CN101324537B - Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system - Google Patents
Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system Download PDFInfo
- Publication number
- CN101324537B CN101324537B CN2008101256359A CN200810125635A CN101324537B CN 101324537 B CN101324537 B CN 101324537B CN 2008101256359 A CN2008101256359 A CN 2008101256359A CN 200810125635 A CN200810125635 A CN 200810125635A CN 101324537 B CN101324537 B CN 101324537B
- Authority
- CN
- China
- Prior art keywords
- reflection wave
- concentric cable
- generator
- treating apparatus
- detection system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/58—Testing of lines, cables or conductors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R11/00—Electromechanical arrangements for measuring time integral of electric power or current, e.g. of consumption
- G01R11/02—Constructional details
- G01R11/25—Arrangements for indicating or signalling faults
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/04—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant in circuits having distributed constants, e.g. having very long conductors or involving high frequencies
- G01R27/06—Measuring reflection coefficients; Measuring standing-wave ratio
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/08—Locating faults in cables, transmission lines, or networks
- G01R31/081—Locating faults in cables, transmission lines, or networks according to type of conductors
- G01R31/083—Locating faults in cables, transmission lines, or networks according to type of conductors in cables, e.g. underground
Abstract
The invention relates to an abnormal detection system for coaxial cable, an abnormal detection method thereof, and processing equipment with the abnormal detection system. The invention provides the abnormal detection system for coaxial cable, which is capable of detecting minimal abnormity such as bucking or crack without stopping the processing equipment. The abnormal detection system comprises: the coaxial cable, which one end is connected with the output of a RF generator, and which the other end is connected with the input of an adapter; a first reflection wave detecting unit for detecting the reflection wave R output from the RF generator; a second reflection wave detecting unit for detecting the reflection wave r input into the adapter of the coaxial cable; and a detector for comparing the reflection wave R with the reflection wave r, when R>r, and the difference between the reflection wave R and the reflection wave r exceeds a specified value, performing the detection of the abnormity in the coaxial cable.
Description
Technical field
The present invention relates to the abnormality detection system and the method for detecting abnormality thereof of the concentric cable that detects unusually of concentric cable and the treating apparatus that possesses this abnormality detection system.
Background technology
In the manufacturing of flat-panel monitor or semiconductor equipment, there is the operation of the treating apparatus of using plasma etch processes or the processing of CVD film forming etc., use RF power.Produce RF power through the RF generator, the RF power of generation is imported into the concentric cable as supply lines, after the adaptation that the impedance through making concentric cable and the impedance phase of treating apparatus mate, supplies to treating apparatus.
Employed treating apparatus is big in the manufacturing of flat-panel monitor or semiconductor equipment, and is also far away to the distance of RF generator from the adaptation that is arranged on the treating apparatus main body.Particularly, the length of the concentric cable of employed treating apparatus arrives 30m for 20m mostly in the manufacturing of flat-panel monitor.If the length of concentric cable increases, then when the device in factory was constructed, when concentric cable is moved etc., concentric cable was inadvertently by bending, and the inner conductor in the concentric cable can break.If plasma just can't just can not take place to treating apparatus supply high frequency electric power in the inner conductor broken string in treating apparatus.
The concentric cable of inner conductor broken string has the so-called phenomenon that departs from the regionalism impedance of broken string.When utilizing this phenomenon, use the external measurement machine, when for example network analyzer is measured the characteristic impedance of concentric cable, can detect and whether break, and the place of broken string.
In this mensuration with in detecting, concentric cable is unloaded from RF generator and adaptation, an end of concentric cable is connected with network analyzer, the other end is passed through terminal resistance ground connection.If the characteristic impedance of concentric cable is 50 Ω, then terminal resistance is made as 50 Ω the characteristic impedance of concentric cable is measured.At this moment, can see that sometimes characteristic impedance becomes big place since 50 Ω.Such concentric cable is that broken string has taken place in inner conductor, and characteristic impedance becomes the big place of place into breaking.
In the mensuration of using network analyzer with in detecting,, can't detect then that this is unusual if not unusual state fully such as the inner conductor broken string that becomes concentric cable.
