CN101299076B - Optical fibre bundle and light source apparatus - Google Patents
Optical fibre bundle and light source apparatus Download PDFInfo
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- CN101299076B CN101299076B CN200810090071XA CN200810090071A CN101299076B CN 101299076 B CN101299076 B CN 101299076B CN 200810090071X A CN200810090071X A CN 200810090071XA CN 200810090071 A CN200810090071 A CN 200810090071A CN 101299076 B CN101299076 B CN 101299076B
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Abstract
A fiber bundle comprises a first fiber bundle part and a second fiber bundle part, wherein the first fiber bundle part comprises a centralizing function fiber bundle part, for arranging a plurality of fibers into a bundle at one side of a light outgoing end, causing a plurality of incident light (L1) entering a plurality of fibers to exit; and an average function fiber part, provided with fibers for causing emergent light from the centralizing function fiber bundle part exiting evenly. The second fiber part arranges a plurality of average function fiber parts of the first fiber part into bundles at one side of the light emergent end, so as to cause the emergent light from a plurality of the first fiber parts to exit. The light emergent end of the centralizing function fiber bundle part is bunted against the light incident end of the average function fiber part.
Description
Technical field
The present invention relates to a kind of light supply apparatus that makes light gather the fibre bundle of also outgoing and have this fibre bundle.
Background technology
Fibre bundle is to make a plurality of optical fiber bunchys and processed terminal part to form, and uses the light supply apparatus of fibre bundle to be applied to spectral analysis, liquid crystal display, exposure sources etc.Require fibre bundle to have to high-density to gather, the function of the uniform light of outgoing.
As the technology of gathering to high-density, studied the method that as far as possible makes thin footpath optical fiber bunchy.Patent documentation 1 discloses following fibre bundle: in laser emitting end one side of fibre bundle, the MIN interval do not affected each other with the landscape mode of the laser that transmits on a plurality of cores configures a plurality of optical fiber, uses than the covering of a plurality of core low-refractions and covers around it.And patent documentation 2 discloses the light supply apparatus that uses following fibre bundle: a plurality of optical fiber that will consist of the different large-diameter portion of cladding diameter and minor diameter part are at minor diameter part one side bunchy.In patent documentation 2, record: by making the cladding diameter d of minor diameter part
2Cladding diameter d for large-diameter portion
11/2
0.5Below, the arranging density of a plurality of optical fiber of raising, compare with the homogeneous cladding diameter, realizes the optical power density (with reference to the 0025th section) more than 2 times.
And, as the technology of the uniform light of outgoing, be included in the optical system such as exit end one side configuration glass bar, fly's-eye lens of fibre bundle and make it the method for homogenizing, but due to the needs optical system, it forming complexity, long-time stability are insufficient.Relative with it, by optical system, do not realize homogenizing, and studied by light source one side, controlling the method that incident optical power makes the emergent light equalization.Patent documentation 3 discloses following fibre bundle: in a plurality of optical fiber of bunchy, the incident optical power of the light source of incident can be adjusted according to each optical fiber or each and group corresponding to exit end position.And patent documentation 4 discloses following fibre bundle: make the incident light unification be input to a plurality of optical fiber, so that the luminous power of a plurality of optical fiber of bunchy is different in each optical fiber.
Patent documentation 1: Japanese patent laid-open 11-23867 communique
Patent documentation 2: Japanese Patent Laid-Open 2006-301121 communique
Patent documentation 3: Japanese Patent Laid-Open 2003-322730 communique
Patent documentation 4: Japanese Patent Laid-Open 2004-37720 communique
According to the method for patent documentation 1 and patent documentation 2, can make the optical fiber bunchy in thin footpath, but not only need the trickle processing of the optical fiber that is difficult to process, and along with the propelling in thin footpath, process the difficulty that also becomes, and the intensity of optical fiber self also can descend, thereby can make the difficulty that becomes such as cable processing.Especially, longer its difficulty of optical fiber is larger, and fibre bundle length, its design freedom can descend.
And, the fibre bundle of patent documentation 3 can according to each optical fiber or and each group corresponding to the position of exit end adjust arbitrarily the outgoing pattern, but the therefore light of outgoing with required light quantity distribution, but need to be to all light source configuration light amount control devices corresponding with a plurality of optical fiber, perhaps when not using light amount control device, for the specification that makes a plurality of light sources is required light quantity distribution, need to make it different, the device construction complexity.And the fibre bundle of patent documentation 4 is for unified input incident light, high-power smooth optically focused is to incident end face, so incident end face high temperature, and the fiber optic materials decline can cause hydraulic performance decline.For this phenomenon, in patent documentation 4, dispel the heat at incident section configuration metal bar etc., but not only device construction becomes complicated, and do not put down in writing any concrete numerical value that radiating effect is relevant, how do not know to have the radiating effect of degree.
Summary of the invention
The present invention produces in view of the above fact, but its purpose is to provide a kind of optical fiber to gather to high-density and uniform irradiation, device construction is simple, process and be easy to fibre bundle.
Fibre bundle of the present invention has the 1st fibre bundle section and the 2nd fibre bundle section, described the 1st fibre bundle section has: aggregation function fibre bundle section, a plurality of optical fiber is arranged and bunchy in light exit side one side of this optical fiber, gathered outgoing so that incide respectively a plurality of incident lights of a plurality of optical fiber, with average active optical fiber section, make the emergent light equalization ground outgoing from this aggregation function fibre bundle section, described the 2nd fibre bundle section, the average function optical fiber section of a plurality of the 1st fibre bundle sections is arranged and bunchy in light exit side one side of this average function optical fiber section, so that gather outgoing from the emergent light of a plurality of the 1st fibre bundle sections, wherein, average function optical fiber section consists of following optical fiber: this optical fiber is at least in the light-incident end of average function optical fiber section, core with the equal above size in light outgoing zone in the light exit side face with aggregation function fibre bundle section, the light incident side butt of the light exit side of aggregation function fibre bundle section and average active optical fiber section, aggregation function fibre bundle section and average active optical fiber section can load and unload.
