CN101311335B - Dismounting and mounting device for czochralski crystal growing furnace thermal system - Google Patents
Dismounting and mounting device for czochralski crystal growing furnace thermal system Download PDFInfo
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- CN101311335B CN101311335B CN2008100364375A CN200810036437A CN101311335B CN 101311335 B CN101311335 B CN 101311335B CN 2008100364375 A CN2008100364375 A CN 2008100364375A CN 200810036437 A CN200810036437 A CN 200810036437A CN 101311335 B CN101311335 B CN 101311335B
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- crystal growing
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Abstract
The invention relates to a quick assembling and dissembling device in a thermal system of a czochralski silicon single crystal growth furnace. The assembling and dissembling device of the thermal system of the czochralski crystal growth furnace comprises a lower furnace tube (14) and a lower graphite heat preservation cover, an outer soft felt or a lower insulating layer (13) consisting of a solidified felt, a middle furnace tube (10) and a middle graphite heat preservation cover and an outer soft felt or a middle insulating layer (6) consisting of the solidified felt. The lower edges of the middle furnace tube (10) are provided with at least three horizontal supporting plates (12) towards the inside of the furnace. The supporting plates (12) supports a ring-shaped tray (11); the tray (11) is arranged between the lower insulating layer (13) of the lower furnace tube (14) and the middle insulating layer (6) of the middle furnace tube (10). The invention provides the quick assembling and dissembling device and a method of the thermal system of the czochralski crystal growth furnace, which changes the technical scheme in the prior art at home and abroad, greatly increases the production efficiency of the single growth furnace, reduces the working strength of the operators and has obvious economical benefits and significant technical advancement.
Description
(1) technical field
The present invention relates to the improvement mechanism of crucible method growing crystal stove device, a kind of attaching/detaching apparatus that hot system installs and removes in the vertical pulling silicon single crystal rod of more specifically the saying so growth stove.
(2) background technology
Known, the structure of the technology stove of single crystal growing is for being furnace body support, crucible shaft transmission lifting part, drop-bottom, following stove tube, middle stove tube and bell from bottom to top successively, the bell top is provided with to hold and grows the crystalline concubine, the concubine top is that crystal lifts and rotating mechanism, seed shaft, weight, seed chuck and seed crystal can drop to silicon melt in the quartz crucible from center, concubine top always and contact, by temperature and various control, make silicon melt be oriented under the seed crystal crystallization and constantly grow up, reach the purpose of crystal growth.
Hot system is a core component in the crystal growing furnace, it mainly comprises three major parts, the graphite resistance heater that is installed on furnace bottom two electrode columns provides heat for silicon material fusing and crystal growth, its two connecting rod and crucible pallet that is mounted in well heater intermediary plumbago crucible holder (being used to bear the quartz crucible that the solid silicon material is housed) and connects the furnace bottom crucible shaft, it three provides insulation and forms each required position of crystal growth, the thermograde device of direction.The insulation device material mainly divides two big classes, one class be internal layer insulation device need material high temperature resistant, fine and close, intensity arranged, usually the gradient lagging material that adopts high purity graphite, carbon carbon fiber or surface to carry out vapour deposition, another kind of is the very low lagging material of thermal conductivity in inner thermal insulating layer outside, mainly contains the soft felt of graphite, solidifies felt.The insulation device be distributed with furnace bottom graphite insulation base plate and down under thin-skinned felt or curing felt thermal insulation layer, the lower furnace body graphite in the graphite around the soft felt of graphite of stay-warm case and outside or curing felt thermal insulation layer, the well heater the soft felt of graphite of thermal insulation layer and outside or curing felt thermal insulation layer, well heater top have last stay-warm case and outside soft felt of graphite or curing felt thermal insulation layer, insulation cover is arranged on last stay-warm case and be under funnel shaped heat shielding.
After a stove silicon monocrystal growth finishes, need crystal is risen in the concubine, mention concubine, and screw out back taking-up crystal left with mechanical system.
After taking out crystal, need to remove stove tube Nei Re system, insulation cover in the particularly middle stove tube, heat shielding, go up the soft felt of stay-warm case, middle stay-warm case and outside or solidify parts such as felt and carry out the technology cleaning, especially down the chip impurity of stove tube bottom and the voloxidation thing in the pump-line of cleaning, and then reinstall hot system, close upper furnace tube, bell, concubine and find time to carry out a new stove crystal pulling program after polycrystal raw material being put into quartz crucible again.In the stove tube promote also and need produce owing to rise limitation in height, must be earlier with insulation cover, heat shielding, upward thermal insulation layer etc. takes out earlier.