The bending of concentric cable makes inner conductor not reach such the buckling or the crackle generation of complete ERST sometimes.Produced at inner conductor and to have buckled or the concentric cable of crackle, different with the concentric cable that is in complete ERST, can with normal concentric cable likewise to treating apparatus supply high frequency electric power.That is, in treating apparatus, normally produce plasma.Therefore, produced at inner conductor and to have buckled or the concentric cable of crackle, can't make a distinction with normal concentric cable.
Buckle or crackle possibly be minimum unusual, but buckle or crackle must be abnormity point for concentric cable.If continue to use concentric cable, then there is the possibility that finally makes concentric cable generation undesirable condition with abnormity point.
But, buckle or crackle can not make the characteristic impedance of concentric cable become big.Therefore, be difficult to detect with network analyzer and buckle or crackle.And, in the mensuration of using the external measurement machine as network analyzer and detection, must concentric cable be unloaded from RF generator and adaptation, and change into the external measurement machine and being connected.Therefore, have to make treating apparatus to stop.
Summary of the invention
The object of the present invention is to provide a kind of can the detection to buckle or that crackle is such is minimum unusual, and can not stop treating apparatus and just can detect abnormality detection system and this method for detecting abnormality of minimum unusual concentric cable and the treating apparatus that possesses this abnormality detection system.
In order to solve above-mentioned problem, the abnormality detection system of the concentric cable of first mode of the present invention comprises: concentric cable, and an end is connected with the output of RF generator, and the other end is connected with the input of adaptation; The first reflection wave detecting unit is used for detecting the reflection wave R of output of the above-mentioned RF generator of above-mentioned concentric cable; The second reflection wave detecting unit is used for detecting the reflection wave r of input of the above-mentioned adaptation of above-mentioned concentric cable; And detecting device; More above-mentioned reflection wave R and above-mentioned reflection wave r; When the relation of above-mentioned reflection wave R and above-mentioned reflection wave r is R＞r, and above-mentioned reflection wave R and above-mentioned reflection wave r poor (difference) is when surpassing setting, to unusual detection the in the above-mentioned concentric cable.
In addition; The method for detecting abnormality of the concentric cable of second mode of the present invention is connected an end of concentric cable with the output of RF generator, the other end of above-mentioned concentric cable is connected with the input of adaptation; Detect the reflection wave R in the output of above-mentioned RF generator of above-mentioned concentric cable; Detect the reflection wave r in the input of above-mentioned adaptation of above-mentioned concentric cable, more above-mentioned reflection wave R and above-mentioned reflection wave r, and when the relation of above-mentioned reflection wave R and above-mentioned reflection wave r be R＞r; When the difference of above-mentioned reflection wave R and above-mentioned reflection wave r surpasses setting, to unusual detection the in the above-mentioned concentric cable.
In addition, possess the treating apparatus of abnormality detection system of the concentric cable of Third Way of the present invention, comprising: the RF generator that produces RF power; Implement the treating apparatus of processing to being processed matrix; That one end is connected with the output of above-mentioned RF generator, as the concentric cable that will supply to the supply lines of above-mentioned treating apparatus from the RF power of above-mentioned RF generator; The adaptation that input is connected with the other end of concentric cable, the impedance phase of output impedance that be connected, that make above-mentioned concentric cable and above-mentioned treating apparatus with above-mentioned treating apparatus matees; Control the controller of above-mentioned adaptation; Detect the first reflection wave detecting unit of the reflection wave R in the output of above-mentioned RF generator of above-mentioned concentric cable; Detect the second reflection wave detecting unit of the reflection wave r in the input of above-mentioned adaptation of above-mentioned concentric cable; With more above-mentioned reflection wave R and above-mentioned reflection wave r, when the relation of above-mentioned reflection wave R and above-mentioned reflection wave r is R＞r, and the difference of above-mentioned reflection wave R and above-mentioned reflection wave r is when surpassing setting, to the unusual detecting device that detects in the above-mentioned concentric cable.
According to the present invention; Can provide a kind of can the detection to buckle or that crackle is such is minimum unusual, and the treating apparatus that can not stop abnormality detection system that treating apparatus just detecting minimum unusual concentric cable and this method for detecting abnormality and possess this abnormality detection system.
