CN101299076A - Optical fibre bundle and light source apparatus - Google Patents
Optical fibre bundle and light source apparatus Download PDFInfo
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- CN101299076A CN101299076A CNA200810090071XA CN200810090071A CN101299076A CN 101299076 A CN101299076 A CN 101299076A CN A200810090071X A CNA200810090071X A CN A200810090071XA CN 200810090071 A CN200810090071 A CN 200810090071A CN 101299076 A CN101299076 A CN 101299076A
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Abstract
A fiber bundle comprises a first fiber bundle part and a second fiber bundle part, wherein the first fiber bundle part comprises a centralizing function fiber bundle part, for arranging a plurality of fibers into a bundle at one side of a light outgoing end, causing a plurality of incident light (L1) entering a plurality of fibers to exit; and an average function fiber part, provided with fibers for causing emergent light from the centralizing function fiber bundle part exiting evenly. The second fiber part arranges a plurality of average function fiber parts of the first fiber part into bundles at one side of the light emergent end, so as to cause the emergent light from a plurality of the first fiber parts to exit. The light emergent end of the centralizing function fiber bundle part is bunted against the light incident end of the average function fiber part.
Description
Technical field
The present invention relates to a kind of light supply apparatus that makes light gather the fibre bundle of also outgoing and have this fibre bundle.
Background technology
Fibre bundle is to make a plurality of optical fiber bunchys and processed terminal part to form, and uses the light supply apparatus of fibre bundle to be applied to spectral analysis, LCD, exposure sources etc.Require fibre bundle to have to high-density to gather, the function of the uniform light of outgoing.
As the technology of gathering to high-density, studied the method that as far as possible makes thin footpath optical fiber bunchy.Patent documentation 1 discloses following fibre bundle: in laser emitting end one side of fibre bundle, the MIN interval that does not influence each other with the landscape mode of the laser that transmits on a plurality of cores disposes a plurality of optical fiber, uses the covering than a plurality of core low-refractions to cover around it.And patent documentation 2 discloses the light supply apparatus that uses following fibre bundle: a plurality of optical fiber that will be made of different large-diameter portion of cladding diameter and minor diameter part are at minor diameter part one side bunchy.Record in the patent documentation 2: by making the cladding diameter d of minor diameter part
2Cladding diameter d for large-diameter portion
11/2
0.5Below, improve the arranging density of a plurality of optical fiber, compare with the homogeneous cladding diameter, realize the optical power density (with reference to the 0025th section) more than 2 times.
And, as the technology of the uniform light of outgoing, be included in the optical system such as exit end one side configuration glass bar, fly's-eye lens of fibre bundle and make it the method for homogenizing, but owing to need optical system, it constituting complexity, long-time stability are insufficient.Relative with it, do not realize homogenizing, and studied by make the method for emergent light equalization at light source one side control incident optical power by optical system.Patent documentation 3 discloses following fibre bundle: the incident optical power of the light source of incident can be adjusted according to the group of each optical fiber or each and exit end position correspondence in a plurality of optical fiber of bunchy.And patent documentation 4 discloses following fibre bundle: make the incident light unification be input to a plurality of optical fiber, so that the luminous power of a plurality of optical fiber of bunchy is different in each optical fiber.
Patent documentation 1: Japanese patent laid-open 11-23867 communique
Patent documentation 2: the Jap.P. spy opens the 2006-301121 communique
Patent documentation 3: the Jap.P. spy opens the 2003-322730 communique
Patent documentation 4: the Jap.P. spy opens the 2004-37720 communique
According to the method for patent documentation 1 and patent documentation 2, can make the optical fiber bunchy in thin footpath, but not only need to be difficult to the trickle processing of processed optical fiber, and along with the propelling of thin footpathization, handle the difficulty that also becoming, and the intensity of optical fiber self can descend also, thereby can make the difficulty that becomes such as cable processing.Especially, long more its difficulty of optical fiber is big more, and fibre bundle length, its design freedom can descend.
And, the fibre bundle of patent documentation 3 can according to each optical fiber or and each group of the position correspondence of exit end adjust the outgoing pattern arbitrarily, but the therefore light of outgoing with required light quantity distribution, but need dispose light amount control devices to all light sources with a plurality of optical fiber correspondences, perhaps when not using light amount control device, for the specification that makes a plurality of light sources is required light quantity distribution, need make it different, the device construction complexity.And the fibre bundle of patent documentation 4 is for unified input incident light, and high-power smooth optically focused is to incident end face, so incident end face high temperatureization, and the fiber optic materials decline can cause performance to descend.At this phenomenon, dispel the heat at incident section configuration metal bar etc. in the patent documentation 4, but not only device construction becomes complicated, and do not put down in writing the relevant any concrete numerical value of radiating effect, how do not know to have the radiating effect of degree.
Summary of the invention
The present invention produces in view of the above fact, but its purpose is to provide a kind of optical fiber to gather to high-density and uniform irradiation, device construction is simple, handle and be easy to fibre bundle.
Fibre bundle of the present invention has the 1st fibre bundle portion and the 2nd fibre bundle portion, described the 1st fibre bundle portion has: aggregation function fibre bundle portion, a plurality of optical fiber are arranged and bunchy in light exit side one side of this optical fiber, gathered outgoing so that incide a plurality of incident lights of a plurality of optical fiber respectively; With average active optical fiber portion, make emergent light equalization ground outgoing from this aggregation function fibre bundle portion, described the 2nd fibre bundle portion, the average function optical fiber portion of a plurality of the 1st fibre bundle portions is arranged and bunchy in light exit side one side of this average function optical fiber portion, so that gather outgoing from the emergent light of a plurality of the 1st fibre bundle portions, wherein, average function optical fiber portion is made of following optical fiber: this optical fiber is at least in the light-incident end of average function optical fiber portion, core with the equal above size in light outgoing zone in the light exit side face with aggregation function fibre bundle portion, the light incident side butt of the light exit side of aggregation function fibre bundle portion and average active optical fiber portion, aggregation function fibre bundle portion and average active optical fiber portion can load and unload.
