(km/s)＝2.972704，K
2(％)＝0.2029，pfa(deg)＝0.03048，tcd(ppm/C)＝-0.06127，tcd2(10
-9/C
2)＝-3.496。
In brief, when above-mentioned quartz substrate Eulerian angles and lithium tantalate substrate Eulerian angles are applied to temperature sensor,, can not obtain as the needed Optimal Temperature coefficient of the SAW device of temperature sensor though character does not experience big change.
Therefore, when the different materials single crystalline substrate, when promptly quartz, langasite or lithium tantalate substrate were used to the SAW device, it was very important setting specific orientation and correspondingly cut substrate according to their character.And if the SAW device has the value that is lower than expectation, then the performance of SAW device can be degenerated thereupon.
Summary of the invention
The objective of the invention is to address the above problem at least and/or defective, and advantage as described below is provided at least.
Therefore, an object of the present invention is the single crystalline substrate and the cutting method thereof that have optimized parameter character by providing, the optimum cutting orientation that is provided for langasite, quartz and the monocrystalline lithium tantalate substrate of SAW device solves foregoing problems.
Aforementioned and other purpose and advantage realize that by single crystalline substrate is provided this single crystalline substrate comprises the langasite substrate with SAW propagation surface; On this surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to this surperficial Z ' axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, this langasite substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is 8 °≤φ≤25 °, the scope of θ is 15 °≤θ≤30 °, the scope of ψ is 55 °≤ψ≤85 °, or φ is 0 °, the scope of θ is 12 °≤θ≤17 °, and the scope of ψ is 73 °≤ψ≤78 °.
Preferably, the optimum Eulerian angles of langasite are φ=10 °, θ=23.6 ° and ψ=78.8 ° or φ=0 °, θ=14.6 ° and ψ=76.2 °.
And single crystalline substrate comprises the quartz substrate with SAW propagation surface; On this surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to this surperficial Z ' axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, this quartz substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 60 °≤θ≤80 °, the scope of ψ is-5 °≤ψ≤+ 5 °, or φ is 0 °, the scope of θ is 17 °≤θ≤23 °, and the scope of ψ is 10 °≤ψ≤20 °.
Preferably, quartzy optimum Eulerian angles are φ=0 °, θ=70.5 ° and ψ=0 ° or φ=0 °, θ=20 ° and ψ=13.7 °.
And single crystalline substrate comprises the lithium tantalate substrate with SAW propagation surface; On this surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to described surface and perpendicular to the Y ' axle of X ' axle, this lithium tantalate substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 70 °≤θ≤90 °, the scope of ψ is 85 °≤ψ≤95 °, or the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 160 °≤θ≤180 °, the scope of ψ is 85 °≤ψ≤95 °, perhaps the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 20 °≤θ≤40 °, and the scope of ψ is 5 °≤ψ≤25 °.
Preferably, the optimum Eulerian angles of lithium tantalate are φ=0 °, θ=79 ° and ψ=90 °; φ=0 °, θ=168 ° and ψ=90 °; Perhaps φ=0 °, θ=30 ° and ψ=16.5 °.
According to a further aspect in the invention, the cutting method of single crystalline substrate may further comprise the steps:
(a) be the surface of the single crystalline substrate of propagation surface sound wave, limit crystal orientation based on revising axle X, Y and Z; (b) limit X ', Y ' and Z ' axle on single crystalline substrate, wherein surperficial direction of wave travel is parallel to X ' axle, and Z ' axle is perpendicular to surface wave, and Y ' axle is parallel to described surface and perpendicular to X ' axle; (c) with X ', the Y ' and Z ' the axle crystal relative orientation Eulerian angles that limit in (b), φ, θ and ψ limit; (d) φ, θ and the ψ that limits in (c) is set in the optimized scope.
Preferably, single crystalline substrate is langasite substrate, quartz substrate and lithium tantalate substrate.
The present invention especially relates to following aspect:
1. single crystalline substrate comprises:
Langasite substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described langasite substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is 8 °≤φ≤25 °, the scope of θ is 15 °≤θ≤30 °, and the scope of ψ is 55 °≤ψ≤85 °.