Preferably, above-mentioned the 2nd fibre bundle section, in the light exit side face of the 2nd fibre bundle section, arrange above-mentioned average function optical fiber section bunchy in the mode of combining closely one-dimensionally.
Preferably, a plurality of optical fiber of above-mentioned aggregation function fibre bundle section, in the light exit side face of above-mentioned aggregation function fibre bundle section, so that the mode of combining closely in two dimension shape ground, cross section is arranged also bunchy.
Preferably; the light incident side of the light exit side of above-mentioned aggregation function fibre bundle section and above-mentioned average function optical fiber section; via the butt be used to suppressing this light exit side and the bonding protective medium of this light incident side, above-mentioned aggregation function fibre bundle section and above-mentioned average function optical fiber section can be via above-mentioned protective medium loading and unloading.The fibre bundle of described structure is preferably applied to the situation that above-mentioned incident light is the light of wavelength 190nm～530nm.
Wherein, " be used to suppressing the bonding protective medium of light exit side and light incident side " refers to; when two end faces are in physics butt state at normal temperatures, prevent between the material of two end faces in abutting part producing chemical reaction and because of bonding protective mediums such as meltings; while after the load heavy with 500g makes light exit side and light incident side butt, leaving or while from abutting part, starting to relatively move; suppress bonding; making in abutting part, is λ/(λ is the starting of oscillation wavelength of the light of incident) below 2 at the attachment of two end faces generations or the concave-convex surface of attachment.
Above-mentioned protective medium preferably contains fluoride, and further preferred above-mentioned protective medium contains from by YF
3, LiF, MgF
2, NaF, LaF
3, BaF
2, CaF
2, and AlF
3At least a fluoride of selecting in the group who forms.
Fibre bundle of the present invention, preferably, the light incident side butt of at least one optical fiber in a plurality of optical fiber of the light exit side of the 2nd aggregation function fibre bundle section and the above-mentioned aggregation function fibre bundle of formation section, above-mentioned the 2nd aggregation function fibre bundle section arranges a plurality of optical fiber bunchy in exit end one side of this optical fiber, so that incide respectively a plurality of incident lights of the plurality of optical fiber, gather outgoing, above-mentioned at least one optical fiber has than the large core in the zone of the light outgoing in the light exit side face of above-mentioned the 2nd aggregation function fibre bundle section in the light-incident end of this optical fiber, above-mentioned at least one optical fiber and above-mentioned the 2nd aggregation function fibre bundle section can load and unload.
Light supply apparatus of the present invention is characterised in that to have: the fibre bundle of the invention described above; A plurality of light sources; With light incident unit, will incide from the light of the plurality of light source each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle section of above-mentioned fibre bundle.
Fibre bundle of the present invention has the 1st fibre bundle section and the 2nd fibre bundle section, and the 1st fibre bundle section has: aggregation function fibre bundle section, a plurality of optical fiber is arranged and bunchy in light exit side one side; With average active optical fiber section, make the emergent light equalization ground outgoing from aggregation function fibre bundle section, the 2nd fibre bundle section, bunchy is arranged in light exit side one side by the average function optical fiber section of a plurality of the 1st fibre bundle sections, wherein, average function optical fiber section consists of following optical fiber: this optical fiber at least in light-incident end, has the core of the equal above size in light outgoing zone in the light exit side face with aggregation function fibre bundle section.
According to above-mentioned structure, in the optical fiber of the core with the size more than equal with the light outgoing of aggregation function fibre bundle section zone, each light equalization of concentrating in aggregation function fibre bundle section, therefore can be from the average light of light exit side outgoing of average function optical fiber section, and pass through the adjustment of the fiber lengths of average function optical fiber section, can guarantee the light that outgoing is average.Further, the light by average function optical fiber section equalization can be gathered a plurality of and with required arranged in patterns outgoing, pattern outgoing high density that therefore can be required, the light of high evenness.
And, the light incident side butt of the light exit side of aggregation function fibre bundle section and average active optical fiber section.That is, without complicated optical system, control module etc., and can make the light equalization of gathering, device construction is simple and easy.Further, can load and unload aggregation function fibre bundle section and average active optical fiber section, therefore during the changes such as aggregation degree of the optical fiber followed of specification change or during fault, can be corresponding to change place, fault place, change any one of aggregation function fibre bundle section and average active optical fiber section.Therefore, design freedom increases, and is easy to process.
The accompanying drawing explanation
Fig. 1 means the fibre bundle of the embodiment the present invention relates to and has the sectional view of structure of the light supply apparatus of this fibre bundle.
Fig. 2 is the amplification sectional view of abutting part of the light incident side of the light exit side of aggregation function fibre bundle section of fibre bundle of Fig. 1 and average active optical fiber section.
Fig. 3 is the synoptic diagram of the light-incident end of the light exit side face of aggregation function fibre bundle section of fibre bundle of Fig. 1 and average active optical fiber section.
Fig. 4 (a) reaches the figure of the arrangement in the light exit side face that (b) means aggregation function fibre bundle section.
Fig. 5 (a)～(d) means the figure of the arrangement of the average function optical fiber section in the light exit side face of the 2nd fibre bundle section.
