CN101295108B - Soft roasting method - Google Patents

Soft roasting method Download PDF

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Publication number
CN101295108B
CN101295108B CN200810098497XA CN200810098497A CN101295108B CN 101295108 B CN101295108 B CN 101295108B CN 200810098497X A CN200810098497X A CN 200810098497XA CN 200810098497 A CN200810098497 A CN 200810098497A CN 101295108 B CN101295108 B CN 101295108B
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China
Prior art keywords
thimble
substrate
glass substrate
heating plate
roasting method
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Expired - Fee Related
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CN200810098497XA
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CN101295108A (en
Inventor
黄郁升
童元鸿
戴嘉萱
杉浦规生
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AU Optronics Corp
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AU Optronics Corp
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Abstract

The invention relates to a soft baking method which comprises the following steps: a substrate is heated by a heating plate, wherein, the heating plate is provided with at least one thimble for supporting the substrate; when the substrate is heated, the position where the thimble supports the substrate is changed. In the invention, the position where the thimble supports the substrate is changed when heating is carried out, and the thimble is not contacted with the same position of the glass substrate for a long time; therefore, the problem of uneven film thickness after drying caused by overhigh local temperature on the glass substrate can be avoided.

Description

Soft roasting method
Technical field
The invention relates to a kind of processing procedure of flat-panel screens, and particularly relevant for a kind of soft roasting method that is applied to make flat-panel screens.
Background technology
In LCD, alignment film is one of key element of control display quality.Alignment film generally is on the pixel electrode, in order to the orientation of control liquid crystal molecule, and the tilt angle (pretilt angle) of required liquid crystal molecule is provided.
The manufacturing of tradition alignment film is to adopt the roller printing technology, and so-called roller printing technology utilizes roller that orientation liquid is coated on the glass substrate exactly, and then dries the solvent in the orientation liquid, to solidify to form alignment film.The roller maintenance is difficult for, orientation liquid expends problems such as too much but this roller printing technology has, and therefore relevant industry replaces traditional roller printing technology with ink-jet printing technology gradually.
Ink-jet printing technology utilizes ink gun and nozzle that orientation liquid is sprayed on the glass substrate exactly, and heat drying forms alignment film again.Yet the employed orientation liquid of ink-jet printing technology viscosity is lower, therefore usually can behind heat drying, produce the phenomenon of uneven thickness.The main cause of this phenomenon is: the non-uniform temperature that the fabricator is applied when heat drying make the orientation liquid of subregion be dried to alignment film, but other part is still liquid situation.Because these liquid orientation liquid can spontaneous flows replenish those dry zones, therefore often let the alignment film of high-temperature area blocked up after drying.Because the phenomenon of this uneven thickness can seriously undermine the display quality of LCD, the fabricator of therefore relevant industry there's no one who doesn't or isn't is devoted to address this problem.
Summary of the invention
The object of the present invention is to provide a kind of soft roasting method, it is in heated substrates, and the position of thimble supporting substrate can change to some extent, to avoid the producing too high phenomenon of local temperature on the substrate.
The objective of the invention is to realize like this, a kind of soft roasting method comprises the following step: with the heating plate heated substrates.Wherein, above-mentioned heating plate has at least one thimble supporting substrate.In addition, in heated substrates, the position of thimble supporting substrate can change to some extent.
From the above mentioned; The position of thimble support glass substrate can change when heating to some extent among the present invention; And same position that can the Long contact time glass substrate, the problem of the dry caudacoria thickness ununiformity that therefore can effectively avoid causing because of local temperature is too high on the glass substrate.
Description of drawings
Figure 1A-1D illustrates the synoptic diagram according to the soft roasting method of one embodiment of the invention.
Fig. 2 A-2C illustrates the synoptic diagram according to the soft roasting method of another embodiment of the present invention.
Fig. 3 A-3D illustrates the synoptic diagram according to the soft roasting method of yet another embodiment of the invention.
Drawing reference numeral:
110: glass substrate
120: orientation liquid
130: thimble
140: lifting mechanism
A: arrow
P: point
Embodiment
General soft roasting method is to come heated substrates with heating plate mostly, and the wet film on the dry solidification substrate thus.And for the position of fixing base in heating process, need be provided with a plurality of thimbles mostly on the general heating plate and come supporting substrate.Yet because these thimbles can be directly conducted to the heat that heating plate produced on the substrate, so substrate and thimble position contacting tend to have higher temperature than other zone.Can know that by above-mentioned prior art the uneven phenomenon of this temperature will cause dry back to produce the uneven problem of thickness.Therefore, the following embodiment of the present invention will disclose a kind of soft roasting method, and it is in heated substrates, and the position of thimble supporting substrate can change to some extent, to avoid the producing too high phenomenon of local temperature on the substrate.
The present invention is a kind of soft roasting method, and this method comprises the following step:
(1) with the heating plate heated substrates, wherein heating plate has at least one thimble supporting substrate.
(2) in heated substrates, change the position of thimble supporting substrate.
