CN101276600A - Reflection board for reflecting UV ray in fabrication of magnetic disk as well as UV processing equipment - Google Patents
Reflection board for reflecting UV ray in fabrication of magnetic disk as well as UV processing equipment Download PDFInfo
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- CN101276600A CN101276600A CNA2007100919247A CN200710091924A CN101276600A CN 101276600 A CN101276600 A CN 101276600A CN A2007100919247 A CNA2007100919247 A CN A2007100919247A CN 200710091924 A CN200710091924 A CN 200710091924A CN 101276600 A CN101276600 A CN 101276600A
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Abstract
The invention discloses a reflecting board for reflecting UV rays during manufacturing a magnetic disk. The reflecting board comprises a center abdomen board and a pair of wing flanges arranged oppositely, an angle between each wing flange and the center abdomen board is an obtuse angle, the reflecting board is provided with a reflecting surface for reflecting UF rays. In addition, the invention also discloses a UV processing device for manufacturing magnetic disks, which comprises a reaction chamber and at least a UV source arranged in the reaction chamber, wherein the UV source includes a reflecting board and a UV lamp disposed correspondingly, the reflecting board is provided with a reflecting surface facing to the UV lamp, the UV lamp irradiates the UV rays on the surface of the magnetic disk to be processed, and the reflecting board reflects the UV rays from the UV lamp to the surface of the magnetic disk, wherein the reflecting board is the inventive reflecting board.
Description
Technical field
The present invention relates in the disk manufacturing, be used to reflect the reflecting plate of UV light and the UV treatment facility of this reflecting plate of employing.
Background technology
Be used for computing machine for example such as magnetic recording mediums such as disks usually with high-speed rotation, thereby between disk and read/write head, form air film.This air film is supported on read/write head the non-contacting position that is positioned at the disk top.When disk from halted state begin to rotate or it when bearing physical shock, air film can not support read/write head, thereby makes it to contact disk, and this damage that will cause card owing to the wearing and tearing and the scraping of magnetic material.Certainly, comprise that the operation that contacts for a long time between magnetic disk surface and the read/write head also causes significant power.In having the disc driver of read/write head, for example in the hard disk drive, read/write head contacts disk when the disk drive shut-down operation, and adopts so-called contact to begin to stop driving method usually, and wherein the driving of disk is under the state of read/write head contact magnetic disk surface.Yet, if disk drive under the situation that read/write head and card contact with each other for a long time need not, bigger stiction can take place between read/write head and dish, the situation that the rotating drive of disk can not suitably be carried out may take place.
Therefore, in order to address this problem, on flux material layer, to form, and on the DLC protective layer, form lubricating film such as protective layers such as DLC (diamond-like coal) films.By lubricating film is set on magnetic disk surface, the friction between read/write head and the card is reduced, and makes their life-span be prolonged and operating characteristic is improved.
In addition, the homogeneity that distributes on magnetic disk surface of lubricating film also has appreciable impact to the operating characteristic of disk and read/write head.
Usually, after lubricating film put on the magnetic disk surface, disk needed further to handle so that lubricating film solidifies and is bonded in magnetic disk surface.The usual method that is used to handle disk is to lubricating film irradiation ultraviolet radiation (hereinafter referred is a UV light).
Patent documentation JP2001-134924A discloses a kind of equipment by the UV irradiate light is handled disk to the magnetic disk surface.Be applied with lubricating film on magnetic disk surface, this lubricating film is made of the molecule with crosslinking functionality, and the UV irradiate light is caused cross-linking reaction to lubricating film, makes molecule constitute bridge, and thereby the lubricating film surface of solidifying and being adhered to dish.Figure 1A-1C is a synoptic diagram, shows disclosed traditional UV treatment facility among the JP2001-134924A, and wherein Figure 1A is a skeleton view, and Figure 1B is a side view, and Fig. 1 C is a front elevation.Shown in Figure 1A-1C, the UV curing apparatus comprises reaction chamber 41 and transfer system 42, and in reaction chamber 41, by the UV irradiate light is handled disk to the surface of disk, and transfer system transmits and will have pending disk feed to go in the reaction chamber 41.The UV treatment facility comprises 4 lines, in other words, can handle four disks simultaneously in reaction chamber.