Fig. 6 is the sectional view of abutting part of the optical fiber of abutting part combination.
Fig. 7 is the sectional view of abutting part of the optical fiber of abutting part breakage.
Fig. 8 means the figure of the relation of the absorption coefficient of pulse laser of wavelength 248nm of oxidation film and fluoride films and damage threshold.
Fig. 9 is the perspective cross-sectional slice for the protection of the major part of the light device of the evaluation of the light output characteristics of the asynchronous emergent light of film.
Figure 10 means that the thickness of diaphragm is the figure of rheological parameters' change with time of light output of the emergent light of λ/2, λ/4, λ/6 o'clock.
Figure 11 means that the thickness of diaphragm is the figure of rheological parameters' change with time of light output of the emergent light of λ/6 and λ/12 o'clock.
Figure 12 means the figure of the rheological parameters' change with time that the light of the emergent light the when film build method of diaphragm is vapour deposition method and ion auxiliary law is exported.
Figure 13 means the sectional view of the formation when the aggregation function fibre bundle section that makes fibre bundle shown in Figure 1 is multistage structure.
Figure 14 is the amplification sectional view of abutting part of the light incident side of the light exit side of the 2nd aggregation function fibre bundle section of fibre bundle of Figure 13 and aggregation function fibre bundle section.
Figure 15 is from the wild pattern of the myopia of the emergent light of the fibre bundle of embodiment 1.(a) being 4 passages while lighting, is (b) situation of 1 passage while lighting.
Embodiment
(fibre bundle, light supply apparatus)
With reference to accompanying drawing, the light supply apparatus of the embodiment the present invention relates to is described.Fig. 1 means the perspective cross-sectional slice of the structure of the light supply apparatus of present embodiment and fibre bundle.Fig. 1 example the fibre bundle that 12 optical fiber are gathered, in Fig. 1, the ratio of each several part has been carried out suitable change in order to be easy to identify.
As shown in Figure 1, the light supply apparatus 2 of present embodiment has: fibre bundle 1; A plurality of light sources 20; With light incident unit 21, make to incide from the incident light L1 of a plurality of light source 20 outgoing each light incident side 31 of a plurality of optical fiber 30 of the aggregation function fibre bundle section 3 of fibre bundle 1.Light supply apparatus 2 makes to gather and outgoing by fibre bundle 1 from the incident light L1 of a plurality of light sources 20.
In the present embodiment, light incident unit 21 is single core SC connectors, with the identical number of light source 20 numbers, to be arranged on connector box 22.In other parts except the part of light exit side 62 sides of the interior up-winding fiber bundle 1 of connector box 22, the light incident side 31 of a plurality of optical fiber 30 of the aggregation function fibre bundle section 3 of formation fibre bundle 1 is connected to each SC connector.
The part of light exit side 62 sides of the 2nd fibre bundle section 6 of the fibre bundle 1 covered by protection tube 60 is stretched out from the optical emission exit 23 of connector box 22, and FC sleeve pipe 63 is installed on light exit side 62.
A plurality of optical fiber 30 in aggregation function fibre bundle section 3 and the 2nd fibre bundle section 6 and the bundle of average function optical fiber section 4, by by optical fiber with required arranged in patterns after, with bonding agent, fix and manufacture.Heat resisting temperature corresponding to light source that preferably has and use as bonding agent.When the heat resisting temperature required surpasses 300 ℃, use the heat-resistant adhesive of mineral-type.
The light incident side 41 of the light exit side 32 of aggregation function fibre bundle section 3 and average active optical fiber section 4 is inserted into respectively in sleeve pipe (ferrule) 30a, 40a (in Fig. 1, omitting diagram), via protective medium 51, utilizes the optical conenctor butt in sleeve 50 (holding member).Therefore, aggregation function fibre bundle section 3 and average active optical fiber section 4 can load and unload.The butt pressure of abutting part is preferably 4.9N～11.8N.
Two end faces that are inserted into sleeve pipe 30a and 40a are polished processing, and its end surface shape so long as connect the few shape of loss and get final product, is not particularly limited, and comprise that hemisphere is planar, plane etc.During as sleeve pipe 30a and 40a use SC sleeve pipe, can use the SC connector as sleeve 50.
Fig. 2 is the amplification sectional view of abutting part of the light incident side 41 of the light exit side 32 of aggregation function fibre bundle section 3 of Fig. 1 and average active optical fiber section 4, and Fig. 3 is the synoptic diagram of the light-incident end 41a of the light exit side face 32a of aggregation function fibre bundle section 3 of Fig. 1 and average active optical fiber section 4.As shown in Figure 3, the optical fiber 40 of average function optical fiber section 4 is at least at light-incident end 41a, has the core 41r of the equal above size of light outgoing zone 32r in the light exit side face 32a with aggregation function fibre bundle section 3.By described structure, all emergent lights that average function optical fiber section 4 receives from aggregation function fibre bundle section 3, and outgoing fifty-fifty.
The material of a plurality of optical fiber 30 is not particularly limited, and comprises with SiO
2, quartz is the category of glass optical fiber etc. of major component, can select suitable material according to the wavelength of incident light L1.The kind of optical fiber is not particularly limited, and considers the application to light source etc., preferably multimode optical fiber.
