CN101318325A - Rotot for industry - Google Patents

Rotot for industry Download PDF

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Publication number
CN101318325A
CN101318325A CNA2008101259111A CN200810125911A CN101318325A CN 101318325 A CN101318325 A CN 101318325A CN A2008101259111 A CNA2008101259111 A CN A2008101259111A CN 200810125911 A CN200810125911 A CN 200810125911A CN 101318325 A CN101318325 A CN 101318325A
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CN
China
Prior art keywords
carrying object
handle part
hand
wafer
horn portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2008101259111A
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Chinese (zh)
Inventor
矢泽隆之
小山淳之介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Priority to CN201510639459.0A priority Critical patent/CN105269552B/en
Publication of CN101318325A publication Critical patent/CN101318325A/en
Pending legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention provides an industrial robot capable of prohibiting impact from a carried object even if a mechanical structure is applied to holding the carried object. The robot (1) comprises: a hand (3A) for loading a wafer (2), and a multi-joint arm section (4) for holding a second arm (6) of the hand (3A). The hand (3A) includes: a holding section (28A) for holding the wafer (2), and a force-applying component applying force to the holding section (28A) in a direction of holding the wafer (2), the second arm (6) includes an eccentric component (31A) which is fixed at a position that is deviated from a rotary center of the hand (3A) and which is abutted against the holding section (28A) before starting carrying the wafer (2) out so as to retract the holding section (28A) from the wafer (2); and along with stretching movement of the multi-joint arm section (4) at the time of carrying the wafer (2) out, the eccentric component (31A) is movable with respect to the holding section (28A) in such a state that the holding section (28A) is enabled to move in the direction of holding the wafer (2), and during deceleration of the stretching movement of the multi-joint arm section (4) at the time of carrying the wafer (2) out, the holding section (28A) begins holding the wafer (2).

Description

Industrial robot
Technical field
The present invention relates to a kind of industrial robot of carrying regulation carrying object.
Background technology
In the past, the carrying object being taken out of and will carry the industrial robot that object moves into to the incorporating section from the incorporating section of taking in the carrying object has obtained widely-used.As this industrial robot, known have a kind of industrial robot (for example with reference to patent documentation 1) that will take out of in the vacuum chamber as the incorporating section and semiconductor wafer is moved into as the semiconductor wafer of carrying object in vacuum chamber.
Patent documentation 1 described industrial robot is assembled in the manufacturing system of semiconductor equipment, this industrial robot from taking out of from the outside preparation pressure-reducing chamber (vacuum transition chamber (Japanese: ロ one De ロ Star Network チ ヤ Application バ one)) that receives semiconductor wafer, and is moved into semiconductor wafer semiconductor wafer to semiconductor wafer being carried out the process chamber (vacuum chamber) that predetermined processing uses.This industrial robot is configured in the transfer chamber (vacuum chamber), transfer chamber be configured in preparation pressure-reducing chamber and process chamber around.
In recent years, in order to enhance productivity, require the speed high speed of industrial robot carrying semiconductor wafer.On the other hand, for semiconductor wafer when the transporting velocity high speed also can not produce dislocation putting on the hand of semiconductor wafer, need on hand, not control semiconductor wafer reliably.At this, what the industrial robot that uses in atmosphere extensively adopted is the method for semiconductor wafer of controlling by vacuum suction, but the industrial robot that is configured in the vacuum chamber can't be controlled semiconductor wafer by vacuum suction.Therefore, in patent documentation 1, the technical scheme that this in response transporting velocity high speed requires has proposed a kind of mechanical clamping device of controlling semiconductor wafer on hand.
The clamping device that proposes in patent documentation 1 comprises: be installed on hand, with the linkage of semiconductor wafer butt; And the action component that is installed on the horn that hand is kept rotationally, linkage is moved.Action component is configured in from the position that the center of rotation of hand departs from.In addition, make the linkage action by relatively rotating between horn and the hand.The clamping device that proposes in patent documentation 1 carries out controlling, discharging of semiconductor wafer by linkage is moved.
Patent documentation 1: the Japan Patent spy opens the 2000-308988 communique
In recent years, semiconductor equipment is just in miniaturization, slimming.Along with miniaturization, the slimming of this semiconductor equipment, semiconductor wafer is also in slimming.Yet the clamping device of the semiconductor wafer that proposes in patent documentation 1 does not take into full account at the semiconductor wafer of controlling slimming.Therefore, when the clamping device of patent documentation 1 described semiconductor wafer is controlled semiconductor wafer, may impact, make semiconductor wafer impaired to semiconductor wafer.
In addition, in the clamping device of the semiconductor wafer that patent documentation 1 is proposed, by relatively rotating between horn and the hand, make the linkage action with being configured in the locational action component that departs from from the center of rotation of hand, thereby carry out controlling, discharging of semiconductor wafer.Therefore, control, discharge the structure complicated that semiconductor wafer is used.
Summary of the invention
Therefore, a kind ofly control the carrying object with frame for movement and also can suppress the industrial robot of impact even the object of the present invention is to provide the carrying object.
Therefore, the object of the present invention is to provide a kind of industrial robot of controlling, discharging that can carry object with simple structure.
In order to solve the problems of the technologies described above, the present invention is that the industrial robot moved into of object to the incorporating section taken out of and carried to a kind of object of carrying from the incorporating section of taking in the carrying object, it is characterized in that, comprising: the hand that loads the carrying object; Have and comprise that the hand that hand is remained on front rotationally keeps the plural horn of horn, the multi-joint horn portion of stretching when the carrying object is come in and gone out with respect to the incorporating section; And the body that multi-joint horn portion is kept rotationally, hand comprises: the handle part that is used for controlling with carrying object butt the carrying object, and towards the force application part of the direction of controlling the carrying object to the handle part application of force, hand keeps horn to comprise eccentric part, this eccentric part is to keep on the horn at hand with respect to the fixed-site that hand keeps the center of rotation of horn to depart from from hand, and before being taken out of beginning from the incorporating section, the carrying object handle part is kept out of the way from the carrying object with the handle part butt, along with the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section, eccentric part so that handle part relatively move with respect to handle part towards the form that moves of direction of controlling the carrying object, the constant speed of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section or in slowing down, handle part begins to control the carrying object by the application of force of force application part.
In industrial machine people of the present invention, eccentric part made handle part keep out of the way from the carrying object before the carrying object is taken out of beginning from the incorporating section with the handle part butt, and along with the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section so that handle part relatively move with respect to handle part towards controlling the form that the direction of carrying object moves.The constant speed of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section or in slowing down, handle part begins to control the carrying object by the application of force of force application part.
Therefore, will carry object when take out of the incorporating section, and can begin the back at the expanding-contracting action of multi-joint horn portion and in the expanding-contracting action of multi-joint horn portion becomes long period till constant speed or the deceleration, utilize eccentric part to control the translational speed of handle part.Therefore, compare, can make handle part control the carrying object towards carrying object butt lentamente with patent documentation 1 described clamping device.Consequently, in industrial machine people of the present invention,, also can suppress impact to the carrying object even control the carrying object with the frame for movement of having used handle part, eccentric part and force application part.
In the present invention, preferably handle part was controlled carrying object by the application of force of force application part at the carrying object before beginning is moved in the incorporating section, along with the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into, eccentric part so that handle part relatively move with respect to handle part from the form that the carrying object direction of keeping out of the way moves, in the acceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into or in the constant speed, handle part begins to keep out of the way from the carrying object.If constitute like this, then can begin in the back long period in the expanding-contracting action of multi-joint horn portion handle part to be kept out of the way in the acceleration or the constant speed of the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into.That is, handle part is kept out of the way more lentamente.Consequently, can suppress to constitute the damage of the part etc. of handle part.
In the present invention, preferably handle part is configured in the base end side that keeps the hand of horn side as hand, and hand has and carry the abutting part of the end butt of object in front.If constitute like this, even then the application of force by force application part begins to control under the situation of carrying object the constant speed of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section or in slowing down, when the acceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section etc., the carrying object the end also can with the abutting part butt, therefore, can suppress to carry the dislocation of object.In addition, even in the acceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into or handle part is begun under the carrying object situation of keeping out of the way, when acceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into etc., the carrying object the end also can with the abutting part butt, therefore, can suppress to carry the dislocation of object.
In the present invention, preferably handle part has and carrying object butt and rotating cylinder.As if constituting like this, on hand, produced dislocation even then when handle part and carrying object butt, carry object, also can under the situation that cause damage can not for the carrying object, will carry object and suitably guide to assigned position.
In the present invention, preferably handle part moves towards the direction linearity of keeping out of the way of controlling direction and keeping out of the way from the carrying object of controlling the carrying object.If constitute like this, the configuration space of handle part is narrowed down, can realize miniaturization, the slimming of hand.
In the present invention, preferably handle part has by towards controlling direction and keeping out of the way two spindle units of direction linearity guiding at least.If constitute like this, then can utilize two spindle units to prevent that the moving direction with handle part from being the rotation of the handle part in axle center.
In the present invention, preferably handle part has the cam part of tubular, and this cam part is formed with cam surface with the eccentric part butt in interior all sides.If constitute like this, handle part is moved towards the direction linearity of keeping out of the way of controlling direction and keeping out of the way from the carrying object of controlling the carrying object.
In order to solve the problems of the technologies described above, the present invention is that the industrial robot moved into of object to the incorporating section taken out of and carried to a kind of object of carrying from the incorporating section of taking in the carrying object, it is characterized in that, comprising: the hand that loads the carrying object; Have and comprise that the hand that hand is remained on front rotationally keeps the plural horn of horn, the multi-joint horn portion of stretching when the carrying object is come in and gone out with respect to the incorporating section; And the body that multi-joint horn portion is kept rotationally, hand comprises: the handle part that is used for controlling with carrying object butt the carrying object, and towards making handle part from the force application part of the carrying object direction of keeping out of the way to the handle part application of force, hand keeps horn to comprise eccentric part, this eccentric part is to keep on the horn at hand with respect to the fixed-site that hand keeps the center of rotation of horn to depart from from hand, and can with the handle part butt, along with the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section, eccentric part so that handle part relatively move with respect to handle part towards the form that moves of direction of controlling the carrying object, handle part was kept out of the way from the carrying object before the carrying object is taken out of beginning from the incorporating section, and began to control the carrying object by the effect with the eccentric part of handle part butt the constant speed of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section or deceleration.
In industrial machine people of the present invention, along with the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section, eccentric part so that handle part relatively move with respect to handle part towards the form that the direction of controlling the carrying object moves.Handle part was kept out of the way from the carrying object before the carrying object is taken out of beginning from the incorporating section, and began to control the carrying object by the effect with the eccentric part of handle part butt the constant speed of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section or deceleration.