In reaction chamber, be provided with UV light source 41A, be used for the UV irradiate light to the surface of disk so that cause cross-linking reaction; And infrared light supply 41B, be used to add Thermomagnetic disc.Shown in Figure 1A-1C, UV light source 41A comprises UV lamp 41a and is positioned at the reflecting plate 41b that is associated of UV lamp 41a back that reflecting plate 41b is used to reflect the light from UV lamp 41a.Similarly, infrared light supply 41B comprises infrared lamp 41c and is positioned at the reflecting plate 41d that is associated of infrared lamp 41a back that reflecting plate 41c is used to reflect the light from infrared lamp 41c.Shown in Figure 1A, nitrogen N 2 is by entering pipe 41C and introduce reaction chamber and discharge from vent pipe 41D, and temperature controller 41c is arranged on and enters pipe and go up to regulate the temperature of the nitrogen of introducing reaction chamber.By nitrogen is introduced reaction chamber, disk is in when handling under the nitrogen environment so that anti-oxidation.
The following describes the operation of traditional UV treatment facility.
Travelling belt 42C is sent to the position that one of disk is aimed at the opening of reaction chamber 41 with the transmission carriage 42A that is equiped with a plurality of disks 10 on it, means of transportation 42B moves into reaction chamber with disk and makes disk between two infrared lamp 41c then, and is heated to desired temperature by infrared light supply 41B.Thereafter, means of transportation 42B moves into place position between two UV lamp 41a with disk, and UV light source 41A with the UV irradiate light to the surface of disk causing cross-linking reaction, so that lubricating film solidifies and is adhered to card.
By with the UV irradiate light in magnetic disk surface, cross-linking reaction is initiated, and makes lubricating film solidify and bonds to magnetic disk surface, thereby form the lubricating film that is attached to magnetic disk surface.
But, inter alia, lubricating film also depends on the homogeneity of the UV light that shines on the card in the homogeneity that distributes on the card.If shine the UV light uneven distribution on card on the card, then the intensity of UV light will change with the position.Therefore, the curing degree in card of lubricating film (or claim bonding rate) will change with the position, and correspondingly, do not combine with the substrate surface of dish and the amount of the movable composition that can move freely will change with the position, and this will cause two problems:
1. because movable composition can move, and it will move to the marginal portion of dish and accumulate in the peripheral place of dish when dish rotates so, this will cause the uneven distribution of lubricating film; And
2. because the amount of the movable composition that is produced changes with the position, movable composition is shifted to the peripheral uneven distribution that self causes lubricating film of dish.
When adopting the V-shaped reflecting plate 41b in cross section shown in Figure 1, the distribution of UV light on card can not be satisfactory.Fig. 2 shows the distribution of UV light on card when adopting the V-shaped reflecting plate in cross section.From Fig. 2 as seen, the skewness of UV light on card, particularly, the middle body of dish has denser irradiation intensity than the peripheral edge portion of dish, thereby causes the lubricating film of deterioration to distribute.
And test shows also compare with the situation that does not adopt reflecting plate, what technique effect the V-shaped reflecting plate in employing cross section does not obtain.
Therefore, there is the demand of further improving lubricating film distributing homogeneity on card.
Summary of the invention
Therefore, the present invention is intended to solve the problem that is associated with traditional UV treatment facility and the reflecting plate that is used to reflect UV light in a kind of disk manufacturing is provided, this reflecting plate can realize shining the even distribution of the UV light of magnetic disk surface, and a kind of UV treatment facility is provided, it can improve the distribution of lubricating film on magnetic disk surface so that improve the quality of disk.
For realizing above-mentioned purpose of the present invention, according to first aspect present invention, a kind of reflecting plate that is used to reflect UV light in the disk manufacturing is provided, this reflecting plate comprises the terminate in enlarged undercut portions and a pair of opposed edge of a wing, angle between each edge of a wing and the described terminate in enlarged undercut portions is the obtuse angle, and described reflecting plate has the reflecting surface that is used to reflect UV light.
Preferably, described reflecting plate comprises substrate, and aluminium lamination is applied on the described substrate to form described reflecting surface.
Preferably, described reflecting plate comprises substrate, and the chromium layer is applied on the described substrate to form described reflecting surface.
Preferably, described reflecting plate is made of aluminum.
Preferably, described angle is equal to each other.
Preferably, described disk is a hard disk.
