CN101301989A - Microfluid drive and mixed structure, and use method thereof - Google Patents
Microfluid drive and mixed structure, and use method thereof Download PDFInfo
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- CN101301989A CN101301989A CNA2008100173664A CN200810017366A CN101301989A CN 101301989 A CN101301989 A CN 101301989A CN A2008100173664 A CNA2008100173664 A CN A2008100173664A CN 200810017366 A CN200810017366 A CN 200810017366A CN 101301989 A CN101301989 A CN 101301989A
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Abstract
The invention discloses a pectinate electrode based micro-fluidic driving and mixing structure and a method of application thereof, which pertains to the technical field of micro-fluidic driving and mixing. The structure comprises an upper cover 1 of a micro channel and a lower cover 4 of the micro channel, wherein a plurality of broad-band electrodes I 2 and identical numbers of narrow-band electrode I 3 are alternately arranged on the upper cover of micro channel, all broad-band electrodes I and all narrow-band electrodes I are respectively connected together to form a pectinate structure and connected with the electrode tip corresponding respectively; the lower cover 4 of the micro channel is provided with the same structure, but arrangement order of electrode pairs on the upper cover is contrary to that of electrode pairs on the lower cover. Furthermore, the invention also discloses a method of application of the structure. The invention can control the mixing process of microfluid in the micro channel, and improve mixing efficiency of the micro fluid; meanwhile, the basis material of the micro channel is polydimethylsiloxane (PDMS), and by using glass or silicon slice as upper and lower covers, integrated and batch manufacture of the micro-fluidic mixed chip can be accomplished easily.
Description
Technical field:
The present invention relates to a kind of microfluid driving and mixed structure and using method thereof, belong to microfluid driving and hybrid technology field in the micromechanics electronic system (MEMS) based on comb electrode.
Background technology:
Because the fluid motion in the microchannel is significant laminar motion, make that the fluid in the microchannel mixes the key technology that technology becomes the miniature organism chemical analysis instrument.The mixed method of existing microfluid can be divided into two classes: adopt the complex passages structure to produce the mixed method of passive type of unordered mixed flow; Change the active mixed method that external conditions such as pressure, electric field improve the mixed efficient of fluid.
Active mixed method is to adopt exterior mechanical or electromagnetic force to disturb the laminar condition of fluid, to improve the mixed effect of microfluid.People such as M.Mpholoa and A.B.D.Brownb has designed asymmetric electrode structure, uses polytetrafluoroethylene (PTFE) as the microchannel matrix material, with mechanical method PTFE is clipped in the middle microchannel that forms of two sheet glass cover plates; Go out broadband electrode and the arrangement of arrowband electrode gap in the microchannel bottom design, adopt to exchange the electrostatic force driving, realize the fluid driving in the microchannel.This mode can realize partly that the fluid in the microchannel mixes when realizing that microfluid drives.The problem that exists is, (1) this structure can't be carried out ACTIVE CONTROL to the mixed effect of microfluid, and mixing efficiency is low; (2) be subjected to the restriction of polytetrafluoroethylene (PTFE) material, can't realize that the microminiaturization of microfluid pipeline and mass make.
Summary of the invention:
The objective of the invention is to solve the following problem that exists in the above-mentioned active Microfluidic Mixing technology: (1) Microfluidic Mixing efficient is low, can't realize the ACTIVE CONTROL of mixing efficiency; (2) can't to satisfy the integrated level of microminiaturization making, complex manufacturing technology, micro-fluidic chip of microfluidic device low for the method for mechanical grip.
Consult Fig. 1 to Fig. 3, the present invention proposes a kind of microfluid and drives and mixed structure, is a kind of sandwich that comprises pectinate texture electrode pair on the pectinate texture electrode pair on upper cover plate 1, the upper cover plate 1, microchannel matrix 9, the lower cover slip 4 and lower cover slip 4 successively; Be separated by on the upper cover plate 1 arranging some broadband electrode I 2 and etc. the arrowband electrode I 3 of number, all broadband electrode I2 are joined together to form pectinate texture and receive electrode tip I 7, all arrowband electrode I 3 are joined together to form pectinate texture and receive electrode tip II 8, each forms one group of electrode pair to adjacent broadband electrode I 2 and arrowband electrode I 3, and electrode pair is arranged the pectinate texture electrode pair that forms on the upper cover plate 1 in proper order;
Be separated by on the lower cover slip 4 arranging some broadband electrode II 5 and etc. the arrowband electrode II 6 of number, all broadband electrode II 5 are joined together to form pectinate texture and receive electrode tip III 9, all arrowband electrode II 6 are joined together to form pectinate texture and receive electrode tip IV 10, each forms one group of electrode pair to adjacent broadband electrode II 5 and arrowband electrode II 6, and electrode pair is arranged the pectinate texture electrode pair that forms on the lower cover slip 4 in proper order.