Therefore, will carry object when take out of the incorporating section, and can begin the back at the expanding-contracting action of multi-joint horn portion and in the expanding-contracting action to multi-joint horn portion becomes long period till constant speed or the deceleration, utilize eccentric part to control the translational speed of handle part.Therefore, compare, can make handle part control the carrying object with carrying object butt more lentamente with patent documentation 1 described clamping device.Consequently, in industrial machine people of the present invention,, also can suppress impact to the carrying object even control the carrying object with the frame for movement of having used handle part, eccentric part and force application part.
In order to solve the problems of the technologies described above, the present invention is that the industrial robot moved into of object to the incorporating section taken out of and carried to a kind of object of carrying from the incorporating section of taking in the carrying object, it is characterized in that, comprising: the hand that loads the carrying object; Have and comprise that the hand that hand is remained on front rotationally keeps the plural horn of horn, the multi-joint horn portion of stretching when the carrying object is come in and gone out with respect to the incorporating section; And the body that multi-joint horn portion is kept rotationally, hand comprises: be used for controlling the handle part of carrying object with carrying object butt and towards the force application part of the direction that handle part is kept out of the way from the carrying object to the handle part application of force, handle part comprises: the inertia force that produces in the time of can be with the controlling parts and utilize multi-joint horn portion expanding-contracting action of carrying object butt makes controls the weight member that parts move towards the direction with carrying object butt.
In industrial machine people of the present invention, hand comprises: be used for controlling the handle part of carrying object with carrying object butt and towards the force application part of the direction that handle part is kept out of the way from the carrying object to the handle part application of force.Handle part comprises: the inertia force that produces in the time of can be with the controlling parts and utilize multi-joint horn portion expanding-contracting action of carrying object butt makes controls the weight member that parts move towards the direction with carrying object butt.Therefore, availablely control the carrying object, and the available simple structure that is made of force application part discharges the carrying object by controlling the simple structure that parts and weight member constitute.
In the present invention, preferably handle part is configured in the base end side that keeps the hand of horn side as hand, hand has and carries the abutting part of the end butt of object in front, the deceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section, weight member makes controls parts and moves towards the direction with carrying object butt.If constitute like this, then can the deceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section, utilize and control the dislocation that parts prevent to carry object, in addition, the acceleration or constant speed of the expanding-contracting action that will carry the multi-joint horn portion of object when take out of the incorporating section, the end and the abutting part butt of carrying object, therefore, can utilize abutting part to prevent to carry the dislocation of object.
In the present invention, preferably handle part is configured in the base end side that keeps the hand of horn side as hand, hand has and carries the abutting part of the end butt of object in front, in the acceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into, weight member makes controls parts towards moving with the direction of carrying the object butt.If constitute like this, then can in the acceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into, utilize and control the dislocation that parts prevent to carry object, in addition, in the deceleration of the expanding-contracting action that will carry the multi-joint horn portion of object when the incorporating section is moved into, the end and the abutting part butt of carrying object, therefore, can utilize abutting part to prevent to carry the dislocation of object.
In the present invention, preferably hand has limiting part, this limiting part restriction handle part at force application part to the action on the application of force direction of handle part.If constitute like this, then can when keeping out of the way, carry out the location of weight member, the inertia force that produces in the time of can utilizing multi-joint horn portion expanding-contracting action makes reliably controls parts and carrying object butt.
In the present invention, preferably handle part will be controlled parts and weight member binding, and have the rod unit of rotating roughly L shaped shape, control parts and be installed in the distolateral of rod unit, and it is distolateral that weight member is installed in another of rod unit.If constitute like this, then can under the simple structure of having used rod unit, utilize inertia force to make and control parts towards moving with the direction of carrying the object butt.
In the present invention, preferably controlling parts is rotating cylinders.As if constituting like this, on hand, produced dislocation even then when controlling parts, carry object with carrying object butt, also can under the situation that cause damage can not for the carrying object, will carry object and suitably guide to assigned position.
As mentioned above, in industrial machine people of the present invention,, also can suppress impact to the carrying object even control the carrying object with frame for movement.
As mentioned above, in industrial machine people of the present invention, can carry controlling, discharging of object with simple structure.
Description of drawings
Fig. 1 is the side view of the industrial robot of expression the invention process form.
Fig. 2 is the vertical view of expression industrial robot shown in Figure 1, Fig. 2 (A) expression be state after the multi-joint horn portion of first example stretches, Fig. 2 (B) expression be state after the multi-joint horn portion of first example shrinks.
Fig. 3 is the vertical view of schematic configuration that expression is assembled with the semi-conductor manufacturing system of industrial robot shown in Figure 1.
Fig. 4 is the general profile chart that is used to illustrate the Poewr transmission mechanism in multi-joint horn portion shown in Figure 1 and the hand.
Fig. 5 be used to illustrate the flexible state of multi-joint horn portion shown in Figure 1 and hand towards between the figure of relation.
Fig. 6 is the major part of expression hand shown in Figure 1 and the vertical view of eccentric part.
Fig. 7 is used for the cutaway view of the structure of the F portion of key diagram 2 (A) from the side.
Fig. 8 is used for the cutaway view of the structure of the G portion of key diagram 2 (A) from the side.
Fig. 9 is the cutaway view in the H-H cross section of presentation graphs 6.
Figure 10 is the figure that is used to illustrate the action of handle part shown in Figure 6.
Figure 11 be expression with robot shown in Figure 1 carry out the taking out of of wafer, the figure of relation when moving between the rotational angle of the speed of the CD-ROM drive motor of hollow rotating shaft and first horn.
Figure 12 is that the taking out of of wafer of other example of the present invention's first example carried out in expression, the figure of the relation when moving between the rotational angle of the speed of the CD-ROM drive motor of hollow rotating shaft and first horn.
Figure 13 is the figure of handle part that is used to illustrate other example of the present invention's first example.
Figure 14 is the figure of handle part that is used to illustrate other example of the present invention's first example.
Figure 15 is the figure of handle part that is used to illustrate other example of the present invention's first example.
Figure 16 is the figure of handle part that is used to illustrate other example of the present invention's first example.
Figure 17 is the vertical view of expression industrial robot shown in Figure 1, Figure 17 (A) expression be state after the multi-joint horn portion of second example stretches, Figure 17 (B) expression be state after the multi-joint horn portion of second example shrinks.
Figure 18 be used to illustrate the flexible state of multi-joint horn portion shown in Figure 1 and hand towards between the figure of relation.
Figure 19 is the vertical view of the major part of expression hand shown in Figure 1, Figure 19 (A) expression be state after handle part is kept out of the way from wafer, Figure 19 (B) expression be the state that handle part is being controlled wafer.
Figure 20 is the side view of the major part of hand shown in Figure 19.
Figure 21 is the figure of force application part that is used to illustrate other example of the present invention's second example.
Figure 22 is the figure of handle part that is used to illustrate other example of the present invention's second example.
(symbol description)
1 robot (industrial robot)
2 wafers (carrying object)
3A, 3B hand
4 multi-joint horn portions
5 bodies
6 second horns (hand maintenance horn)
10 transition chambers (incorporating section)
11 process chambers (incorporating section)
28A, 28B, 48A, 58A, 68A, 78A handle part
29A, 29B, 49B compression helical spring (force application part)
30 butt parts (abutting part)
The 31A eccentric part
The 31B limiting part
34A, 34B cylinder
35B, 45B weight member
The 36A spindle unit
The 36B rod unit
The 37A cam part
The 37Aa cam surface
39B compression helical spring (force application part)
61A, 79A draft helical spring (force application part)
The CL center of rotation
The specific embodiment
With reference to the accompanying drawings example of the present invention is described.
(first example)
(schematic configuration of industrial robot)
Fig. 1 is the side view of the industrial robot 1 of expression the invention process form.Fig. 2 is the vertical view of expression industrial robot 1 shown in Figure 1, Fig. 2 (A) expression be state after multi-joint horn portion 4 stretches, Fig. 2 (B) expression be state after multi-joint horn portion 4 shrinks.Fig. 3 is the vertical view of schematic configuration that expression is assembled with the semi-conductor manufacturing system 9 of industrial robot shown in Figure 11.Fig. 4 is the general profile chart that is used to illustrate the Poewr transmission mechanism in multi-joint horn portion 4 shown in Figure 1 and the hand 3A.Fig. 5 be used to illustrate the flexible state of multi-joint horn portion 4 shown in Figure 1 and hand 3A towards between the figure of relation.What represent among Fig. 4 is the summary cross section of multi-joint horn portion 4 grades when the E-E direction of Fig. 2 (A) is seen.
The industrial robot 1 of first example (below be called " robot 1 ") is the robot that is used to carry thin discoid semiconductor wafer 2 as the carrying object (below be called " wafer 2 ").As shown in Figure 1 and Figure 2, this robot 1 comprises: the hand 3A of loaded with wafers 2, hand 3A kept rotationally and flexible multi-joint horn portion 4 and the body 5 that multi-joint horn portion 4 is kept rotationally when carrying wafer 2.The multi-joint horn portion 4 of first example is made of second horn 6 and 7 two horns of first horn.
The robot 1 of first example for example is assembled in as shown in Figure 3 the semi-conductor manufacturing system 9 and uses.Particularly, robot 1 is assembled in the semi-conductor manufacturing system 9 and uses, and this semi-conductor manufacturing system 9 comprises: between semi-conductor manufacturing system 9 and external device (ED) (not shown) transition chamber 10 of handing-over wafer 2, wafer 2 is carried out the process chamber 11 of predetermined processing and the transfer chamber 12 that confession robot 1 is configured.
As shown in Figure 3, in semi-conductor manufacturing system 9, a plurality of (in the example shown in Figure 3 being two) transition chambers 10 and a plurality of (in the example shown in Figure 3 being four) process chamber 11 be configured in transfer chamber 12 around.Between transition chamber 10 or process chamber 11 and transfer chamber 12, dispose the door (not shown) of coming in and going out for wafer 2.
The robot 1 that is configured in the transfer chamber 12 takes out of wafer 2 from transition chamber 10 or process chamber 11, and wafer 2 is moved into to transition chamber 10 or process chamber 11.That is, flexible by multi-joint horn portion 4, wafer 2 is come in and gone out with respect to transition chamber 10 and process chamber 11.Particularly, when moving into wafer 2, the multi-joint horn portion of contraction 4 stretches, and hand 3A passes door and enters the inside of transition chamber 10 or process chamber 11.When taking out of wafer 2, the multi-joint horn portion 4 that enters after the stretching, extension of transition chamber 10 or process chamber 11 inside shrinks, and hand 3A passes door and gets back in the transfer chamber 12.