Description of drawings
Fig. 1 is the structural drawing of an example of treating apparatus of the abnormality detection system of the expression concentric cable that possesses an embodiment of the present invention.
Fig. 2 A is the reflection wave R of expression concentric cable 3 during for normal condition and the synoptic diagram of the relation of reflection wave r, and Fig. 2 B is the synoptic diagram that there is the relation of reflection wave R and reflection wave r when unusual in the inner conductor of representing concentric cable 3.
Fig. 3 is the process flow diagram of an example of the sequence of operation of expression abnormality detection system 100.
Fig. 4 is the stereographic map of an example of expression concentric cable 3.
Fig. 5 A is the sectional view of expression concentric cable 3 ' bending state, and Fig. 5 B is the buckle sectional view of 32 state of the concentric cable 3 that is illustrated in bending ' middle.
Symbol description
The 1RF generator
2 treating apparatus
3,3 ' concentric cable
4 adaptations
5 controllers
6 detecting devices
8 operating means
10 warning horns
The output of 11RF generator
12 standing-wave ratio (SWR)s detect substrate
31 inner conductors
32 places of buckling
The input of 41 adaptations
The output of 42 adaptations
43 standing-wave ratio (SWR)s detect substrate
Embodiment
Below, with reference to accompanying drawing an embodiment of the present invention is specified.
Fig. 1 be the expression possess an embodiment of the present invention concentric cable abnormality detection system treating apparatus one the example structural drawing.
As shown in Figure 1, the treating apparatus of abnormality detection system that possesses the concentric cable of an embodiment comprises: the RF generator 1 that produces RF power; Implement the treating apparatus 2 of processing to being processed matrix; As the concentric cable 3 that will supply to the supply lines of treating apparatus 2 from the RF power of RF generator 1; Make the adaptation 4 of impedance phase coupling of impedance and the treating apparatus 2 of concentric cable 3; Control the controller 5 of this adaptation 4; With to the unusual detecting device that detects 6 in this concentric cable.
As the example of treating apparatus 2, can enumerate the plasma-etching apparatus that uses in the manufacturing of flat-panel monitor or semiconductor equipment or plasma CVD equipment etc.In Fig. 1, represent flat-panel monitor (FPD) plasma-etching apparatus as an example.FPD plasma dry Etaching device is for example being removed as the film on the glass substrate that is processed matrix 21, and utilizes etching to form middle uses the such as operation of circuit pattern.RF power supplies to and is processed matrix 21, is in this example to supply to carry to be equipped with carrying of glass substrate and to put platform 22.From the spray head 23 that is arranged on the top that is processed matrix 21 internal feed etching gas to chamber 24.Spray head 23 is grounded, and works as carrying the opposite electrode of putting platform 22.
One end of concentric cable 3 is connected with the output 11 of RF generator 1, the other end is connected with the input 41 of adaptation 4.The output 42 of adaptation 4 is connected with treating apparatus 2.
Reflection wave r in the input 41 of the reflection wave R in the output 11 of the RF generator 1 of 6 pairs of concentric cable 3 of detecting device and the adaptation 4 of identical concentric cable 3 compares.Detecting device 6 detects: the relation of reflection wave R and reflecting part r is R＞r, and when the difference of reflection wave R and reflection wave r surpasses setting, in concentric cable 3, takes place unusual.
For reflection wave R and reflection wave r; The reflection wave detecting unit that detects them also can be set in addition; Use the detecting unit that is provided with in addition that they are detected; In this example, be to utilize the standing-wave ratio (SWR) that possesses in RF generator 1 and the adaptation 4 to detect substrate (VSWR (VoltageStanding Wave Ratio: detected reflection wave voltage standing wave ratio (VSWR)) substrate).That is, in this example, reflection wave R utilizes the standing-wave ratio (SWR) that possesses in the RF generator 1 to detect substrate (VSWR substrate) 12 detected reflection wave R, and reflection wave r utilizes the standing-wave ratio (SWR) that possesses in the adaptation 4 to detect substrate (VSWR substrate) 43 detected reflection wave r.
