CN101294847A - Integrating sphere production method for laser power measurement - Google Patents
Integrating sphere production method for laser power measurement Download PDFInfo
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- CN101294847A CN101294847A CNA2007100976926A CN200710097692A CN101294847A CN 101294847 A CN101294847 A CN 101294847A CN A2007100976926 A CNA2007100976926 A CN A2007100976926A CN 200710097692 A CN200710097692 A CN 200710097692A CN 101294847 A CN101294847 A CN 101294847A
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Abstract
The invention relates to a method for preparing a laser power measurement used integrating sphere, and is characterized in that the method comprises the following steps: step 1, taking a metal ball which has a hollow structure; step 2, depositing a layer of silicon dioxide powder in the hollow cavity of the metal ball; and step 3, oxidizing the silicon oxide powder layer with wet oxygen and dry oxygen alternatively, and sintering the silicon oxide powder layer to form a uniform compact white silicon powder film layer.
Description
Technical field
The present invention relates generally to a kind of photodetection integrating sphere production method, particularly supports the integrating sphere production method for laser power measurement of laser power measurement with light-detecting device.
Background technology
In contemporary optics is measured, be extensive use of light-measuring integrating sphere, as the reflection ratio measuring of optical material, mostly adopt the integrating sphere method.Integrating sphere is called the logical ball of light again, is the complete spherical shell of a hollow.Inwall coating white diffuse reflector, and the diffusion of ball inwall each point is even.The advantage of integrating sphere is that it can not only collect whole reflected light on the sample, and ball wall each several part has symmetry to the light of receiver reflection, distributes irrelevantly with the angle of reflection, and the structure and the internal coating of this performance and ball are closely related.According to the ultimate principle of light-measuring integrating sphere, after a branch of luminous flux entered integrating sphere by inlet, repeatedly after the diffuse reflection, the illuminance that arrives arbitrary window all was repeatedly irreflexive integration through the ball inwall.
For existing integrating sphere light power meter, it mainly contains two preparation methods, is respectively to adopt preparation of teflon die pressing and barium sulphate spraying process.Adopt the integrating sphere diffuse reflection performance of teflon die pressing preparation good, but cost an arm and a leg.There are such mistaken ideas for a long time in China's illumination industry: the integrating sphere internal coating is got over Bai Yuehao, and promptly reflectivity is high more good more.In fact very white integrating sphere internal coating (being generally the barium sulphate coating), not only reflectance varies is bigger, easily dirty, the easy brightness reversion of cementing agent improper use, and spectral reflectivity unevenness, it is bigger mainly to be that the shortwave blue light partly drops, bigger to the influence of photometry degree of accuracy, and barium sulphate coating fastness is not good, comes off easily, and this will directly cause the inaccurate of measurement result.
Therefore, we have proposed to utilize the method for oxidation and sinter silica dioxide coating to prepare the diffuse reflector of integrating sphere light power meter, because processing step adopts spraying process to produce the SiO 2 powder layer, so preparation technology is simple; Owing to adopt high temperature sintering, the film layer structure densification, it is good to adhere to quality.This method technology under the prerequisite that guarantees the integrating sphere diffusing characteristic diffuser is simple relatively, does not also report in the world.
Summary of the invention
The object of the present invention is to provide a kind of photodetection integrating sphere production method, it is to adopt flame hydrolysis deposition of silica powder, and method is simple, preparation cost is low, because of adopting the high-temperature oxydation sintering processing, it prepares silica coating, compact structure, and adhesion property is good; Adopt deposition process,, improve applicability the no requirement (NR) of integrating sphere design size.
The invention provides a kind of integrating sphere production method for laser power measurement, it is characterized in that, comprise the steps:
Step 1: get a Metal Ball, this Metal Ball is a hollow structure;
Step 2: at Metal Ball hollow shape cavity inner surface deposition layer of silicon dioxide powder bed;
Step 3: the SiO 2 powder layer is carried out wet oxygen, dried oxygen alternating oxidation, make the SiO 2 powder layer be sintered to the white silica coating of even compact.
Wherein the material of the said Metal Ball of step 1 is iron or aluminium or copper.
Wherein the said method at metal ball shaped cavity inner surface deposition layer of silicon dioxide powder bed of step 2 is a flame hydrolysis process.
Wherein said during by flame hydrolysis process deposition layer of silicon dioxide powder bed, in reacting gas, add phosphorus, boron element to regulate oxidizing temperature.
Wherein the said wet oxygen of step 3, dried oxygen alternating oxidation are to change the silica coating density by regulating oxygen flow in oxidizing process.
Wherein step 3 is said carries out wet oxygen, dried oxygen alternating oxidation to the SiO 2 powder layer, and the number of times of this alternating oxidation is 2-5 time.
The oxidizing temperature of wherein said wet oxygen, dried oxygen alternating oxidation is 800 to 1100 degrees centigrade.