A plurality of optical fiber 30 forms aggregation function fibre bundle section 3, and therefore in order to gather more to high-density, preferably its fibre diameter is thinner footpath.But, the thinner footpath of optical fiber, it is more difficult to process, and fiber lengths, from the angle of difficult treatment, the rate that manufactures a finished product, is also had to shorter, has the restriction on these design freedoms.And as described in the background art, the cable processing of the fibre bundle after very thin optical fiber high density is gathered is very difficult.Therefore, preferably by the thick optical fiber of diameter, form and gather structure as far as possible.The fibre bundle 1 of present embodiment is that the secondary that the further bunchy of average function optical fiber section 4 gathers is gathered to structure, and this average function optical fiber section 4 makes the average outgoing of emergent light from aggregation function fibre bundle section 3.Therefore, when the light quantity required was determined, this secondary gathers structure to be compared with the common single structure that gathers, and the number of the optical fiber once gathered can be less.That is, compare with the single structure that gathers, can form the fibre bundle section 3 that gathers by bigbore optical fiber.For example, gather under structure single, while gathering the optical fiber of external diameter 50 μ m left and right, in structure shown in Figure 1, can make external diameter is 80 μ m left and right.If have the fibre diameter of this degree, fiber lengths can be tractable 50cm～1m left and right.
And, when the optical fiber number of gathering is many, for example, while surpassing 20, be difficult for processing, the amount of the bonding agent used while therefore making the optical fiber bunchy easily produces inequality, because of this bonding inequality, while grinding the light exit side face of fibre bundle, exert an influence, may make grinding state unstable.As mentioned above, fibre bundle 1 can reduce the number of the optical fiber gathered in aggregation function fibre bundle section 3, therefore can be difficult to produce bonding inequality.Further, for the requirement of the densification of aggregation degree, be multistage structure by making following aggregation function fibre bundle section, can make one to gather radical in the radical that keeps tractability, improve aggregation degree.
In aggregation function fibre bundle section 3, the Pareto diagram of a plurality of optical fiber 30 is not particularly limited, but if Fig. 4 (a) and (b) shown in concentric circles combine closely (two-dimentional shape) and during the arrangement of bunchy, be easy to make the optical fiber bunchy in thin footpath, thereby preferably.The Pareto diagram of the average function optical fiber section 4 of final outgoing pattern in the light exit side 62 of the 2nd fibre bundle section 6 determines, therefore in fibre bundle 1, can be by the arrangement of the concentric circles easily gathered bunchy.
Average function optical fiber section 4 consists of a root multimode fiber 40, its material is not particularly limited, owing to being the average outgoing of emergent light made from the aggregation function fibre bundle section 3 that a plurality of optical fiber 30 bunchys are formed, therefore preferably with the optical fiber of a plurality of optical fiber 30 same materials.
As mentioned above, aggregation function fibre bundle section 3 has gathered thin footpath optical fiber, so high density because of difficult treatment, can't make fiber lengths oversize while gathering.Average function optical fiber section 4 makes the emergent light of the aggregation function fibre bundle section 3 of freely a plurality of optical fiber formations, by the interference that makes the optical fiber 40 consisted of multimode optical fiber produces in the leaded light process light, the interaction between pattern etc., and outgoing fifty-fifty, so the length of optical fiber 40 is preferably longer.Therefore, can adjust the fibre bundle entire length by average function optical fiber section.Consider the light loss in leaded light, the length of fibre bundle 40 is preferably below the above 5m of 10cm, further preferably below the above 5m of 1m.
Emergent light from average function optical fiber section 4 is measured its intensity distributions by near-sighted wild pattern, evenness higher (with reference to Figure 15 (a) of embodiment 1).Therefore, even the structure of the 1st fibre bundle section 5 is only arranged, also can provide the high fibre bundle of evenness of emergent light.
The light exit side of fibre bundle 1 is the light exit side 62 of the 2nd fibre bundle section 6.Therefore, from the outgoing pattern of the emergent light L2 of fibre bundle 1, can change according to the arrangement of the optical fiber 40 of the average function optical fiber section 4 in light exit side 62.Fig. 5 (a)～(d) means the example of the Pareto diagram of optical fiber 40.
For example, all when radiation source is used, as Fig. 5 (a) or (b), the Pareto diagram arrangement optical fiber 40 of combining closely with the one dimension shape gets final product using the catoptrons of long four jiaos.Only with thin footpath optical fiber gather Fig. 5 (a) or (b) shown in pattern the time, more difficult because processing, be easy to become the outgoing pattern that inactive area is many, consequently, be easy to become the poor light source of evenness.As mentioned above, the fibre bundle 1 of present embodiment, it in aggregation function fibre bundle section 3, is the arrangement of the concentric circles easily gathered, by the optical fiber 40 that makes the average function optical fiber section 4 that tractable bore is large, be required arrangement bunchy, can form the outgoing pattern, therefore manufacture simply, but and the good light of outgoing evenness.
And, as shown in Fig. 5 (d), from the situations such as a plurality of light of outgoing position outgoing of leaving, in each eye point, but the high light of outgoing evenness.
But, the applicant confirms: in fibre bundle 1, to the large light of energy density, when particularly the short-wavelength light below 450nm carries out leaded light or while carrying out the UV cleaning be used to the polluter of the exit end of removing optical fiber, in abutting part, constituent material (quartzy, the SiO of the light-incident end 41a of the light exit side face 32a of aggregation function fibre bundle section 3 and average active optical fiber section 4
2Deng) produce some reaction and paste, while separating afterwards, the part breakage of stickup, light loss increase, and further become the state that can not re-use.While because of loading and unloading, producing the end face breakage like this, can't load and unload.
