CN101285735A - Hartmann sensor for expanding dynamic range by separating integral inclination of wave surface - Google Patents
Hartmann sensor for expanding dynamic range by separating integral inclination of wave surface Download PDFInfo
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Abstract
A Hartmann sensor for expanding a dynamic range by separating an entire inclination of a wave surface, which can measure information of a wave surface having a large inclination; the method is characterized in that: compared with the common Hartmann sensor, the Hartmann sensor is added with an optical splitting system behind the beam-shrinking system and in front of the micro-lens, and the optical splitting system leads part of signal light out of a main optical path; the part of light is finally focused on a photoelectric detector placed at the focal point of the focusing lens through the focusing lens, the integral inclination information of the incident wave surface can be obtained by analyzing the deviation condition of the focal point, and the whole wave surface information can be obtained by superposing the part of information and the wave surface information obtained on the Hartmann sensor. The invention adds a matched light splitting path on the basis of the common Hartmann sensor to realize the function of measuring the information of the large inclined wave surface on the premise of not influencing the Hartmann measurement precision; the invention has simple structure and little cost increase compared with the common Hartmann sensor.
Description
Technical field
The present invention relates to a kind of Hartmann sensor system that is used for, particularly a kind of Hartmann sensor that great dynamic range is arranged.
Background technology
Hartmann wave front sensor is a kind of instrument that can detect the corrugated shape, and it has obtained using widely in adaptive optics, optical mirror plane detection, Medical Instruments and celestial body target imaging.Traditional Hartmann sensor is made up of the beam system that contracts, microlens array, photodetector and wave front processor usually.Dynamic range is a very important characteristic parameter of design and use Hartmann sensor, the dynamic range of Hartmann sensor can be interpreted as, and does not make focus after focusing on through microlens array step out the maximum local wavefront slope of its pairing sub-aperture time institute energy measurement.Usual condition down can be by reducing the Hartmann sub-aperture number, use the microlens array of short focal length and use the photodetector of big target surface.But, reduce the sub-aperture of Hartmann number and use short focal length microlens array all will reduce the measuring accuracy of Hartmann sensor, use the photodetector of big target surface will increase the cost of sensor greatly.Simultaneously, use the method for photodetector of big target surface limited for improving the dynamic range effect.So, when the actual design Hartmann sensor, often obtain the Hartmann sensor of great dynamic range with sacrifice in measurement accuracy.
Because the existence of above problem, Hartmann sensor how to design low cost, high precision, great dynamic range is an important topic of Hartmann sensor research field always.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the deficiency that prior art can not be taken into account simultaneously on measuring accuracy and dynamic range, based on traditional Hartmann, provide a kind of high precision, inclination is had the Hartmann sensor of great dynamic range; It can be measured under the prerequisite that does not influence measuring accuracy, and distorted wave surface information with quite big inclination is provided convenience for needing to measure the field of information before the decline oblique wave, cheap Hartmann sensor.
The technical solution adopted for the present invention to solve the technical problems is: a kind of Hartmann sensor by separating wave face integral inclination expansion dynamic range, include the beam system of forming by front lens and rear lens that contracts, and microlens array, first photodetector; It is characterized in that:, adds the subsystem of forming by spectroscope, catoptron, condenser lens and second photodetector of an ensemble average inclination that is used to measure the incident corrugated in the position of forming by front lens and rear lens before the microlens array after the beam system of contracting; The extraneous tested light beam beam system that contracted contracts behind the bundle, is divided into two parts by spectroscope, and a part of illumination is mapped to the core component of Hartmann sensor, by the form collection of first photodetector with the hot spot dot matrix; Another part enters subsystem and is collected by the form of second photodetector with far-field spot; Can measure the integral inclination on tested corrugated in subsystem, the integral inclination information that is superimposed with the corrugated on the basis of the information that main optical path obtains just can obtain the Global Information on tested corrugated.
Described spectroscope can replace with Amici prism.
After the beam splitting of described light beam process spectroscope, a branch of process microlens array arrives first photodetector, another bundle is focused lens focus to second photodetector through behind the catoptron, and the light path that arrives on the corresponding photodetector through the two-beam after the spectroscope beam split equates.
Obtain the translational movement of uncalibrated image in the main optical path by the far-field spot amount of movement on second photodetector in the subsystem in the computing system.
Described second photodetector places the focus place of condenser lens.
