CN101284263A - Liquid spray head based on piezoelectric bridge type beam - Google Patents
Liquid spray head based on piezoelectric bridge type beam Download PDFInfo
- Publication number
- CN101284263A CN101284263A CNA200810114270XA CN200810114270A CN101284263A CN 101284263 A CN101284263 A CN 101284263A CN A200810114270X A CNA200810114270X A CN A200810114270XA CN 200810114270 A CN200810114270 A CN 200810114270A CN 101284263 A CN101284263 A CN 101284263A
- Authority
- CN
- China
- Prior art keywords
- micro
- piezoelectric
- bridge type
- type beam
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 56
- 239000007921 spray Substances 0.000 title claims abstract description 19
- 238000005507 spraying Methods 0.000 claims abstract description 26
- 239000012530 fluid Substances 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 31
- 238000002347 injection Methods 0.000 claims description 17
- 239000007924 injection Substances 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 150000001875 compounds Chemical group 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 230000007547 defect Effects 0.000 abstract 1
- 238000004377 microelectronic Methods 0.000 abstract 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000002131 composite material Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000009616 inductively coupled plasma Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Images
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810114270XA CN101284263B (en) | 2008-06-02 | 2008-06-02 | Liquid showerhead based on piezoelectric bridge type beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810114270XA CN101284263B (en) | 2008-06-02 | 2008-06-02 | Liquid showerhead based on piezoelectric bridge type beam |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101284263A true CN101284263A (en) | 2008-10-15 |
CN101284263B CN101284263B (en) | 2012-01-04 |
Family
ID=40056803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200810114270XA Active CN101284263B (en) | 2008-06-02 | 2008-06-02 | Liquid showerhead based on piezoelectric bridge type beam |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101284263B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104339865A (en) * | 2013-07-30 | 2015-02-11 | 珠海纳思达企业管理有限公司 | Liquid spray head |
CN104908421A (en) * | 2014-03-12 | 2015-09-16 | 精工电子打印科技有限公司 | Liquid jet head and liquid jet apparatus |
-
2008
- 2008-06-02 CN CN200810114270XA patent/CN101284263B/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104339865A (en) * | 2013-07-30 | 2015-02-11 | 珠海纳思达企业管理有限公司 | Liquid spray head |
CN104908421A (en) * | 2014-03-12 | 2015-09-16 | 精工电子打印科技有限公司 | Liquid jet head and liquid jet apparatus |
CN104908421B (en) * | 2014-03-12 | 2017-07-28 | 精工电子打印科技有限公司 | Jet head liquid and liquid injection apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN101284263B (en) | 2012-01-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: FANG HUAJUN Free format text: FORMER OWNER: LIU SHUQIN Effective date: 20130822 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C53 | Correction of patent of invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Fang Huajun Inventor before: Liu Shuqin |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: LIU SHUQIN TO: FANG HUAJUN |
|
TR01 | Transfer of patent right |
Effective date of registration: 20130822 Address after: 100084 box 76, box 100084, Beijing Patentee after: Fang Huajun Address before: 100084 box 76, box 100084, Beijing Patentee before: Liu Shuqin |