CN101279845A - Electrostatic dissipation ceramic material and preparation thereof - Google Patents

Electrostatic dissipation ceramic material and preparation thereof Download PDF

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Publication number
CN101279845A
CN101279845A CNA2007100719838A CN200710071983A CN101279845A CN 101279845 A CN101279845 A CN 101279845A CN A2007100719838 A CNA2007100719838 A CN A2007100719838A CN 200710071983 A CN200710071983 A CN 200710071983A CN 101279845 A CN101279845 A CN 101279845A
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content
electrostatic
weight percents
titanium carbide
electrostatic dispersion
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胡忠辉
李新江
刘永涛
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Abstract

The invention relates to an electrostatic dissipation ceramic material and a method for the production thereof. The electrostatic dissipation ceramic takes a mixture of zirconia or aluminum oxide or zirconia and aluminum oxide as a matrix, and adds a proper titanium carbide as a resistivity regulator, and the adopted materials comprise (1) 70 to 90 percent of zirconia content and 10 to 30 percent of titanium carbide content by weight percentage; (2) 70 to 90 percent of aluminum oxide content and 10 to 30 percent of titanium carbide content by weight percentage; and (3) 20 to 60 percent of zirconia content and 20 to 60 percent of aluminum oxide content by weight percentage; and 10 to 30 percent of titanium carbide content by weight percentage. The electrostatic dissipation ceramic having a surface resistivity ranging from 10<5> to 10<10>ohms/square is made after mixing, forming and sintering. The material can be used for making antistatic electronic components and various antistatic tools and tool equipment.

Description

Electrostatic dissipation ceramic material and preparation method thereof
Technical field
The invention belongs to the technical field of stupalith, this stupalith has the electrostatic dissipative properties of static electric charge safety discharge.
Background technology
Static is ubiquitous in daily life and production work, as long as have phase mutual friction, contact and separate, just will inevitably produce static and static and discharge.
In the epoch of scientific and technical high speed development, the application of various microelectronics, opto-electronic device is increasingly extensive, and electrostatic discharge (ESD) can change the electrical property of semiconductor element, reduces its performance even damages.Static release can cause the disorder of electronic system, causes plant and instrument fault or malfunctioning.In addition, static discharges and produces static sparking, becomes the potential safety hazard in the inflammable explosive article production, and static electric charge also adsorbs dust, contaminate environment.Therefore, static is released in each industrial circle and causes enormous economic loss, according to statistics, just reaches hundred billion dollars because of static discharges the financial loss that is caused in the annual only electronic industry.
At present, static hazard has caused people's great attention, and is also more and more higher to the requirement of electrostatic protection.Use and study maximum antistatic materials at present, be in polymkeric substance, to add electro-conductive materials such as metal and carbon black to make mostly, can't satisfy intensity and the hardness requirement of some frocks, instrument, be difficult to also to solve that these materials self exist easily wears out, wear no resistance, problem such as corrosion-resistant manufactured materials.And the electrostatic dispersion ceramic goods of selling at present all are to add oxide conductor or semiconductor material as the resistance adjustment agent in the zirconium white matrix, and the product mechanical and physical performance is relatively poor, production technology difficulty height, and the cost height causes product price very expensive.
Summary of the invention
The present invention relates to a kind of electrostatic dispersion ceramic, by in zirconium white or aluminum oxide or zirconium white and alumina mixture matrix, adding titanium carbide as the resistance adjustment agent, material therefor is (1) zirconia content 70~90% weight percents, titanium carbide content 10~30% weight percents; (2) alumina content 70~90% weight percents, titanium carbide content 10~30% weight percents; (3) zirconia content 20~60% weight percents, alumina content 20~60% weight percents; Titanium carbide content 10~30% weight percents.Make electrostatic dispersion ceramic through mixing, moulding, sintering, material surface resistivity is 10 5~10 10Ω/
Figure A20071007198300041
The electrostatic dispersion ceramic of manufacturing of the present invention, manufacturing process is simple, and stable performance can be made as follows:
The first step, with body material and titanium carbide by 70~90: 30~10 part by weight mix;
In second step, the powder that mixes is carried out machinery or artificial granulation;
The 3rd step, with the granulation powder at hydropress, electrostatic machine such as cold or adopt method such as powder injection-molded, extrusion moulding to carry out moulding;
The 4th step, the blank after the moulding is put into vacuum sintering furnace, under vacuum environment or argon gas atmosphere protective condition, sintering progressively heats up; When 1550 ℃~1750 ℃ of firing temperatures, be incubated 1~2 hour, promptly obtain electrostatic dispersion ceramic; ,
In the 5th step, suitable processing is carried out in the technical requirements of pressing finished parts, promptly obtains having the part (as various tool, frock, electronic component etc.) of electrostatic dissipative properties.
The present invention compared with prior art has following advantage and effect:
(1), the electrostatic dispersion ceramic of manufacturing, its electrostatic dissipative properties is stable, constant;
(2), with compare as the electrostatic dispersion ceramic of resistance adjustment agent with oxide semiconductor material, have better mechanical and physical performance, as hardness height, intensity height, impelling strength height and fracture toughness property advantages of higher;
(3), to production technology and production environment require relatively lowly, be easy to produce.
Description of drawings
Fig. 1 is that the electrostatic dispersion ceramic that the present invention makes is measured the substrate synoptic diagram.
Fig. 2 is that the electrostatic dispersion ceramic that the present invention makes detects the disc synoptic diagram.
Fig. 3 is the antimagnetic debugging written instructions of anti-electrostatic intentions.
Specific implementation method
Embodiment 1
(1) batch mixing: 78% aluminum oxide powder and 22% carbonized titanium powder are put into planetary mixed powder machine together, and thorough mixing is even;
(2) powder that mixes is carried out granulation;
(3) with the mould compression moulding on hydropress that processes;
(4) blank that suppresses is put into plumbago crucible, bury silica powder, put into vacuum sintering furnace together and carry out sintering, progressively heat under vacuum environment, firing temperature is 1680 ℃, is incubated 2 hours, and cooling is gradually taken out to room temperature again;
(5) both ends of the surface of burning till blank are adopted diamond wheel grinding.
Detect through electrical property, product surface resistivity is 7.5 * 10 8Ω/
Figure A20071007198300051
This product can be used as measures substrate or semiconductor material production supporting plate.
Embodiment 2
(1) batch mixing: 41.5% zirconia powder, 40% aluminum oxide powder and 18.5% carbonized titanium powder are put into planetary mixed powder machine, and thorough mixing is even;
(2) powder that mixes is added a certain proportion of organic adhesion agent;
(3) use the mould that manufactures and designs by spare part outside measurement, on injector, carry out injection molding;
(4) injection molding blank is extracted and the processing of coming unstuck:
(5) blank is put into plumbago crucible, bury silica powder, put into vacuum sintering furnace together, under vacuum condition, be heated to 650 ℃, charge into argon gas again, progressively heat, be incubated 1 hour, take out after progressively being cooled to room temperature to 1600 ℃;
(6) the workpiece both ends of the surface are carried out ground finish by drawing.
This product is used detection disc in the computer magnetic head assembling production.Through Performance Detection, product surface resistivity is 2 * 10 8Ω/
Figure A20071007198300061
Embodiment 3
(1) batch mixing: 20% zirconia powder, 65% aluminum oxide powder and 15% carbonized titanium powder are put into planetary mixed powder machine, and thorough mixing is even;
(2) powder that mixes is adopted the extrusion molding moulding;
(3) blank is carried out putting into plumbago crucible after the dewaxing treatment, bury silica powder, put into vacuum sintering furnace together, under vacuum condition, be heated to 650 ℃, charge into argon gas again and progressively heat, be incubated 1 hour, take out after progressively being cooled to room temperature to 1585 ℃;
(4) to the bar that burns till through the centreless grinding grinding, behind the cylindrical photetching, grind end edge of a knife shape.
This product is that the antimagnetic debugging of anti-electrostatic is criticized, and detects through electrical property, and product surface resistivity is 3.7 * 10 8Ω/