2. the single crystalline substrate of project 1, wherein the optimum Eulerian angles of langasite are φ=10 °, θ=23.6 ° and ψ=78.8 °.
3. single crystalline substrate comprises:
Langasite substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described langasite substrate has by revising the axle crystal orientation that X, Y and Z limited, the relative orientation of axle X ', Y ' and Z ' is limited by Eulerian angles φ, θ and ψ, wherein φ is 0 °, the scope of θ is 12 °≤θ≤17 °, and the scope of ψ is 73 °≤ψ≤78 °.
4. the single crystalline substrate of project 3, wherein the optimum Eulerian angles of langasite are φ=0 °, θ=14.6 ° and ψ=76.2 °.
5. single crystalline substrate comprises:
Quartz substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described quartz substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 60 °≤θ≤80 °, and the scope of ψ is-5 °≤ψ≤+ 5 °.
6. the single crystalline substrate of project 5, wherein Shi Ying optimum Eulerian angles are φ=0 °, θ=70.5 ° and ψ=0 °.
7. single crystalline substrate comprises:
Quartz substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described quartz substrate has by revising the axle crystal orientation that X, Y and Z limited, the relative orientation of axle X ', Y ' and Z ' is limited by Eulerian angles φ, θ and ψ, wherein φ is 0 °, the scope of θ is 17 °≤θ≤23 °, and the scope of ψ is 10 °≤ψ≤20 °.
8. the single crystalline substrate of project 7, wherein Shi Ying optimum Eulerian angles are φ=0 °, θ=20 ° and ψ=13.7 °.
9. single crystalline substrate comprises:
Lithium tantalate substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described lithium tantalate substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 70 °≤θ≤90 °, and the scope of ψ is 85 °≤ψ≤95 °.
10. the single crystalline substrate of project 9, wherein the optimum Eulerian angles of lithium tantalate are φ=0 °, θ=79 ° and ψ=90 °.
11. a single crystalline substrate comprises:
Lithium tantalate substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described lithium tantalate substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 160 °≤θ≤180 °, and the scope of ψ is 85 °≤ψ≤95 °.
12. the single crystalline substrate of project 11, wherein the optimum Eulerian angles of lithium tantalate are φ=0 °, θ=168 ° and ψ=90 °.
13. a single crystalline substrate comprises:
Lithium tantalate substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described lithium tantalate substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 20 °≤θ≤40 °, and the scope of ψ is 5 °≤ψ≤25 °.
14. the single crystalline substrate of project 13, wherein the optimum Eulerian angles of lithium tantalate are φ=0 °, θ=30 ° and ψ=16.5 °.
15. the cutting method of a single crystalline substrate comprises step:
(a) for the surface of the single crystalline substrate of propagation surface sound wave, limit crystal orientation based on revising axle X, Y and Z;
(b) limit X ', Y ' and Z ' axle on single crystalline substrate, wherein surperficial direction of wave travel is parallel to X ' axle, and Z ' axle is perpendicular to surface wave, and Y ' axle is parallel to described surface and perpendicular to X ' axle;
(c) use relative orientation Eulerian angles φ, the θ of crystal and ψ to limit on X ', the Y ' and the Z ' axle that limit in (b); With
(d) φ, θ and the ψ that limits in (c) is set in the optimized scope.
16. the method for project 15, wherein single crystalline substrate is the langasite substrate.
17. the method for project 15, wherein single crystalline substrate is a quartz substrate.
18. the method for project 15, wherein single crystalline substrate is the lithium tantalate substrate.
Other advantages of the present invention, purpose and feature be illustrated part in the following description, when a part is investigated one skilled in the relevant art hereinafter and become apparent, perhaps can be to understand by the practice of the present invention.Purpose and advantage that the present invention can realize and obtain are specifically noted in appended claims.