Electrode pair on the upper cover plate 1 arrange with lower cover slip 4 on electrode pair put in order on the contrary, promptly the upper cover plate electrode pair puts in order and is arrowband electrode-broadband electrode, then the lower cover slip electrode pair puts in order and is broadband electrode-arrowband electrode.Perhaps, the upper cover plate electrode pair puts in order and is broadband electrode-arrowband electrode, and then the lower cover slip electrode pair puts in order and is arrowband electrode-broadband electrode.
The microfluid that the present invention proposes drives with the mixed structure using method as follows:
1. electrode tip I 7 and electrode tip II 8 are received respectively on the two poles of the earth of first AC power, apply the AC power I of frequency and adjustable amplitude value joint to it; Electrode tip III 9 and electrode tip IV 10 are received respectively on the two poles of the earth of second AC power, apply the AC power II of frequency and adjustable amplitude value joint to it;
2. open AC power I, make fluid in the microchannel from microchannel one end to the motion of the microchannel other end, open AC power II, direction is opposite when making fluid motion in the microchannel with unlatching AC power I.Open AC power I or AC power II as required, the microfluid of needs mixing is driven into the microchannel zone at electrode pair place.
3. open AC power I and AC power II simultaneously, apply identical supply frequency and voltage, make microfluid mixed in the microchannel zone at electrode pair place.
4. according to the different in kind of microfluid in the requirement of Microfluidic Mixing degree and the microchannel, duration, supply frequency and voltage magnitude in the control step 3 make that ducted microfluid is fully mixed.
5. according to the direction of motion requirement of microfluid, close AC power I or AC power II, utilize AC power II or AC power I will drive out the microchannel zone at electrode pair place through the microfluid that mixes.
The invention has the beneficial effects as follows: by in microchannel, making the two arrays of electrodes comb-shape electrode structure opposite,, can control the mixed process of microfluid in the microchannel, improve the mixing efficiency of microfluid adding under the action of alternative electric field to orientation; In addition, the microchannel matrix material adopts dimethyl silicone polymer (PDMS), and using glass or silicon chip be cover plate up and down, realizes the integrated and mass making of Microfluidic Mixing chip easily.
Description of drawings:
Fig. 1 drives and mixed structure based on the microfluid of comb electrode
The A-A view of Fig. 2 Fig. 1
Fig. 3 comb-shape electrode structure schematic diagram
Among the figure, 1-upper cover plate, 2-broadband electrode I, 3-arrowband electrode I, 4-lower cover slip, 5-broadband electrode II, 6-arrowband electrode II, 7-electrode tip I, 8-electrode tip II, 9-microchannel matrix.
The specific embodiment:
Specific embodiment 1:
Consult Fig. 1, Fig. 2, a kind of microfluid that present embodiment proposes drives and mixed structure, upper cover plate 1 material is a glass, the broadband electrode I 2 and arrowband electrode I 3 materials that are positioned at upper cover plate 1 are platinum, lower cover slip 4 is a glass, the broadband electrode II 5 and arrowband electrode II 6 materials that are positioned on the lower cover slip 4 are platinum, and the thickness of platinum electrode is 100 nanometers.
The broadband electrode I 2 that is positioned on the upper cover plate 1 is 15 microns with the width that is positioned at the broadband electrode II 5 on the lower cover slip 4, and the arrowband electrode I 3 that is positioned on the upper cover plate 1 is 5 microns with the width that is positioned at the arrowband electrode II 6 on the lower cover slip 4.
Being positioned at that electrode pair on the upper cover plate 1 puts in order is arrowband electrode-broadband electrode from left to right, and totally 20 pairs of electrodes are formed arrays of comb electrodes; Being positioned at that electrode pair on the lower cover slip 4 puts in order is broadband electrode-arrowband electrode from left to right, and totally 20 pairs of electrodes are formed arrays of comb electrodes.
Spacing between broadband electrode and the arrowband electrode is 5 microns, and the spacing between the electrode pair is 25 microns.