Fig. 6 mean to optical fiber and glass carry out UV clean after, with the load of about 500g, make cross section and the glass butt of this optical fiber, placed the approximately bearing surface of the optical fiber 80 after 100 hours.The 81st, covering, the 82nd, core.The 89th, after cleaning, make the quartz contained in optical fiber 80 and glass, place that oxide reacts by butt, extruding optical fiber 80 and glass (omit and illustrate), be the integrated part of optical fiber 80 and glass.When point of response was integrated, when optical fiber 80 and glass were left, point of response was subject to very macrolesion, or point of response is attached to the cross section of optical fiber 80 or on glass.In addition, the surface roughness Ra=2[nm of the optical fiber before butt].This phenomenon also occurs when by optical conenctor, making the optical fiber butt.And above-mentioned phenomenon is at surface roughness Ra<5[nm] time is easy to occur, further when the light to the large short wavelength of energy density carries out leaded light, is easy to occur.
Fig. 7 means to make the light exit side face of the glass optical fiber 80 of glass butt external diameter 80 μ m, core diameter 60 μ m, the damage of irradiating after the laser of 500 hours wavelength 405nm, output 150mW the outgoing end face of the glass optical fiber 80 while leaving.In Fig. 7, white point is partly the place of rear breakage of sustaining damage.
As can be known from Fig. 6, Fig. 7; the light that energy density is high is in the situation that light source is used; for example incident light L1 is the light time of wavelength 190nm～530nm; preferably make protective medium 51 between light exit side 32 and light incident side 41, this protective medium 51 is bonding be used to the light incident side 41 of the light exit side 32 that suppresses aggregation function fibre bundle 3 and average active optical fiber section 4.Situation when below explanation protective medium 51 is film body.
Diaphragm (protective medium) the 51st, the film body of film forming on the light-incident end 41a of average function optical fiber section 4, bonding be used to the light incident side 41 of the light exit side 32 that suppresses aggregation function fibre bundle section 3 and average active optical fiber section 4.But diaphragm 51 direct formation of film at surfaces, on light-incident end 41a, also can pass through the auxiliary film film forming.
Further, the light loss that the existence of preferred diaphragm 51 causes is the smaller the better, the therefore preferred material less to the light wavelength light absorption of leaded light.Various fluoride films when Fig. 8 means to use the pulse laser of wavelength 248nm and the absorption coefficient of oxidation film and the relation of its damage threshold (are quoted " High damage threshold fluoride UV mirrors made by Ion BeamSputtering ", J.Dijion, et., al., SPIE vol.3244, pp406-418,1998).Therefore as can be known from this chart, with respect to ultraviolet light, the damage threshold of fluoride films is larger, from the angle of light absorption, as diaphragm 51 preferred fluorinated things.Further, when the light of guided wave is ultraviolet light, as shown in the chart, and in fluoride films, YF
3, LiF etc. damage threshold larger, preferably use.
In the present embodiment, diaphragm 51 film forming on the light-incident end 41a of average function optical fiber section 4, but but also film forming is on the light exit side face 32a of aggregation function fibre bundle section 3, or film forming is at light-incident end 41a and light exit side face 32a on both.
The light loss that the existence of diaphragm 51 causes, except the impact of the material that is subject to said protection film 51, also is subject to the thickness impact.Therefore, the thickness that preferably light loss do not exerted an influence of the thickness of diaphragm 51.As the main cause of the light loss in diaphragm 51, comprise and reflect the loss produced, the loss that reaches the absorption generation.Therefore, the thickness of diaphragm 51 is preferably considered to reflect and absorb on the impact of light loss and is determined.
In order to make to reflect the minimization of loss of generation; when film forming has diaphragm 51 on any one of the light class origin end face 32a of the light-incident end 41a of average function optical fiber section 4 or aggregation function fibre bundle section 3; optical path length (d * the N of the optical guided wave direction of diaphragm 51; wherein d is the thickness of optical guided wave direction, and N is the refractive index of diaphragm 51) and preferably met following formula (1) by the light wavelength λ of leaded light.
d×N＝(λ/2)×n…(1)
(wherein n is the integer more than 1)
When film forming had diaphragm 51 on both at light-incident end 41a and light exit side face 32a, when the diaphragm 51 of film forming had same refractive index on both, in formula (1), d was that the total film thickness of diaphragm 51 gets final product.But on both during film forming, in order to make because of butt, not react between the diaphragm of film forming on two end faces or integrated etc., the superiors that on each end face, the diaphragm 51 of film forming preferably is positioned at most surface at least consist of different materials.In this case, the thickness of the diaphragm 51 of the upper film forming of light exit side 32a is d
f, same refractive index is N
f, the thickness of the diaphragm 51 of film forming is d on light incident side 41a
g, same refractive index is N
gThe time, preferably meet following formula (2).
(d
f×N
f)+(d
g×N
g)＝(λ/2)×n…(2)
(wherein n is the integer more than 1)
In order to reduce, absorb the loss produced, the preferred thickness of diaphragm 51 is thinner.The luminous energy of the larger film of thickness absorbs larger, so diaphragm 51 degenerates because of the energy heat absorbed, and is easy to produce the variable color of accompanying with it, crackle etc.Therefore, preferred n is 1 in above-mentioned formula (1) and (2).But, according to the influence degree absorbed loss, to compare with the impact of reflection, the impact of absorption is larger.Now, in above-mentioned formula (1) and (2), under the thin thickness of the thickness than n=1 the time, can reduce light loss.
In order to study the preferred thickness of diaphragm 51, produce light device shown in Figure 9 90, the rheological parameters' change with time of the light output of the emergent light while measuring the diaphragm 51 that uses different thickness.As shown in the figure, light device 90 consists of optical fiber 91a, 911b, sleeve pipe 92a, 92b, sleeve 93 etc., in sleeve 93, makes to be inserted into optical fiber 91a, 91b in each sleeve pipe via diaphragm 51 butts of thickness d.In bearing surface, it is planar that the end of sleeve pipe is ground to hemisphere, and diaphragm 51 film forming are on the end face of optical fiber 91a mono-side.