When handling wafer 2, make transition chamber 10, process chamber 11 and transfer chamber 12 all become vacuum state.That is, the robot 1 of this example uses under vacuum state.In first example, transition chamber 10 and process chamber 11 are the incorporating sections of taking in as the wafer 2 of carrying object.
As shown in Figure 1 and Figure 2, the front of the base end side of hand 3A and second horn 6 links rotationally.The front of the base end side of second horn 6 and first horn 7 links rotationally.The base end side of first horn 7 and body 5 link rotationally.On above-below direction, hand 3A, second horn 6, first horn 7 and body 5 are from upside configuration successively in this order.In this example, second horn 6 is the hand maintenance horns that hand 3A remained on rotationally front.
The profile of body 5 forms roughly cylindric.This body 5 comprises: be configured in radial center portion solid spindle 15, with the hollow rotating shaft 16 of the form that covers solid spindle 15 outer peripheral faces and solid spindle 15 concentric arrangement, be fixed on solid spindle 15 upper end side belt wheel 17, be used to make CD-ROM drive motor (not shown) that solid spindle 15 rotates and the CD-ROM drive motor (not shown) that is used to make hollow rotating shaft 16 rotations.The upper end of hollow rotating shaft 16 is fixed on the bottom surface of first horn, 7 base end sides.
Hollow rotating shaft 16 can be with respect to solid spindle 15 rotations.Body 5 has the connect mechanism (not shown) that solid spindle 15 and hollow rotating shaft 16 are linked, and solid spindle 15 also can rotate integratedly with hollow rotating shaft 16.
As shown in Figure 4, first horn 7 forms the general hollow shape with hollow bulb.Internal configurations at first horn, 7 base end sides has belt wheel 17.Internal fixation in first horn, 7 front has fixed axis 18.
As shown in Figure 4, second horn 6 is the same with first horn 7, also forms the general hollow shape with hollow bulb.On the bottom surface of second horn, 6 base end sides, be fixed with belt wheel 19.Internal fixation in second horn, 6 front has fixed axis 20.Belt wheel 19 comprises: second 19b of belt wheel portion that is configured in first 19a of belt wheel portion of second horn, 6 inside and is configured in the inside of first horn, 7 front.Insert in belt wheel 19 and leading to fixed axis 18, belt wheel 19 can rotate with respect to fixed axis 18.Between the belt wheel 17 and second 19b of belt wheel portion, set up belt 21.
On the bottom surface of hand 3A base end side, be fixed with belt wheel 22.Belt wheel 22 is configured in the inside of second horn, 6 front.Insert in belt wheel 22 and leading to fixed axis 20, belt wheel 22 can rotate with respect to fixed axis 20.Between the belt wheel 22 and first 19a of belt wheel portion, set up belt 23.
The detailed structure of the linking portion between the detailed structure of hand 3A and second horn 6 and the hand 3A illustrates below.
In first example, if hollow rotating shaft 16 rotates under the state that solid spindle 15 is fixed, then multi-joint horn portion 4 stretches.That is, as if the drive motor of hollow rotating shaft 16 under specified states, then multi-joint horn portion 4 carries out expanding-contracting action.On the other hand, if solid spindle 15 rotates integratedly with hollow rotating shaft 16, then multi-joint horn portion 4 is not flexible, and multi-joint horn portion 4 is with respect to body 5 rotations.That is, as if the drive motor of solid spindle 15 under specified states, then multi-joint horn portion 4 is rotated action.
In first example, the belt wheel spacing of belt wheel 17,19 equates with the belt wheel spacing of belt wheel 19,22.The diameter ratio of the diameter of belt wheel 17 and second 19b of belt wheel portion is 2: 1, and the diameter of first 19a of belt wheel portion and the diameter ratio of belt wheel 22 are 1: 2.Therefore, in this example, if hollow rotating shaft 16 rotates under the state that solid spindle 15 is fixed, then as shown in Figure 5, angle between the angle between the hand 3A and second horn 6 and second horn 6 and first horn 7 can change, but the chain-dotted line X of hand 3A at the center (being the center of body 5) that links belt wheel 17 and the center (being the center of rotation of hand 3A) of belt wheel 22 goes up with certain towards moving.That is, the robot 1 of this example be when stretching in multi-joint horn portion 4 hand 3A with towards the radial mobile so-called cylindrical shape of the state of certain orientation robot.
What Fig. 5 (A) represented is that multi-joint horn portion 4 extends to the longest state, begins to take out of wafer 2 from transition chamber 10 or process chamber 11 under this state.What Fig. 5 (D) represented is that multi-joint horn portion 4 is contracted to the shortest state, begins wafer 2 is moved into to transition chamber 10 or process chamber 11 under this state.What Fig. 5 (B) represented is the middle state of the expanding-contracting action of multi-joint horn portion 4.Promptly, if the rotational angle of multi-joint horn portion 4 first horn 7 when the state of Fig. 5 (A) carries out expanding-contracting action to the state of Fig. 5 (D) between is made as θ, then Fig. 5 (B) expression is that angulation between first horn 7 of state of first horn 7 of state of Fig. 5 (A) and Fig. 5 (B) (or between first horn 7 of the state of first horn 7 of the state of Fig. 5 (D) and Fig. 5 (B) angulation) is the state of θ/2 o'clock.Fig. 5 (C) expression be the center of rotation of hand 3A and body 5 center-aligned state.
(structure of the linking portion between hand and hand and second horn)
Fig. 6 is the major part of expression hand 3A shown in Figure 1 and the vertical view of eccentric part 31A.Fig. 7 is used for the cutaway view of the structure of the F portion of key diagram 2 (A) from the side.Fig. 8 is used for the cutaway view of the structure of the G portion of key diagram 2 (A) from the side.Fig. 9 is the cutaway view in the H-H cross section of presentation graphs 6.Figure 10 is the figure that is used to illustrate the action of handle part 28A shown in Figure 6.Figure 11 be expression with robot shown in Figure 11 carry out the taking out of of wafer 2, the figure of relation when moving between the rotational angle of the speed of the CD-ROM drive motor of hollow rotating shaft 16 and first horn 7.
Figure 10 (A) expression be state (being that multi-joint horn portion 4 extends to the longest state) corresponding handle part 28A and the state of eccentric part 31A with Fig. 5 (A).Figure 10 (B) expression be state (being the middle state of the expanding-contracting action of multi-joint horn portion 4) corresponding handle part 28A and the state of eccentric part 31A with Fig. 5 (B).Figure 10 (C) expression be state (being that multi-joint horn portion 4 is contracted to the shortest state) corresponding handle part 28A and the state of eccentric part 31A with Fig. 5 (D).In the following description, for convenience, the above-below direction of Fig. 6 is made as left and right directions, the left and right directions of Fig. 6 is made as fore-and-aft direction.
Shown in Fig. 6 waited, hand 3A comprised: be used to put two of wafer 2 put parts 26, for the fixing base component 27A of two base end sides that put parts 26, with the end butt of wafer 2 control wafer 2 handle part 28A, towards the direction of controlling wafer 2 to the handle part 28A application of force as the compression helical spring 29A of force application part and with the butt parts 30 as abutting part of the end butt of wafer 2.As shown in Figure 9, second horn 6 comprises eccentric part 31A, and this eccentric part 31A is being fixed on second horn 6 with respect to the position that the center of rotation CL of second horn 6 departs from from hand 3A.
Put parts 26 and be lamellar parts, for example form with pottery.As mentioned above, two base end sides that put parts 26 are fixed on the base component 27A.Particularly, shown in Fig. 2 waited, two base end sides that put parts 26 were fixed on the base component 27A, so that two put parts 26 separate predetermined distance on left and right directions state almost parallel each other.Be formed with inclined plane 26a with the lower end butt of wafer 2 ends at the base end side that puts parts 26.Particularly, as shown in Figure 8, inclined plane 26a forms with the form that gently descends towards front.In addition, shown in Fig. 2 (A), when when seeing along the vertical direction, inclined plane 26a forms with the form with the tangential direction almost parallel of the abutment portion that is connected to the wafer 2 on the 26a of inclined plane.
Butt parts 30 are separately fixed at two front that put parts 26.As shown in Figure 7, on these butt parts 30, be formed with the vertical guide 30a of the end butt of wafer 2 and with the inclined plane 30b of the lower end butt of wafer 2 ends.Base end side towards hand 3A forms inclined plane 30b from the lower end of vertical guide 30a, and to form towards the gently dipping form of the base end side of hand 3A.Shown in Fig. 2 (A), when seeing along the vertical direction, vertical guide 30a and inclined plane 30b form and are connected to the tangential direction almost parallel of the abutment portion of the wafer 2 on the 30b of inclined plane.
As described below, vertical guide 30a has the function of controlling wafer 2 with handle part 28A.In addition, as described below, vertical guide 30a the taking out of of wafer 2, have the function that prevents wafer 2 dislocation when moving into.
Base component 27A has constituted the base end side part of hand 3A.As shown in Figure 9, belt wheel 22 is fixed on the bottom surface of this base component 27A.In addition, on base component 27A, be formed with the through hole 27Aa of the circle that is configured for eccentric part 31A etc.
Handle part 28A is configured in the base end side of hand 3A.Particularly, handle part 28A is installed in the upper face side of base component 27A.In addition, handle part 28A is configured in two and puts between the parts 26.Shown in Fig. 6 waited, this handle part 28A comprised: the roughly block holding member 35A that keeps rotationally with wafer 2 butts and rotating two cylinder 34A, with two cylinder 34A, two spindle unit 36A of cylinder 34A and the holding member 35A left and right directions guiding in Fig. 6 and interior all sides are formed with cam part 37A with the tubular of the cam surface 37Aa of eccentric part 31A butt.
Two cylinder 34A are installed in rotation on the front of holding member 35A with the state that separates predetermined distance on left and right directions.Cylinder 34A is being installed in slightly highlightedly on the holding member 35A than the front end of holding member 35A is distolateral forward with the form of wafer 2 butts.
Spindle unit 36A forms elongated cylindric.On this spindle unit 36A, be formed with spring abutting part 36Aa with the end butt of compression helical spring 29A.Particularly, diameter becomes on the centre position of length direction that big spring abutting part 36Aa is formed on spindle unit 36A.The front end of spindle unit 36A is fixed on the base end side of holding member 35A, and the rear end of spindle unit 36A is fixed on the front of cam part 37A.