Description of drawings
The present invention is elaborated with reference to the following drawings, and wherein identical Reference numeral refers to identical element wherein:
Fig. 1 is the perspective illustration of the SAW device of correlation technique;
Fig. 2 is the schematic diagram of the distortion that caused by surface acoustic wave, Piezoelectric Substrates inside of explanation correlation technique;
Fig. 3 is the schematic diagram as the SAW device of the correlation technique of temperature sensor;
＜embodiment 1:langasite substrate 〉
Fig. 4 is according to one embodiment of the invention, the isogram of pfa when φ=10 in the langasite of the SAW device substrate °;
Fig. 5 is according to one embodiment of the invention, the isogram of tcd when φ=10 in the langasite of the SAW device substrate °;
Fig. 6 is the flow chart of explanation according to the analogy method of the single crystalline substrate of SAW device of the present invention;
Fig. 7 illustrates according to Eulerian angles (10 °, 23.6 ° and 78.8 °) in the langasite substrate of the SAW device of one embodiment of the invention dependence on temperature;
Fig. 8 illustrates that Eulerian angles (0 °, 138.5 ° and 26.6 °) are to dependence on temperature in the langasite substrate of SAW device of correlation technique;
Fig. 9 is in the langasite substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 ° for the propagation loss isogram of LGS PSAW;
＜embodiment 2: quartz substrate 〉
Figure 10 is illustrated in the quartz substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, and coupling coefficient (K when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=0 °
2) and first-order lag temperature coefficient (tcd) between relation;
Figure 11 is illustrated in the quartz substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, the relation when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=0 ° between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2);
Figure 12 is illustrated in the quartz substrate according to the SAW device of one embodiment of the invention, and when Eulerian angles φ=0 °, when θ=70.5 ° and ψ=0 °, frequency is to dependence on temperature;
Figure 13 explanation in quartz substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 °, the minimum propagation loss when θ=20 ° and ψ=13.7 °;
＜embodiment 3: lithium tantalate substrate 〉
Figure 14 is illustrated in the lithium tantalate substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, and coupling coefficient (K when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 °
2) and first-order lag temperature coefficient (tcd) between relation;
Figure 15 is illustrated in the lithium tantalate substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, the relation when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 ° between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2);
Figure 16 is illustrated in the lithium tantalate substrate according to the SAW device of one embodiment of the invention, and when Eulerian angles φ=0 °, when θ=79 ° and ψ=90 °, frequency is to dependence on temperature;
Figure 17 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 °, and coupling coefficient (K when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 °
2) and first-order lag temperature coefficient (tcd) between relation;
Figure 18 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 °, the relation when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 ° between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2).
Figure 19 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, and when Eulerian angles φ=0 °, when θ=168 ° and ψ=90 °, frequency is to dependence on temperature.
Figure 20 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the present invention, when Eulerian angles φ=0 °, and coupling coefficient (K when θ=30 ° and ψ=ψ ° (ψ ° of finger is arbitrarily angled)
2) and first-order lag temperature coefficient (tcd) between relation.
Figure 21 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the present invention, when Eulerian angles φ=0 °, the relation when θ=30 ° and ψ=ψ ° (ψ ° of finger is arbitrarily angled) between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2).
Figure 22 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the present invention, when Eulerian angles φ=0 °, and the isogram of pfa when θ=30 ° and ψ=ψ ° (ψ ° of finger is arbitrarily angled).
Figure 23 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, and when Eulerian angles φ=0 °, when θ=30 ° and ψ=16.5 °, frequency is to dependence on temperature.
Figure 24 is the key diagram of Eulerian angles in the correlative technology field.
Embodiment
Followingly single crystalline substrate and cutting method thereof according to the preferred embodiments of the invention are elaborated with reference to accompanying drawing.
＜embodiment 1 〉
Fig. 4 is according to one embodiment of the invention, the isogram of pfa when Eulerian angles φ=10 in the langasite of the SAW device substrate °; The isogram of tcd when Fig. 5 is Eulerian angles φ=10 °.
As shown in the figure, wherein pfa and tcd to be zero point simultaneously in about θ=23.6 ° and ψ=78.8 ° locate.
Fig. 6 is the flow chart of explanation according to the analogy method of the single crystalline substrate of SAW device of the present invention.
With reference to Fig. 6, the analogy method of single crystalline substrate is as described below.The user at first imports material and thermal constant, temperature, hunting zone and the Eulerian angles (S11) of monocrystalline.
Then, the user is converted to work coordinate system (S12) with constant from the crystallography coordinate system.Thereafter, the user separates for bulk wave search dispersion equation, i.e. V
S1, V
S2, V
1(S13).