Preferably, above-mentioned the 2nd fibre bundle portion in the light exit side face of the 2nd fibre bundle portion, arranges above-mentioned average function optical fiber portion and bunchy in the mode of combining closely one-dimensionally.
Preferably, a plurality of optical fiber of above-mentioned aggregation function fibre bundle portion are in the light exit side face of above-mentioned aggregation function fibre bundle portion, so that the mode of combining closely in two dimension shape ground, cross section is arranged also bunchy.
Preferably; the light incident side of the light exit side of above-mentioned aggregation function fibre bundle portion and above-mentioned average function optical fiber portion; the butt via being used to suppress this light exit side and the bonding protective medium of this light incident side, above-mentioned aggregation function fibre bundle portion and above-mentioned average function optical fiber portion can be via above-mentioned protective medium loading and unloading.The fibre bundle of described structure is preferably applied to the situation that above-mentioned incident light is the light of wavelength 190nm～530nm.
Wherein, " being used to suppress light exit side and the bonding protective medium of light incident side " is meant; when two end faces are in physics butt state at normal temperatures, prevent to produce between the material of two end faces in abutting part chemical reaction and because of bonding protective mediums such as fusions; when after the load heavy with 500g makes light exit side and light incident side butt, leaving or when abutting part begins to relatively move; suppress bonding; making in abutting part, is λ/(λ is the starting of oscillation wavelength of the light of incident) below 2 at the attachment of two end faces generations or the concave-convex surface of attachment.
Above-mentioned protective medium preferably contains fluoride, and further preferred above-mentioned protective medium contains from by YF
3, LiF, MgF
2, NaF, LaF
3, BaF
2, CaF
2, and AlF
3At least a fluoride of selecting among the group who constitutes.
Fibre bundle of the present invention, preferably, the light incident side butt of at least one optical fiber in a plurality of optical fiber of the light exit side of the 2nd aggregation function fibre bundle portion and the above-mentioned aggregation function fibre bundle of formation portion, above-mentioned the 2nd aggregation function fibre bundle portion arranges a plurality of optical fiber and bunchy in exit end one side of this optical fiber, gather outgoing so that incide a plurality of incident lights of these a plurality of optical fiber respectively, above-mentioned at least one optical fiber has in the light-incident end of this optical fiber than the big core in the zone of the light outgoing in the light exit side face of above-mentioned the 2nd aggregation function fibre bundle portion, and above-mentioned at least one optical fiber and above-mentioned the 2nd aggregation function fibre bundle portion can load and unload.
Light supply apparatus of the present invention is characterised in that to have: the fibre bundle of the invention described above; A plurality of light sources; With light incident unit, will incide each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle portion of above-mentioned fibre bundle from the light of these a plurality of light sources.
Fibre bundle of the present invention has the 1st fibre bundle portion and the 2nd fibre bundle portion, and the 1st fibre bundle portion has: aggregation function fibre bundle portion, a plurality of optical fiber are arranged and bunchy in light exit side one side; With average active optical fiber portion, make emergent light equalization ground outgoing from aggregation function fibre bundle portion, the 2nd fibre bundle portion, bunchy is arranged in light exit side one side by the average function optical fiber portion of a plurality of the 1st fibre bundle portions, wherein, average function optical fiber portion is made of following optical fiber: this optical fiber has the core of the equal above size in light outgoing zone in the light exit side face with aggregation function fibre bundle portion at least in light-incident end.
According to above-mentioned structure, in the optical fiber of the core that has with the light outgoing of aggregation function fibre bundle portion zone the size more than equal, each light equalization of concentrating in aggregation function fibre bundle portion, therefore can be from the average light of light exit side outgoing of average function optical fiber portion, and pass through the adjustment of the fiber lengths of average function optical fiber portion, can guarantee the light that outgoing is average.Further, the light by average function optical fiber portion equalization can be gathered a plurality of and, pattern outgoing high density that therefore can be required, the light of high evenness with required arranged in patterns outgoing.
And, the light incident side butt of the light exit side of aggregation function fibre bundle portion and average active optical fiber portion.That is, need not complicated optical system, control module etc., and can make the light equalization of gathering, device construction is simple and easy.Further, can load and unload aggregation function fibre bundle portion and average active optical fiber portion, therefore during the changes such as aggregation degree of the optical fiber followed of specification change or during fault, can change any one of aggregation function fibre bundle portion and average active optical fiber portion corresponding to change place, fault place.Therefore, design freedom increases, and is easy to handle.
Description of drawings
Fig. 1 is the sectional view of the structure of the fibre bundle of the embodiment that the present invention relates to of expression and the light supply apparatus with this fibre bundle.
Fig. 2 is the amplification sectional view of abutting part of the light incident side of the light exit side of aggregation function fibre bundle portion of fibre bundle of Fig. 1 and average active optical fiber portion.
Fig. 3 is the synoptic diagram of the light-incident end of the light exit side face of aggregation function fibre bundle portion of fibre bundle of Fig. 1 and average active optical fiber portion.
Fig. 4 (a) and (b) be the figure of the arrangement in the light exit side face of expression aggregation function fibre bundle portion.
Fig. 5 (a)～(d) is the figure of arrangement of the average function optical fiber portion in the light exit side face of expression the 2nd fibre bundle portion.
Fig. 6 is the sectional view of abutting part of the optical fiber of abutting part combination.
Fig. 7 is the sectional view of abutting part of the optical fiber of abutting part breakage.
Fig. 8 is the figure of the relation of the absorption coefficient of pulse laser of wavelength 248nm of expression oxidation film and fluoride films and damage threshold.
Fig. 9 is the perspective cross-sectional slice of major part of light device of evaluation that is used for the light output characteristics of the asynchronous emergent light of diaphragm.
Figure 10 be the thickness of expression diaphragm be λ/2, λ/4, λ/6 o'clock emergent light light output through the time figure that changes.
Figure 11 be the thickness of expression diaphragm be λ/6 and λ/12 o'clock emergent light light output through the time figure that changes.