According to second aspect present invention, a kind of UV treatment facility that is used to make disk is provided, described UV treatment facility comprises that reaction chamber and at least one are arranged on the UV light source in the described reaction chamber, described UV light source comprises the UV lamp of reflecting plate and related setting, described reflecting plate has the reflecting surface in the face of described UV lamp, described UV lamp with the UV irradiate light to the surface of the disk that pending processing is arranged, and described reflecting plate will reflex to from the UV light of described UV lamp on the described surface of described disk, and wherein said reflecting plate is the reflecting plate according to first aspect present invention.
Preferably, described UV light source comprises a pair of reflecting plate that faces with each other and be provided with, and each described reflecting plate is provided with the UV lamp that is associated.
Preferably, each reflecting plate is provided with two UV lamps that are associated, and described two UV lamps are arranged to one and are positioned at another top.
Preferably, a plurality of UV light sources have been arranged side by side in the described reaction chamber.
Preferably, the described reflecting plate that is positioned at the same side in each UV light source is integrally formed and form the overall reflective plate.
Preferably, being positioned at the same side and being in the whole microscler UV lamp of each UV lamp formation at equal height place in each UV light source along described UV light source arrangement direction extension.
Preferably, described UV lamp takes the shape of the letter U basically, has two shanks that link together in the end, and described two shanks are arranged to one and are positioned at another top.
Description of drawings
The embodiment of the invention is described in detail with reference to the accompanying drawings, wherein
Figure 1A-1C synoptic diagram shows the structure of traditional UV treatment facility, and wherein Figure 1A is a skeleton view, and Figure 1B is a side view, and Fig. 1 C is a front elevation;
Fig. 2 is a synoptic diagram, shows the distribution of UV light on the panel surface when adopting the traditional reflective plate;
Fig. 3 A-3B is the view that shows the reflecting plate of the embodiment of the invention, and wherein Fig. 3 A is a skeleton view, and Fig. 3 B is a cut-open view;
Fig. 4 is a synoptic diagram, shows the distribution of UV light on the panel surface when not adopting reflecting plate;
Fig. 5 is a synoptic diagram, shows the distribution of UV light on the panel surface when adopting reflecting plate of the present invention;
Fig. 6 synoptic diagram shows the major part of the UV treatment facility that adopts reflecting plate of the present invention for the purpose of clear, only to show the main building block of UV treatment facility that other building block omits;
Fig. 7 is a schematic plan view, shows in order to compare the UV treatment facility of test;
Fig. 8 is the side view of UV treatment facility shown in Figure 7;
Fig. 9 is a curve map, shows the corresponding relation of curing degree and disk radial position, and the line that wherein has symbol ■ shows the situation of using reflecting plate of the present invention, and has symbol ◆ line show the situation of not using reflecting plate;
Figure 10 is a curve map, shows to reach the required time shutter of 58% curing degree, and the line that wherein has symbol ■ shows the situation of using reflecting plate of the present invention, and has symbol ◆ line show the situation of not using reflecting plate;
Figure 11 is a curve map, shows the curing rate variance, and the line that wherein has symbol ■ shows the situation of using reflecting plate of the present invention, and has symbol ◆ line show the situation of not using reflecting plate;
Figure 12 is a curve map, shows the result of corrosion resistance test;
Figure 13 is the front view of VU lamp of the present invention.
Embodiment
Now, referring to Fig. 3, wherein show the reflecting plate 51b according to the embodiment of the invention, wherein Fig. 3 A is the skeleton view of reflecting plate, and Fig. 3 B is the cut-open view of reflecting plate.Shown in Fig. 3 A and 3B, reflecting plate 51b cross section is flute profile, has the terminate in enlarged undercut portions 11 and a pair of opposed edge of a wing 12.Described each and terminate in enlarged undercut portions 11 in the opposed edge of a wing 12 forms obtuse angle θ, and two obtuse angles shown in the figure are equal to each other, but two obtuse angles also can differ from one another; In addition, the angle between the terminate in enlarged undercut portions and the edge of a wing can change according to practical situations.Moreover the size L2 on the size L1 of terminate in enlarged undercut portions 11 and the edge of a wing 12 can change according to practical situations.
Reflecting plate 51b makes by bending plate, and reflecting plate is preferably made of aluminum.
Referring now to Fig. 2,4 and 5,, the effect that reflecting plate of the present invention obtained is adopted in explanation.
The situation of reflecting plate is not adopted on Fig. 4 surface.As shown in Figure 4, two UV lamps 20 are used for the UV irradiate light to the surface of disk 10, and two lamps are arranged on another top along one of vertical direction.From Fig. 4 as seen, UV light is uneven disk 10 lip-deep being distributed on the whole card, and the central authorities of dish and periphery do not have UV light, causes the lubricating film of deterioration to distribute thus.