In addition, setting example is described below.
At concentric cable 3 is under the normal condition, and the relation of reflection wave R and reflection wave r is " R ≒ r ".The difference of reflection wave R and reflection wave r is owing to the length and the high-frequency electrical intensity of force of concentric cable 3 change, but is approximately less than 100W.
Relatively, in the inner conductor of concentric cable 3, exist under the unusual situation, the relation of reflection wave R and reflection wave r becomes " R＞r ".And the difference of reflection wave R and reflection wave r is owing to the length and the high-frequency electrical intensity of force of concentric cable 3 change, but it is above to the 200W to expand about 100W to.Therefore, setting is made as below the above 200W of 100W.For example, setting is being made as under the situation of 101W, detecting device 6 detects: the relation of reflection wave R and reflection wave r becomes R＞r, when the difference of reflection wave R and reflection wave r is more than the 101W, when perhaps surpassing 101W, in concentric cable 3, takes place unusual.
Below expression is when the inner conductor of concentric cable 3 exists when unusual, and the relation of reflection wave R and reflection wave r becomes " R＞r ", and the difference of reflection wave R and reflection wave r expands a reason more than the 100W to.
Fig. 2 A is the synoptic diagram of the relation of reflection wave R and the reflection wave r of expression concentric cable 3 during for normal condition, and Fig. 2 B representes to exist in the inner conductor of concentric cable 3 synoptic diagram of the relation of reflection wave R and reflection wave r when unusual.
Shown in Fig. 2 A, when concentric cable 3 is normal condition, roughly do not done to be input to the input 41 of adaptation 4 from the RF power of RF generator 1 with changing.At this moment, at the part generation reflection wave r of input 41, but this reflection wave r does not roughly do to arrive the output 11 of RF generator 1 with changing yet.Therefore, the reflection wave r in the input of reflection wave R in the output 11 of RF generator 1 and adaptation 4 about equally.That is to say that the standing-wave ratio (SWR) of RF generator 1 side detects substrate (VSWR substrate) 12 detected reflection wave R, the relation that detects substrate 43 detected reflection wave r with the standing-wave ratio (SWR) of adaptation 4 sides is " R ≒ r ".
Relatively, when the inner conductor of concentric cable 3 exists when unusual, shown in Fig. 2 B, from the part of the RF power of RF generator 1 in 7 reflections of unusual place.Therefore, the RF power that is input to the input 41 of adaptation 4 reduces with normal compared.Consequently, reflection wave r also reduces down than normal state.
And, arrive at reflection wave r on the basis of output 11 of RF generator 1, also arrive the output 11 of RF generator 1 at the reflection wave r ' of unusual place 7 reflections.Consequently, the reflection wave R in the output 11 of RF generator 1 compares increase with reflection wave r.Therefore; The standing-wave ratio (SWR) of RF generator 1 side detects substrate (VSWR substrate) 12 detected reflection wave R; The relation that detects substrate 43 detected reflection wave r with the standing-wave ratio (SWR) of adaptation 4 sides becomes " R＞r ", and the difference of reflection wave R and reflection wave r also expands to for example more than the 100W.
So, in this embodiment, utilize the relation shown in Fig. 2 A and Fig. 2 B, detect and in the inner conductor of concentric cable 3, whether take place unusually.
In addition, what in inner conductor, produce is minimum unusual, even for example by buckling or crackle also causes the reflex at the unusual place 7 shown in Fig. 2 B, even therefore buckle or minimum also can detecting unusually that crackle is such.
When detecting through detecting device 4 when unusual, RF generator 1 and treating apparatus 2 are stopped, changing concentric cable 3.Also can RF generator 1 and treating apparatus 2 be stopped according to the direct command that comes self-detector 6; For example; On the display 81 of the operating means 8 of operational processes device 2, show " unusual generation "; Warning horn 10 ring is moved report " unusual generation " person's " unusual generation " that comes the notifying operation, RF generator 1 and treating apparatus 2 are stopped through operator self.
The demonstration of above-mentioned " unusual generation ", the transmitting messages as required to adopt of above-mentioned " unusual generation " get final product, when adopting, can only adopt one of them, also can both's employing.