Below will lift three embodiment how the above-mentioned step (2) of practical implementation will be described.In following three embodiment, substrate for example can be the glass substrate that is coated with orientation liquid, the semiconductor substrate that is coated with photoresistance or other is coated with the substrate that wet film needs heat drying.Below explanation is to be example with the glass substrate 110 (shown in Figure 1A-3D) that is coated with orientation liquid 120, to clearly demonstrate embodiments of the invention.
Embodiment 1
Figure 1A-1D illustrates the synoptic diagram according to the soft roasting method of one embodiment of the invention.As shown in the figure; The user can coat orientation liquid 120 on the glass substrate 110 earlier; And then this glass substrate 110 is placed on the thimble 130 of heating plate; And utilize heating plate glass substrate 110 (illustrating) like Figure 1A, make that orientation liquid 120 dry solidifications on the glass substrate 110 become alignment film.When glass substrate 110, the user can change the position (some P) of thimble 130 support glass substrates 110 in good time, to avoid the orientation liquid 120 on the P dry too fast, causes dried alignment film uneven thickness.
Particularly, the user can utilize lifting mechanism 140 that glass substrate 110 is lifted away from thimble 130 (illustrating like Figure 1B) earlier in glass substrate 110.Then, change the relative position (illustrating) of glass substrate 110 and thimble 130, and then glass substrate 110 put back on the thimble 130 (illustrate) like Fig. 1 D like Fig. 1 C.Can be found out that by Fig. 1 D this moment, the position of thimble 130 support glass substrates 110 changed, no longer be some P originally.
Though in Figure 1B and Fig. 1 C, the user is the position of thimble 130 fixedly, and move glass substrate 110 according to the direction of arrow A simultaneously; But this does not limit the present invention; The user also can select the position of fixing glass substrate, and moves thimble simultaneously, changes as long as relative position between the two produces.
Embodiment 2
Fig. 2 A-2C illustrates the synoptic diagram according to the soft roasting method of another embodiment of the present invention.Likewise; The user can coat orientation liquid 120 on the glass substrate 110 earlier; And then this glass substrate 110 is placed on the thimble 130 of heating plate; And utilize heating plate glass substrate 110 (illustrating) like Fig. 2 A, make that orientation liquid 120 dry solidifications on the glass substrate 110 become alignment film.The difference of present embodiment and embodiment 1 is: (that is to say because the section shape of the thimble 130 of present embodiment presents the structure of similar zigzag; The root of thimble 130 is to be positioned on the different Z-axises with the top); Therefore the user can change the position of thimble 130 support glass substrates 110 by the mode of rotating thimble 130.
Particularly, the user can utilize lifting mechanism 140 that glass substrate 110 is lifted away from thimble 130 (illustrating like Fig. 2 B) earlier in glass substrate 110.Then, the position of fixing glass substrate 110, and rotate thimble 130 simultaneously, make relative position between the two produce change (illustrating) like Fig. 2 C.Then, glass substrate 110 is put back on the thimble 130.Can find out that by Fig. 2 C because the relative position of thimble 130 and glass substrate 110 changes, so the position of thimble 130 support glass substrates 110 will change to some extent, and can not be some P originally again.
Embodiment 3
Fig. 3 A-3D illustrates the synoptic diagram according to the soft roasting method of yet another embodiment of the invention.The difference of a present embodiment and a last embodiment is: thimble 130 quantity on the heating plate of present embodiment are a plurality of; These thimbles 130 will take turns support glass substrate 110 (illustrating like Fig. 3 A-3D); To avoid thimble 130 Long contact time glass substrates 110, cause the local temperature on the glass substrate 110 too high.
Particularly; The thimble 130 of Fig. 3 A-3D is with quaternate mode, does simple harmonic motion along the direction of vertical glass substrate 110, and wherein on the same group thimble 130 has 90 ° phase differential to each other; That is to say that those thimbles 130 are to contact with glass substrate 110 in regular turn.Should be appreciated that, more than the embodiment lifted be merely illustration, be not in order to restriction the present invention, be familiar with the mode of motion that this art should be looked the thimble 130 of elasticity of demand selection at that time.For instance, when thimble changes when doing simple harmonic motion with the mode of N a group, phase differential each other then can be 360 °/N.
Comprehensive above three embodiment; Because the position of thimble 130 support glass substrates 110 can change when heating to some extent; And same position that can Long contact time glass substrate 110; Therefore can effectively avoid on the glass substrate 110 because of the too high problem that causes of local temperature, for example: dried thickness is uneven.
In addition, in an embodiment of the present invention, it for example is in 20 seconds that the time of thimble 130 lasting contact glass substrates 110 can be controlled at.In other words, surpass 20 seconds in case thimble 130 continues the time of contact glass substrate 110, the user will change the position of thimble 130 support glass substrates 110, produces the too high phenomenon of temperature with the zone of avoiding glass substrate 110 to contact with thimble 130.Should be appreciated that, more than the time parameter lifted all be merely illustration, be not in order to restriction the present invention, be familiar with this art and should look its embodiment of elasticity of demand selection at that time.
Though the present invention discloses with specific embodiment; But it is not in order to limit the present invention; Any those skilled in the art; The displacement of the equivalent assemblies of under the prerequisite that does not break away from design of the present invention and scope, having done, or, all should still belong to the category that this patent is contained according to equivalent variations and modification that scope of patent protection of the present invention is done.