Figure 12 be the expression diaphragm the emergent light of film build method when being vapour deposition method and ion auxiliary law light output through the time figure that changes.
Figure 13 is the sectional view of the formation of expression when to make the aggregation function fibre bundle portion of fibre bundle shown in Figure 1 be multistage structure.
Figure 14 is the amplification sectional view of abutting part of the light incident side of the light exit side of the 2nd aggregation function fibre bundle portion of fibre bundle of Figure 13 and aggregation function fibre bundle portion.
Figure 15 is the near-sighted wild pattern from the emergent light of the fibre bundle of embodiment 1.(a) being 4 passages when lighting, (b) is the situation of 1 passage when lighting.
Embodiment
(fibre bundle, light supply apparatus)
With reference to accompanying drawing, the light supply apparatus of an embodiment that the present invention relates to is described.Fig. 1 is the perspective cross-sectional slice of the structure of expression light supply apparatus of present embodiment and fibre bundle.Fig. 1 example the fibre bundle that 12 optical fiber are gathered, in Fig. 1, the ratio of each several part has been carried out suitable change in order to be easy to discern.
As shown in Figure 1, the light supply apparatus 2 of present embodiment has: fibre bundle 1; A plurality of light sources 20; With light incident unit 21, make each light incident side 31 of a plurality of optical fiber 30 that incides the aggregation function fibre bundle portion 3 of fibre bundle 1 from the incident light L1 of a plurality of light source 20 outgoing.Light supply apparatus 2 makes the incident light L1 from a plurality of light sources 20 gather and outgoing by fibre bundle 1.
In the present embodiment, light incident unit 21 is single core SC connectors, to be arranged on the connector box 22 with the identical number of light source 20 numbers.Other parts except the part of light exit side 62 sides of up-winding fiber bundle 1 in connector box 22, the light incident side 31 of a plurality of optical fiber 30 of the aggregation function fibre bundle portion 3 of formation fibre bundle 1 is connected to each SC connector.
The part of light exit side 62 sides of the 2nd fibre bundle portion 6 of the fibre bundle 1 that is covered by protection tube 60 is stretched out from the optical emission exit 23 of connector box 22, and FC sleeve pipe 63 is installed on light exit side 62.
The a plurality of optical fiber 30 in aggregation function fibre bundle portion 3 and the 2nd fibre bundle portion 6 and the bundle of average function optical fiber portion 4, by with optical fiber with required arranged in patterns after, make with adhesive.Preferably have and the heat resisting temperature of the light source correspondence used as bonding agent.When the heat resisting temperature that requires surpasses 300 ℃, use the heat-resistant adhesive of mineral-type.
The light exit side 32 of aggregation function fibre bundle portion 3 and the light incident side 41 of average active optical fiber portion 4 are inserted into respectively among sleeve pipe (ferrule) 30a, the 40a (omitting diagram among Fig. 1), utilize the optical conenctor butt via protective medium 51 in sleeve 50 (holding member).Therefore, aggregation function fibre bundle portion 3 and average active optical fiber portion 4 can load and unload.The butt pressure of abutting part is preferably 4.9N～11.8N.
Two end faces that are inserted into sleeve pipe 30a and 40a are by attrition process, and its end surface shape does not have especially and limits so long as connect the few shape of loss and get final product, comprise that hemisphere is planar, plane etc.During as sleeve pipe 30a and 40a use SC sleeve pipe, can use the SC connector as sleeve 50.
Fig. 2 is the amplification sectional view of abutting part of the light incident side 41 of the light exit side 32 of aggregation function fibre bundle portion 3 of Fig. 1 and average active optical fiber portion 4, and Fig. 3 is the synoptic diagram of the light-incident end 41a of the light exit side face 32a of aggregation function fibre bundle portion 3 of Fig. 1 and average active optical fiber portion 4.As shown in Figure 3, the optical fiber 40 of average function optical fiber portion 4 is at least at light-incident end 41a, has the core 41r of the equal above size of light outgoing zone 32r among the light exit side face 32a with aggregation function fibre bundle portion 3.By described structure, all emergent lights that average function optical fiber portion 4 receives from aggregation function fibre bundle portion 3, and outgoing fifty-fifty.
The material of a plurality of optical fiber 30 is not particularly limited, and comprises with SiO
2, quartz is the category of glass optical fiber etc. of major component, can select suitable material according to the wavelength of incident light L1.The kind of optical fiber is not particularly limited, and considers the application to light source etc., preferred multimode optical fiber.
A plurality of optical fiber 30 constitute aggregation function fibre bundle portion 3, and therefore in order to gather more to high-density, preferably its fibre diameter is thinner footpath.But, the more thin footpathization of optical fiber, it is difficult more to handle, and fiber lengths is from the angle of difficult treatment, the rate that manufactures a finished product, and it is short also to have to, and has the restriction on these design freedoms.And as described in the background technology, the cable processing of the fibre bundle after very thin optical fiber high density gathered is difficulty very.Therefore, preferred as far as possible formation by the thick optical fiber of diameter gathers structure.The fibre bundle 1 of present embodiment is that the secondary that average function optical fiber portion 4 further bunchys gather is gathered structure, and this average function optical fiber portion 4 makes the average outgoing of emergent light from aggregation function fibre bundle portion 3.Therefore, when the light quantity that requires was determined, this secondary gathers structure to be compared with the common single structure that gathers, and the number of the optical fiber that once gathers can be less.That is, compare, can form the fibre bundle portion 3 that gathers by bigbore optical fiber with the single structure that gathers.For example, gather under the structure single, when gathering the optical fiber about external diameter 50 μ m, in structure shown in Figure 1, can make external diameter is about 80 μ m.If have the fibre diameter of this degree, then fiber lengths can be about tractable 50cm～1m.