The thickness d that uses diaphragm 51 as λ/2 ,/4, the light device 90 of λ/6, measure when the laser of wavelength 405nm, output 160mW is incided to optical fiber 91a, from the rheological parameters' change with time of the light output of the emergent light of optical fiber 91b.The film build method of diaphragm 51 is used vapour deposition method.Figure 10 means the figure of this measurement result, and the longitudinal axis means the ratio of the output valve of emergent light with respect to the output valve of incident light.Now, laser is by the zone of the diameter 60 μ m in each film.
As shown in figure 10, thickness d is less, the light output decline fewer (being that light loss is fewer) of emergent light.And, during with each diaphragm 51 after the microscopic examination experiment, substantially do not find the cosmetic variation of the film of d=λ/6, but the film of d=λ/4 and λ/2 has been confirmed the variable color of laser by the zone of part.Further, the film of d=λ/2 has been confirmed the crackle of film at the periphery of variable color part.The variable color of seeing in the film of d=λ/2 and d=λ/4 is considered to that the melting (heat is degenerated) of the film that the heat due to laser causes causes.According to this result, thickness d is larger, and film is larger to the energy absorption of laser, membranous because this absorption changes, and it is large that light loss becomes.
And Figure 11 means that making the thickness of diaphragm 51 is the MgF2 film result of measuring the rheological parameters' change with time of light loss value the same as said determination of d=λ/6 and λ/12.The film forming of diaphragm 51 is undertaken by the ion auxiliary law.As shown in figure 11, in the film of d=λ/6 and d=λ/12, the variation pattern of light output is basic identical, and the rate of descent of the light output of the emergent light after 1000 hours all is less than 10%.
According to this result; in the situation that the light that diaphragm 51 is MgF2 film, incident is the laser of wavelength 405nm, output 160mW; in impact on light loss; with the impact of reflection, compare; the impact absorbed is larger; if the thickness d of diaphragm 51 is that λ/below 6, the rate of descent of the light of the emergent light after 1000 hours output is controlled to such an extent that be less than 10%, comparatively preferred.
Reflection on the impact of light loss and absorb on the ratio of the impact of light loss because of the output of laser, wavelength, and the material of diaphragm 51 different; existence is preferably the situation of the thickness while meeting formula (1) or formula (2), and also having preferred thickness d is the following situations in λ/6.Therefore but the energy density of the light of wavelength 190nm～530nm is larger, output, the thickness d of diaphragm 51 are preferably λ/below 6 although also depend on.In addition, in abutting part, when film forming had diaphragm 51 on both at light-incident end and light gasing surface, thickness was the total (d=df+dg) of thickness of the diaphragm 51 of film forming on both.
The film build method of diaphragm 51 is restriction not, but, for the light loss at the interface between the end face that reduces diaphragm 51 and film forming, preferably before film forming, can carry out by the clean film build method of film forming face.And the compactness of film is higher, the membranous variation that while making the large optical guided wave of optical energy density, the energy absorption of the light of diaphragm 51 itself causes is fewer, but therefore preferably film forming be the film build method of finer and close film.But as before film forming, cleaning by film forming face and film forming, be the film build method that compactness is high, comprise ion auxiliary law, ion cladding process, sputtering method etc.
Figure 12 means to use the diaphragm 51 (MgF2 film) of the thickness λ of vapour deposition method and each method film forming of ion auxiliary law/6, the result of measuring the rheological parameters' change with time of light loss value the same as said determination.As shown in figure 12, compare with vapour deposition method, while using the diaphragm 51 by ion auxiliary law film forming, the decline of light output is less, therefore preferably uses.
The 2nd gathers fibre bundle section 7 has the structure same with the aggregation function fibre bundle section 3 of fibre bundle 1, and the structure of the abutting part during multipolarity is also the same with fibre bundle 1.Therefore, load and unload the same with fibre bundle 1, and due to by the multipolarity of aggregation function fibre bundle section, so can gather to high-density light.In Figure 13, mean that aggregation function fibre bundle section is the situation of secondary structure, by same structure, can increase aggregation function fibre bundle section, with further multipolarity.
And; the same with the abutting part of aggregation function fibre bundle section 3 and average active optical fiber section 4; to the high light of energy density, when especially the short-wavelength light below 450nm carries out leaded light, preferably make between the light incident side 31 of at least one optical fiber 30 of protective medium 51 in a plurality of optical fiber 30 of the light exit side 72 of the 2nd aggregation function fibre bundle section 7 and formation aggregation function fibre bundle section 3.
As above form fibre bundle 1.
According to described structure, in the optical fiber 40 had with the equal above big or small core 41r of the light outgoing of aggregation function fibre bundle section 3 zone 32r, each light equalization of gathering in aggregation function fibre bundle section 3, therefore can be from the average light of light exit side 42 outgoing of average function optical fiber section 4, and, by the fiber lengths adjustment of average function optical fiber section 4, can guarantee the length of fibre bundle.Further, can gather a plurality of light by average function optical fiber section 4 equalizations, with required arranged in patterns outgoing, therefore can make the light of high density and high evenness with required pattern outgoing.