The situation of the V-shaped reflecting plate in disclosed cross section among the JP2001-134924 is adopted on Fig. 2 surface.As shown in Figure 2, the rounded UV lamp 41a in cross section is used for the UV irradiate light to the surface of disk 10, and is arranged between pending dish 10 and the reflecting plate 41b.From Fig. 2 as seen, UV light is uneven in being distributed on the whole card on the magnetic disk surface, and the middle body of dish has denseer intensity of illumination than the periphery of dish, causes the lubricating film of deterioration to distribute thus.The rectangle frame that indicates with dotted line shows the zone that does not have reflection function of reflecting plate, because can not arrive this zone in order to the far away inadequately of the UV light ray propagation of irradiation card, and this is considered to cause one of UV light factor that deterioration distributes on card.
Fig. 5 shows the situation that adopts reflecting plate of the present invention.As shown in Figure 5, two UV lamps 20 are used for the UV irradiate light to the surface of disk 10, and two lamps are arranged in mode same as shown in Figure 4.From Fig. 5 as seen, by means of the reflecting effect that reflecting plate 51b of the present invention realizes, the distribution of UV light on card is quite even, causes good lubricating film to distribute thus.Its result, the quality of disk is improved greatly.
Fig. 6 is the view that adopts the UV treatment facility of reflecting plate of the present invention, for the purpose of clear, only show the main building block of UV treatment facility among Fig. 6, and has omitted other parts.
As shown in Figure 6, two reflecting plate 51b are arranged on and are similar in the reaction chamber shown in Fig. 1 and are arranged to toward each other, reflecting plate 51b can utilize suitable fastener nationality to be secured to support component in the reaction chamber by the dorsal part of its terminate in enlarged undercut portions, the mode of attaching reflecting plate is unessential for purposes of the invention, but can adopt any suitable fastening method.Two reflecting plate 51b face with each other and are spaced apart with preset distance.What be associated with each reflecting plate is two UV lamps 20, these two UV lamps on the vertical direction one be positioned at above another and be provided with.Fig. 6 also shows how UV light obtained UV light on the card by baffle reflection even distribution.The disk that has applied lubricating film is placed on the carriage that is similar to as shown in Figure 1, and carriage of placement disk moves to the reaction chamber below on it.When the opening of a dish and reaction chamber on time, this dish is introduced into reaction chamber and places between two pairs of UV lamps 20.Be under the UV light that this dish is moved out of reaction chamber after the exposure scheduled time slot, and carriage continues to move and makes next disk can introduce reaction chamber to handle.
In the traditional UV treatment facility shown in Fig. 1 and 2, adopted the rounded UV lamp 41a in cross section.According to the present invention, adopted a kind of novel UV lamp 20.As shown in figure 13, the UV lamp takes the shape of the letter U basically, and it is rounded to have two 30 and 31, two section cross sections of parallel section that link together in the end.As illustrated in Figures 5 and 6, preferably, adopt two this kind UV lamps, in use be arranged on another top along one of vertical direction.Test shows, adopts this type UV lamp can obtain the good technical effect.Though UV lamp shown in Figure 13 is preferred, the UV lamp of other types also can obtain the good technical effect in conjunction with reflecting plate of the present invention uses.
In the above-described embodiments, use two UV lamps in conjunction with each reflecting plate.Yet the quantity of employed UV lamp is not limited to two, but can use still less or more UV lamp according to practical situations.And in actual applications, the distance between the size of reflecting plate (comprising the size on the size of terminate in enlarged undercut portions, two edges of a wing and the angle between the web and the edge of a wing) and reflecting plate and the UV lamp can be changed according to size and dimension of the size that pending dish is arranged, UV lamp etc.
In addition, be provided with in reaction chamber under the situation of many lines, the arrangement form of UV lamp can present different forms.For example, each reflecting plate can dispose its personal UV lamp, or can be shared by a plurality of reflecting plates along a long UV lamp of production line arranged direction extension.In addition, some or all reflecting plates can be integrally formed and be formed an overall reflective plate.
In addition, in the above-described embodiments, the UV lamp that each side of dish is provided with reflecting plate and is associated is so that the both sides of process disk.Need under the situation of processing on a surface of only coiling, only the UV lamp that need reflecting plate is set and be associated in a side of dish.