Two spindle unit 36A are to remain on the sliding bearing 38A at the state that separates predetermined distance on the left and right directions, and this sliding bearing 38A is fixed on the upper surface of base component 27A.Particularly, each spindle unit 36A is maintained at on two sliding bearing 38A of the state configuration that separates predetermined distance on the fore-and-aft direction.In this example, two spindle unit 36A are by sliding bearing 38A linearity guiding on fore-and-aft direction.That is, two spindle unit 36A by sliding bearing 38A towards controlling controlling direction (right among Fig. 6) and keeping out of the way direction (left Fig. 6 to) linearity guiding of wafer 2 from what wafer 2 was kept out of the way.Therefore, the handle part 28A of this example moves towards controlling direction and keeping out of the way the direction linearity.
Spindle unit 36A inserts interior all sides of logical compression helical spring 29A.Spring abutting part 36Aa is configured between two sliding bearing 38A, these two sliding bearing 38A are to separate the state configuration of predetermined distance on fore-and-aft direction, compression helical spring 29A is configured between the sliding bearing 38A and spring abutting part 36Aa that is configured in base end side.Therefore, spindle unit 36A is compressed helical spring 29A and controls the direction application of force towards what control wafer 2.That is, handle part 28A is compressed helical spring 29A and controls the direction application of force towards what control wafer 2.
As mentioned above, cam part 37A forms tubular.Particularly, cam part 37A forms the roughly quadrangular barrel shape that runs through along the vertical direction in roughly tetragonal hole, four inner peripheral surfaces configured in parallel on fore-and-aft direction or left and right directions.In this example, the inner peripheral surface butt in the left side of eccentric part 31A and Fig. 6 cam parts 37A.That is, the inner peripheral surface in the left side of Fig. 6 cam parts 37A is cam surface 37Aa.
Shown in Fig. 9 waited, eccentric part 31A formed the cylindric of heavy wall, and utilizes hold-down screw 39A to be installed in the upper end of fixed axis 20, and fixed axis 20 is fixed on the front of second horn 6.As mentioned above, eccentric part 31A departs from from the center of rotation CL of hand 3A.Therefore, by the expanding-contracting action of multi-joint horn portion 4, eccentric part 31A relatively moves with respect to hand 3A along broken circle Y.
Eccentric part 31A is configured in the inner peripheral surface side of cam part 37A, can with cam surface 37Aa butt.The eccentric part 31A of this example be installed in the more approaching position of the center of rotation CL of hand 3A on.Particularly, when seeing along the vertical direction, the center of rotation CL of hand 3A also is configured in the inner peripheral surface side of cam part 37A.
Eccentric part 31A both can be fixed on the upper end of fixed axis 20, also can be installed in rotation on the upper end of fixed axis 20.In addition, eccentric part 31A also can be integrally formed with rotating shaft 20.As shown in Figure 9, dispose bearing 40 between fixed axis 20 and belt wheel 22, as mentioned above, belt wheel 22 can rotate with respect to fixed axis 20.
In first example, shown in Fig. 2 (A), under the state that multi-joint horn portion 4 has stretched (promptly begin from transition chamber 10 or process chamber 11 take out of wafer 2 before), handle part 28A keeps out of the way from wafer 2.That is, shown in Figure 10 (A), under this state, cylinder 34A separates from wafer 2.Particularly, under this state, eccentric part 31A and cam surface 37Aa butt utilize eccentric part 31A to overcome the application of force of compression helical spring 29A, and handle part 28A is moved towards keeping out of the way direction.In addition, shown in Figure 10 (A), under this state, eccentric part 31A is configured in the center of rotation CL that crosses hand 3A towards front and back to the dotted line center line that extends and broken circle Y on the approaching position of the intersection point of base end side.In addition, under the state that multi-joint horn portion 4 has stretched, eccentric part 31A also can be configured in center of rotation CL and towards front and back on dotted line center line that extends and the intersection point of broken circle Y at base end side.
On the other hand, shown in Fig. 2 (B), under multi-joint horn portion 4 contracted states (before promptly beginning to move into wafer 2 in transition chamber 10 or the process chamber 11), handle part 28A and wafer 2 butts and controlling wafer 2.That is, shown in Figure 10 (C), under this state, cylinder 34A and wafer 2 butts and controlling wafer 2.Particularly, under this state, eccentric part 31A separates from cam surface 37Aa, and under the application of force effect of compression helical spring 29A, handle part 28A moves towards controlling direction.In addition, shown in Figure 10 (C), under this state, eccentric part 31A is configured in the dotted line center line that extends to left and right direction with the center of rotation CL that crosses hand 3A and broken circle Y on the approaching position of the intersection point of Figure 10 (C) downside.
When handle part 28A is controlling wafer 2, the vertical guide 30a of butt parts 30 also with wafer 2 butts.That is, handle part 28A and vertical guide 30a are controlling wafer 2.In this example, as shown in Figure 2, handle part 28A and vertical guide 30a are with roughly 120 ° spacing and wafer 2 butts, thereby handle part 28A and vertical guide 30a are controlling wafer 2.
For wafer 2 is taken out of from transition chamber 10 or process chamber 11, when multi-joint horn portion 4 when extended configuration shrinks, eccentric part 31A relatively moves with respect to handle part 28A along with the action of multi-joint horn portion 4, so that handle part 28A moves towards controlling direction.Particularly, the counter clockwise direction of eccentric part 31A along broken circle Y towards Figure 10 relatively moves with respect to handle part 28A.
At this, as mentioned above, under the state that multi-joint horn portion 4 has stretched, eccentric part 31A is configured in the center of rotation CL that crosses hand 3A towards front and back to the dotted line center line that extends and broken circle Y on the approaching position of the intersection point of base end side.Therefore, in this example, when multi-joint horn portion 4 when the state shown in Fig. 5 (A) begins to shrink, originally the fore-and-aft direction amount of movement of eccentric part 31A is less with respect to the rotational angle of eccentric part 31A, and then the fore-and-aft direction amount of movement of eccentric part 31A becomes big gradually with respect to the rotational angle of eccentric part 31A.That is, when multi-joint horn portion 4 began to shrink, handle part 28A began to move towards controlling direction lentamente.
As mentioned above, in first example, eccentric part 31A be installed in the more approaching position of the center of rotation CL of hand 3A on, therefore, be near completion when shrinking eccentric part 31A and cam surface 37Aa butt from extended configuration in multi-joint horn portion 4.Therefore, under the effect of eccentric part 31A, handle part 28A (particularly being cam part 37A) moves swimmingly along sine curve.
In addition since in multi-joint horn portion 4 from extended configuration be near completion eccentric part 31A and cam surface 37Aa butt when shrinking, so eccentric part 31A is the approaching position of handle part 28A and wafer 2 from the position of cam surface 37A separation.In this example, the restoring force of compression helical spring 29A is less.Therefore, even eccentric part 31A separates from cam surface 37Aa, handle part 28A can be with form and wafer 2 butts of impacting for wafer 2 yet.
On the other hand, for wafer 2 being moved in transition chamber 10 or the process chamber 11, when multi-joint horn portion 4 when contraction state stretches, eccentric part 31A relatively moves with respect to handle part 28A along with the action of multi-joint horn portion 4, so that handle part 28A moves towards keeping out of the way direction.Particularly, the clockwise direction of eccentric part 31A along broken circle Y towards Figure 10 relatively moves with respect to handle part 28A.
In first example, shown in Figure 10 (B), under the middle state of the expanding-contracting action of the multi-joint horn portion 4 shown in Fig. 5 (B), eccentric part 31A and cam surface 37Aa butt, handle part 28A not with wafer 2 butts.That is, if multi-joint horn portion 4 further do not shrink under the state shown in Fig. 5 (B), then handle part 28A just not with wafer 2 butts.
At this, in this example, carry out the taking out of of wafer 2, when moving into, the rotary speed of the CD-ROM drive motor of hollow rotating shaft 16 changes as illustrated in fig. 11.That is, the CD-ROM drive motor of hollow rotating shaft 16 quickens back just deceleration under the situation that does not have the constant speed rotation.That is, follow the rotation of hollow rotating shaft 16 and the expanding-contracting action of the multi-joint horn portion 4 that carries out does not have the constant speed action, the acceleration and deceleration action is only arranged.
In this example, the acceleration rate of change of the CD-ROM drive motor of hollow rotating shaft 16 equates that with the deceleration rate of change under the state shown in Fig. 5 (B), the acceleration and deceleration of the CD-ROM drive motor of hollow rotating shaft 16 are switched.That is, after the taking out of or move into beginning of wafer 2, when first horn, 7 rotation θ/2, the acceleration and deceleration of the expanding-contracting action of multi-joint horn portion 4 are switched.
As mentioned above, in this example, under the state shown in Fig. 5 (B), handle part 28A and wafer 2 be butt not, and handle part 28A does not control wafer 2.Therefore, in this example, in the speed-down action of the multi-joint horn portion 4 of when taking out of (carry out wafer 2), handle part 28A begins to control wafer 2 with wafer 2 butts under the application of force effect of compression helical spring 29A when shrinking in multi-joint horn portion 4.That is, in the accelerated motion of the multi-joint horn portion 4 when shrinking in multi-joint horn portion 4 at least, handle part 28A does not control wafer 2.
In this example, when multi-joint horn portion 4 stretches in the accelerated motion of the multi-joint horn portion 4 of when moving into (carry out wafer 2), handle part 28A begins to separate (promptly beginning to keep out of the way from wafer 2) from wafer 2 under the effect of eccentric part 31A, discharges wafer 2.That is, in the speed-down action of the multi-joint horn portion 4 when stretching in multi-joint horn portion 4 at least, handle part 28A does not control wafer 2.
In the accelerated motion of the multi-joint horn portion 4 when taking out of wafer 2, can on wafer 2, produce relative inertness power towards hand 3A front.In addition, in the speed-down action of the multi-joint horn portion 4 when moving into wafer 2, also can on wafer 2, produce towards the relative inertness power of hand 3A front.Therefore, these the time, the vertical guide 30a butt of wafer 2 and butt parts 30 can prevent wafer 2 dislocation.
(the main effect of first example)
As mentioned above, in this example, wafer 2 take out of beginning before, eccentric part 31A and cam surface 37Aa butt and handle part 28A is kept out of the way from wafer 2.If multi-joint horn portion 4 shrinks when taking out of wafer 2, then eccentric part 31A relatively moves with respect to handle part 28A, so that handle part 28A moves towards controlling direction.In addition, in the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2, handle part 28A begins to control wafer 2 under the application of force effect of compression helical spring 29A.