This microfluid that the present invention proposes drives with the mixed structure course of work as follows:
1. electrode tip I 7 and electrode tip II 8 are received respectively on the two poles of the earth of first AC power; Electrode tip III 9 and electrode tip IV 10 are received respectively on the two poles of the earth of second AC power;
2. open AC power I, applying frequency to it is 2000Hz, and amplitude is the AC power I of 5V, and then fluid moves in microchannel, and the microfluid media drive that needs are mixed is to comb electrode area.
3. open AC power I and AC power II simultaneously, applying frequency simultaneously for two AC powers is 2000Hz, and amplitude is the AC power of 5V, and then microfluid is mixed in the microchannel zone at electrode pair place.
4. continue 30 seconds the 3rd time in step, the microfluid in the microchannel is fully mixed.
5. close AC power II, the microfluid that makes AC power I drive through mixing moves in microchannel, and microfluid is driven out the microchannel zone at electrode pair place.
Specific embodiment 2:
The another kind of microfluid that present embodiment proposes drives and mixed structure, upper cover plate 1 material is a glass, the broadband electrode I 2 and arrowband electrode I 3 materials that are positioned at upper cover plate 1 are platinum, platinum electrode thickness is 80 nanometers, lower cover slip 4 is a silicon chip, the broadband electrode II 5 and arrowband electrode II 6 materials that are positioned on the lower cover slip 4 are metallic aluminium, and the aluminium thickness of electrode is 80 nanometers.
Being positioned at that electrode pair on the upper cover plate 1 puts in order is broadband electrode-arrowband electrode from left to right, and totally 50 pairs of electrodes are formed arrays of comb electrodes; Being positioned at that electrode pair on the lower cover slip 4 puts in order is arrowband electrode-broadband electrode from left to right, and totally 50 pairs of electrodes are formed arrays of comb electrodes.
The broadband electrode I 2 that is positioned on the upper cover plate 1 is 15 microns with the width that is positioned at the broadband electrode II 5 on the lower cover slip 4, and the arrowband electrode I 3 that is positioned on the upper cover plate 1 is 3 microns with the width that is positioned at the arrowband electrode II 6 on the lower cover slip 4.
Spacing between broadband electrode and the arrowband electrode is 5 microns, and the spacing between the electrode pair is 20 microns.
This microfluid that the present invention proposes drives with the mixed structure course of work as follows:
1. electrode tip I 7 and electrode tip II 8 are received respectively on the two poles of the earth of first AC power; Electrode tip III 9 and electrode tip IV 10 are received respectively on the two poles of the earth of second AC power;
2. open AC power I, applying frequency to it is 1500Hz, and amplitude is the AC power I of 3V, and then fluid moves in microchannel, and the microfluid media drive that needs are mixed is to comb electrode area.
3. open AC power I and AC power II simultaneously, applying frequency simultaneously for two AC powers is 1500Hz, and amplitude is the AC power of 3V, and then microfluid is mixed in the microchannel zone at electrode pair place.
4. continue the 3rd voltage time that goes on foot 3 minutes, the microfluid in the microchannel is fully mixed.
5. close AC power I, the microfluid that makes AC power II drive through mixing moves in microchannel, and microfluid is driven out the microchannel zone at electrode pair place.
Claims (7)
1. a microfluid drives and mixed structure, comprises pectinate texture electrode pair and lower cover slip (4) on pectinate texture electrode pair on upper cover plate (1), the upper cover plate (1), microchannel matrix (9), the lower cover slip (4) successively; Be separated by on the upper cover plate (1) arranging some broadband electrode I (2) and etc. the arrowband electrode I (3) of number, all broadband electrode I (2) are joined together to form pectinate texture and receive electrode tip I (7), all arrowband electrode I (3) are joined together to form pectinate texture and receive electrode tip II (8), and each forms one group of electrode pair to adjacent broadband electrode I (2) and arrowband electrode I (3); Be separated by on the lower cover slip (4) arranging some broadband electrode II (5) and etc. the arrowband electrode II (6) of number, all broadband electrode II (5) are joined together to form pectinate texture and receive electrode tip III (9), all arrowband electrode II (6) are joined together to form pectinate texture and receive electrode tip IV (10), and each forms one group of electrode pair to adjacent broadband electrode II (5) and arrowband electrode II (6); Electrode pair arrangement on the upper cover plate (1) puts in order opposite with the electrode pair on the lower cover slip (4); Having a kind of material in upper cover plate (1) or the lower cover slip (4) at least is transparent medium.
2. a microfluid as claimed in claim 1 drives and mixed structure, it is characterized in that, electrode pair on the described upper cover plate (1) puts in order and is that arrowband electrode-broadband electrode, the electrode pair on the described lower cover slip (2) put in order and is broadband electrode-arrowband electrode.