In addition, though in the above-described embodiments, reflecting plate is made of aluminum, and reflecting plate can otherwise prepare.For example, the substrate of reflecting plate can be by making such as other materials such as steel, and form an aluminium lamination on substrate, and perhaps other material such as chromium with good UV light reflection characteristic can put on substrate by for example plating.
In order to confirm technique effect of the present invention, carried out contrast test.
In order to compare test, adopted the UV treatment facility that comprises two reaction chambers shown in Figure 7, each reaction chamber has three production lines that are arranged side by side, and makes can handle three dishes simultaneously in each reaction chamber, shown in Fig. 7 signal.Six lines are denoted as production line 1 respectively to production line 6.Reaction chamber 1 is that three lines 1-3 in the reaction chamber of left side are provided with reflecting plate of the present invention; And reaction chamber 2 is three lines 4-6 in the reaction chamber of right side reflecting plate is not set.Two reaction chambers all adopt the novel lamp of the present invention shown in the set of diagrams 13.
Fig. 8 is the side view of UV treatment facility.As shown in Figure 8, the carriage 42A that carries a plurality of disks 10 is positioned at reaction chamber 41 belows, and means of transportation 42B is used for dish 10 is moved into or shift out reaction chamber.
I. curing degree (hereinafter referred is BR) contrast
Fig. 9 is a curve map, shows the corresponding relation of curing degree and disk radial position, and among Fig. 9, the line that has symbol ■ shows the situation of using reflecting plate of the present invention, and has symbol ◆ line show the situation of not using reflecting plate.Different radial positions at disk in the test detect, and test condition is as follows:
Device type: UV treatment facility 3001
Exemplar quantity: two
The UV light time shutter: identical
Target curing degree: 58%
From Fig. 9 as seen, under the identical time shutter, by adopting reflecting plate of the present invention, the curing degree of lubricating film significantly increases.
II. time shutter contrast
Figure 10 is a curve map, shows to reach the required time shutter of 58% curing degree.Among Figure 10, the line that has symbol ■ shows the situation of using reflecting plate of the present invention, and has symbol ◆ line show the situation of not using reflecting plate.And test condition is as follows:
Device type: UV treatment facility 3001
Exemplar quantity: 11
From Figure 10 as seen, reach the required time shutter of 58% curing degree by adopting reflecting plate of the present invention, having reduced.
III. solidify the rate variance contrast
Figure 11 is a curve map, shows the curing rate variance.Among Figure 11, the line that has symbol ■ shows the situation of using reflecting plate of the present invention, and has symbol ◆ line show the situation of not using reflecting plate.
The difference of card diverse location place curing degree is one of inhomogeneity index of lubricating film, and difference is more little, and all fair property is good more.Solidifying rate variance is defined as follows:
The minimum BR (%) of maximum BR (the %)-dish of BR poor (%)=dish
Test condition is as follows:
Device type: UV treatment facility 3001
Exemplar quantity: 11
The quantity of test point: every dish 8 points (each surperficial 4 point)
From Figure 11 as seen, by adopting reflecting plate of the present invention, reduced the curing rate variance, and thereby utilized reflecting plate of the present invention to improve the homogeneity of lubricating film.
IV. output contrast
Output when table 1 shows the output when adopting reflecting plate of the present invention and do not use reflecting plate.Test condition is as follows:
Device type: ATS UV treatment facility
UV lamp service time: 511 hours
UV lamp intensity: 3.1mw/cm
2
As seen from Table 1, compare with the situation that does not adopt reflecting plate, the output with reaction chamber 1 of reflecting plate has improved 16.4%.
Table 1
V. the contrast of the time shutter between reaction chamber 1 and the reaction chamber 2
Illustrated in the table 2 handle dish required, corresponding to time shutter of every lines in reaction chamber 1 and 2.As seen from Table 2, the mean exposure time of reaction chamber 1 lacks about 2 seconds than the mean exposure time of reaction chamber 2, thereby throughput rate has improved about 11%.
Table 2
VI. corrosion resistance contrast
At the disk that adopts reflecting plate manufacturing of the present invention with do not adopt the disk of reflecting plate manufacturing to carry out corrosion resistance test.