In addition, this routine detecting device 6, the function of additional detector 6 on the controller 5 of control adaptation 4, and detecting device 6 is built in the controller 5, but detecting device 6 for example also can be used as the external machine of controller 5.
In device shown in Figure 1; The part that plays a role as the abnormality detection system 100 of concentric cable for as the lower part: concentric cable 3, the first reflection wave detecting unit (being standing-wave ratio (SWR) detection substrate (VSWR substrate) 12 in this example) that the reflection wave R in the output 11 of the RF generator 1 of concentric cable 3 is detected, the second reflection wave detecting unit (being standing-wave ratio (SWR) detection substrate (VSWR substrate) 43 in this example) that the reflection wave r in the input 41 of the adaptation 4 of concentric cable 3 is detected and reflection wave R and reflection wave r compared; When the relation of reflection wave R and reflection wave r is R＞r; And when the difference of reflection wave R and reflection wave r surpasses setting, to the unusual detecting device that detects 6 in the concentric cable 3.
In such abnormality detection system 100, can install as required aforesaid demonstration " unusual generation " display 81, or the report " unusual generation " warning horn 10.
Then, an example to the sequence of operation of abnormality detection system 100 describes.
Fig. 3 is the process flow diagram of an example of the sequence of operation of expression abnormality detection system 100.
At first, set the time delay (ST.1) of opening beginning from RF generator 1.
This time delay is for being opened to the stand-by period that the RF power supplied with to adaptation 4 becomes stable from the RF generator.Be 10 seconds if give an example time delay along with the length of concentric cable 3 or high-frequency electrical intensity of force and change.
Then, set the poor of reflection wave R and reflection wave r, that is, set setting (ST.2).
Setting, as stated, along with the length of concentric cable 3 or high-frequency electrical intensity of force and change, if give an example to below the above 200W of 100W.
Then, set detection time (ST.3).
Do detection time, and reflection wave R and reflection wave r are compared, and the relation of reflection wave R and reflection wave r is R＞r, and whether the difference of keeping watch on reflection wave R and reflection wave r is above time of setting.This detection time is also along with the length of concentric cable 3 or high-frequency electrical intensity of force and change, and is more than 5 seconds below 10 seconds if give an example.
Through through such order ST.1～ST.3, in abnormality detection system 100, be provided with the detection data of time delay, setting and detection time.These data for example from input block (for example keyboard) 82 inputs of operating means shown in Figure 18, are arranged in the detecting device 6 of abnormality detection system 100.
In addition, the setting that detects data is not limited to order shown in Figure 3 in proper order, can be order arbitrarily.
In addition, in controller 5 or scanister 8, as long as not change of data, then implementing once, order ST.1～ST.3 gets final product through the detection data storage that will be set.
After the detection data are set, open RF generator 1 (ST.4), to treating apparatus 2 supply high frequency electric power; Begin processing (ST.5) to being processed matrix 21, in addition, after opening RF generator 1; Through after time delay, begin abnormality detection (ST.6) to concentric cable 3.In this embodiment, to the abnormality detection of concentric cable 3 and implementation that the processing that is processed matrix 21 is walked abreast.
So; The abnormality detection system 100 of this embodiment; Can be with carrying out to the abnormality detection of concentric cable 3 and to the processing that is processed matrix 21 is parallel; Therefore not only can detect and buckle and such minimum unusual of crackle, and can not stop treating apparatus 2 just to this minimum detecting unusually.And, because will be to the abnormality detection of concentric cable 3 and implementation that the processing that is processed matrix 21 is walked abreast, so also can not hinder the throughput rate of treating apparatus 2.
In addition, abnormality detection system 100 during to the processing that is processed matrix 21, can detect repeatedly it is turned round often, also can be off and on, for example whenever make its running at a distance from a few minutes.
Then, an example about concentric cable 3 describes.
Fig. 4 is the stereographic map of an example of expression concentric cable 3.