And, when the optical fiber number of gathering for a long time, when for example surpassing 20, be difficult for handling, the amount of employed bonding agent is easy to generate inequality when therefore making the optical fiber bunchy, because of this bonding inequality, exert an influence when grinding the light exit side face of fibre bundle, may make the grinding state instability.As mentioned above, fibre bundle 1 can reduce the number of the optical fiber that gathers in aggregation function fibre bundle portion 3, therefore can be difficult to produce bonding inequality.Further, at the requirement of the densification of aggregation degree, be multistage structure by making following aggregation function fibre bundle portion, can make one to gather radical when keeping the radical of the easy property handled, improve aggregation degree.
In aggregation function fibre bundle portion 3, the Pareto diagram of a plurality of optical fiber 30 is not particularly limited, but if Fig. 4 (a) and (b) shown in concentric circles combine closely (two-dimentional shape) and during the arrangement of bunchy, be easy to make the optical fiber bunchy in thin footpath, thereby preferred.Final outgoing pattern is by the decision of the Pareto diagram of the average function optical fiber portion 4 in the light exit side 62 of the 2nd fibre bundle portion 6, therefore in fibre bundle 1, can be by the arrangement of the concentric circles easily gathered bunchy.
Average function optical fiber portion 4 is made of a root multimode fiber 40, its material is not particularly limited, owing to being the average outgoing of emergent light that makes from the aggregation function fibre bundle portion 3 that a plurality of optical fiber 30 bunchys are constituted, therefore preferably with the optical fiber of a plurality of optical fiber 30 same materials.
As mentioned above, aggregation function fibre bundle portion 3 has gathered thin footpath optical fiber, so high density because of difficult treatment, can't make fiber lengths oversize when gathering.Average function optical fiber portion 4 makes the emergent light of the aggregation function fibre bundle portion 3 of free a plurality of optical fiber formations, by the interference that makes the light that the optical fiber 40 that is made of multimode optical fiber produces in the leaded light process, the interaction between the pattern etc., and outgoing fifty-fifty, so the length of optical fiber 40 is preferably longer.Therefore, can adjust the fibre bundle entire length by average function optical fiber portion.Consider the light loss in the leaded light, the length of fibre bundle 40 is preferably below the above 5m of 10cm, below the further preferred above 5m of 1m.
Emergent light from average function optical fiber portion 4 is measured its intensity distributions by near-sighted wild pattern, evenness higher (with reference to Figure 15 (a) of embodiment 1).Therefore, even the structure of the 1st fibre bundle portion 5 is only arranged, also can provide the high fibre bundle of evenness of emergent light.
The light exit side of fibre bundle 1 is the light exit side 62 of the 2nd fibre bundle portion 6.Therefore, can change according to the arrangement of the optical fiber 40 of the average function optical fiber portion 4 in the light exit side 62 from the outgoing pattern of the emergent light L2 of fibre bundle 1.The example of the Pareto diagram of Fig. 5 (a)～(d) expression optical fiber 40.
For example, when long four jiaos catoptrons were all used as radiation source, as Fig. 5 (a) or (b), the Pareto diagram arrangement optical fiber 40 of combining closely with the one dimension shape got final product.Only with thin footpath optical fiber gather Fig. 5 (a) or (b) shown in pattern the time, difficult because of handling, be easy to become the many outgoing patterns of inactive area, consequently, be easy to become the light source of evenness difference.As mentioned above, the fibre bundle 1 of present embodiment, it in aggregation function fibre bundle portion 3 arrangement of the concentric circles easily gathered, be required arrangement and bunchy by the optical fiber 40 that makes the big average function optical fiber portion 4 of tractable bore, can form the outgoing pattern, therefore make simply, but and the good light of outgoing evenness.
And, shown in Fig. 5 (d), under the situations of leaving such as a plurality of light of outgoing position outgoing, in each eye point, but the high light of outgoing evenness.
But, the applicant confirms: in fibre bundle 1, to the big light of energy density, when particularly the short-wavelength light below the 450nm carries out leaded light or when being used to remove the UV cleaning of polluter of exit end of optical fiber, in abutting part, constituent material (quartzy, the SiO of the light-incident end 41a of the light exit side face 32a of aggregation function fibre bundle portion 3 and average active optical fiber portion 4
2Deng) produce some reaction and paste, when separating afterwards, the part breakage of stickup, light loss increase, and further become the state that can not re-use.When producing the end face breakage because of loading and unloading like this, can't load and unload.
After Fig. 6 represents optical fiber and glass carried out the UV cleaning, make the cross section and the glass butt of this optical fiber, placed the bearing surface of the optical fiber 80 after about 100 hours with the load of about 500g.The 81st, covering, the 82nd, core.The 89th, clean the back and make the quartz that contains in optical fiber 80 and the glass, the place that oxide reacts by butt, extruding optical fiber 80 and glass (omitting diagram), be the incorporate part of optical fiber 80 and glass.When the point of response was integrated, when optical fiber 80 and glass were left, the point of response was subjected to very macrolesion, and perhaps the point of response is attached to the cross section of optical fiber 80 or on glass.In addition, the surface roughness Ra=2[nm of the optical fiber before the butt].This phenomenon also takes place when making the optical fiber butt by optical conenctor.And above-mentioned phenomenon is at surface roughness Ra＜5[nm] time is easy to take place, further is easy to take place when the light to the big short wavelength of energy density carries out leaded light.
Fig. 7 represents to make the damage of the outgoing end face of the glass optical fiber 80 when leaving behind the laser of light exit side face, irradiation 500 hours wavelength 405nm, output 150mW of the glass optical fiber 80 of glass butt external diameter 80 μ m, core diameter 60 μ m.In Fig. 7, white point partly is the damaged place, back that sustains damage.
From Fig. 6, Fig. 7 as can be known; under the situation of the light that energy density is high as the light source use; for example incident light L1 is the light time of wavelength 190nm～530nm; preferably make protective medium 51 between light exit side 32 and light incident side 41, this protective medium 51 is used to suppress light incident side 41 bonding of the light exit side 32 of aggregation function fibre bundle 3 and average active optical fiber portion 4.Situation when below explanation protective medium 51 is film body.