Its key step is generally as follows: mention a pair chamber after crystal is risen to pair chamber, screw out the back left and take out crystal.Rising bell produces left.Take out heat shielding, insulation cover, go up the soft felt of stay-warm case and outside or solidify felt etc.Hang that the stove tube produces in the rise to the right, take out again and be arranged on stay-warm case and outer thin-skinned felt or curing carpet veneer in the well heater graphite all around, check whether the heater electrode contact well also please wash the oxide compound of well heater appearance, regularly pulling down well heater clears up greatly, down each position of stove tube and venting port are carried out the technology cleaning, also need carry out the technology cleaning going up of taking out, middle stay-warm case and insulation cover.Cleaning work is adorned hot system from bottom to top after finishing in order, requires crucible tray, well heater, stay-warm case to keep good concentricity, reaches thermal field homogeneity purpose.
Its technological process of production is: tear stove open and clean the stove-shove charge-material-stable-crystal growth-blowing out of finding time (fill a certain amount of argon gas, furnace pressure keeps 1000-2000Pa)-change
Lagging material widespread use along with technical progress and excellent property, the heat-insulating property of hot system is become better and better, the power of crystal growth declines to a great extent, also more and more longer (the melted silicon Tc is 1420 degree but stove cooling simultaneously needs the time, heater temperature is not less than 1500 degree, temperature should be taller when changing material), in order to enhance productivity, generally at graphite device and lagging material in the resistance to oxidation temperature range limit, exit to normal atmosphere and opened stove (blowing out 5-6 hour at present, temperature is about about 400 degree-350 degree in the stove), because the good heat insulation effect of hot system, but yet need many times even in air, be cooled to service temperature, generally speaking, after opening stove and waiting for a period of time, the operative employee also will emit very high-temperature earlier with top graphite device, comprise insulation cover, heat shielding, last stay-warm cases etc. take out earlier, the stove tube produces in rising then, again stay-warm case in the graphite and outside insulation graphite felt or solidify felt and lift taking-up (the middle stay-warm case of 20 inches hot systems and graphite felt weigh twenties kilograms) together, carrying out technology after for some time to be cooled again cleans, thermal field is installed then, middle stay-warm case is installed in down on the stay-warm case, the stove tube is transferred to the lower furnace body top and drops to the lower furnace body flange in the rise, also will align the stay-warm case orientation this moment, the stay-warm case thermometer hole is aimed at temperature measurer position on the stove, more than during these working expenditures, effort, the installation requirement height, to in very high temperature, operate debugging, work under hard conditions, big to the human body infringement, but also can influence the installation assembly quality, influence the quality product of next stove.
Through investigation and retrieval, there can be no exception whatever for the method for the structure of this kind equipment and replacing, cleaning, process both at home and abroad.
Production practice need a kind of improved device, can make things convenient for to dismantle stove tube Nei Re system compactly and to the clearance activity at each position, reduce in the unloading process because stove tube internal heat system component is cooled off time of required wait, and energy efficient is increased work efficiency.
(3) summary of the invention
Purpose of the present invention intends providing a kind of rapid dismounting apparatus of vertical pulling crystal growing furnace, can for convenience detachly shift out main heat preservation component in the stove tube, accelerates dismounting, cooling, cleanup step.
The objective of the invention is so to realize.
A kind of attaching/detaching apparatus of czochralski crystal growing furnace thermal system, comprise that the stove tube reaches by graphite stay-warm case, soft felt under comprising or solidifies the following thermal insulation layer that felt is formed down, middle stove tube reaches by graphite stay-warm case in comprising and soft felt or solidifies the middle thermal insulation layer that felt is formed, it is characterized in that, lower rim at middle stove tube is provided with at least three blocks of horizontal supporting plates in stove, supporting plate rest one circular pallet, pallet circle is between the middle thermal insulation layer of following thermal insulation layer that descends stove tube inside and middle stove tube inside.
The L-shaped platy structure of described supporting plate, its straight plate is fixedlyed connected with middle stove tube inwall, the circular pallet of its transverse slat rest.
There is a circle supporting plate positioning step bottom, outer ring of described pallet with supporting plate rest contact segment.
Described supporting plate is four.
Described supporting plate is a stainless material.
There is the V-arrangement bead of a circle to lower convexity the inner ring bottom of described pallet with following thermal insulation layer contact segment, is equipped with the V-arrangement detent of a circle depression in following thermal insulation layer corresponding positions.
Described pallet is selected carbon-fibre composite for use.Carbon-fibre composite is a kind of gradient lagging material, it is characterized in that outside surface is through vapour deposition, density is high and good intensity arranged, be enough to support tens kilograms go up, weight such as middle thermal insulation layer, insulation cover, heat shielding, again because the intermediary density of this gradient lagging material is less, very low thermal conductivity is arranged and has good heat-insulating property.