A kind of as the concentric cable 3 that uses on plasma dry Etaching device that in the manufacturing of flat-panel monitor or semiconductor equipment, uses or the plasma CVD equipment; In order to realize lightweight, have with inner conductor 31 be made as the concentric cable 3 of hollow form '.Fig. 4 represent this concentric cable 3 ' an example.As the conductor of hollow form, use copper pipe, aluminum pipe etc.
But, with inner conductor 31 be made as the concentric cable 3 of hollow form ', when that kind shown in Fig. 5 A terrifically during bending, the place after bending such shown in Fig. 5 B causes easily and buckles 32.If cause and buckle 32, then almost can not consider to return to original state, therefore as concentric cable 3 ' in abnormity point, will be forever remaining probably.
Such inner conductor 31 be placed on be easy to produce the concentric cable 3 of buckling ' in; If use the abnormality detection system 100 of this embodiment; Therefore then can detect whether buckle 32 simply, even be easy to produce the concentric cable 3 of buckling ' also can use safely.
More than, describe the present invention through an embodiment, but the present invention is not limited to an above-mentioned embodiment, can carry out various distortion.In addition, as embodiment of the present invention, an above-mentioned embodiment is not unique embodiment yet.
For example; In an above-mentioned embodiment; As treating apparatus 2; Though the plasma dry Etaching device or the plasma CVD equipment that use in the manufacturing to flat-panel monitor or semiconductor equipment are illustrated,, just be not limited to said apparatus so long as use the treating apparatus of RF power.
In addition, an above-mentioned embodiment can carry out various distortion in the scope that does not break away from purport of the present invention.
Claims (10)
1. the abnormality detection system of a concentric cable is characterized in that, comprising:
Concentric cable, the one of which end is connected with the output of RF generator, and the other end is connected with the input of adaptation;
The first reflection wave detecting unit detects the reflection wave R in the output of said RF generator of said concentric cable;
The second reflection wave detecting unit detects the reflection wave r in the input of said adaptation of said concentric cable; With
Detecting device, more said reflection wave R and said reflection wave r are when the relation of said reflection wave R and said reflection wave r is R＞r; And when the difference of said reflection wave R and said reflection wave r surpasses setting; To unusual detection the in the said concentric cable, wherein
Said setting is below the above 200W of 100W.
2. according to the abnormality detection system of claim item 1 described concentric cable, it is characterized in that:
The said first reflection wave detecting unit is that the standing-wave ratio (SWR) that possesses in the said RF generator detects substrate,
The said second reflection wave detecting unit is that the standing-wave ratio (SWR) that possesses in the said adaptation detects substrate,
Said reflection wave R is utilized in the standing-wave ratio (SWR) that possesses in the said RF generator and detects the detected reflection wave of substrate, and said reflection wave r is utilized in the standing-wave ratio (SWR) that possesses in the said adaptation and detects the detected reflection wave of substrate.
3. according to the abnormality detection system of claim item 1 or 2 described concentric cable, it is characterized in that, comprising:
In display and the alarm at least one when said detecting device detects the unusual generation in the said concentric cable, shown this unusual generation or reported this unusual generation by alarm by display.
4. according to the abnormality detection system of claim item 1 or 2 described concentric cable, it is characterized in that:
Said concentric cable uses the conductor of hollow form as inner conductor.
5. according to the abnormality detection system of claim item 1 or 2 described concentric cable, it is characterized in that:
The abnormality detection of said concentric cable is with parallel implementation of processing of being carried out being processed matrix by the treating apparatus that uses from the RF power of said RF generator.
6. the method for detecting abnormality of a concentric cable is characterized in that:
One end of concentric cable is connected with the output of RF generator,
The other end of said concentric cable is connected with the input of adaptation,
Reflection wave R in the output of the said RF generator of said concentric cable detects,
Reflection wave r in the input of the said adaptation of said concentric cable detects,
Said reflection wave R and said reflection wave r are compared, and when the relation of said reflection wave R and said reflection wave r is R＞r, and the difference of said reflection wave R and said reflection wave r is when surpassing setting, to unusual detection the in the said concentric cable, wherein,
Said setting is below the above 200W of 100W.