Diaphragm (protective medium) the 51st, the film body of film forming on the light-incident end 41a of average function optical fiber portion 4 is used to suppress light incident side 41 bonding of the light exit side 32 of aggregation function fibre bundle portion 3 and average active optical fiber portion 4.Diaphragm 51 directly film forming also can pass through the auxiliary film film forming on light-incident end 41a.
Further, the light loss that the existence of preferred diaphragm 51 causes is the smaller the better, therefore preferred light wavelength light absorption less material to leaded light.Various fluoride films when Fig. 8 represents to use the pulse laser of wavelength 248nm and the absorption coefficient of oxidation film and the relation of its damage threshold (are quoted " High damage threshold fluoride UV mirrors made by Ion BeamSputtering ", J.Dijion, et., al., SPIE vol.3244, pp406-418,1998).Therefore from this chart as can be known, with respect to ultraviolet light, the damage threshold of fluoride films is bigger, from the angle of light absorption, as diaphragm 51 preferred fluorinated things.Further, when the light of guided wave is ultraviolet light, shown in chart, in fluoride films, YF
3, LiF etc. damage threshold bigger, the preferred use.
In the present embodiment, diaphragm 51 film forming on the light-incident end 41a of average function optical fiber portion 4, but but also film forming is on the light exit side face 32a of aggregation function fibre bundle portion 3, or film forming is at light-incident end 41a and light exit side face 32a on both.
The light loss that the existence of diaphragm 51 causes also is subjected to the thickness influence except the influence of the material that is subjected to said protection film 51.Therefore, the thickness that preferably light loss do not exerted an influence of the thickness of diaphragm 51.As the main cause of the light loss in the diaphragm 51, comprise and reflect the loss that produces, the loss that reaches the absorption generation.Therefore, the thickness of diaphragm 51 is preferably considered to reflect and absorb to the influence of light loss and is determined.
For the minimization of loss that reflection is produced; when film forming has diaphragm 51 on any one of the light class origin end face 32a of the light-incident end 41a of average function optical fiber portion 4 or aggregation function fibre bundle portion 3; optical path length (d * the N of the optical guided wave direction of diaphragm 51; wherein d is the thickness of optical guided wave direction, and N is the refractive index of diaphragm 51) and preferably satisfied following formula (1) by the light wavelength λ of leaded light.
d×N＝(λ/2)×n …(1)
(wherein n is the integer more than 1)
At light-incident end 41a and light exit side face 32a when film forming has diaphragm 51 on both, when the diaphragm 51 of film forming had same refractive index on both, in formula (1), d was that the total film thickness of diaphragm 51 gets final product.But, on both during film forming, between the diaphragm of film forming on two end faces, not reacting or integrated etc. because of butt in order to make, the diaphragm 51 of film forming preferably is positioned at the most surperficial the superiors at least and is made of different materials on each end face.In this case, the thickness of the diaphragm 51 of the last film forming of light exit side 32a is d
f, same refractive index is N
f, the thickness of the diaphragm 51 of film forming is d on light incident side 41a
g, same refractive index is N
gThe time, preferably satisfy following formula (2).
(d
f×N
f)+(d
g×N
g)＝(λ/2)×n …(2)
(wherein n is the integer more than 1)
Absorb the loss that produces in order to reduce, diaphragm 51 preferred thickness are thinner.The luminous energy of the big more film of thickness absorbs big more, so diaphragm 51 degenerates because of the energy heat that absorbs, and is easy to produce the variable color of accompanying with it, crackle etc.Therefore, preferred n is 1 in above-mentioned formula (1) and (2).But, according to the influence degree that absorbs loss, to compare with the influence of reflection, the influence of absorption is bigger.At this moment, in above-mentioned formula (1) and (2), under the thin thickness of the thickness than n=1 the time, can reduce light loss.
In order to study the preferred thickness of diaphragm 51, produce light device shown in Figure 9 90, the light output of the emergent light when measure using the diaphragm 51 of different thickness through the time change.As shown in the figure, light device 90 is made of optical fiber 91a, 911b, sleeve pipe 92a, 92b, sleeve 93 etc., makes the optical fiber 91a, the 91b that are inserted in each sleeve pipe diaphragm 51 butts via thickness d in sleeve 93.In bearing surface, the end of sleeve pipe is ground to hemisphere planar, and diaphragm 51 film forming are on the end face of optical fiber 91a one side.
Use the light device 90 of the thickness d of diaphragm 51 as λ/2, λ/4, λ/6, when measuring laser with wavelength 405nm, output 160mW and inciding optical fiber 91a, from the light output of the emergent light of optical fiber 91b through the time change.The film build method of diaphragm 51 uses vapour deposition method.Figure 10 is the figure of this measurement result of expression, and the longitudinal axis is represented the ratio of the output valve of emergent light with respect to the output valve of incident light.At this moment, laser is by the zone of the about 60 μ m of diameter in each film.
As shown in figure 10, d is more little for thickness, the light output decline few more (being that light loss is few more) of emergent light.And, during with each diaphragm 51 after the microscopic examination experiment, do not find the appearance change of the film of d=λ/6 substantially, but the film of d=λ/4 and λ/2 has been confirmed the variable color of laser by the zone of part.Further, the film of d=λ/2 has been confirmed the crackle of film at the periphery of variable color part.The variable color of seeing in the film of d=λ/2 and d=λ/4 is considered to because the fusion of the film that the heat of laser causes (heat is degenerated) causes.According to this result, thickness d is big more, and film is big more to the energy absorption of laser, and is membranous because of this absorption changes, and it is big that light loss becomes.
And, Figure 11 represent to make the thickness of diaphragm 51 be the MgF2 film of d=λ/6 and λ/12 the same with said determination measure the light loss value through the time result that changes.The film forming of diaphragm 51 is undertaken by the ion auxiliary law.As shown in figure 11, in the film of d=λ/6 and d=λ/12, the variation pattern of light output is basic identical, and the rate of descent of the light output of the emergent light after 1000 hours is all less than 10%.