And, light incident side 41 butts of the light exit side of aggregation function fibre bundle section 3 32 and average active optical fiber section 4.That is, without complicated optical system, control module etc., and can make the light equalization of gathering, further, can load and unload aggregation function fibre bundle section 3 and average active optical fiber section 4, so device construction be simple.And, owing to can loading and unloading aggregation function fibre bundle section 3 and average active optical fiber section 4, during the changes such as the aggregation degree of the optical fiber that specification change is followed or during fault, can, corresponding to change place, fault place, change any one of 4 ones of aggregation function fibre bundle section 3 and average active optical fibers.Therefore, design freedom increases, and is easy to process.
(design alteration)
In the present embodiment, light supply apparatus 2 be take the situation of a part of having accommodated fibre bundle 1 in the connector box 22 connected with the SC connector of light source 20 same number and is illustrated as example, but is not defined as the structure with connector box 22.And light incident unit 21 is not restriction also, is not defined as the SC connector.
And, in the present embodiment, the situation when protective medium 51 is film body has been described, but has not been limited to film body.
(embodiment)
The embodiment the present invention relates to is described.
(embodiment 1)
The fibre bundle that following manufacture is shown in Figure 1.
At first, as the optical fiber of aggregation function fibre bundle section, 12 of the quartzy class multimode glass fibers of the long 1m of preparation optical fiber, core diameter 60 μ m, external diameter 80 μ m, at an end bunchy, produce three aggregation function fibre bundle sections by every four optical fiber.Bunchy is as shown in Fig. 4 (a), and 4 optical-fiber two-dimensional shapes are fixed by bonding agent after combining closely and arranging the ground bunchy.
Then, as the optical fiber of average function optical fiber section, prepare the quartzy class multimode optical fiber of 3 core diameter 205 μ m, external diameter 250 μ m, make equally an end bunchy of 3 optical fiber.The arrangement of bunchy is different from aggregation function fibre bundle section, is the arrangement that the wire shown in Fig. 5 (a) is combined closely (one dimension shape), and the FC sleeve pipe has been installed on exit end.In the light-incident end of each average function optical fiber section film forming by MgF
2The diaphragm formed.
After being inserted into the light incident side of the light incident side of aggregation function fibre bundle section and light exit side, average function optical fiber section in the SC sleeve pipe, by the SC connector, make the light exit side of aggregation function fibre bundle section and the light incident side butt of average active optical fiber section, obtain the overall channel number and be 12 fibre bundle.
At first, the average behavior of the average function optical fiber section of this fibre bundle is estimated.In the fibre bundle of 12 passages of manufacturing, for the 1st a fibre bundle section (4 passage), at 1 passage (1 aggregation function fibre bundle section optical fiber), while lighting and 4 passages (4 aggregation function fibre bundle section optical fiber) while lighting, carry out the evaluation of the wild image of myopia (near-sighted wild pattern) of emergent light.Incident light is used the laser of wavelength 405nm, output 150mW.Result as shown in figure 15.Figure 15 (a) is the wild images of the myopia of whole passages (4 passage) while lighting, and is (b) the myopia wild image of 1 passage while lighting, and the longitudinal axis means the maximal value of emergent light is made as 1.0, everybody deposits output light with respect to peaked strength ratio.
As shown in figure 15, when 4 passages are lighted and 1 passage while lighting, all can obtain substantially average outgoing figure at the in-core of average function optical fiber section.Therefore, can confirm the light gathered by average function optical fiber outgoing fifty-fifty.
The fibre bundle of 12 passages of manufacturing is to have the fibre bundle of 3 the linear alignments of the 1st fibre bundle of the emergent light that evenness is high.And the exit end of the 1st fibre bundle is the exit end of heavy caliber multimode optical fiber, therefore be easy to process.Therefore, compare with the existing fibre bundle by a bunchy of unmanageable 12 thin footpath optical fiber, can obtain the emergent light of the high evenness that inactive area is few.
Further, when the wild image of myopia when the fiber lengths that makes average function optical fiber section is changed in the scope of 1～6m compared equally, no matter fiber lengths, can obtain substantially equal characteristic.
(embodiment 2)
As the optical fiber of average function optical fiber section, use the optical fiber less than embodiment 1 core diameter (core diameter 205 μ m, external diameter 250 μ m), the manufacture fibre bundle uses the same method.The optical fiber of average function optical fiber section is compared with embodiment 1, and caliber size diminishes, but while carrying out the evaluating characteristics of the emergent light the same with embodiment 1, can obtain the emergent light of the characteristic basic the same with embodiment 1.
(embodiment 3)
The optical fiber that makes aggregation function fibre bundle section is 21, and the overall channel number is 21, in addition produce fibre bundle the same as embodiment 2.
While carrying out the evaluating characteristics of the emergent light the same with embodiment 1, can obtain the emergent light with embodiment 1 basic identical characteristic, even increase the passage number, the characteristic while lighting with single channel when all passages are lighted is substantially similar.
Fibre bundle of the present invention preferably carries the light guide of use, the uses such as light source that exposure machine is used, liquid crystal display is used as printed circuit board.