7. the method for detecting abnormality of concentric cable according to claim 6 is characterized in that:
The abnormality detection of said concentric cable is with parallel implementation of processing of being carried out being processed matrix by the treating apparatus that uses from the RF power of said RF generator.
8. the treating apparatus that handled object is implemented to handle is characterized in that: the abnormality detection system that possesses concentric cable
The abnormality detection system of said concentric cable comprises:
Produce the RF generator of RF power;
That one end is connected with the output of said RF generator, as the concentric cable that will supply to the supply lines of said treating apparatus from the RF power of said RF generator;
The adaptation that input is connected with the other end of said concentric cable, the impedance phase of output impedance that be connected, that make said concentric cable and said treating apparatus with said treating apparatus matees;
Control the controller of said adaptation;
Detect the first reflection wave detecting unit of the reflection wave R in the output of said RF generator of said concentric cable;
Detect the second reflection wave detecting unit of the reflection wave r in the input of said adaptation of said concentric cable; With
More said reflection wave R and said reflection wave r; When the relation of said reflection wave R and said reflection wave r is R＞r, and the difference of said reflection wave R and said reflection wave r is when surpassing setting, to the unusual detecting device that detects in the said concentric cable; Wherein
Said setting is below the above 200W of 100W.
9. treating apparatus according to claim 8 is characterized in that:
The abnormality detection of said concentric cable is with parallel implementation of processing of being carried out being processed matrix by the said treating apparatus that uses from the RF power of said RF generator.
10. treating apparatus according to claim 8 is characterized in that:
Said treating apparatus is plasma dry Etaching device or plasma CVD equipment.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007154666 | 2007-06-12 | ||
| JP2007-154666 | 2007-06-12 | ||
| JP2007154666A JP5013979B2 (en) | 2007-06-12 | 2007-06-12 | Coaxial cable anomaly detection system, anomaly detection method thereof, and processing apparatus including the anomaly detection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101324537A CN101324537A (en) | 2008-12-17 |
| CN101324537B true CN101324537B (en) | 2012-05-30 |
Family
ID=40188162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101256359A Expired - Fee Related CN101324537B (en) | 2007-06-12 | 2008-06-12 | Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5013979B2 (en) |
| KR (1) | KR100984941B1 (en) |
| CN (1) | CN101324537B (en) |
| TW (1) | TWI442068B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2676053C1 (en) * | 2017-12-06 | 2018-12-25 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный аграрный университет имени И.Т. Трубилина" | Method for detecting the defect of electric cable |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5210905B2 (en) * | 2009-01-30 | 2013-06-12 | 株式会社日立ハイテクノロジーズ | Plasma processing equipment |
| JP2013088392A (en) * | 2011-10-21 | 2013-05-13 | Hioki Ee Corp | Measuring apparatus |
| CN104296700A (en) * | 2014-09-29 | 2015-01-21 | 成都英博联宇科技有限公司 | Power cable eccentric detecting system |
| US10114061B2 (en) * | 2016-11-28 | 2018-10-30 | Kohler Co. | Output cable measurement |
| DE112022002877T5 (en) * | 2021-06-02 | 2024-03-14 | Sumitomo Electric Industries, Ltd. | Detection device and detection method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6344748B1 (en) * | 2000-02-23 | 2002-02-05 | Lucent Technologies Inc. | Coaxial cable connector testing methods and apparatus |
| CN1818691A (en) * | 2005-11-07 | 2006-08-16 | 北京联合大学 | Cable fault positioning system and method |
| CN1828324A (en) * | 2005-03-05 | 2006-09-06 | 淄博科汇电气有限公司 | Method for promoting testing reliability of cable obstacle |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05268102A (en) * | 1992-03-18 | 1993-10-15 | Fuji Facom Corp | Modem with standing wave ratio detection device |
| JPH08130811A (en) * | 1994-09-05 | 1996-05-21 | Sumitomo Electric Ind Ltd | Method for detecting discontinuity of conductor |