According to this result; be under the situation of laser of wavelength 405nm, output 160mW at diaphragm 51 for the light of MgF2 film, incident; in the influence to light loss; compare with the influence of reflection; the influence that absorbs is bigger; if the thickness d of diaphragm 51 is that λ/below 6, the rate of descent of the light of the emergent light after 1000 hours output is controlled less than 10%, and is comparatively preferred.
Reflection to the influence of light loss and absorb to the ratio of the influence of light loss because of the output of laser, wavelength, and the material of diaphragm 51 different; have the situation that is preferably the thickness when satisfying formula (1) or formula (2), also having preferred thickness d is the following situations in λ/6.Therefore but the energy density of the light of wavelength 190nm～530nm is bigger, is preferably λ/below 6 though also depend on output, the thickness d of diaphragm 51.In addition, in abutting part, at light-incident end and light gasing surface when film forming has diaphragm 51 on both, thickness is the total (d=df+dg) of thickness of the diaphragm 51 of film forming on both.
The film build method of diaphragm 51 but for the light loss at the interface between the end face that reduces diaphragm 51 and film forming, can carry out by the film build method of the cleaning of film forming face before the preferred film forming without limits.And the compactness of film is high more, and the membranous variation that the energy absorption of the light of diaphragm 51 itself causes when making the big optical guided wave of optical energy density is few more, but therefore preferred film forming is the film build method of finer and close film.But as cleaning by film forming face and film forming before the film forming is the high film build method of compactness, comprises ion auxiliary law, ion cladding process, sputtering method etc.
Figure 12 represents to use the diaphragm 51 (MgF2 film) of thickness λ/6 of vapour deposition method and each method film forming of ion auxiliary law, the same with said determination measure the light loss value through the time result that changes.As shown in figure 12, compare with vapour deposition method, when using the diaphragm 51 by ion auxiliary law film forming, the decline of light output is less, therefore preferred the use.
The 2nd gathers fibre bundle portion 7 has the structure same with the aggregation function fibre bundle portion 3 of fibre bundle 1, and the structure of the abutting part during multipolarity is also the same with fibre bundle 1.Therefore, with fibre bundle 1 the same the loading and unloading, and because with the multipolarity of aggregation function fibre bundle portion, so can gather light to high-density.In Figure 13, expression aggregation function fibre bundle portion is the situation of secondary structure, can increase aggregation function fibre bundle portion by same structure, with further multipolarity.
And; the same with the abutting part of aggregation function fibre bundle portion 3 and average active optical fiber portion 4; to the high light of energy density, when especially the short-wavelength light below the 450nm carries out leaded light, preferably make protective medium 51 between the light exit side 72 of the 2nd aggregation function fibre bundle portion 7 with constitute between the light incident side 31 of at least one optical fiber 30 in a plurality of optical fiber 30 of aggregation function fibre bundle portion 3.
As above constitute fibre bundle 1.
According to described structure, in the optical fiber 40 that has with the equal above big or small core 41r of the light outgoing of aggregation function fibre bundle portion 3 zone 32r, by each light equalization of gathering in the aggregation function fibre bundle portion 3, therefore can be from the average light of light exit side 42 outgoing of average function optical fiber portion 4, and, can guarantee the length of fibre bundle by the fiber lengths adjustment of average function optical fiber portion 4.Further, can gather a plurality of light,, therefore can make the light of high density and high evenness with required pattern outgoing with required arranged in patterns and outgoing by average function optical fiber portion 4 equalizations.
And, the light exit side 32 of aggregation function fibre bundle portion 3 and light incident side 41 butts of average active optical fiber portion 4.That is, need not complicated optical system, control module etc., and can make the light equalization of gathering, further, can load and unload aggregation function fibre bundle portion 3 and average active optical fiber portion 4, so device construction is simple.And, owing to can load and unload aggregation function fibre bundle portion 3 and average active optical fiber portion 4, during changes such as the aggregation degree of the optical fiber that specification change is followed or during fault, can change any one of 4 ones of aggregation function fibre bundle portion 3 and average active optical fibers corresponding to change place, fault place.Therefore, design freedom increases, and is easy to handle.
(design alteration)
In the present embodiment, light supply apparatus 2 is that example is illustrated with the situation of having accommodated the part of fibre bundle 1 in the connector box 22 that has connected with the SC connector of light source 20 same number, but is not defined as the structure with connector box 22.And light incident unit 21 is not defined as the SC connector without limits yet.
And, in the present embodiment, the situation when protective medium 51 is film body has been described, but has not been limited to film body.
(embodiment)
The embodiment that the present invention relates to is described.
(embodiment 1)
The fibre bundle that following manufacturing is shown in Figure 1.
At first, as the optical fiber of aggregation function fibre bundle portion, 12 of the quartzy class multimode glass fibers of the long 1m of preparation optical fiber, core diameter 60 μ m, external diameter 80 μ m at an end bunchy, produce three aggregation function fibre bundle portions with per four optical fiber.Bunchy is shown in Fig. 4 (a), and 4 optical-fiber two-dimensional shapes pass through adhesive after combining closely and arranging the ground bunchy.
Then,, prepare the quartzy class multimode optical fiber of 3 core diameter 205 μ m, external diameter 250 μ m, make an end bunchy of 3 optical fiber equally as the optical fiber of average function optical fiber portion.The arrangement of bunchy is different with aggregation function fibre bundle portion, is the arrangement that the wire shown in Fig. 5 (a) is combined closely (one dimension shape), and the FC sleeve pipe has been installed on exit end.In the light-incident end of each average function optical fiber portion film forming by MgF
2The diaphragm that constitutes.
After being inserted into the light incident side of the light incident side of aggregation function fibre bundle portion and light exit side, average function optical fiber portion in the SC sleeve pipe, make the light exit side of aggregation function fibre bundle portion and the light incident side butt of average active optical fiber portion by the SC connector, acquisition overall channel number is 12 fibre bundle.