Principle of work of the present invention: identical with common Hartmann sensor, the demarcation before the use of the Hartmann sensor that this patent relates to need be used equally.But because the adding of subsystem is arranged, so demarcation of the present invention will be that two parts in the Hartmann sensor are demarcated simultaneously.The beam system that contracts that directional light is formed via front lens, rear lens contracts the bundle back by the spectroscope beam splitting, part light is finally collected by the form of second photodetector with far-field spot, and a part enters Hartmann sensor by the form collection of first photodetector with the hot spot dot matrix in addition.Since the integral inclination on corrugated will cause on first photodetector and second photodetector hot spot integral body towards same direction skew, and amount of movement and the hot spot amount of movement on second photodetector of hot spot has the corresponding relation of linearity on first photodetector.Can calculate the overall offset amount Δ of spot array on first photodetector with respect to the facula mass center amount of movement of demarcating hot spot by the hot spot of gathering on second photodetector.Moving direction displacement Δ with uncalibrated image signal hot spot on second photodetector, recomputate the side-play amount of the hot spot of distorted wavefront with the image after moving as uncalibrated image, obtain new side-play amount on the side-play amount that then the displacement Δ is added to.Calculate wavefront slope, restore the corrugated with this amount of movement.
The present invention's beneficial effect compared with prior art is: Hartmann sensor involved in the present invention is compared with common Hartmann sensor, has added one and be used to detect the subsystem that incident corrugated ensemble average tilts on hardware.In information processing, with common Hartmann sensor many a process of an integral image translation that is used to demarcate; Guarantee in the dynamic range that does not increase expansion Hartmann sensor under the condition of cost substantially; And the measuring accuracy of Hartmann sensor does not change before with the expansion dynamic range.
Description of drawings
Fig. 1 is the Hartmann sensor structural representation that enlarges dynamic range by separating wave face integral inclination of the present invention;
Fig. 2 is wavetilt synoptic diagram within Hartmann's dynamic range;
Fig. 3 exceeds Hartmann's dynamic range synoptic diagram for wavetilt;
Fig. 4 isolates the wave face integral inclination synoptic diagram for subsystem;
Fig. 5 is for demarcating dot matrix image translation synoptic diagram;
Among the figure, 1. front lens, 2. rear lens, 3. spectroscope, 4. microlens array, 5. first photodetector, 6. catoptron, 7. condenser lens, 8. second photodetector, the 9. core component of Hartmann sensor.
Embodiment
Introduce the present invention in detail below in conjunction with the drawings and the specific embodiments.
As shown in Figure 1, a kind of Hartmann sensor that enlarges dynamic range by separating wave face integral inclination of present embodiment, add a subsystem that is used to measure the ensemble average inclination on incident corrugated after the beam system that contracts that the front lens 1 of existing Hartmann sensor and rear lens 2 are formed and on the position before the microlens array 4, wherein subsystem is made up of spectroscope 3, catoptron 6, condenser lens 7 and second photodetector 8 again, and second photodetector 8 places the focus place of condenser lens 7; First photodetector 5 places place, microlens array 4 back focus planes, after 3 beam splitting of light beam process spectroscope, a branch of through microlens array 4 arrival first photodetector 5, another bundle focuses on second photodetector 8 through being focused lens 7 behind the catoptron 6, for what guarantee that two photodetectors detect is the information on same corrugated, and the light path that arrives on the corresponding photodetector through the two-beam after spectroscope 3 beam split equates; Described spectroscope 3 can also replace with Amici prism.
Hartmann sensor before using, error that at first must calibration system itself.
As shown in Figure 2, be hot spot distribution situation on the demarcation of Hartmann sensor and measuring process and the photodetector target surface thereof.Wherein only drawn Hartmann sensor core component-microlens array 4 and be placed on first photodetector at microlens array focal plane place.Hartmann sensor carries out sub-aperture segmentation before utilizing the signal wave of 4 pairs of incidents of microlens array, light signal focuses on thereafter first photodetector 5 in each sub-aperture, utilizes on first photodetector, 5 target surfaces energy distributions situation to carry out centroid position and calculates;
Light ray propagation situation when dotted line is depicted as incident direction perpendicular to the plane of microlens array 4 in Fig. 2 left side, in fact this is exactly the process of demarcating Hartmann sensor.Hot spot distribution situation after the dot matrix that is formed by this corrugated is gathered by first photodetector 5 can be found out by Fig. 2 right side, the sub-aperture that is partitioned into of each lenticule of box indicating wherein, symbol among the figure
The dot matrix that the corrugated forms is demarcated in expression.After finishing, demarcation use special-purpose centroid computing method just to calculate the barycenter of each hot spot of nominal light spot.The propagation condition of light when solid line is depicted as distorted wavefront (using among the figure to tilt to replace) incident in Fig. 2 left side.The hot spot distribution situation of the dot matrix that is formed by this corrugated after by the photodetector collection can be found out symbol among the figure by Fig. 2 right side
The dot matrix distribution situation that expression is formed by distorted wavefront.By calculating two drift condition between the dot matrix, just the corrugated of distorted wavefront can have been restored.