Adopt the technical program, concubine is mentioned after crystal is risen to concubine by elder generation, screws out the back left and takes out crystal, rises bell and produces left.When middle stove tube rises, also will be shelved on pallet on the supporting plate by four supporting plates in middle stove tube lower end, together with above the pallet by the soft felt of middle graphite stay-warm case and outside or solidify middle thermal insulation layer, the soft felt of going up graphite stay-warm case and outside that felt forms or solidify last thermal insulation layer that felt forms and rises simultaneously such as insulation cover, heat shielding.Be positioned at outside the intermediary well heater is exposed to, without any the stopping of lagging material and parts, can cool off quickly on every side, make that operator can be very fast, and in suitable temperature environment, compare standard, calm cleaning work.When doing the technology cleaning, the middle thermal insulation layer of middle stove tube inside need not to take out, and can directly carry out cleaning in the stove tube, has improved effect thing rate greatly.And after the cleaning work end, when reinstalling, also middle stove tube need only be descended when putting in place, protruding V-arrangement bead falls into down in the V-arrangement detent of the corresponding circle depression of stay-warm case naturally under annulus pallet the inner, guarantee that all assemblings are accurately errorless, guaranteed the concentricity of hot system, supporting plate continues to sink to having broken away from pallet, middle stove tube and the supporting plate of fixing on it separate fully with the middle thermal insulation layer of inside by tray support, both sides' independence and inner stability have been guaranteed, and because pallet and metal supporting plate break away from and blocked thermal conduction each other fully, played good heat insulation effect, whole erection work finishes.
Pallet has the location to cooperate with the supporting plate place, has guaranteed that also the whole process of reinstalling after rising to cleaning is in the accurate relative position control all the time.
Major advantage of the present invention and beneficial effect be, 1. when stove is torn open, rises supporting plate by middle stove tube the heat-insulation system on around the well heater and top is all risen the disengaging well heater, accelerated dismounting speed and working efficiency.2. the stove tube descends in when shove charge, and supporting plate breaks away from pallet when putting in place, accurately is in place by dual location stay-warm case, makes hot system have not a particle of the effect that the gap reaches good heat insulation.3. adopt existing intensity to have low thermal conductivity carbon-fibre composite to make the effect that pallet has reached insulation and held up heat-insulation system again.4. the present invention has improved production efficiency and shove charge quality, has reduced labour intensity, has increased the work-ing life of graphite device and lagging material.5. test after actual fabrication, increase this device, 18 inches and above hot yarn system only need a people just can finish whole mounting or dismounting furnace operatings, and just need two people finish originally.Owing to shortened the time of stove cooling and dismounting greatly, 20 inches hot systems of crucible drew 14 stove monocrystalline to bring up to 15 stoves from every month, every stove monthly output has increased by 70 kilograms, the output value increases by 210,000, this vertical pulling crystal growing furnace is after adopting the technical program surplus having 50 by a medium-sized enterprise, just can produce 3500 kilograms in one month more, output value altar adds 1,050 ten thousand, rate of profit by 10 is calculated, every the Temple of Moon adds profit and reaches 1,050,000, adopt the gradient lagging material to compare every stove 10 degree that per hour economize on electricity with graphite material in addition, calculated each every stove economize on electricity 350 degree with the heating of every stove in 35 hours, every month every economize on electricity 5250 degree, it is electric to calculate economize on electricity in every month 26.25 ten thousand degree by 50 stoves, is worth to reach more than 16 ten thousand yuan, has created high economic worth.In sum, the present invention has changed existing both at home and abroad traditional technical scheme, fills up in this field, the domestic and international blank of this technical elements, has very remarkable economic efficiency and outstanding technical advance.
(4) description of drawings
Fig. 1 is the layout diagram of prior art vertical pulling crystal growing furnace;
Fig. 2 rises to crystal the state graph of mentioning concubine behind the concubine from the vertical pulling crystal growing furnace;
Fig. 3 is the bell component diagram from the vertical pulling crystal growing furnace;
Fig. 4 is stove cartridge unit figure from the vertical pulling crystal growing furnace;
Fig. 5 is the state graph after from the vertical pulling crystal growing furnace middle stove tube being mentioned;
Fig. 6 is with the state graph after the removal of the thermal insulation layer in the middle stove tube from the vertical pulling crystal growing furnace;
Fig. 7 is the attaching/detaching apparatus partial enlarged drawing of czochralski crystal growing furnace thermal system of the present invention;
Fig. 8 is the attaching/detaching apparatus of czochralski crystal growing furnace thermal system of the present invention and the configured in one piece figure of process furnace;
Among the figure, the 1st, concubine, the 2nd, seed chuck, the 3rd, bell, 4 ring washers, the 5th, heat shielding, the 6th, middle thermal insulation layer, 7 thermometer holes, 8 plumbago crucibles, 9 well heaters, stove tube in 10,11 pallets, 12 supporting plates, 13 times thermal insulation layers, 14 times stove tubes, the 15th, reflector, the 16th, following stove tube bottom thermal insulation layer, 17 crucible connecting rods, 18 insulation covers, thermal insulation layer on 19,20 quartz crucibles, G are crystal.
