CN101294844A - 弯曲压电式氧化锌纳米棒微电机(mems)振动传感器 - Google Patents
弯曲压电式氧化锌纳米棒微电机(mems)振动传感器 Download PDFInfo
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- CN101294844A CN101294844A CNA2007100978743A CN200710097874A CN101294844A CN 101294844 A CN101294844 A CN 101294844A CN A2007100978743 A CNA2007100978743 A CN A2007100978743A CN 200710097874 A CN200710097874 A CN 200710097874A CN 101294844 A CN101294844 A CN 101294844A
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- zinc oxide
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 239000011787 zinc oxide Substances 0.000 title claims abstract description 38
- 238000005452 bending Methods 0.000 title claims description 13
- 239000002073 nanorod Substances 0.000 claims abstract description 33
- 230000000694 effects Effects 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 21
- 238000009413 insulation Methods 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims 2
- 238000007906 compression Methods 0.000 claims 2
- 239000007772 electrode material Substances 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 230000005611 electricity Effects 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract 1
- 229960001296 zinc oxide Drugs 0.000 description 27
- 239000000758 substrate Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000000919 ceramic Substances 0.000 description 8
- 238000010276 construction Methods 0.000 description 5
- 239000003292 glue Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
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- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 241000283153 Cetacea Species 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000027455 binding Effects 0.000 description 1
- 238000009739 binding Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000005676 thermoelectric effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
性能参数 | 电磁式 | 压电式 | 纳米压电式 |
频率平滑20~1500Hz | 是 | 是 | - |
频率平滑2~5000Hz | 不 | 是 | - |
相位一致性2~5000Hz | 不好 | 优 | 优 |
低离轴敏感度 | 不好 | 好 | 优 |
高频噪声 | 低 | 局 | 极低 |
线性度 | 好 | 好 | 优 |
任意指向安装 | 不 | 是 | 是 |
工作到120℃ | 是 | 是 | 是 |
机械寿命 | 一般 | 优 | 优 |
附加电路 | 一般 | 复杂 | 简单 |
体积 | 大 | 一般 | 极小 |
耗电 | 大 | 中 | 无或极小 |
抗电磁干扰 | 低 | 优 | 优 |
振动模式 | 1 | 2 | 3 | 4 | 5 |
振动频率(Hz) | 109.74 | 122.8 | 369.15 | 389.95 | 560.07 |
Claims (10)
Priority Applications (1)
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CN200710097874.3A CN101294844B (zh) | 2007-04-23 | 2007-04-23 | 弯曲压电式氧化锌纳米棒微电机(mems)振动传感器 |
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CN200710097874.3A CN101294844B (zh) | 2007-04-23 | 2007-04-23 | 弯曲压电式氧化锌纳米棒微电机(mems)振动传感器 |
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CN101294844A true CN101294844A (zh) | 2008-10-29 |
CN101294844B CN101294844B (zh) | 2015-07-22 |
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CN200710097874.3A Expired - Fee Related CN101294844B (zh) | 2007-04-23 | 2007-04-23 | 弯曲压电式氧化锌纳米棒微电机(mems)振动传感器 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101628704A (zh) * | 2008-07-18 | 2010-01-20 | 罗伯特·博世有限公司 | 微机械式传感器元件及其制造方法和运行方法 |
CN101866975A (zh) * | 2010-05-29 | 2010-10-20 | 兰州大学 | 一种半导体传感器及制备方法 |
CN102208525A (zh) * | 2010-03-30 | 2011-10-05 | 徐文光 | 压电元件及其制备方法 |
CN102889925A (zh) * | 2011-07-22 | 2013-01-23 | 国家纳米科学中心 | 基于ZnO纳米线的自供电振动传感器及其制造方法 |
WO2013082823A1 (zh) * | 2011-12-07 | 2013-06-13 | 中国科学院微电子研究所 | 压电纳米线的叠层结构及其制造方法 |
WO2013100860A1 (en) * | 2011-12-30 | 2013-07-04 | Microfine Materials Technologies Pte Ltd | Cost-effective single crystal multi-stake actuator and method of manufacture |
CN105632843A (zh) * | 2014-11-26 | 2016-06-01 | 中国科学院宁波材料技术与工程研究所 | 一种三维微/纳机电开关及其制备方法 |