Hartmann wave front sensor all will calculate the centroid position of hot spot in demarcation and measuring process, Hartmann wave front sensor mainly is the position (x that calculates facula mass center according to following formula (1)
i, y
i):
In the formula, m=1～M, n=1～N are that sub-aperture is mapped to pixel region corresponding on the photodetector photosensitive target surface, I
NmBe (n, the m) signal received of individual pixel-by-pixel basis, x on the photodetector photosensitive target surface
Nm, y
NmBe respectively (n, m) the x coordinate of individual pixel and y coordinate.
Calculate the wavefront slope g of incident wavefront again according to following formula (2)
Xi, g
Yi:
In the formula, (X
0, y
0) demarcate the spot center reference position that Hartmann sensor obtains for the standard flat ripple; During Hartmann sensor probing wave front-distortion, (solid line is depicted as the position of the actual focusing of distorted wavefront among the figure, and dotted line is depicted as the light focusing situation of standard flat wavefront) as shown in Figure 2, spot center is displaced to (x
i, y
i).The slope value on tested corrugated is restored wavefront by type method or field method at last again on each sub-aperture that utilization is calculated by following formula.
The prerequisite that said method uses is the dynamic range that the local dip on actual measurement corrugated is unlikely to exceed Hartmann sensor.As the situation on Fig. 3 left side (among symbol definition wherein and Fig. 2 identical), owing to the focal spot of wavefront slope after too large micro-lenses focuses on crossed over the corresponding sub-aperture that has entered other from the aperture, the dynamic range that has obviously exceeded the Hartmann in this case, the corrugated information that calculates according to general method obviously is wrong.
The integral inclination of considering wavefront can cause the integral translation of whole spot array, the present invention separates by adding a subsystem wave face integral inclination situation that is used to detect the translation situation of whole corrugated far-field focus, thereby has improved Hartmann's dynamic range.In Fig. 4, the far-field focus of Hartmann sensor and subsystem will move along identical direction after the inclination corrugated enters system, and owing to incide the corrugated of microlens array 4 and condenser lens 7 identical global slopes is arranged, so the amount of movement of both hot spots exists unique corresponding relation of being determined by device parameters.Thus, the integral inclination on corrugated can be measured by subsystem.
By above embodiment as can be known, because the present invention has added a spectroscope 3 on original Hartmann's basis, a catoptron 6, a condenser lens 7 and a common photoelectric detector 8, proportion is very little these devices other device on Hartmann sensor, and cost is not almost increased.Measuring accuracy for Hartmann sensor, most important influence factor is the detection accuracy of facula mass center, only added a subsystem in the present invention, do not make any change to influencing the centroid detection factors of accuracy, so detection accuracy of the present invention has kept original detection accuracy.
The Hartmann sensor course of work involved in the present invention is as follows:
First: going out according to Hartmann's system-computed of actual design causes far-field focus amount of movement vector (Δ X on first photodetector, 5 focal planes after the wavefront incident, Δ Y) with second photodetector 8 on coefficient of correspondence K between the far-field focus amount of movement vector (Δ M, Δ N).According to optical knowledge as can be known,
ΔX＝K*ΔM，ΔY＝K*ΔN。
Second: demarcate Hartmann sensor with the standard flat ripple, note the facula information on first photodetector 5, second photodetector 8 respectively, and calculate corresponding centroid position respectively.
The 3rd: actual measurement has the corrugated of inclination, and first photodetector 5, second photodetector 8 expose simultaneously and gather the information of incident wavefront.
The the 4th: calculate earlier the hot spot amount of movement vector of gathering on second photodetector 8 (Δ M, Δ N), calculate hot spot motion-vector (Δ X, Δ Y) on the first corresponding photodetector 5 according to formula.Then uncalibrated image and sub-pore diameter range thereof are moved Δ X, Δ Y along X, Y direction respectively according to the direction of vector (Δ X, Δ Y), then calculate centroid position with new sub-aperture area; As shown in Figure 5, wherein
The dot matrix that expression is formed by distorted wavefront, sub-aperture area and uncalibrated image thereof that the original uncalibrated image of expression shown in the dotted line forms, expression shown in the solid line is according to the situation of integral inclination after with the uncalibrated image translation.Diagram can clearly be found out, can well each focus be corresponded to by the mode of uncalibrated image translation in the corresponding sub-aperture because the hot spot that tilts to cause is striden the situation in sub-aperture.