(5) embodiment,
Below in conjunction with accompanying drawing, the invention will be further described.
A kind of attaching/detaching apparatus of vertical pulling crystal growth process furnace, lower rim at middle stove tube 10 is provided with at least three blocks of horizontal supporting plates 12 in stove, supporting plate 12 rests one circular pallet 11, pallet 11 boundaries are between the middle thermal insulation layer 6 of following thermal insulation layer 13 that descends stove tube 14 inside and middle stove tube 10 inside.Supporting plate 12 L-shaped platy structures, its upright plate is fixedlyed connected with middle stove tube 10 inwalls, the circular pallet 11 of its transverse slat rest.There are a circle supporting plate 12 localized steps the bottom, outer ring of pallet 11 with supporting plate 12 rest contact segments.Supporting plate 12 is four.There is the V-arrangement bead of a circle to lower convexity the inner ring bottom of pallet 11 with following thermal insulation layer 13 contact segments, is equipped with the V-arrangement detent that a circle caves in following thermal insulation layer 13 corresponding positions, and pallet 11 is selected carbon-fibre composite for use.
Adopt the technical program, concubine 1 is mentioned after crystal G is risen to concubine 1 by elder generation, screws out the back left and takes out crystal G, rises bell 3 and produces left.When rising, middle stove tube 10 also will be shelved on pallet 11 above the supporting plate 12 by three supporting plates 12 in middle stove tube 10 lower ends, together with above the pallet 11 by middle graphite stay-warm case and wrap in the soft felt of outside or solidify the middle thermal insulation layer 6 that felt forms and rise, and the heat shielding 5 again, back-up ring 4, insulation cover, go up the graphite stay-warm case and the last thermal insulation layer that wraps in the soft felt of outside or solidify the felt composition also can rise simultaneously.Be positioned at outside intermediary well heater 9 is exposed to, without any the stopping of lagging material and parts, can cool off quickly on every side, make that operator can be very fast, and in suitable temperature environment, compare standard, calm cleaning work.When doing the technology cleaning, the middle thermal insulation layer 6 of middle stove tube 10 inside can directly be done the technology cleaning inside and need not to take out, and technological operation is simplified.And after the cleaning work end, when reinstalling, also middle stove tube 10 need only be descended when putting in place, annulus pallet 11 inner protruding V-arrangement beads down fall into down in the V-arrangement detent of thermal insulation layer 13 corresponding circle depressions naturally, guarantee that all assemblings are accurately errorless, guaranteed the concentricity of hot system, supporting plate 12 continues to sink to having broken away from pallet 11, middle stove tube 10 and the supporting plate of fixing on it 12 are separated by the middle thermal insulation layer 6 that pallet 11 supports fully with inside, guaranteed both sides' independence and inner stability, whole erection work finishes.Pallet 11 has the location to cooperate with supporting plate 12 places, has guaranteed that also the whole process of reinstalling after rising to cleaning is in the accurate relative position control all the time.
Claims (7)
1. the attaching/detaching apparatus of a czochralski crystal growing furnace thermal system, comprise that stove tube (14) reaches by graphite stay-warm case under comprising and wraps in the soft felt of outside or solidify the following thermal insulation layer (13) that felt is formed down, middle stove tube (10) reaches by comprising middle graphite stay-warm case and the middle thermal insulation layer of being made up of soft felt that wraps in the outside or curing felt (6), it is characterized in that, lower rim at middle stove tube (10) is provided with at least three blocks of horizontal supporting plates (12) in stove, supporting plate (12) rest one circular pallet (11), pallet (11) boundary is in descending between the inner middle thermal insulation layer (6) of inner following thermal insulation layer (13) of stove tube (14) and middle stove tube (10).
2. according to the attaching/detaching apparatus of the hot system of the described crystal growing furnace of claim 1, it is characterized in that the L-shaped platy structure of described supporting plate (12), its straight plate is fixedlyed connected the circular pallet of its transverse slat rest (11) with middle stove tube (10) inwall.