Therefore, when taking out of wafer 2, can begin at the expanding-contracting action of multi-joint horn portion 4 to make eccentric part 31A and cam surface 37Aa butt in the long period till back expanding-contracting action to multi-joint horn portion 4 becomes deceleration, can utilize eccentric part 31A to control the translational speed of handle part 28A.Therefore, can make handle part 28A control wafer 2 with wafer 2 butts more lentamente.Consequently, in this example,, also can suppress impact to wafer 2 even control wafer 2 with the frame for movement of having used handle part 28A, force application part 29A and eccentric part 31A.
In this example, wafer 2 move into beginning before, control wafer 2 with the application of force of compression helical spring 29A.If multi-joint horn portion 4 stretches when moving into wafer 2, then eccentric part 31A relatively moves with respect to handle part 28A so that handle part 28A moves towards keeping out of the way direction, in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, handle part 28A begins to keep out of the way from wafer 2.Therefore, can be when the acceleration of the expanding-contracting action of multi-joint horn portion 4 when moving into wafer 2 handle part 28A be kept out of the way in long period to the expanding-contracting action of multi-joint horn portion 4 from wafer 2.Consequently, in this example, can suppress to constitute the damage of the various parts of handle part 28A.
In this example, handle part 28A is configured in the base end side of hand 3A, and butt parts 30 are fixed on the front that puts parts 26 as hand 3A front.Therefore, even begin to control wafer 2 in the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2, in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2, also can utilize butt parts 30 (particularly being vertical guide 30a) to prevent the dislocation of wafer 2.In addition, even handle part 28A begins to keep out of the way from wafer 2 in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, in the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, also can utilize butt parts 30 to prevent the dislocation of wafer 2.
In this example, handle part 28A has and wafer 2 butts and rotating cylinder 34A.Therefore, when handle part 28A and wafer 2 butts,, also can wafer 2 be located to assigned position by acting under the situation that cause damage can not for wafer 2 of cylinder 34A even wafer 2 produces dislocation on hand 3A.
In this example, handle part 28A moves towards the direction of controlling wafer 2 with from the direction linearity that wafer 2 is kept out of the way.Therefore, compare, the configuration space of handle part 28A is narrowed down, can realize miniaturization, the slimming of hand 3A with the structure of above-mentioned patent documentation 1 described use linkage.In addition, in this example, handle part 28A comprises by two spindle unit 36A of sliding bearing 38A linearity guiding.Therefore, can utilize two spindle unit 36A to prevent that the moving direction with handle part 28A from being the rotation of the handle part 28A in axle center.
In this example, handle part 28A comprises cam part 37A, and this cam part 37A is formed with cam surface 37Aa with eccentric part 31A butt in interior all sides.Therefore, can make handle part 28A towards controlling controlling direction and moving of wafer 2 with the simple structure of using eccentric part 31A and cam part 37A from the direction linearity of keeping out of the way that wafer 2 is kept out of the way.
(other example of first example)
Above-mentioned example is an example of preferable example of the present invention, but is not limited thereto, and can carry out various distortion and implement in the scope that does not change purport of the present invention.
In above-mentioned first example, in the speed-down action of the multi-joint horn portion 4 when shrinking in multi-joint horn portion 4, handle part 28A and wafer 2 butts and begin to control wafer 2.In addition, for example shown in the image pattern 12 like that, carry out the taking out of of wafer 2, the CD-ROM drive motor of hollow rotating shaft 16 makes handle part 28A and wafer 2 butts and begins to control wafer 2 under constant speed rotation after the acceleration, the situation of slowing down then when moving in the constant speed action of the multi-joint horn portion 4 in the time of also can shrinking in multi-joint horn portion 4.In this case, also can make handle part 28A control wafer 2 with wafer 2 butts more lentamente, can suppress impact wafer 2.Even under the situation of the CD-ROM drive motor constant speed of hollow rotating shaft 16 rotation, make handle part 28A and wafer 2 butts in the speed-down action of the multi-joint horn portion 4 in the time of also can shrinking and begin to control wafer 2 in multi-joint horn portion 4.
In above-mentioned example, in the accelerated motion of the multi-joint horn portion 4 when stretching in multi-joint horn portion 4, handle part 28A begins to keep out of the way from wafer 2.In addition, for example carry out the taking out of of wafer 2, the CD-ROM drive motor of hollow rotating shaft 16 makes handle part 28A begin to keep out of the way from wafer 2 in the constant speed action of the multi-joint horn portion 4 in the time of also can stretching in multi-joint horn portion 4 under constant speed rotation after the acceleration, the situation of slowing down then when moving into.In this case, handle part 28A is kept out of the way more lentamente from wafer 2, can suppress to constitute the damage of the various parts of handle part 28A.Even under the situation that the CD-ROM drive motor constant speed of hollow rotating shaft 16 is rotated, make handle part 28A begin to keep out of the way in the accelerated motion of the multi-joint horn portion 4 in the time of also can stretching from wafer 2 in multi-joint horn portion 4.
In above-mentioned example, the acceleration rate of change of the CD-ROM drive motor of hollow rotating shaft 16 equates with the deceleration rate of change, but the acceleration rate of change of the CD-ROM drive motor of hollow rotating shaft 16 also can be different with the deceleration rate of change.
In above-mentioned example, handle part 28A comprises two spindle unit 36A.In addition, handle part 28A also can comprise the spindle unit 36A more than three.In addition, as shown in figure 13, handle part also can only comprise a spindle unit 46A.On this spindle unit 46A, be formed with the spring abutting part 46Aa that is equivalent to spring abutting part 36Aa.In this case, replace holding member 35A to be fixed on the front of spindle unit 46A as long as will form the holding member 45A of V-arrangement shape.When only using a spindle unit 46A, in order to prevent spindle unit 46A rotation, spindle unit 46A is preferably formed as and is polygonal column rather than cylindric.In Figure 13, the symbol identical to the structure tag identical with above-mentioned example.
In above-mentioned example, hand 3A comprises handle part 28A, and this handle part 28A has two spindle unit 36A and moves towards controlling direction and keeping out of the way the direction linearity.In addition, as shown in figure 14, hand 3A can comprise that also handle part 58A replaces handle part 28A, and this handle part 58A has a pair of bar 59A that cylinder 34A is installed, and bar 59A is that the center is rotated and controlled wafer 2 with predetermined axis 60A.
In this handle part 58A, bar 59A forms L shaped shape, and the helical spring 61A that is stretched controls the direction application of force towards what control wafer 2.Distolateral cylinder 34A that is rotatably mounted with at bar 59A.Eccentric part 31A can with another distolateral butt of bar 59A.Therefore, by eccentric part 31A being installed on the assigned position of fixed axis 20 upper ends, under the state that multi-joint horn portion 4 has stretched, for example shown in the image pattern 14 (A) like that, eccentric part 31A and bar 59A butt, overcome the application of force of draft helical spring 61A and bar 59A is rotated, cylinder 34A keeps out of the way from wafer 2.Under multi-joint horn portion 4 contracted states, for example shown in Figure 14 (B) like that, eccentric part 31A separates from bar 59A, bar 59A rotates under the application of force of draft helical spring 61A, cylinder 34A controls wafer 2.In Figure 14, the symbol identical to the structure tag identical with above-mentioned example.
As shown in figure 15, hand 3A can comprise that also handle part 68A replaces handle part 28A, this handle part 68A comprises: a pair of bar 69A of cylinder 34A is installed and with the wire rod 72A of a pair of bar 69A wire connected to one another, bar 69A is that the center is rotated and controlled wafer 2 with predetermined axis 70A.
In this handle part 68A, bar 69A forms linearity, and the helical spring 61A that is stretched controls the direction application of force towards what control wafer 2.At the distolateral cylinder 34A that is being rotatably mounted of bar 69A, in another distolateral end of fixing wire rod 72A of bar 69A.Eccentric part 31A and wire rod 72A butt and make wire rod 72A deflection.Therefore, by eccentric part 31A being installed on the assigned position of fixed axis 20 upper ends, under the state that multi-joint horn portion 4 has stretched, for example shown in the image pattern 15 (A) like that, eccentric part 31A and wire rod 72A butt and make wire rod 72A deflection, thereby overcome the application of force of draft helical spring 61A and bar 69A is rotated, cylinder 34A keeps out of the way from wafer 2.Under multi-joint horn portion 4 contracted states, for example shown in Figure 15 (B) like that, eccentric part 31A separates from wire rod 72A, under the application of force effect of draft helical spring 61A, bar 69A rotates, cylinder 34A controls wafer 2.In addition, also can use laminal belt to replace wire rod 72A.In Figure 15, the symbol identical to the structure tag identical with above-mentioned example.
In above-mentioned example, when multi-joint horn portion 4 has shunk shown in Fig. 2 (B), shown in Figure 10 (C), under the state that eccentric part 31A separates from cam surface 37Aa, handle part 28A and wafer 2 butts.In addition, for example also eccentric part 31A and cam surface 37Aa etc. be can constitute as follows, promptly when multi-joint horn portion 4 has shunk, under the state of eccentric part 31A and cam surface 37Aa butt, handle part 28A and wafer 2 butts made shown in Fig. 2 (B).
In above-mentioned example, handle part 28A is compressed helical spring 29A and controls the direction application of force towards what control wafer 2.In addition, but for example also shown in the image pattern 16 like that, the draft helical spring 79A that handle part 78A is used as force application part keeps out of the way the direction application of force towards what keep out of the way from wafer 2.In this case, making fixedly, the spring fixed part 86Aa of draft helical spring 79A one end is formed on the spindle unit 86A, the end of draft helical spring 79A is fixed on the spring fixed part 86Aa, and the other end of draft helical spring 79A is fixed on the sliding bearing 38A that is configured in base end side.In this case, the front end at spindle unit 86A is equipped with cylinder 34A by compression helical spring 87A.In Figure 16, the symbol identical to the structure tag identical with above-mentioned example.
In this case, eccentric part 31A is installed on the assigned position of fixed axis 20 upper ends, with under the state that has stretched in multi-joint horn portion 4 shown in Figure 16 (A), eccentric part 31A is separated from the inner peripheral surface of cam part 37A, and under multi-joint horn portion 4 contracted states shown in Figure 16 (B), make the cam part 37A of eccentric part 31A and Figure 16 the side, right side, be cam surface 37Ab butt.