A kind of photodetection integrating sphere production method provided by the invention, it has the following advantages:
1, adopt flame hydrolysis deposition of silica powder, method is simple, and preparation cost is low.
2, adopt the high-temperature oxydation sintering processing to prepare silica coating, compact structure, adhesion property is good.
3, adopt deposition process,, improve applicability the no requirement (NR) of integrating sphere design size.
Description of drawings
In order to further specify feature of the present invention and effect, the present invention is described further below in conjunction with drawings and Examples, wherein:
Fig. 1 is photodetection integrating sphere structural representation;
Fig. 2 sprays SiO 2 powder and sinters the membrane process process flow diagram into by flame hydrolysis for the integrating sphere cavity inner wall.
Embodiment
See also illustrated in figures 1 and 2ly, a kind of integrating sphere production method for laser power measurement of the present invention comprises the steps:
Step 1: get a Metal Ball 10, this Metal Ball 10 is a hollow structure; The material of this Metal Ball 10 is iron or aluminium or copper;
Step 2: at Metal Ball 10 hollow shape cavity inner surfaces deposition layer of silicon dioxide powder bed 40; Said method at Metal Ball 10 shape cavity inner surfaces deposition layer of silicon dioxide powder bed 40 is a flame hydrolysis process; When adopting flame hydrolysis process deposition of silica powder bed 40, in reacting gas, add phosphorus, boron element to regulate oxidizing temperature;
Step 3: SiO 2 powder layer 40 is carried out wet oxygen, dried oxygen alternating oxidation, make SiO 2 powder layer 40 be sintered to the white silica coating of even compact; Said wet oxygen, dried oxygen alternating oxidation are to change the silica coating density by regulating oxygen flow in oxidizing process; Said SiO 2 powder layer 40 is carried out wet oxygen, dried oxygen alternating oxidation, the number of times of this alternating oxidation is 2-5 time; The oxidizing temperature of wherein said wet oxygen, dried oxygen alternating oxidation is 800 to 1100 degrees centigrade.
It consults Fig. 1 again, and Fig. 1 describes photodetection integrating sphere structural representation.This device comprises integration Metal Ball 10, and this Metal Ball 10 has a hollow cavity; Have on Metal Ball 10 into perforation 20, this is gone into perforation 20 and is used for laser incident; Have circular hole 30 on Metal Ball 10, this circular hole 30 is used to install photodetector, and this is gone into perforation 20 and differs 90 degree with circular hole 30; Adhere to one deck by the flame hydrolysis deposition and through the SiO 2 powder layer 40 of overdrying wet-oxygen oxidation sintering at the inside surface of Metal Ball 10, this SiO 2 powder layer 40 is a silica coating; The silica coating of sintering mainly act on be with the uniform diffuse reflection of incident light in integrating sphere, to reduce the influence of detector to incident light physical dimension and polarization state; The effect of integrating sphere inner wall baffle-plate 50 is to avoid incident ray directly not shining on the photodetector through perforate 30 through under irreflexive condition, prevents that receiver from directly receiving first reflection light, receives only integral light, thereby improves accuracy of measurement.
Please consult Fig. 2 again, Fig. 2 describes the integrating sphere cavity inner wall by flame hydrolysis deposition of silica powder technology synoptic diagram.At first at the integrating sphere inwall by flame hydrolysis deposition layer of silicon dioxide powder, if a dusty spray thickness deficiency, can deposit repeatedly up to the SiO 2 powder layer by scan mode and reach required thickness; Then integrating sphere is put into the oxidation furnace that is connected with dried wet oxygen and carried out sintering, sintering temperature is 800 degrees centigrade to 1100 degrees centigrade, in the sintering process can by dried wet oxygen atmosphere alternately and change sintering temperature, regulate the silica coating density behind the sintering.
The novel light-measuring integrating sphere of our development is to replace magnesium oxide (MgO), barium sulphate (BaSO commonly used with the SiO 2 powder sinter coating
4) make the integrating sphere coating, with in the wavelength coverage, spectral reflectance is higher, and reflectance neutrality is good, helps reducing its influence to the integrating sphere non-neutral in optical communication.
Novel SiO 2 powder sinter coating integrating sphere is because its reflectance is higher, therefore can improve the efficient of integrating sphere greatly, this helps low transmission, weak reflected light signal is measured, and not only can improve the sensitivity of measurement, and has improved the signal to noise ratio (S/N ratio) of measuring greatly.
In addition, because coating adopts the sintering preparation, coating viscosity is good, is difficult for breaking with wrinkling, and dust can be removed with the hairbrush of cleaning, can not damage coating.The SiO 2 powder sinter coating is not afraid of humidity, and being exposed under the ultraviolet light also not can flavescence, has good environmental suitability, can widespread use and the laboratory outside actual production environment in.