| JP4411282B2 (en) * | 2003-11-27 | 2010-02-10 | 株式会社ダイヘン | High frequency power supply system |
| US7245129B2 (en) | 2005-02-14 | 2007-07-17 | Texas Instruments Incorporated | Apparatus for and method of cable diagnostics utilizing time domain reflectometry |
| JP2007303862A (en) | 2006-05-09 | 2007-11-22 | Alps Electric Co Ltd | Apparatus for detecting connection failure of coaxial cable |
-
2007
- 2007-06-12 JP JP2007154666A patent/JP5013979B2/en not_active Expired - Fee Related
-
2008
- 2008-05-22 KR KR1020080047664A patent/KR100984941B1/en not_active IP Right Cessation
- 2008-06-11 TW TW097121734A patent/TWI442068B/en not_active IP Right Cessation
- 2008-06-12 CN CN2008101256359A patent/CN101324537B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6344748B1 (en) * | 2000-02-23 | 2002-02-05 | Lucent Technologies Inc. | Coaxial cable connector testing methods and apparatus |
| CN1828324A (en) * | 2005-03-05 | 2006-09-06 | 淄博科汇电气有限公司 | Method for promoting testing reliability of cable obstacle |
| CN1818691A (en) * | 2005-11-07 | 2006-08-16 | 北京联合大学 | Cable fault positioning system and method |
Non-Patent Citations (2)
| Title |
|---|
| 杨军.射频同轴电缆故障定位测试系统.《国外电子测量技术》.2003,(第5期),第23-25页. * |
| 金庆光.运用驻波原理分析检测同轴电缆故障点.《电视技术》.1998,(第12期),第78-80页. * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2676053C1 (en) * | 2017-12-06 | 2018-12-25 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный аграрный университет имени И.Т. Трубилина" | Method for detecting the defect of electric cable |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008309492A (en) | 2008-12-25 |
| KR20080109612A (en) | 2008-12-17 |
| CN101324537A (en) | 2008-12-17 |
| TWI442068B (en) | 2014-06-21 |
| KR100984941B1 (en) | 2010-10-01 |
| TW200905215A (en) | 2009-02-01 |
| JP5013979B2 (en) | 2012-08-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101324537B (en) | Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system | |
| CN101389179B (en) | Plasma processing device, plasma processing method | |
| TWI234418B (en) | RF plasma processing method and RF plasma processing apparatus | |
| KR101997330B1 (en) | Plasma processing apparatus and operation method of the same | |
| EP1872295B1 (en) | Arc detection and handling in radio frequency power applications | |
| TWI605513B (en) | Vacuum device, pressure control method, and etching method | |
| KR102518845B1 (en) | Identifying components associated with a fault in a plasma system | |
| WO2014201867A1 (en) | Probe module for detecting contact effect | |
| JP2010276420A (en) | Device and method for detecting partial discharge | |
| TWI821768B (en) | Detection method and detection device for arc in plasma processing chamber | |
| CN108809255A (en) | A kind of photovoltaic generating system DC side arc fault method for comprehensive detection and system | |
| US20060157446A1 (en) | End point detection method for plasma etching of semiconductor wafers with low exposed area | |
| CN103389454A (en) | Startup-and-shutdown test system and method | |
| KR20050007624A (en) | Apparatus for generating inductively coupled plasma having high plasma uniformity, and method of controlling plasma uniformity thereof | |
| JP2004220923A (en) | Abnormal discharge detection device and method, and plasma treatment device comprising the abnormal discharge detection device | |
| JP5210905B2 (en) | Plasma processing equipment | |
| JP2010096571A (en) | Inspection device and inspection method | |
| CN1744406B (en) | On-line integral pluggable signal circuit surge protector | |
| WO2021169596A1 (en) | Radio frequency link working state measurement method, related measurement apparatus, and system | |
| CN104008957A (en) | Substrate compensation etching method | |
| JP2003045846A (en) | Monitoring and controlling method of semiconductor- manufacturing apparatus | |
| US20230352283A1 (en) | System and method for detecting endpoint in plasma processing | |
| CN104392946B (en) | Etching terminal detection method | |
| CN105839073B (en) | Anti-jump electric structure for chemical vapor deposition unit | |
| US20210066931A1 (en) | Integral anti-arcing battery charger hot disconnect system and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20150612 |
|
| EXPY | Termination of patent right or utility model |