Therefore, under the state that multi-joint horn portion 4 has stretched, under the application of force effect of draft helical spring 79A, cylinder 34A keeps out of the way from wafer 2.Under multi-joint horn portion 4 contracted states, eccentric part 31A and cam surface 37Ab butt, handle part 78A moves towards the direction of controlling wafer 2 and controls wafer 2.When multi-joint horn portion 4 when extended configuration shrinks, the counter clockwise direction of eccentric part 31A along broken circle Y towards Figure 16 relatively move with respect to handle part 78A and with cam surface 37Ab butt, when multi-joint horn portion 4 when contraction state stretches, the clockwise direction of eccentric part 31A along broken circle Y towards Figure 16 relatively moves with respect to handle part 78A and separates from cam surface 37Ab.
In this case, the same with above-mentioned example, in the speed-down action of the multi-joint horn portion 4 when multi-joint horn portion 4 shrinks, handle part 78A with the effect of the eccentric part 31A of cam surface 78Ab butt under begin to control wafer 2 with wafer 2 butts, in the acceleration of the multi-joint horn portion 4 when multi-joint horn portion 4 stretches, handle part 78A keeps out of the way from wafer 2 under the application of force effect of draft helical spring 79A.
Under situation about constituting as illustrated in fig. 16, when taking out of wafer 2, can begin at the expanding-contracting action of multi-joint horn portion 4 to utilize eccentric part 31A to control the translational speed of handle part 78A in the long period till back expanding-contracting action to multi-joint horn portion 4 becomes deceleration.Therefore, can make handle part 78A control wafer 2 with wafer 2 butts more lentamente.Consequently, can suppress impact to wafer 2.
In above-mentioned first example, be compression helical spring 29A towards the direction of controlling wafer 2 to the force application part of the handle part 28A application of force, but also can be elastomeric elements such as other spring members such as leaf spring or rubber the force application part of the handle part 28A application of force.
(second example)
With reference to the accompanying drawings second example of the present invention is described.The structure tag identical symbol identical with above-mentioned first example to second example.
(schematic configuration of industrial robot)
Fig. 1 is the side view of the industrial robot 1 of expression the invention process form.Figure 17 is the vertical view of expression industrial robot 1 shown in Figure 1, Figure 17 (A) expression be state after multi-joint horn portion 4 stretches, Figure 17 (B) expression be state after multi-joint horn portion 4 shrinks.Fig. 3 is the vertical view of schematic configuration that expression is assembled with the semi-conductor manufacturing system 9 of industrial robot shown in Figure 11.Fig. 4 is the general profile chart that is used to illustrate the Poewr transmission mechanism in multi-joint horn portion 4 shown in Figure 1 and the hand 3B.Figure 18 be used to illustrate the flexible state of multi-joint horn portion 4 shown in Figure 1 and hand 3B towards between the figure of relation.Figure 11 be expression with robot shown in Figure 11 carry out the taking out of of wafer 2, the figure of relation when moving between the rotational angle of the speed of the CD-ROM drive motor of hollow rotating shaft 16 and first horn 7.What represent among Fig. 4 is the summary cross section of multi-joint horn portion 4 grades when the E-E direction of Figure 17 (A) is seen.
The industrial robot 1 of this example (below be called " robot 1 ") is the robot that is used to carry thin discoid semiconductor wafer 2 as the carrying object (below be called " wafer 2 ").As Fig. 1, shown in Figure 17, this robot 1 comprises: the hand 3B of loaded with wafers 2, hand 3B kept rotationally and flexible multi-joint horn portion 4 and the body 5 that multi-joint horn portion 4 is kept rotationally when carrying wafer 2.The multi-joint horn portion 4 of this example is made of second horn 6 and 7 two horns of first horn.
The robot 1 of this example for example is assembled in as shown in Figure 3 the semi-conductor manufacturing system 9 and uses.
Because semi-conductor manufacturing system 9 shown in Figure 3 is identical with above-mentioned first example, therefore omit its detailed description at this, but in second example, when moving into wafer 2, the multi-joint horn portion 4 of shrinking stretches, and hand 3B passes door and enters the inside of transition chamber 10 or process chamber 11.When taking out of wafer 2, the multi-joint horn portion 4 that enters after the stretching, extension of transition chamber 10 or process chamber 11 inside shrinks, and hand 3B passes door and gets back in the transfer chamber 12.
As Fig. 1, shown in Figure 17, the front of the base end side of hand 3B and second horn 6 links rotationally.The front of the base end side of second horn 6 and first horn 7 links rotationally.The base end side of first horn 7 and body 5 link rotationally.On above-below direction, hand 3B, second horn 6, first horn 7 and body 5 are from upside configuration successively in this order.In this example, second horn 6 is the hand maintenance horns that hand 3B remained on rotationally front.
Explanation to Fig. 4 is identical with above-mentioned first example, therefore omits its detailed description at this, but in second example, is fixed with belt wheel 22 on the bottom surface of hand 3B base end side.Belt wheel 22 is configured in the inside of second horn, 6 front.Insert in belt wheel 22 and leading to fixed axis 20, belt wheel 22 can rotate with respect to fixed axis 20.Between the belt wheel 22 and first 19a of belt wheel portion, set up belt 23.
The detailed structure of hand 3B illustrates below.
In this example, if hollow rotating shaft 16 rotates under the state that solid spindle 15 is fixed, then multi-joint horn portion 4 stretches.That is, as if the drive motor of hollow rotating shaft 16 under specified states, then multi-joint horn portion 4 carries out expanding-contracting action.On the other hand, if solid spindle 15 rotates integratedly with hollow rotating shaft 16, then multi-joint horn portion 4 is not flexible, and multi-joint horn portion 4 is with respect to body 5 rotations.That is, as if the drive motor of solid spindle 15 under specified states, then multi-joint horn portion 4 is rotated action.
In this example, the belt wheel spacing of belt wheel 17,19 equates with the belt wheel spacing of belt wheel 19,22.The diameter ratio of the diameter of belt wheel 17 and second 19b of belt wheel portion is 2: 1, and the diameter of first 19a of belt wheel portion and the diameter ratio of belt wheel 22 are 1: 2.Therefore, in this example, if hollow rotating shaft 16 rotates under the state that solid spindle 15 is fixed, then as shown in figure 18, angle between the angle between the hand 3B and second horn 6 and second horn 6 and first horn 7 can change, but the chain-dotted line X of hand 3B at the center (being the center of body 5) that links belt wheel 17 and the center (being the center of rotation of hand 3B) of belt wheel 22 goes up with certain towards moving.That is, the robot 1 of this example be when stretching in multi-joint horn portion 4 hand 3B with towards the radial mobile so-called cylindrical shape of the state of certain orientation robot.
What Figure 18 (A) represented is that multi-joint horn portion 4 extends to the longest state, begins to take out of wafer 2 from transition chamber 10 or process chamber 11 under this state.What Figure 18 (D) represented is that multi-joint horn portion 4 is contracted to the shortest state, begins wafer 2 is moved into to transition chamber 10 or process chamber 11 under this state.What Figure 18 (B) represented is the middle state of the expanding-contracting action of multi-joint horn portion 4.Promptly, if the rotational angle of multi-joint horn portion 4 first horn 7 when the state of Figure 18 (A) carries out expanding-contracting action to the state of Figure 18 (D) between is made as θ, then Figure 18 (B) expression is that angulation between first horn 7 of state of first horn 7 of state of Figure 18 (A) and Figure 18 (B) (or between first horn 7 of the state of first horn 7 of the state of Figure 18 (D) and Figure 18 (B) angulation) is the state of θ/2 o'clock.Figure 18 (C) expression be the center of rotation of hand 3B and body 5 center-aligned state.
In second example, carry out the taking out of of wafer 2, when moving into, the rotary speed of the CD-ROM drive motor of hollow rotating shaft 16 changes as illustrated in fig. 11.That is, the CD-ROM drive motor of hollow rotating shaft 16 does not just slow down through the constant speed rotation after acceleration.That is, follow the rotation of hollow rotating shaft 16 and the expanding-contracting action of the multi-joint horn portion 4 that carries out is the acceleration and deceleration actions that do not have the constant speed action.
In this example, the acceleration rate of change of the CD-ROM drive motor of hollow rotating shaft 16 equates that with the deceleration rate of change under the state shown in Figure 18 (B), the acceleration and deceleration of the CD-ROM drive motor of hollow rotating shaft 16 are switched.That is, after the taking out of or move into beginning of wafer 2, when first horn, 7 rotation θ/2, the acceleration and deceleration of the expanding-contracting action of multi-joint horn portion 4 are switched.
(structure of the hand of second example)
Figure 19 is the vertical view of the major part of expression hand 3B shown in Figure 1, Figure 19 (A) expression be state after handle part 28B keeps out of the way from wafer 2, Figure 19 (B) expression be the state that handle part 28B is controlling wafer 2.Figure 20 is the side view of the major part of hand 3B shown in Figure 19.Fig. 7 is the cutaway view of structure that is used for illustrating from the side the F portion of Figure 17 (A).Fig. 8 is the cutaway view of structure that is used for illustrating from the side the G portion of Figure 17 (A).In the following description, for convenience, the above-below direction of Fig. 7 is made as left and right directions, the left and right directions of Figure 19 is made as fore-and-aft direction.
Shown in Figure 19 waited, hand 3B comprised: be used to put two of wafer 2 put parts 26, for the fixing base component 27B of two base end sides that put parts 26, with the end butt of wafer 2 control wafer 2 handle part 28B, towards the direction that handle part 28B is kept out of the way from wafer 2 to the draft helical spring 29B as force application part of the handle part 28B application of force, with the end butt of wafer 2 as the butt parts 30 of abutting part and restriction handle part 28B at the limiting part 31B of draft helical spring 29B to the action on the application of force direction of handle part 28B.
Put parts 26 and be lamellar parts, for example form with pottery.As mentioned above, two base end sides that put parts 26 are fixed on the base component 27B.Particularly, shown in Fig. 2 waited, two base end sides that put parts 26 were fixed on the base component 27B, so that two put parts 26 separate predetermined distance on left and right directions state almost parallel each other.Be formed with inclined plane 26a with the lower end butt of wafer 2 ends at the base end side that puts parts 26.Particularly, as shown in Figure 8, inclined plane 26a forms with the form that gently descends towards front.In addition, shown in Figure 17 (A), when when seeing along the vertical direction, inclined plane 26a forms with the form with the tangential direction almost parallel of the abutment portion that is connected to the wafer 2 on the 26a of inclined plane.
Butt parts 30 are separately fixed at two front that put parts 26.As shown in Figure 7, on these butt parts 30, be formed with the vertical guide 30a of the end butt of wafer 2 and with the inclined plane 30b of the lower end butt of wafer 2 ends.Base end side towards hand 3B forms inclined plane 30b from the lower end of vertical guide 30a, and to form towards the gently dipping form of the base end side of hand 3B.Shown in Figure 17 (A), when seeing along the vertical direction, vertical guide 30a and inclined plane 30b form and are connected to the tangential direction almost parallel of the abutment portion of the wafer 2 on the 30b of inclined plane.