At first, the average behavior of the average function optical fiber portion of this fibre bundle is estimated.In the fibre bundle of 12 passages of making, for one the 1st fibre bundle portion (4 passage), when lighting and 4 passages (4 aggregation function fibre bundle portion optical fiber) when lighting, carry out the evaluation of the near-sighted wild image (near-sighted wild pattern) of emergent light at 1 passage (1 aggregation function fibre bundle portion optical fiber).Incident light uses the laser of wavelength 405nm, output 150mW.The result as shown in figure 15.Figure 15 (a) is the near-sighted wild images of whole passages (4 passage) when lighting, and (b) is the near-sighted wild image of 1 passage when lighting, and the longitudinal axis represents that the maximal value with emergent light is made as 1.0, everybody deposits output light is with respect to peaked strength ratio.
As shown in figure 15, when 4 passages are lighted and 1 passage when lighting, all can obtain average substantially outgoing figure at the in-core of average function optical fiber portion.Therefore, can confirm the light outgoing fifty-fifty gathered by average function optical fiber.
The fibre bundle of 12 passages of making is fibre bundles that 3 wire of the 1st fibre bundle with the high emergent light of evenness are arranged.And the exit end of the 1st fibre bundle is the exit end of heavy caliber multimode optical fiber, therefore is easy to handle.Therefore, and the existing fibre bundles of a bunchy of unmanageable 12 thin footpath optical fiber are compared, can be obtained the emergent light of the few high evenness of inactive area.
Further, when the near-sighted wild image the when fiber lengths that makes average function optical fiber portion is changed in the scope of 1～6m compared equally, no matter fiber lengths can obtain equal substantially characteristic.
(embodiment 2)
As the optical fiber of average function optical fiber portion, use the optical fiber littler (core diameter 205 μ m, external diameter 250 μ m) than embodiment 1 core diameter, the manufacturing fibre bundle uses the same method.The optical fiber of average function optical fiber portion is compared with embodiment 1, and caliber size diminishes, but when carrying out the evaluating characteristics of the emergent light the same with embodiment 1, can obtain the emergent light of the characteristic basic the same with embodiment 1.
(embodiment 3)
The optical fiber that makes aggregation function fibre bundle portion is 21, and the overall channel number is 21, in addition with the embodiment 2 the same fibre bundles that produce.
When carrying out the evaluating characteristics of the emergent light the same with embodiment 1, can obtain the emergent light with embodiment 1 basic identical characteristic, even increase the passage number, the characteristic when lighting with single channel when all passages are lighted is similar substantially.
Fibre bundle of the present invention preferably carries the light guide of usefulness, the uses such as light source that exposure machine is used, LCD is used as printed circuit board.
Claims (16)
1. a fibre bundle has the 1st fibre bundle portion and the 2nd fibre bundle portion,
Described the 1st fibre bundle portion has: aggregation function fibre bundle portion, a plurality of optical fiber are arranged and bunchy in light exit side one side of this optical fiber, and gather outgoing so that incide a plurality of incident lights of above-mentioned a plurality of optical fiber respectively; With average active optical fiber portion, make emergent light equalization ground outgoing from this aggregation function fibre bundle portion,
Described the 2nd fibre bundle portion arranges the above-mentioned average function optical fiber portion of above-mentioned a plurality of the 1st fibre bundle portions and bunchy in light exit side one side of this average function optical fiber portion, so that gather outgoing from the emergent light of a plurality of above-mentioned the 1st fibre bundle portions,
Described fibre bundle is characterised in that,
Above-mentioned average function optical fiber portion is made of following optical fiber: this optical fiber has the core of the equal above size in light outgoing zone in the light exit side face with above-mentioned aggregation function fibre bundle portion at least in the light-incident end of above-mentioned average function optical fiber portion,
The light incident side butt of the light exit side of above-mentioned aggregation function fibre bundle portion and above-mentioned average function optical fiber portion,
Above-mentioned aggregation function fibre bundle portion and above-mentioned average function optical fiber portion can load and unload.
2. fibre bundle according to claim 1 is characterized in that, above-mentioned the 2nd fibre bundle portion arranges above-mentioned average function optical fiber portion and bunchy in the mode of combining closely one-dimensionally in the light exit side face of the 2nd fibre bundle portion.
3. fibre bundle according to claim 1 and 2 is characterized in that, a plurality of optical fiber of above-mentioned aggregation function fibre bundle portion are in the light exit side face of above-mentioned aggregation function fibre bundle portion, so that the mode of combining closely in two dimension shape ground, cross section is arranged also bunchy.
4. fibre bundle according to claim 1 is characterized in that, the length of above-mentioned average function optical fiber portion is more than the 10cm.
5. fibre bundle according to claim 1 is characterized in that,
The light incident side of the light exit side of above-mentioned aggregation function fibre bundle portion and above-mentioned average function optical fiber portion, the butt via being used to suppress this light exit side and the bonding protective medium of this light incident side,
Above-mentioned aggregation function fibre bundle portion and above-mentioned average function optical fiber portion can be via above-mentioned protective medium loading and unloading.
6. fibre bundle according to claim 5 is characterized in that, above-mentioned incident light is the light of wavelength 190nm～530nm.
7. fibre bundle according to claim 5 is characterized in that above-mentioned protective medium contains fluoride.
8. fibre bundle according to claim 7 is characterized in that, above-mentioned protective medium contains from by YF
3, LiF, MgF
2, NaF, LaF
3, BaF
2, CaF
2, and AlF
3At least a fluoride of selecting among the group who constitutes.
9. fibre bundle according to claim 1 is characterized in that,
The light incident side butt of at least one optical fiber in a plurality of optical fiber of the light exit side of the 2nd aggregation function fibre bundle portion and the above-mentioned aggregation function fibre bundle of formation portion, above-mentioned the 2nd aggregation function fibre bundle portion arranges a plurality of optical fiber and bunchy in exit end one side of this optical fiber, gather outgoing so that incide a plurality of incident lights of these a plurality of optical fiber respectively
Above-mentioned at least one optical fiber has in the light-incident end of this optical fiber than the big core in the zone of the light outgoing in the light exit side face of above-mentioned the 2nd aggregation function fibre bundle portion,
Above-mentioned at least one optical fiber and above-mentioned the 2nd aggregation function fibre bundle portion can load and unload.