Claims (10)

1. electrostatic dissipation ceramic material, its composition comprises:
A, zirconia content 70~90% weight percents, titanium carbide content 10~30% weight percents;
B, alumina content 70~90% weight percents, titanium carbide content 10~30% weight percents;
C, zirconia content 20~60% weight percents, alumina content 20~60% weight percents; Titanium carbide content 10~30% weight percents.
2. electrostatic dispersion ceramic as claimed in claim 1 is characterized in that surface resistivity is
Figure A2007100719830002C1
Figure A2007100719830002C2
3. electrostatic dispersion ceramic as claimed in claim 1 is characterized in that, volume resistance is 10 4~10 9Ω cm.
4. electrostatic dispersion ceramic as claimed in claim 1 is characterized in that, zirconic granularity is about 0.05~5 micron, and aluminum oxide grain size is about 0.05~5 micron, and the titanium carbide granularity is about 0.5~5 micron.
5. electrostatic dispersion ceramic as claimed in claim 1 is characterized in that the maximum electrostatic stream that is produced during release electrostatic is not more than 3mA.
6. electrostatic dispersion ceramic as claimed in claim 1 is characterized in that sintered compact has the density greater than about 95% theoretical density.
7. electrostatic dispersion ceramic as claimed in claim 1 is characterized in that, adds a spot of oxide conductor or semi-conductor in material, as SnO 2, ZnO etc.
8. electrostatic dispersion ceramic as claimed in claim 1 is characterized in that the static voltage of material is less than 10 volts.
9. electrostatic dispersion ceramic as claimed in claim 7 is characterized in that, has claim 2,3,4,5,6 and 8 material property that is had and technical characterictics.
10. as claim 1 and the described electrostatic dispersion ceramic of claim 7, it is characterized in that the firing temperature of material is 1550 ℃~1750 ℃, sintering atmosphere is vacuum sintering or argon gas atmosphere protection sintering.
CNA2007100719838A 2007-04-03 2007-04-03 Electrostatic dissipation ceramic material and preparation thereof Pending CN101279845A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016172824A1 (en) * 2015-04-27 2016-11-03 深圳市商德先进陶瓷有限公司 Zirconium oxide composite ceramic and preparation method therefor
CN107473741A (en) * 2017-09-21 2017-12-15 深圳市商德先进陶瓷股份有限公司 Anti-static ceramic and preparation method thereof
CN112028640A (en) * 2020-07-27 2020-12-04 常熟理工学院 TiC-ZrO2Preparation method of composite powder and composite fiber

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016172824A1 (en) * 2015-04-27 2016-11-03 深圳市商德先进陶瓷有限公司 Zirconium oxide composite ceramic and preparation method therefor
CN107473741A (en) * 2017-09-21 2017-12-15 深圳市商德先进陶瓷股份有限公司 Anti-static ceramic and preparation method thereof
CN112028640A (en) * 2020-07-27 2020-12-04 常熟理工学院 TiC-ZrO2Preparation method of composite powder and composite fiber

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Open date: 20081008