As described below, vertical guide 30a has the function of controlling wafer 2 with handle part 28B.In addition, as described below, vertical guide 30a the taking out of of wafer 2, have the function that prevents wafer 2 dislocation when moving into.
Base component 27B has constituted the base end side part of hand 3B.Belt wheel 22 is fixed on the bottom surface of this base component 27B.
Handle part 28B is configured in the base end side of hand 3B.Particularly, handle part 28B is installed in the upper face side of base component 27B.Shown in Figure 19 waited, this handle part 28B comprised: make two weight member 35B that cylinder 34B moves towards the direction with wafer 2 butts with wafer 2 butts and rotating two cylinder 34B, the inertia force that produces when utilizing multi-joint horn portion 4 expanding-contracting actions, with cylinder and two rod unit 36B of weight member 35B binding and two fixed axis 37B that rod unit 36B is supported rotationally.Two cylinder 34B, two weight member 35B, two rod unit 36B and two fixed axis 37B dispose symmetrically with respect to the center on the left and right directions of hand 3B respectively.In this example, cylinder 34B is and the parts of controlling of controlling wafer 2 as wafer 2 butts of carrying object.
As shown in figure 19, two fixed axis 37B are fixed on the right both end sides that keeps left of base component 27B front.That is, two fixed axis 37B are fixed on the front of base component 27B with the state that separates predetermined distance on left and right directions.As shown in figure 20, fixed axis 37B is to be fixed on the base component 27B from the outstanding form of the upper surface of base component 27B.
Rod unit 36B forms roughly L shaped shape.Particularly, first 36Ba of bar portion of the roughly linearity that links by approximate right angle shape each other of rod unit 36B and roughly second 36Bb of bar portion of linearity constitute.As mentioned above, a rod unit 36B 37B that is fixed supports rotationally.Particularly, the 37B that is fixed of the linking part between first 36Ba of bar portion and second 36Bb of bar portion supports rotationally.Rod unit 36B is supported on the fixed axis 37B rotationally, so that roughly fore-and-aft direction becomes the length direction of first 36Ba of bar portion, make left and right directions roughly become the length direction of second 36Bb of bar portion, and make first 36Ba of bar portion outstanding from fixed axis 37B towards front, make second 36Bb of bar portion interior side-prominent from fixed axis 37B towards left and right directions.
Cylinder 34B is installed in the distolateral of rod unit 36B.Particularly, cylinder 34B is installed in rotation on the front of first 36Ba of bar portion.
Weight member 35B is the weight with formation such as the bigger metal materials of proportion.The weight member 35B of this example forms roughly discoid.It is distolateral that this weight member 35B is installed in another of rod unit 36B.Particularly, weight member 35B is installed in the front of second 36Bb of bar portion.
Limiting part 31B forms tabular, is configured to and left and right directions and the formed plane parallel of above-below direction.Particularly, limiting part 31B is fixed on the upper surface of two base end sides that put parts 26.In this example, limiting part 31B is configured in than the weight member 35B that is fixed in rod unit 36B more on the position of the 3B of armrest portion front.Limiting part 31B be configured to can with weight member 35B butt, this weight member 35B is that rotate at the center with rod unit 36B with fixed axis 37B.That is, in this example, by weight member 35B and limiting part 31B butt limit handle part 28B at draft helical spring 29B to the action on the application of force direction of handle part 28B.
As shown in figure 19, the end of draft helical spring 29B is installed on the limiting part 31B, and the other end of draft helical spring 29B is installed in the front of second 36Bb of bar portion.Therefore, as mentioned above, handle part 28B (particularly being cylinder 34B) is stretched helical spring 29B towards the direction application of force of keeping out of the way from wafer 2.Particularly, the rod unit 36B that is configured in Figure 19 upside is by the application of force against the sun, and the rod unit 36B that is configured in Figure 19 downside is by the application of force with the sun.
In this example, as described below, set the length of second 36Bb of bar portion, the weight of weight member 35B and the application of force of draft helical spring 29B etc., the inertia force that produces when utilizing multi-joint horn portion 4 expanding-contracting actions makes cylinder 34B move towards the direction with wafer 2 butts.
Shown in Figure 19 (A), in this example, under the application of force effect of draft helical spring 29B, handle part 28B keeps out of the way from wafer 2, cylinder 34B not with wafer 2 butts.That is, handle part 28B discharges wafer 2.At this moment, weight member 35B and limiting part 31B butt have limited the action of handle part 28B.
On the other hand, for wafer 2 is taken out of from transition chamber 10 or process chamber 11, multi-joint horn portion 4 shrinks from extended configuration, and when the expanding-contracting action of multi-joint horn portion 4 became speed-down action, weight member 35B produced relative inertness power with respect to base component 27B towards the base end side of hand 3B.Therefore, shown in Figure 19 (B), rod unit 36B overcomes the application of force of draft helical spring 29B and cylinder 34B is rotated towards the direction of controlling wafer 2.That is, in the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2, weight member 35B utilizes inertia force and cylinder 34B is moved towards the direction with wafer 2 butts.If rod unit 36B overcomes the application of force of draft helical spring 29B and rotates, then cylinder 34B and wafer 2 butts and control wafer 2.If stop after multi-joint horn portion 4 shrinks, then as mentioned above, cylinder 34B discharges wafer 2 under the application of force effect of draft helical spring 29B.
Equally, for wafer 2 is moved in transition chamber 10 or process chamber 11, if multi-joint horn portion 4 stretches from contraction state, then when the expanding-contracting action of multi-joint horn portion 4 quickens, weight member 35B produces relative inertness power with respect to base component 27B towards the base end side of hand 3B, and rod unit 36B overcomes the application of force of draft helical spring 29B and cylinder 34B is rotated towards the direction of controlling wafer 2.That is, in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, weight member 35B utilizes inertia force and cylinder 34B is moved towards the direction with wafer 2 butts.If rod unit 36B overcomes the application of force of draft helical spring 29B and rotates, then cylinder 34B and wafer 2 butts and control wafer 2.If stop after multi-joint horn portion 4 stretches, then cylinder 34B discharges wafer 2 under the application of force effect of draft helical spring 29B.
When handle part 28B is controlling wafer 2, the vertical guide 30b of butt parts 30 also with wafer 2 butts.That is, handle part 28B and vertical guide 30a are controlling wafer 2.In this example, as shown in figure 17, handle part 28B and vertical guide 30a are with roughly 120 ° spacing and wafer 2 butts, thereby handle part 28B and vertical guide 30a are controlling wafer 2.
In the accelerated motion of the multi-joint horn portion 4 when taking out of wafer 2, can on wafer 2, produce relative inertness power towards hand 3B front.In addition, in the speed-down action of the multi-joint horn portion 4 when moving into wafer 2, also can on wafer 2, produce towards the relative inertness power of hand 3B front.Therefore, these the time, the vertical guide 30a butt of wafer 2 and butt parts 30 can prevent wafer 2 dislocation.
In the accelerated motion of the multi-joint horn portion 4 when taking out of wafer 2 and in the speed-down action of the multi-joint horn portion 4 when moving into wafer 2, weight member 35B is towards the relative inertness power of hand 3B front generation with respect to base component 27B.
(the main effect of second example)
As mentioned above, in this example, hand 3B comprises: control the handle part 28B of wafer 2 with wafer 2 butts and towards the draft helical spring 29B of the direction that handle part 28B is kept out of the way from wafer 2 to the handle part 28B application of force.In addition, handle part 28B comprises: the weight member 35B that the inertia force that produces when controlling the cylinder 34B of wafer 2 and utilizing multi-joint horn portion 4 expanding-contracting actions with wafer 2 butts makes cylinder 34B move towards the direction with wafer 2 butts.Therefore, can utilize the simple structure that constitutes by cylinder 34B and weight member 35B to control wafer 2, can utilize the simple structure that constitutes by draft helical spring 29B to discharge wafer 2.
In this example, handle part 28B is configured in the base end side of hand 3B, and butt parts 30 are fixed on the front that puts parts 26 as hand 3B front.In the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2, utilize weight member 35B that cylinder 34B is moved towards the direction with wafer 2 butts.Therefore, in the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2, can utilize cylinder 34B to prevent the dislocation of wafer 2, in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2, can utilize butt parts 30 (particularly being vertical guide 30a) to prevent the dislocation of wafer 2.
In this example, in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, utilize weight member 35B that cylinder 34B is moved towards the direction with wafer 2 butts.Therefore, similarly, in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, can utilize cylinder 34B to prevent the dislocation of wafer 2, in the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, can utilize butt parts 30 (particularly being vertical guide 30a) to prevent the dislocation of wafer 2.
In this example, hand 3B comprises limiting part 31B, this limiting part 31B restriction handle part 28B at draft helical spring 29B to the action on the application of force direction of handle part 28B.Therefore, handle part 28B (when discharging wafer 2) when wafer 2 has retreated, can position weight member 35B.Therefore, the inertia force that produces in the time of can making multi-joint horn portion 4 expanding-contracting actions suitably acts on the weight member 35B, thereby rod unit 36B is rotated reliably.Consequently, can make cylinder 34B and wafer 2 butts reliably.
In this example, forming the roughly distolateral cylinder 34B that is equipped with of the rod unit 36B of L shaped shape, at another distolateral weight member 35B that is equipped with of rod unit 36B.Therefore, under the simple structure of having used the rod unit 36B that rotates as the center with fixed axis 37B, can utilize inertia force that cylinder 34B is moved towards the direction with wafer 2 butts.
In this example, handle part 28B comprises and wafer 2 butts and rotating cylinder 34B.Therefore, when handle part 28B and wafer 2 butts,, also can wafer 2 be located to assigned position by acting under the situation that cause damage can not for wafer 2 of cylinder 34B even wafer 2 produces dislocation on hand 3B.
(other example of second example)
Above-mentioned second example is an example of preferable example of the present invention, but is not limited thereto, and can carry out various distortion and implement in the scope that does not change purport of the present invention.
In above-mentioned example, utilize draft helical spring 29B to handle part 28B towards the direction application of force of keeping out of the way from wafer 2.In addition, but for example also shown in the image pattern 21 like that, utilize compression helical spring 39B to handle part 28B towards the direction application of force of keeping out of the way from wafer 2.In this case, as shown in figure 21, the end of compression helical spring 39B is installed on second 36Bb of bar portion, and the other end of compression helical spring 39B is installed in and puts on the parts 26 (or base component 27B).In Figure 21, the symbol identical to the structure tag identical with above-mentioned example.