3. according to the attaching/detaching apparatus of claim 1 or the hot system of 2 described crystal growing furnaces, it is characterized in that described supporting plate (12) is four.
4. according to the attaching/detaching apparatus of the hot system of the described crystal growing furnace of claim 1, it is characterized in that described supporting plate (12) is a stainless material.
5. according to the attaching/detaching apparatus of the hot system of the described crystal growing furnace of claim 1, it is characterized in that the bottom, outer ring of described pallet (11), one circle supporting plate (12) positioning step is arranged with supporting plate (12) rest contact segment.
6. according to the attaching/detaching apparatus of the hot system of the described crystal growing furnace of claim 1, the inner ring bottom that it is characterized in that described pallet (11), with following thermal insulation layer (13) contact segment the V-arrangement bead of one circle to lower convexity arranged, be equipped with the V-arrangement detent of a circle depression in following thermal insulation layer (13) corresponding positions.
7. according to the attaching/detaching apparatus of the hot system of the described crystal growing furnace of claim 1, it is characterized in that described pallet (11) selects carbon-fibre composite for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100364375A CN101311335B (en) | 2008-04-22 | 2008-04-22 | Dismounting and mounting device for czochralski crystal growing furnace thermal system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100364375A CN101311335B (en) | 2008-04-22 | 2008-04-22 | Dismounting and mounting device for czochralski crystal growing furnace thermal system |
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| Publication Number | Publication Date |
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| CN101311335A CN101311335A (en) | 2008-11-26 |
| CN101311335B true CN101311335B (en) | 2011-04-06 |
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| CN2008100364375A Expired - Fee Related CN101311335B (en) | 2008-04-22 | 2008-04-22 | Dismounting and mounting device for czochralski crystal growing furnace thermal system |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102912411A (en) * | 2011-08-01 | 2013-02-06 | 苏州东泰太阳能科技有限公司 | Single crystal furnace |
| CN105887207A (en) * | 2014-10-21 | 2016-08-24 | 镇江大成新能源有限公司 | Low-power-consumption monocrystal furnace |
| CN113218190B (en) * | 2021-04-01 | 2022-09-27 | 青海湘和有色金属有限责任公司 | Oxygen supply device for stabilizing oxygen supply of oxygen-enriched side-blown converter and use method thereof |
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|---|---|---|---|---|
| CN2076663U (en) * | 1990-06-14 | 1991-05-08 | 嘉兴市新丰电瓷厂 | Continuous high-temp. heating furnace |
| US5254172A (en) * | 1991-03-28 | 1993-10-19 | Shin-Etsu Handotai Co., Ltd. | Rotating furnace tube having a non-rotating slidable work holder for processing semiconductor substrates |
| US5938852A (en) * | 1996-05-17 | 1999-08-17 | Samsung Electronics Co., Ltd. | Cap for vertical furnace |
| US6246029B1 (en) * | 1999-02-19 | 2001-06-12 | Seh America, Inc. | High temperature semiconductor crystal growing furnace component cleaning method |
| CN2900042Y (en) * | 2006-06-02 | 2007-05-16 | 上海卡姆丹克半导体有限公司 | Four-jaw automatic centring chuck |
| CN201195762Y (en) * | 2008-10-31 | 2009-02-18 | 上海卡姆丹克太阳能科技有限公司 | Assembling-disassembling mechanism of vertical pulling crystal growth furnace |
-
2008
- 2008-04-22 CN CN2008100364375A patent/CN101311335B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2076663U (en) * | 1990-06-14 | 1991-05-08 | 嘉兴市新丰电瓷厂 | Continuous high-temp. heating furnace |
| US5254172A (en) * | 1991-03-28 | 1993-10-19 | Shin-Etsu Handotai Co., Ltd. | Rotating furnace tube having a non-rotating slidable work holder for processing semiconductor substrates |
| US5938852A (en) * | 1996-05-17 | 1999-08-17 | Samsung Electronics Co., Ltd. | Cap for vertical furnace |
| US6246029B1 (en) * | 1999-02-19 | 2001-06-12 | Seh America, Inc. | High temperature semiconductor crystal growing furnace component cleaning method |
| CN2900042Y (en) * | 2006-06-02 | 2007-05-16 | 上海卡姆丹克半导体有限公司 | Four-jaw automatic centring chuck |
| CN201195762Y (en) * | 2008-10-31 | 2009-02-18 | 上海卡姆丹克太阳能科技有限公司 | Assembling-disassembling mechanism of vertical pulling crystal growth furnace |
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