Then, user's setting speed and decay initial value (S14), and form dispersion equation (S15).
Dispersion equation forms the equation (S16) of root β.The user calculates β subsequently
iRoot (S17).
In a plurality of of calculating, the user selects Im β
i＜0 root, it equals the y (S18) of compound radical x+jy.
Subsequently, square (S19) of the absolute value of user's calculation of boundary conditions function.Thereafter, the user determine the boundary condition function that calculates absolute value square whether be minimum (S20).
Herein, if it is a minimum, the user calculates the key property (S21) of ripple so.And, finish according to the analogy method of the single crystalline substrate of SAW device of the present invention.If it is not a minimum, the user changes velocity of wave and pad value (S22), repeating step S14 to S20.
It below is the key property of the ripple that calculates according to analogy method as shown in Figure 6, about Eulerian angles (10 °, 23.6 °, 78.8 °).
Suppose Eulerian angles φ=10 °, θ=23.6 ° and ψ=78.8 ° have provided the following result of each parameter by the more accurate Calculation of Eulerian angles simulation.Vs(km/s)＝2.969688，Vo(km/s)＝2.972704，K
2(％)＝0.2029，pfa(deg)＝0.03048，tcd(ppm/C)＝-0.06127，tcd2(10
-9/C
2)＝-3.496。
Herein, Vs and Vo are respectively the phase velocity on finite sum open (freedom) surface, K
2Be coupling coefficient, pfa can flow the angle, and tcd and tcd2 are respectively single order and second order delay temperature coefficient.
Here, preferably have the high K2 that optimizes, and preferably approach zero for the optimal value of pfa, tcd and tcd2.On the other hand, Vs and Vo have the Different Optimization value that depends on the circumstances.This is that Vs and Vo will change because when according to f=v/ λ (f, v and λ are respectively wave frequency, velocity of wave and wavelength) herein when fixing expected frequency.
Yet,, therefore adopt the near-optimization value usually owing to satisfy very difficulty of the needed optimal value of all parameters.The optimum range of Eulerian angles is 8 °≤φ≤25 °, 15 °≤θ≤30 ° and 55 °≤ψ≤85 °.
Fig. 7 explanation is according to the temperature dependency of Eulerian angles (10 °, 23.6 ° and 78.8 °) in the langasite substrate of the SAW device of one embodiment of the invention, and Fig. 8 illustrates the temperature dependency of Eulerian angles (0 °, 138.5 ° and 26.6 °) in the langasite substrate of SAW device of correlation technique.
Comparison diagram 7 and Fig. 8 find that the temperature dependency of the Eulerian angles of langasite is stable.
Therefore, in the orientation group that proposes, can find similar value for other two angles for any orientation.And the combination of these two values will improve temperature stability better and reduce and insert loss.
Fig. 9 is in the langasite substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 ° for the propagation loss isogram of LGS SAW.
As shown in the figure, when Eulerian angles are φ=0 °, obtain minimal losses when θ=14.6 ° and ψ=76.2 °.
According to the parameter value that adopts Eulerian angles (10 °, 14.6 ° and 76.2 °) from simulation, to obtain, Vs (km/s)=3.402727, Vo (km/s)=3.04514, K
2(%)=0.1585, pfa (deg)=-4.556, tcd (ppm/C)=30.176, tcd2 (10
-9/ C
2)=51.942, loss_s (dB/ λ)=0.0006225, loss_o (dB/ λ)=2.19 * 10
-5Herein, Vs and Vo are respectively the phase velocity on finite sum open (freedom) surface, K
2Be coupling coefficient, pfa can flow the angle, and tcd and tcd2 are respectively single order and second order delay temperature coefficient, and loss_s and loss_o are respectively the propagation losses of finite sum open surface.
Like this, the langasite single crystalline substrate on this SAW device just has low-loss and high coupling coefficient, and demonstrates good temperature stability in wide operating temperature range.
Yet,, therefore adopt the near-optimization value usually owing to satisfy very difficulty of the needed optimal value of all parameters.The optimum range of Eulerian angles is φ=0 °, 12 °≤θ≤17 ° and 73 °≤ψ≤78 °.