In above-mentioned example, hand 3B comprises handle part 28B, and this handle part 28B makes and forms roughly two rod unit 36B of L shaped shape and rotate and control, discharge wafer 2.In addition, but for example also shown in the image pattern 22 like that, hand 3B can comprise that also handle part 48B replaces handle part 28B, this handle part 48B has: be fixed on the weight member 45B on the belt 41B and be installed in cylinder 34B on the belt 41B by holding member 42B, control, discharge wafer 2 by cylinder 34B linearity is moved.
In this handle part 48B, belt 41B for example is erected on two belt wheel 43B.Cylinder 34B is installed in rotation on the front of holding member 42B.In the rear end side of holding member 42B the end of draft helical spring 49B is installed, the other end of draft helical spring 49B is installed on the base component 27B.The same with above-mentioned example, shown in Figure 22 (A), this handle part 48B keeps out of the way from wafer 2 under the application of force effect of draft helical spring 49B usually.In the deceleration of the expanding-contracting action of the multi-joint horn portion 4 when taking out of wafer 2 or in the acceleration of the expanding-contracting action of the multi-joint horn portion 4 when moving into wafer 2, shown in Figure 22 (B), handle part 48B controls wafer 2 with cylinder 34B under the inertia force effect.In Figure 22, the symbol identical to the structure tag identical with above-mentioned example.
On handle part 48B shown in Figure 22, also can use linear guide spare to replace belt 41B and belt wheel 43B.
In above-mentioned second example, there is not the constant speed action in the expanding-contracting action of the multi-joint horn portion 4 that under the rotation of hollow rotating shaft 16, carries out, the acceleration and deceleration action is only arranged.In addition, in the expanding-contracting action of the multi-joint horn portion 4 that under the rotation of hollow rotating shaft 16, carries out, except that accelerated motion, speed-down action, can also comprise the constant speed action.In above-mentioned example, the acceleration rate of change of the CD-ROM drive motor of hollow rotating shaft 16 equates with the deceleration rate of change, but the acceleration rate of change of the CD-ROM drive motor of hollow rotating shaft 16 also can be different with the deceleration rate of change.
In above-mentioned second example, cylinder 34B is and the parts of controlling of controlling wafer 2 as wafer 2 butts of carrying object.In addition, the parts of controlling of controlling wafer 2 with wafer 2 butts also can be to be fixed on the distolateral fixed part of rod unit 36B one.In above-mentioned example, be draft helical spring 29B to handle part 28B towards the force application part of the direction application of force of controlling wafer 2, but also can be elastomeric elements such as other spring members such as leaf spring or rubber the force application part of the handle part 28B application of force.
In above-mentioned example, by weight member 35B and limiting part 31B butt limit handle part 28B at draft helical spring 29B to the action on the application of force direction of handle part 28B.In addition, also can by rod unit 36B and limiting part 31B butt limit handle part 28B at draft helical spring 29B to the action on the application of force direction of handle part 28B.
In above-mentioned first, second example, robot 1 be when stretching in multi-joint horn portion 4 hand 3A, 3B with towards the radial mobile so-called cylindrical shape of the state of certain orientation robot.In addition, the robot that uses structure of the present invention also can not be the cylindrical shape robot.That is, also can be along with stretching of multi-joint horn portion with the robot towards variation of structure applications of the present invention in hand 3A, 3B.In above-mentioned example, multi-joint horn portion 4 is made of second horn 6 and 7 two horns of first horn, but multi-joint horn portion 4 also can be made of the horn more than three.
In above-mentioned first, second example, butt parts 30 with put parts 26 and separate to form and be fixed on and put on the parts 26, but have with the abutting part of butt parts 30 identical functions also can be with to put parts 26 integrally formed.
In above-mentioned first, second example etc., robot 1 is the so-called vacuum robot that uses under vacuum state, but robot 1 also can use in atmosphere.That is, the robot that uses structure of the present invention is not limited to vacuum robot.In above-mentioned example, the carrying object of being carried by robot 1 is discoid wafer 2, but by the carrying object that robot 1 is carried also can be the discoid substrate that forms beyond the wafer 2, and perhaps also can be the substrate etc. that forms polygonal shape such as rectangle.

Claims (14)

1. industrial robot, be used to carry object from the incorporating section of taking in described carrying object take out of with described carrying object to the moving into of described incorporating section, it is characterized in that, comprising:
Load the hand of described carrying object;
Multi-joint horn portion, this multi-joint horn portion have comprise that the hand that described hand is remained on front rotationally keeps the plural horn of horn, stretches when described carrying object are come in and gone out with respect to described incorporating section; And
The body that described multi-joint horn portion is kept rotationally,
Described hand comprises: be used for controlling the handle part of described carrying object and towards the force application part of the direction of controlling described carrying object to the described handle part application of force with described carrying object butt,
Described hand keeps horn to comprise eccentric part, this eccentric part is to keep on the horn at described hand with respect to the fixed-site that described hand keeps the center of rotation of horn to depart from from described hand, and before being taken out of beginning from described incorporating section, described carrying object described handle part is kept out of the way from described carrying object with described handle part butt
Along with the expanding-contracting action with the described multi-joint horn portion of described carrying object when take out of described incorporating section, described eccentric part relatively moves with respect to described handle part, so that described handle part moves towards the direction of controlling described carrying object,
With the constant speed of the expanding-contracting action of the described multi-joint horn portion of described carrying object when take out of described incorporating section or in slowing down, described handle part begins to control described carrying object by the application of force of described force application part.
2. industrial robot as claimed in claim 1 is characterized in that,
By before beginning is moved in described incorporating section, described handle part comes the described carrying object of holding by the application of force of described force application part at described carrying object,
Along with the expanding-contracting action with the described multi-joint horn portion of described carrying object when described incorporating section is moved into, described eccentric part relatively moves with respect to described handle part, so that the direction that described handle part is kept out of the way from described carrying object moves,
In with the acceleration of the expanding-contracting action of the described multi-joint horn portion of described carrying object when described incorporating section is moved into or in the constant speed, described handle part begins to keep out of the way from described carrying object.
3. industrial robot as claimed in claim 1 is characterized in that,
Described handle part is configured in the base end side that keeps the described hand of horn side as described hand,
Described hand has abutting part with the end butt of described carrying object in front.
4. industrial robot as claimed in claim 1 is characterized in that, described handle part has and described carrying object butt and rotating cylinder.
5. industrial robot as claimed in claim 1 is characterized in that, described handle part is towards controlling controlling direction and moving from the direction linearity of keeping out of the way that described carrying object is kept out of the way of described carrying object.
6. industrial robot as claimed in claim 5 is characterized in that, described handle part has by towards described direction and described two spindle units keeping out of the way direction linearity guiding of controlling at least.
7. industrial robot as claimed in claim 5 is characterized in that described handle part has the cam part of tubular, and this cam part is formed with cam surface with described eccentric part butt in interior all sides.
8. industrial robot, be used to carry object from the incorporating section of taking in described carrying object take out of with described carrying object to the moving into of described incorporating section, it is characterized in that, comprising:
Load the hand of described carrying object;
Multi-joint horn portion, this multi-joint horn portion have comprise that the hand that described hand is remained on front rotationally keeps the plural horn of horn, stretches when described carrying object are come in and gone out with respect to described incorporating section; And
The body that described multi-joint horn portion is kept rotationally,
Described hand comprises: be used for controlling the handle part of described carrying object and towards the force application part of the direction that described handle part is kept out of the way from described carrying object to the described handle part application of force with described carrying object butt,
Described hand keeps horn to comprise eccentric part, and this eccentric part to be keeping on the horn at described hand with respect to the fixed-site that described hand keeps the center of rotation of horn to depart from from described hand, and can with described handle part butt,
Along with the expanding-contracting action with the described multi-joint horn portion of described carrying object when take out of described incorporating section, described eccentric part relatively moves with respect to described handle part, so that described handle part moves towards the direction of controlling described carrying object,
Described handle part was kept out of the way from described carrying object before described carrying object is taken out of beginning from described incorporating section, and was beginning to control described carrying object by the effect with the described eccentric part of described handle part butt with the constant speed of the expanding-contracting action of the described multi-joint horn portion of described carrying object when take out of described incorporating section or slowing down.
9. industrial robot, be used to carry object from the incorporating section of taking in described carrying object take out of with described carrying object to the moving into of described incorporating section, it is characterized in that, comprising:
Load the hand of described carrying object;
Multi-joint horn portion, this multi-joint horn portion have comprise that the hand that described hand is remained on front rotationally keeps the plural horn of horn, stretches when described carrying object are come in and gone out with respect to described incorporating section; And
The body that described multi-joint horn portion is kept rotationally,
Described hand comprises: be used for controlling the handle part of described carrying object and towards the force application part of the direction that described handle part is kept out of the way from described carrying object to the described handle part application of force with described carrying object butt,
Described handle part comprises: the inertia force that produces in the time of can be with the controlling parts and utilize described multi-joint horn portion expanding-contracting action of described carrying object butt makes the described weight member that parts move towards the direction with described carrying object butt of controlling.
10. industrial robot as claimed in claim 9 is characterized in that,
Described handle part is configured in the base end side that keeps the described hand of horn side as described hand,
Described hand has abutting part with the end butt of described carrying object in front,
The deceleration with the expanding-contracting action of the described multi-joint horn portion of described carrying object when take out of described incorporating section, described weight member makes the described parts of controlling move towards the direction with described carrying object butt.
11. industrial robot as claimed in claim 9 is characterized in that,
Described handle part is configured in the base end side that keeps the described hand of horn side as described hand,
Described hand has abutting part with the end butt of described carrying object in front,
In the acceleration with the expanding-contracting action of the described multi-joint horn portion of described carrying object when described incorporating section is moved into, described weight member makes the described parts of controlling move towards the direction with described carrying object butt.
12. industrial robot as claimed in claim 9 is characterized in that, described hand has limiting part, this limiting part limit described handle part at described force application part to the action on the application of force direction of described handle part.
13. industrial robot as claimed in claim 9, it is characterized in that, described handle part links described parts and the described weight member of controlling, and has a rod unit of rotating roughly L shaped shape, the described parts of controlling are installed in the distolateral of described rod unit, and it is distolateral that described weight member is installed in another of described rod unit.
14. industrial robot as claimed in claim 9 is characterized in that, the described parts of controlling are rotating cylinders.
CNA2008101259111A 2007-06-05 2008-06-04 Rotot for industry Pending CN101318325A (en)

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