Claims (10)
1. a fibre bundle, have the 1st fibre bundle section and the 2nd fibre bundle section,
Described the 1st fibre bundle section has: aggregation function fibre bundle section, a plurality of optical fiber is arranged and bunchy in light exit side one side of this optical fiber, and so that incide respectively the incident light of a plurality of wavelength 190nm～530nm of above-mentioned a plurality of optical fiber, gather outgoing; With average active optical fiber section, make the emergent light equalization ground outgoing from this aggregation function fibre bundle section,
Described the 2nd fibre bundle section, arrange the above-mentioned average function optical fiber section of a plurality of above-mentioned the 1st fibre bundle sections bunchy in light exit side one side of this average function optical fiber section, so that gather outgoing from the emergent light of a plurality of above-mentioned the 1st fibre bundle sections,
Described fibre bundle is characterised in that,
Above-mentioned aggregation function fibre bundle section and above-mentioned average function optical fiber section comprise quartz or SiO
2,
Above-mentioned average function optical fiber section consists of following optical fiber: this optical fiber at least in the light-incident end of above-mentioned average function optical fiber section, has the core of the equal above size in light outgoing zone in the light exit side face with above-mentioned aggregation function fibre bundle section,
The light incident side of the light exit side of above-mentioned aggregation function fibre bundle section and above-mentioned average function optical fiber section, via the butt be used to suppressing this light exit side and the bonding protective medium of this light incident side,
Above-mentioned aggregation function fibre bundle section and above-mentioned average function optical fiber section can be via above-mentioned protective medium loading and unloading,
The optical path length of the optical guided wave direction of above-mentioned protective medium is that λ/below 6, wherein, λ is above-mentioned incident light wavelength.
2. fibre bundle according to claim 1, is characterized in that, above-mentioned the 2nd fibre bundle section arranges above-mentioned average function optical fiber section bunchy in the mode of combining closely one-dimensionally in the light exit side face of the 2nd fibre bundle section.
3. fibre bundle according to claim 1 and 2, is characterized in that, a plurality of optical fiber of above-mentioned aggregation function fibre bundle section, in the light exit side face of above-mentioned aggregation function fibre bundle section, so that the mode of combining closely in two dimension shape ground, cross section is arranged also bunchy.
4. fibre bundle according to claim 1, is characterized in that, the length of above-mentioned average function optical fiber section is more than 10cm.
5. fibre bundle according to claim 1, is characterized in that, above-mentioned protective medium contains fluoride.
6. fibre bundle according to claim 5, is characterized in that, above-mentioned protective medium contains from by YF
3, LiF, MgF
2, NaF, LaF
3, BaF
2, CaF
2, and AlF
3At least a fluoride of selecting in the group who forms.
7. fibre bundle according to claim 1, is characterized in that,
Described fibre bundle also has the 2nd aggregation function fibre bundle section, the light incident side butt of at least one optical fiber in a plurality of optical fiber of the light exit side of the 2nd aggregation function fibre bundle section and the above-mentioned aggregation function fibre bundle of formation section, above-mentioned the 2nd aggregation function fibre bundle section arranges a plurality of optical fiber bunchy in exit end one side of this optical fiber, so that incide respectively a plurality of incident lights of the plurality of optical fiber, gather outgoing
Above-mentioned at least one optical fiber has than the large core in the zone of the light outgoing in the light exit side face of above-mentioned the 2nd aggregation function fibre bundle section in the light-incident end of this optical fiber,
Above-mentioned at least one optical fiber and above-mentioned the 2nd aggregation function fibre bundle section can load and unload.
8. according to right, want 7 described fibre bundles, it is characterized in that,
The light incident side of at least one optical fiber in a plurality of optical fiber of the light exit side of above-mentioned the 2nd aggregation function fibre bundle section and the above-mentioned aggregation function fibre bundle of formation section, via the butt be used to suppressing this light exit side and the bonding protective medium of this light incident side,
Above-mentioned the 2nd aggregation function fibre bundle section and above-mentioned at least one optical fiber can be via above-mentioned protective medium loading and unloading.
9. light supply apparatus is characterized in that having:
Fibre bundle claimed in claim 1;
A plurality of light sources; With
Light incident unit, will incide from the light of above-mentioned a plurality of light sources each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle section of above-mentioned fibre bundle.
10. light supply apparatus is characterized in that having:
Fibre bundle claimed in claim 7;
A plurality of light sources; With
Light incident unit, will incide from the light of above-mentioned a plurality of light sources each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle section of above-mentioned fibre bundle.
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| JP2007-096070 | 2007-04-02 | ||
| JP2007096070A JP2008256765A (en) | 2007-04-02 | 2007-04-02 | Fiber bundle and light source device |
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| CN101299076B true CN101299076B (en) | 2013-11-27 |
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| JP6125786B2 (en) * | 2012-09-28 | 2017-05-10 | 有限会社ジェイ・アイ・エンジニアリング | Optical component, light guide member usable for optical component, and light irradiation device |
| JP6480680B2 (en) * | 2014-08-02 | 2019-03-13 | 株式会社アドテックエンジニアリング | Illuminance ratio changing method and exposure method |
| JP2017224461A (en) * | 2016-06-15 | 2017-12-21 | 国立研究開発法人産業技術総合研究所 | Light irradiation device and optical fiber path used for the light irradiation device |
| JP6652618B2 (en) * | 2018-10-11 | 2020-02-26 | 株式会社アドテックエンジニアリング | Illuminance ratio changing method and exposure method |
| WO2023233548A1 (en) * | 2022-05-31 | 2023-12-07 | 日本電信電話株式会社 | Ultraviolet light irradiation system and ultraviolet light irradiation method |
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| CN1573410A (en) * | 2003-06-02 | 2005-02-02 | 富士胶片株式会社 | Laser device |
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| JP2001291922A (en) * | 2000-04-06 | 2001-10-19 | Matsushita Electric Ind Co Ltd | Laser diode excitation device |
| JP2002196192A (en) * | 2000-12-25 | 2002-07-10 | Kyocera Corp | Line monitor |
| JP4731787B2 (en) * | 2002-04-10 | 2011-07-27 | 富士フイルム株式会社 | Exposure head and exposure apparatus |
| JP2007041342A (en) * | 2005-08-04 | 2007-02-15 | Fujifilm Corp | Multiplexing light source |
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