10. fibre bundle according to claim 5 is characterized in that,
The light incident side butt of at least one optical fiber in a plurality of optical fiber of the light exit side of the 2nd aggregation function fibre bundle portion and the above-mentioned aggregation function fibre bundle of formation portion, above-mentioned the 2nd aggregation function fibre bundle portion arranges a plurality of optical fiber and bunchy in exit end one side of this optical fiber, gather outgoing so that incide a plurality of incident lights of these a plurality of optical fiber respectively
Above-mentioned at least one optical fiber has in the light-incident end of this optical fiber than the big core in the zone of the light outgoing in the light exit side face of above-mentioned the 2nd aggregation function fibre bundle portion,
Above-mentioned at least one optical fiber and above-mentioned the 2nd aggregation function fibre bundle portion can load and unload.
11. want 9 described fibre bundles according to right, it is characterized in that,
The light exit side of above-mentioned the 2nd aggregation function fibre bundle portion and constitute the light incident side of at least one optical fiber in a plurality of optical fiber of above-mentioned aggregation function fibre bundle portion, the butt via being used to suppress this light exit side and the bonding protective medium of this light incident side,
Above-mentioned the 2nd aggregation function fibre bundle portion and above-mentioned at least one optical fiber can be via above-mentioned protective medium loading and unloading.
12. fibre bundle according to claim 10 is characterized in that,
The light exit side of above-mentioned the 2nd aggregation function fibre bundle portion and constitute the light incident side of at least one optical fiber in a plurality of optical fiber of above-mentioned aggregation function fibre bundle portion, the butt via being used to suppress this light exit side and the bonding protective medium of this light incident side,
Above-mentioned the 2nd aggregation function fibre bundle portion and above-mentioned at least one optical fiber can be via above-mentioned protective medium loading and unloading.
13. a light supply apparatus is characterized in that having:
The described fibre bundle of claim 1;
A plurality of light sources; With
Light incident unit will incide each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle portion of above-mentioned fibre bundle from the light of above-mentioned a plurality of light sources.
14. a light supply apparatus is characterized in that having:
The described fibre bundle of claim 5;
A plurality of light sources; With
Light incident unit will incide each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle portion of above-mentioned fibre bundle from the light of above-mentioned a plurality of light sources.
15. a light supply apparatus is characterized in that having:
The described fibre bundle of claim 9;
A plurality of light sources; With
Light incident unit will incide each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle portion of above-mentioned fibre bundle from the light of above-mentioned a plurality of light sources.
16. a light supply apparatus is characterized in that having:
The described fibre bundle of claim 10;
A plurality of light sources; With
Light incident unit will incide each light incident side of a plurality of optical fiber of the above-mentioned aggregation function fibre bundle portion of above-mentioned fibre bundle from the light of above-mentioned a plurality of light sources.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-096070 | 2007-04-02 | ||
| JP2007096070A JP2008256765A (en) | 2007-04-02 | 2007-04-02 | Fiber bundle and light source device |
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| Publication Number | Publication Date |
|---|---|
| CN101299076A true CN101299076A (en) | 2008-11-05 |
| CN101299076B CN101299076B (en) | 2013-11-27 |
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|---|---|---|---|
| CN200810090071XA Active CN101299076B (en) | 2007-04-02 | 2008-04-02 | Optical fibre bundle and light source apparatus |
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| Country | Link |
|---|---|
| JP (1) | JP2008256765A (en) |
| CN (1) | CN101299076B (en) |
Cited By (1)
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|---|---|---|---|---|
| CN107526129A (en) * | 2016-06-15 | 2017-12-29 | 国立研究开发法人产业技术综合研究所 | Light irradiation device and the fiber path for the light irradiation device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6125786B2 (en) * | 2012-09-28 | 2017-05-10 | 有限会社ジェイ・アイ・エンジニアリング | Optical component, light guide member usable for optical component, and light irradiation device |
| JP6480680B2 (en) * | 2014-08-02 | 2019-03-13 | 株式会社アドテックエンジニアリング | Illuminance ratio changing method and exposure method |
| JP6652618B2 (en) * | 2018-10-11 | 2020-02-26 | 株式会社アドテックエンジニアリング | Illuminance ratio changing method and exposure method |
| WO2023233548A1 (en) * | 2022-05-31 | 2023-12-07 | 日本電信電話株式会社 | Ultraviolet light irradiation system and ultraviolet light irradiation method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000012933A (en) * | 1998-06-23 | 2000-01-14 | Mitsubishi Electric Corp | Laser apparatus |
| JP2001291922A (en) * | 2000-04-06 | 2001-10-19 | Matsushita Electric Ind Co Ltd | Laser diode excitation device |
| JP2002196192A (en) * | 2000-12-25 | 2002-07-10 | Kyocera Corp | Line monitor |
| JP4731787B2 (en) * | 2002-04-10 | 2011-07-27 | 富士フイルム株式会社 | Exposure head and exposure apparatus |
| JP2004361472A (en) * | 2003-06-02 | 2004-12-24 | Fuji Photo Film Co Ltd | Laser apparatus |
| JP2007041342A (en) * | 2005-08-04 | 2007-02-15 | Fujifilm Corp | Multiplexing light source |
-
2007
- 2007-04-02 JP JP2007096070A patent/JP2008256765A/en not_active Abandoned
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107526129A (en) * | 2016-06-15 | 2017-12-29 | 国立研究开发法人产业技术综合研究所 | Light irradiation device and the fiber path for the light irradiation device |
| CN107526129B (en) * | 2016-06-15 | 2019-12-27 | 国立研究开发法人产业技术综合研究所 | Light irradiation device and optical fiber path used for the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008256765A (en) | 2008-10-23 |
| CN101299076B (en) | 2013-11-27 |
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