＜embodiment 2 〉
Figure 10 is illustrated in the quartz substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, and coupling coefficient (K when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=0 °
2) and first-order lag temperature coefficient (tcd) between relation; Figure 11 is illustrated in the quartz substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, the relation when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=0 ° between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2).
Shown in Figure 10 and 11, the maximum of coupling coefficient is during corresponding to 70 ° of Eulerian angles θ ≈.
According to the parameter value that adopts Eulerian angles (0 °, 70.5 ° and 0 °) from simulation, to obtain, Vs (km/s)=3.205561, Vo (km/s)=3.208859, K
2(%)=0.2056, pfa (deg)=0, tcd (ppm/C)=-27.78, tcd2 (10
-9/ C
2)=2.5308, and γ=1.214.
In order to use the SAW device as temperature sensor and improve its applicability and practicality, coupling coefficient and first-order lag temperature coefficient should be big, and second order delay temperature coefficient and pfa (can flow the angle) should be near zero, and the γ value should approach-1.
Figure 12 is illustrated in the quartz substrate according to the SAW device of one embodiment of the invention, and when Eulerian angles φ=0 °, when θ=70.5 ° and ψ=0 °, frequency is to dependence on temperature.
Yet the single crystal quartz substrate on the SAW device does not have required optimized parameter value, therefore uses the near-optimization value usually.The Eulerian angles optimum range is-5 °≤φ≤+ 5 °, 60 °≤θ≤80 ° and-5 °≤ψ≤+ 5 °.
Figure 13 explanation in quartz substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 °, the minimum propagation loss when θ=20 ° and ψ=13.7 °.
As shown in figure 13, obtain minimal losses during corresponding to φ=0 ° when Eulerian angles.
And according to the parameter value that adopts Eulerian angles (0 °, 20 ° and 13.7 °) from simulation, to obtain, Vs (km/s)=3.861097, Vo (km/s)=3.86422, K
2(%)=0.1618, pfa (deg)=-4.812, tcd (ppm/C)=4.4367, tcd2 (10
-9/ C
2)=-22.03, loss_s (dB/ λ)=0.0001331, loss_o (dB/ λ)=7.50 * 10
-6
Like this, the single crystal quartz substrate on this SAW device has loss and the high coupling coefficient lower than the SAW device of correlation technique.Though pfa and tcd value are slightly poorer than the value of the SAW device of correlation technique, they can not have big influence to performance.
Yet,, therefore adopt the near-optimization value usually owing to satisfy very difficulty of the needed optimal value of all parameters.The optimum range of Eulerian angles is φ=0 °, 17 °≤θ≤23 ° and 10 °≤ψ≤20 °.
＜embodiment 3 〉
Figure 14 is illustrated in the lithium tantalate substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, and coupling coefficient (K when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 °
2) and first-order lag temperature coefficient (tcd) between relation; Figure 15 is illustrated in the lithium tantalate substrate according to the SAW device of one embodiment of the invention, when Eulerian angles φ=0 °, the relation when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 ° between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2).
Shown in Figure 14 and 15, the maximum of coupling coefficient that depends on single order and second order delay temperature coefficient is during corresponding to θ=79 °.
According to the parameter value that adopts Eulerian angles (0 °, 79 ° and 90 °) from simulation, to obtain, Vs (km/s)=3.247331, Vo (km/s)=3.26343, K2 (%)=0.9867, pfa (deg)=0, tcd (ppm/C)=32.833, tcd2 (10
-9/ C
2)=-19.419, and γ=-0.4199.
In order to use the SAW device as temperature sensor and improve its applicability and practicality, coupling coefficient and first-order lag temperature coefficient should be big, and second order delay temperature coefficient and pfa (can flow the angle) should be near zero, and the γ value should approach-1.
Figure 16 is illustrated in the lithium tantalate substrate according to the SAW device of one embodiment of the invention, and when Eulerian angles φ=0 °, when θ=79 ° and ψ=90 °, frequency is to dependence on temperature.
Yet the monocrystalline lithium tantalate substrate on the SAW device does not have required optimized parameter value, therefore uses the near-optimization value usually.The Eulerian angles optimum range is-5 °≤φ≤+ 5 °, 70 °≤θ≤90 ° and 85 °≤ψ≤95 °.