CN106199462A (zh) * | 2016-08-29 | 2016-12-07 | 南京理工大学 | 一种降低振动噪声的磁电传感器敏感元件 |
CN111492219A (zh) * | 2017-11-06 | 2020-08-04 | 赛峰集团 | 具有集成电子测量电路的复合部件及其制造方法 |
CN112565949A (zh) * | 2020-11-18 | 2021-03-26 | 杭州士兰集昕微电子有限公司 | 压电式微机电系统麦克风及其制造方法 |
Citations (3)
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US20040106203A1 (en) * | 2002-12-03 | 2004-06-03 | James Stasiak | Free-standing nanowire sensor and method for detecting an analyte in a fluid |
US20060134883A1 (en) * | 2004-12-20 | 2006-06-22 | Palo Alto Research Center Incorporated | Systems and methods for electrical contacts to arrays of vertically aligned nanorods |
CN1853090A (zh) * | 2003-09-22 | 2006-10-25 | 星电株式会社 | 振动传感器 |
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2007
- 2007-04-23 CN CN200710097874.3A patent/CN101294844B/zh not_active Expired - Fee Related
Patent Citations (3)
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US20040106203A1 (en) * | 2002-12-03 | 2004-06-03 | James Stasiak | Free-standing nanowire sensor and method for detecting an analyte in a fluid |
CN1853090A (zh) * | 2003-09-22 | 2006-10-25 | 星电株式会社 | 振动传感器 |
US20060134883A1 (en) * | 2004-12-20 | 2006-06-22 | Palo Alto Research Center Incorporated | Systems and methods for electrical contacts to arrays of vertically aligned nanorods |
Non-Patent Citations (2)
Title |
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XUDONG WANG,ET AL.: "Direct-Current Nanogenerator Driven by Ultrasonic wave", 《SCIENCE》 * |
王中林: "压电式纳米发电机的原理和潜在应用", 《物理》 * |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101628704A (zh) * | 2008-07-18 | 2010-01-20 | 罗伯特·博世有限公司 | 微机械式传感器元件及其制造方法和运行方法 |
US8627719B2 (en) | 2008-07-18 | 2014-01-14 | Robert Bosch Gmbh | Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element |
CN101628704B (zh) * | 2008-07-18 | 2014-09-10 | 罗伯特·博世有限公司 | 微机械式传感器元件及其制造方法和运行方法 |
CN102208525A (zh) * | 2010-03-30 | 2011-10-05 | 徐文光 | 压电元件及其制备方法 |
CN102208525B (zh) * | 2010-03-30 | 2013-11-06 | 徐文光 | 压电元件及其制备方法 |
CN101866975A (zh) * | 2010-05-29 | 2010-10-20 | 兰州大学 | 一种半导体传感器及制备方法 |
CN101866975B (zh) * | 2010-05-29 | 2012-05-23 | 兰州大学 | 一种半导体传感器及制备方法 |
CN102889925A (zh) * | 2011-07-22 | 2013-01-23 | 国家纳米科学中心 | 基于ZnO纳米线的自供电振动传感器及其制造方法 |
CN102889925B (zh) * | 2011-07-22 | 2015-06-24 | 国家纳米科学中心 | 基于ZnO纳米线的自供电振动传感器及其制造方法 |
WO2013082823A1 (zh) * | 2011-12-07 | 2013-06-13 | 中国科学院微电子研究所 | 压电纳米线的叠层结构及其制造方法 |
CN104137285A (zh) * | 2011-12-30 | 2014-11-05 | 晶致材料科技私人有限公司 | 具有成本效益的单晶多桩致动器及制造方法 |
WO2013100860A1 (en) * | 2011-12-30 | 2013-07-04 | Microfine Materials Technologies Pte Ltd | Cost-effective single crystal multi-stake actuator and method of manufacture |
CN104137285B (zh) * | 2011-12-30 | 2016-12-28 | 晶致材料科技私人有限公司 | 具有成本效益的单晶多桩致动器及制造方法 |
US9673374B2 (en) | 2011-12-30 | 2017-06-06 | Microfine Materials Technologies Pty Ltd | Cost-effective single crystal multi-stake actuator and method of manufacture |
CN105632843A (zh) * | 2014-11-26 | 2016-06-01 | 中国科学院宁波材料技术与工程研究所 | 一种三维微/纳机电开关及其制备方法 |
CN105632843B (zh) * | 2014-11-26 | 2018-06-26 | 中国科学院宁波材料技术与工程研究所 | 一种三维微/纳机电开关及其制备方法 |
CN106199462A (zh) * | 2016-08-29 | 2016-12-07 | 南京理工大学 | 一种降低振动噪声的磁电传感器敏感元件 |
CN111492219A (zh) * | 2017-11-06 | 2020-08-04 | 赛峰集团 | 具有集成电子测量电路的复合部件及其制造方法 |
CN111492219B (zh) * | 2017-11-06 | 2022-05-24 | 赛峰集团 | 具有集成电子测量电路的复合部件及其制造方法 |
US11639916B2 (en) | 2017-11-06 | 2023-05-02 | Safran | Composite part with integral electronic instrumentation circuit and its manufacturing method |
CN112565949A (zh) * | 2020-11-18 | 2021-03-26 | 杭州士兰集昕微电子有限公司 | 压电式微机电系统麦克风及其制造方法 |
CN112565949B (zh) * | 2020-11-18 | 2023-06-20 | 杭州士兰集昕微电子有限公司 | 压电式微机电系统麦克风及其制造方法 |
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