Claims (2)

1. soft roasting method, this method comprises the following step:
Heat a substrate with a heating plate, wherein this heating plate has at least one this substrate of thimble support;
In this substrate of heating, change the position that this thimble supports this substrate;
The step that changes the position of this this substrate of thimble support comprises:
This substrate is lifted away from this thimble;
After this substrate is lifted away from this thimble, change the relative position of this substrate and this thimble;
Behind the relative position that changes this substrate and this thimble, this substrate is put back on this thimble;
The step that changes the relative position of this substrate and this thimble comprises:
In fixing this substrate position, rotate this thimble;
This thimble is that root is positioned at the zigzag structure on the different Z-axises with the top.
2. soft roasting method as claimed in claim 1 is characterized in that: the quantity of this thimble is a plurality of.
CN200810098497XA 2008-05-28 2008-05-28 Soft roasting method Expired - Fee Related CN101295108B (en)

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CN101295108B true CN101295108B (en) 2012-02-08

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014146365A1 (en) * 2013-03-19 2014-09-25 深圳市华星光电技术有限公司 Glass substrate support mechanism for exposure machine

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102085511A (en) * 2010-11-22 2011-06-08 深圳市华星光电技术有限公司 Alignment film drying device and method
CN102863147B (en) * 2012-09-26 2014-10-29 深圳市华星光电技术有限公司 Device and method for baking substrate
CN103676296B (en) * 2013-12-06 2016-08-17 深圳市华星光电技术有限公司 Glass substrate and manufacture method thereof for display
US9382622B2 (en) 2013-12-06 2016-07-05 Shenzhen China Star Optoelectronics Technology Co., Ltd. Glass substrate for display and manufacturing method thereof
CN104090430B (en) * 2014-06-18 2017-01-18 京东方科技集团股份有限公司 Temperature-adjusting shade and polyimide film pre-curing device
CN106526984B (en) * 2017-01-24 2019-10-22 京东方科技集团股份有限公司 Display base plate preparation method and device
CN206573826U (en) * 2017-03-23 2017-10-20 惠科股份有限公司 A kind of jacking apparatus and orientation ultraviolet irradiation machine
CN107315285B (en) * 2017-07-19 2018-07-27 深圳市华星光电半导体显示技术有限公司 A kind of temperature control alignment apparatus
CN108089378B (en) * 2018-01-03 2020-07-07 惠科股份有限公司 Baking method, baking device and baking oven

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014146365A1 (en) * 2013-03-19 2014-09-25 深圳市华星光电技术有限公司 Glass substrate support mechanism for exposure machine

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