Because temperature has certain influence to measurement, in order further to increase the accuracy of measuring, can in integrating sphere, increase temperature sensing device, actual temperature when record is measured, revise by modes such as temperature control or calculating compensation, thereby realize high-acruracy survey.
Claims (7)
1, a kind of integrating sphere production method for laser power measurement is characterized in that, comprises the steps:
Step 1: get a Metal Ball, this Metal Ball is a hollow structure;
Step 2: at Metal Ball hollow shape cavity inner surface deposition layer of silicon dioxide powder bed;
Step 3: the SiO 2 powder layer is carried out wet oxygen, dried oxygen alternating oxidation, make the SiO 2 powder layer be sintered to the white silica coating of even compact.
2, the method that is used to realize laser power measurement with the integrating sphere preparation according to claim 1 is characterized in that wherein the material of the said Metal Ball of step 1 is iron or aluminium or copper.
3, the method that is used to realize laser power measurement with the integrating sphere preparation according to claim 1 is characterized in that, wherein the said method at metal ball shaped cavity inner surface deposition layer of silicon dioxide powder bed of step 2 is a flame hydrolysis process.
4, the method that is used to realize laser power measurement with the integrating sphere preparation according to claim 3, it is characterized in that, wherein said during by flame hydrolysis process deposition layer of silicon dioxide powder bed, in reacting gas, add phosphorus, boron element to regulate oxidizing temperature.
5, the method that is used to realize laser power measurement with the integrating sphere preparation according to claim 1, it is characterized in that, wherein the said wet oxygen of step 3, dried oxygen alternating oxidation are to change the silica coating density by regulating oxygen flow in oxidizing process.
6, the method that is used to realize laser power measurement with the integrating sphere preparation according to claim 1 is characterized in that wherein step 3 is said carries out wet oxygen, dried oxygen alternating oxidation to the SiO 2 powder layer, and the number of times of this alternating oxidation is 2-5 time.
7, according to claim 1, the 5 or 6 described methods that are used to realize laser power measurement with the integrating sphere preparation, it is characterized in that the oxidizing temperature of wherein said wet oxygen, dried oxygen alternating oxidation is 800 to 1100 degrees centigrade.
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| CN200710097692A CN100575895C (en) | 2007-04-28 | 2007-04-28 | Integrating sphere production method for laser power measurement |
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| CN200710097692A CN100575895C (en) | 2007-04-28 | 2007-04-28 | Integrating sphere production method for laser power measurement |
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| CN101294847A true CN101294847A (en) | 2008-10-29 |
| CN100575895C CN100575895C (en) | 2009-12-30 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102410875A (en) * | 2011-08-15 | 2012-04-11 | 西北核技术研究所 | Array attenuator of high-energy laser and manufacturing method thereof |
| CN102707212A (en) * | 2011-10-28 | 2012-10-03 | 杭州浙大三色仪器有限公司 | Device for detecting service life of light emitting diode (LED) in real time |
| CN105675128A (en) * | 2016-01-25 | 2016-06-15 | 武汉浩宏科技有限公司 | Laser energy detector |
| CN109580172A (en) * | 2018-11-06 | 2019-04-05 | 中国计量科学研究院 | A kind of micro-imaging radiometric calibration substrate and preparation method thereof |
| CN111867730A (en) * | 2018-03-14 | 2020-10-30 | 格兰森斯股份公司 | Sample container and tool for use in an integrating chamber |
| CN115198373A (en) * | 2022-07-22 | 2022-10-18 | 安徽易芯半导体有限公司 | Device and method for growing silicon dioxide film by thermal oxidation method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3702775A (en) * | 1971-02-12 | 1972-11-14 | Nasa | Diffuse reflective coating |
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2007
- 2007-04-28 CN CN200710097692A patent/CN100575895C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102410875A (en) * | 2011-08-15 | 2012-04-11 | 西北核技术研究所 | Array attenuator of high-energy laser and manufacturing method thereof |
| CN102707212A (en) * | 2011-10-28 | 2012-10-03 | 杭州浙大三色仪器有限公司 | Device for detecting service life of light emitting diode (LED) in real time |
| CN105675128A (en) * | 2016-01-25 | 2016-06-15 | 武汉浩宏科技有限公司 | Laser energy detector |
| CN111867730A (en) * | 2018-03-14 | 2020-10-30 | 格兰森斯股份公司 | Sample container and tool for use in an integrating chamber |
| US11975331B2 (en) | 2018-03-14 | 2024-05-07 | Grainsense Oy | Sample containers for use inside integrating cavities, and tools |
| CN109580172A (en) * | 2018-11-06 | 2019-04-05 | 中国计量科学研究院 | A kind of micro-imaging radiometric calibration substrate and preparation method thereof |
| CN115198373A (en) * | 2022-07-22 | 2022-10-18 | 安徽易芯半导体有限公司 | Device and method for growing silicon dioxide film by thermal oxidation method |
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| CN100575895C (en) | 2009-12-30 |
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