3. a microfluid as claimed in claim 1 drives and mixed structure, it is characterized in that, electrode pair on the described upper cover plate (1) puts in order and is that broadband electrode-arrowband electrode, the electrode pair on the described lower cover slip (2) put in order and is arrowband electrode-broadband electrode.
4. a microfluid as claimed in claim 1 drives and mixed structure, it is characterized in that described upper cover plate (1) material is silicon or glass.
5. a microfluid as claimed in claim 1 drives and mixed structure, it is characterized in that described lower cover slip (4) material is glass or silicon chip.
6. a microfluid as claimed in claim 1 drives and mixed structure, it is characterized in that described microchannel matrix (9) material is dimethyl silicone polymer (PDMS).
7. a microfluid as claimed in claim 1 drives the using method with mixed structure, may further comprise the steps:
Step 1. is received electrode tip I (7) and electrode tip II (8) respectively on the two poles of the earth of first AC power, applies the AC power I of frequency and adjustable amplitude value joint to it; Electrode tip III (9) and electrode tip IV (10) are received respectively on the two poles of the earth of second AC power, apply the AC power II of frequency and adjustable amplitude value joint to it;
Step 2. is opened AC power I, make fluid in the microchannel from microchannel one end to the other end motion of microchannel; Open AC power II, the direction of motion is opposite when making fluid motion in the microchannel with unlatching AC power I.Open AC power I or AC power II as required, the microfluid of needs mixing is driven into the microchannel zone at electrode pair place.
Step 3. is opened AC power I and AC power II simultaneously, applies identical supply frequency and voltage, and then microfluid is mixed in the microchannel zone at electrode pair place.
Step 4. is according to the different in kind of microfluid in the requirement of Microfluidic Mixing degree and the microchannel, and duration, supply frequency and the voltage magnitude of control step 3 make that ducted microfluid is fully mixed.
Step 5. is closed AC power I or AC power II according to the direction of motion requirement of microfluid, utilizes AC power II or AC power I will drive out the microchannel zone at electrode pair place through the microfluid that mixes.
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| CNA2008100173664A CN101301989A (en) | 2008-01-22 | 2008-01-22 | Microfluid drive and mixed structure, and use method thereof |
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| CNA2008100173664A CN101301989A (en) | 2008-01-22 | 2008-01-22 | Microfluid drive and mixed structure, and use method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101497006B (en) * | 2009-01-15 | 2011-04-20 | 宁波大学 | Digital microfluid micro-mixer and mixing method |
| CN101559914B (en) * | 2009-05-15 | 2011-09-21 | 中国科学院上海微系统与信息技术研究所 | Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| CN102725060A (en) * | 2009-12-02 | 2012-10-10 | 独立行政法人科学技术振兴机构 | Flow path device and sample processing device including same |
| CN104767354A (en) * | 2015-03-19 | 2015-07-08 | 华南理工大学 | Electrofluid power micropump based on double-pole-piece composite electric field |
| CN109647273A (en) * | 2019-01-31 | 2019-04-19 | 山东省农业机械科学研究院 | Liquid device for controlling uniformity in a kind of pipeline |
| WO2022061713A1 (en) * | 2020-09-25 | 2022-03-31 | 京东方科技集团股份有限公司 | Microfluidic chip and microfluidic system |
-
2008
- 2008-01-22 CN CNA2008100173664A patent/CN101301989A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101497006B (en) * | 2009-01-15 | 2011-04-20 | 宁波大学 | Digital microfluid micro-mixer and mixing method |
| CN101559914B (en) * | 2009-05-15 | 2011-09-21 | 中国科学院上海微系统与信息技术研究所 | Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| CN102725060A (en) * | 2009-12-02 | 2012-10-10 | 独立行政法人科学技术振兴机构 | Flow path device and sample processing device including same |
| CN102725060B (en) * | 2009-12-02 | 2015-09-02 | 国立研究开发法人科学技术振兴机构 | Flow circuit device and comprise the sample processing device of flow circuit device |
| CN104767354A (en) * | 2015-03-19 | 2015-07-08 | 华南理工大学 | Electrofluid power micropump based on double-pole-piece composite electric field |
| CN109647273A (en) * | 2019-01-31 | 2019-04-19 | 山东省农业机械科学研究院 | Liquid device for controlling uniformity in a kind of pipeline |
| WO2022061713A1 (en) * | 2020-09-25 | 2022-03-31 | 京东方科技集团股份有限公司 | Microfluidic chip and microfluidic system |
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Open date: 20081112 |