Figure 17 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 °, the relation when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 ° between coupling coefficient (K2) and first-order lag temperature coefficient (tcd); Figure 18 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, when Eulerian angles φ=0 °, the relation when θ=θ ° (θ ° of finger is arbitrarily angled) and ψ=90 ° between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2).
Shown in Figure 17 and 18, the maximum of coupling coefficient that depends on single order and second order delay temperature coefficient is during corresponding to θ=168 °.
According to the parameter value that adopts Eulerian angles (0 °, 168 ° and 90 °) from simulation, to obtain, Vs (km/s)=3.360127, Vo (km/s)=3.383842, K2 (%)=1.402, pfa (deg)=0, tcd (ppm/C)=75.33, tcd2 (10
-9/ C
2)=0.78342, and γ=-1.113.
In order to use the SAW device as temperature sensor and improve its applicability and practicality, coupling coefficient and first-order lag temperature coefficient should be big, and second order delay temperature coefficient and pfa (can flow the angle) should be near zero, and the γ value should approach-1.
Figure 19 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, and when Eulerian angles φ=0 °, when θ=168 ° and ψ=90 °, frequency is to dependence on temperature.
Yet the monocrystalline lithium tantalate substrate on the SAW device of this embodiment does not have required optimized parameter value, therefore uses the near-optimization value usually.The Eulerian angles optimum range is-5 °≤φ≤+ 5 °, 160 °≤θ≤180 ° and 85 °≤ψ≤95 °.
Figure 20 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the present invention, when Eulerian angles φ=0 °, the relation when θ=30 ° and ψ=ψ ° (ψ ° of finger is arbitrarily angled) between coupling coefficient (K2) and first-order lag temperature coefficient (tcd); Figure 21 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the present invention, when Eulerian angles φ=0 °, the relation when θ=30 ° and ψ=ψ ° (ψ ° of finger is arbitrarily angled) between open surface phase velocity (Vo) and second order delay temperature coefficient (tcd2).
Shown in Figure 20 and 21, maximum coupling coefficient is during corresponding to ψ=16.5 °.
Figure 22 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the present invention, when Eulerian angles φ=0 °, and the isogram of pfa when θ=30 ° and ψ=ψ ° (ψ ° of finger is arbitrarily angled).
As shown in figure 22, when ψ=16.5 °, in φ=0 ° and θ=30 ° locate the pfa value and approach zero.
According to the parameter value that adopts Eulerian angles (0 °, 30 ° and 16.5 °) from simulation, to obtain, Vs (km/s)=3.387511, Vo (km/s)=3.418243, K2 (%)=1.789, pfa (deg)=0.1585, tcd (ppm/C)=70.869, tcd2 (10
-9/ C
2)=-13.278, and γ=1.873.
In order to use the SAW device as temperature sensor and improve its applicability and practicality, coupling coefficient and first-order lag temperature coefficient should be big, and second order delay temperature coefficient and pfa (can flow the angle) should be near zero, and the γ value should approach-1.
Figure 23 is illustrated in the lithium tantalate substrate according to the SAW device of another embodiment of the invention, and when Eulerian angles φ=0 °, when θ=30 ° and ψ=16.5 °, frequency is to dependence on temperature.
Yet the monocrystalline lithium tantalate substrate on this SAW device does not have required optimized parameter value, therefore uses the near-optimization value usually.The Eulerian angles optimum range is-5 °≤φ≤+ 5 °, 20 °≤θ≤40 ° and 5 °≤ψ≤25 °.
Below will explain Eulerian angles.
Figure 24 is the figure that explains the Eulerian angles of correlation technique.
As shown in the figure, suppose that the direction of propagation of SAW is parallel to X ' axle, and the isopleth of wafer (substrate) is drawn on the face parallel with Z ' axle.Like this, the direction of ripple propagation just is parallel to a limit of the wafer vertical with X ' axle.
Suppose that correction axle X, Y and Z are consistent with wafer profile axle X ', Y ' and Z ' respectively.When not rotating, wafer is considered to the Z cutting, and promptly wafer cuts along the polished surface perpendicular to the Z axle, and SAW propagates along the direction that is parallel to X-axis.