In the test, 6-9 disk put into the carriage that is used for producing, and the carriage that has disk on it is put into the polybag that is formed with two holes.Thereafter, carriage is put into the test cabinet with predetermined relative humidity, and test cabinet is heated and cooling subsequently.Afterwards, detect the quantity of the hot spot on each dish.Figure 12 shows the result who shows that the upward average corrosion of each dish is counted.From Figure 12 as seen, the disk made from without reflecting plate the time is compared, and utilizes the disk corrosion resistance of reflecting plate manufacturing of the present invention to improve greatly, because as shown in figure 12, average hot spot digital display work reduces.
Though described the preferred embodiments of the present invention above, the insider be it is evident that, can carry out various modifications and not deviate from scope and spirit of the present invention embodiment.
Claims (14)
1. reflecting plate that in the disk manufacturing, is used to reflect UV light, this reflecting plate comprises the terminate in enlarged undercut portions and a pair of opposed edge of a wing, the angle between each edge of a wing and the described terminate in enlarged undercut portions is the obtuse angle, and described reflecting plate has the reflecting surface that is used to reflect UV light.
2. reflecting plate as claimed in claim 1, wherein said reflecting plate comprises substrate, and aluminium lamination is applied on the described substrate to form described reflecting surface.
3. reflecting plate as claimed in claim 1, wherein said reflecting plate comprises substrate, and the chromium layer is applied on the described substrate to form described reflecting surface.
4. reflecting plate as claimed in claim 1, wherein said reflecting plate is made of aluminum.
5. as each described reflecting plate among the claim 1-4, wherein said angle is equal to each other.
6. as each described reflecting plate among the claim 1-4, wherein said disk is a hard disk.
7. reflecting plate as claimed in claim 5, wherein said disk is a hard disk.
8. UV treatment facility that is used to make disk, described UV treatment facility comprises that reaction chamber and at least one are arranged on the UV light source in the described reaction chamber, described UV light source comprises the UV lamp of reflecting plate and related setting, described reflecting plate has the reflecting surface in the face of described UV lamp, described UV lamp with the UV irradiate light to the surface of the disk that pending processing is arranged, and described reflecting plate will reflex to from the UV light of described UV lamp on the described surface of described disk, and wherein said reflecting plate is each described reflecting plate among the claim 1-7.
9. UV treatment facility as claimed in claim 8, wherein said UV light source comprise a pair of reflecting plate that faces with each other and be provided with, and each described reflecting plate is provided with the UV lamp that is associated.
10. UV treatment facility as claimed in claim 8 or 9, wherein each reflecting plate is provided with two UV lamps that are associated, and described two UV lamps are arranged to one and are positioned at another top.
11., be arranged side by side a plurality of UV light sources in the wherein said reaction chamber as each described UV treatment facility among the claim 8-10.
12. UV treatment facility as claimed in claim 11, wherein the described reflecting plate that is positioned at the same side in each UV light source is integrally formed and form the overall reflective plate.
13. UV treatment facility as claimed in claim 11, wherein being positioned at the same side and being in the whole microscler UV lamp of each UV lamp formation at equal height place in each UV light source along described UV light source arrangement direction extension.
14. as each described UV treatment facility among the claim 8-13, wherein said UV lamp takes the shape of the letter U basically, has two shanks that link together in the end, described two shanks are arranged to one and are positioned at another top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100919247A CN101276600A (en) | 2007-03-30 | 2007-03-30 | Reflection board for reflecting UV ray in fabrication of magnetic disk as well as UV processing equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100919247A CN101276600A (en) | 2007-03-30 | 2007-03-30 | Reflection board for reflecting UV ray in fabrication of magnetic disk as well as UV processing equipment |
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| Publication Number | Publication Date |
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| CN101276600A true CN101276600A (en) | 2008-10-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA2007100919247A Pending CN101276600A (en) | 2007-03-30 | 2007-03-30 | Reflection board for reflecting UV ray in fabrication of magnetic disk as well as UV processing equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112351841A (en) * | 2018-05-04 | 2021-02-09 | 泽农公司 | Reflector providing uniform light energy |
-
2007
- 2007-03-30 CN CNA2007100919247A patent/CN101276600A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112351841A (en) * | 2018-05-04 | 2021-02-09 | 泽农公司 | Reflector providing uniform light energy |
| US11365866B2 (en) | 2018-05-04 | 2022-06-21 | Xenon Corporation | Reflector for providing uniform light energy |
| CN112351841B (en) * | 2018-05-04 | 2023-08-15 | 泽农公司 | Reflector for providing uniform light energy |
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