The 5th: restore on the corrugated, and the formula that calculates barycenter is still calculated by formula (1), at the wavefront slope g that calculates incident wavefront
Xi, g
YiIn time, will be taken into account the process of translation uncalibrated image, and its formula becomes:
Slope matrix by obtaining then restores measured corrugated by type method or field method.
Claims (5)
1, a kind of Hartmann sensor by separating wave face integral inclination expansion dynamic range includes the beam system of being made up of front lens (1) and rear lens (2) that contracts, and microlens array (4), first photodetector (5); It is characterized in that:, adds the subsystem of forming by spectroscope (3), catoptron (6), condenser lens (7) and second photodetector (8) of an ensemble average inclination that is used to measure the incident corrugated in microlens array (4) position of forming by front lens (1) and rear lens (2) before after the beam system of contracting; The extraneous tested light beam beam system that contracted contracts behind the bundle, is divided into two parts by spectroscope (3), and a part of illumination is mapped to the core component (9) of Hartmann sensor, by the form collection of first photodetector (5) with the hot spot dot matrix; Another part enters subsystem and is collected by the form of second photodetector (8) with far-field spot; Can measure the integral inclination on tested corrugated in subsystem, the integral inclination information that is superimposed with the corrugated on the basis of the information that main optical path obtains just can obtain the Global Information on tested corrugated.
2, a kind of Hartmann sensor by separating wave face integral inclination expansion dynamic range according to claim 1, it is characterized in that: spectroscope (3) can replace with Amici prism.
3, a kind of Hartmann sensor that enlarges dynamic range by separating wave face integral inclination according to claim 1, it is characterized in that: after the beam splitting of light beam process spectroscope (3), a branch of through microlens array (4) arrival first photodetector (5), be focused lens (7) behind another bundle process catoptron (6) and focus on second photodetector (8), the light path that arrives on the corresponding photodetector through the two-beam after spectroscope (3) beam split equates.
4, a kind of Hartmann sensor by separating wave face integral inclination expansion dynamic range according to claim 1 is characterized in that: the translational movement that obtains uncalibrated image in the main optical path by the far-field spot amount of movement on second photodetector (8) in the subsystem in the computing system.
5, a kind of Hartmann sensor by separating wave face integral inclination expansion dynamic range according to claim 1, it is characterized in that: second photodetector (8) places the focus place of condenser lens (7).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104801852A (en) * | 2015-04-17 | 2015-07-29 | 温州大学 | Beam splitting double-focus-point laser processing head |
| CN109029288A (en) * | 2018-07-25 | 2018-12-18 | 中国科学院光电技术研究所 | Reflective large-gradient aspheric surface and free-form surface detection device and method based on DMD wave-front sensing technology |
| CN112304443A (en) * | 2020-10-30 | 2021-02-02 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with variable spatial resolution |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5287165A (en) * | 1991-09-30 | 1994-02-15 | Kaman Aerospace Corporation | High sensitivity-wide dynamic range optical tilt sensor |
| DE19705119A1 (en) * | 1997-02-11 | 1998-08-13 | Johannes Prof Dr Schwider | Dynamic range increasing method for measurement through Shack-Hartmann sensor |
| CN1212508C (en) * | 2002-06-24 | 2005-07-27 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with adjustable dynamic range and measurement accuracy |
| CN100573064C (en) * | 2006-01-16 | 2009-12-23 | 中国科学院光电技术研究所 | Hartmann wave front sensor based on visual field offset of beam splitter prism |
| CN1815259B (en) * | 2006-03-09 | 2011-01-12 | 中国科学院光电技术研究所 | Photoelectric imaging tracking system based on beam splitter prism |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104801852A (en) * | 2015-04-17 | 2015-07-29 | 温州大学 | Beam splitting double-focus-point laser processing head |
| CN104801852B (en) * | 2015-04-17 | 2016-10-19 | 温州大学 | A kind of beam splitting double focus laser Machining head |
| CN109029288A (en) * | 2018-07-25 | 2018-12-18 | 中国科学院光电技术研究所 | Reflective large-gradient aspheric surface and free-form surface detection device and method based on DMD wave-front sensing technology |
| CN109029288B (en) * | 2018-07-25 | 2020-10-16 | 中国科学院光电技术研究所 | Reflective large-gradient aspheric surface and free-form surface detection device and method based on DMD wave-front sensing technology |
| CN112304443A (en) * | 2020-10-30 | 2021-02-02 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with variable spatial resolution |
| CN112304443B (en) * | 2020-10-30 | 2022-10-21 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with variable spatial resolution |
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