Along with any follow-up rotation, wafer axis X ', Y ' and Z ' also rotate, and hypothesis is revised axle X, Y and Z fixes.For example, suppose that (ψ)=(0 °, 135 °, 28 °), this situation approaches the centre of specified scope to Eulerian angles for φ, θ.Then, carry out rotating the first time φ around Z ' axle (X ' to Y ').Because φ=0 °, so not rotation in this case.
Secondly rotation around " newly " X ' axle takes place.Wherein, new axle always combines with wafer, and to rotate θ arbitrarily around wafer axis, wherein wafer axis comprises all rotations in the past.
At last, take place to be 28 ° at this around Z ' axle (X ' to Y ') rotation ψ.Wafer axis X ', Y ' and Z ' are defined as relative orientation Eulerian angles φ, θ, ψ.
Therefore, in the orientation group that proposes, always can find similar value for other two angles for any orientation.And, preferably with these two values in conjunction with to improve parameter character.
Industrial usability
In a word, by using the monocrystalline lanthanum silicate gallium (La that is called langasite of SAW device
3Ga
5SiO
14) optimum SAW orientation, this single crystalline substrate and cutting method thereof can advantageously be used for obtaining optimized parameter character.
Can also obtain the optimum parameters characteristic by the optimum Cutting orientation of using the single crystal quartz substrate, wherein the single crystal quartz substrate is one of single crystalline substrate that is used for by the SAW device.
By using the optimum Cutting orientation to utilize lithium tantalate (LiTaO
3), can obtain identical result, wherein lithium tantalate is one of single crystalline substrate that is used for by the SAW device.
And for example, single crystalline substrate is used in the SAW filter and uses in the transducer of SAW.
When illustrating with reference to specific preferred embodiment wherein and describing when of the present invention, should be appreciated that: do not deviate under the condition of essence of the present invention that claims limit and scope, those skilled in the art can make various changes in form and details.
Aforesaid embodiment and advantage only are exemplary, and unrestricted the present invention.This instruction can be applied to other device easily.Specification of the present invention is illustrative, and the scope of unrestricted claim.To those skilled in the art, many replacements, modifications and variations all will be conspicuous.In the claims, the clause that method adds function is intended to comprise the structure of the cited function of execution described herein, not only comprises equivalent structures, but also comprises equivalent structure.
Claims (3)
1. single crystalline substrate comprises:
Lithium tantalate substrate with SAW propagation surface; With
On described surface, has the input and output IDT that is used for launching and/or detecting the electrode of surface acoustic wave, wherein surperficial direction of wave travel is parallel to X ' axle, and this substrate also has perpendicular to the Z ' on described surface axle and is parallel to this surface and perpendicular to the Y ' axle of X ' axle, described lithium tantalate substrate has by revising axle X, the crystal orientation that Y and Z limited, axle X ', the relative orientation of Y ' and Z ' is by Eulerian angles φ, θ and ψ limit, wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 70 °≤θ≤90 °, the scope of ψ is 85 °≤ψ≤95 °, or wherein the scope of φ is-5 °≤φ≤+ 5 °, the scope of θ is 20 °≤θ≤40 °, the scope of ψ is 5 °≤ψ≤25 °, or φ=0 ° wherein, θ=168 ° and ψ=90 °.
2. the single crystalline substrate of claim 1, wherein the optimum Eulerian angles of lithium tantalate are φ=0 °, θ=79 ° and ψ=90 °.
3. the single crystalline substrate of claim 1, wherein the optimum Eulerian angles of lithium tantalate are φ=0 °, θ=30 ° and ψ=16.5 °.
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| KR1020020036007 | 2002-06-26 | ||
| KR10-2002-0036007A KR100450903B1 (en) | 2002-06-26 | 2002-06-26 | Optimal cut psaw device and the method |
| KR1020020047000 | 2002-08-09 | ||
| KR1020020047002 | 2002-08-09 | ||
| KR1020020046999 | 2002-08-09 | ||
| KR1020020047001 | 2002-08-09 |
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| CN115276594A (en) * | 2022-06-29 | 2022-11-01 | 上海馨欧集成微电有限公司 | Longitudinal leakage surface acoustic wave resonator and filter |
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