CN101275217A - Heating apparatus for vacuum evaporation - Google Patents
Heating apparatus for vacuum evaporation Download PDFInfo
- Publication number
- CN101275217A CN101275217A CNA2007101485175A CN200710148517A CN101275217A CN 101275217 A CN101275217 A CN 101275217A CN A2007101485175 A CNA2007101485175 A CN A2007101485175A CN 200710148517 A CN200710148517 A CN 200710148517A CN 101275217 A CN101275217 A CN 101275217A
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- white
- hot filament
- deposition material
- evaporation
- vacuum evaporation
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Abstract
The technical subject of the invention is to provide a late-model heating device for vacuum evaporation that improves operation convenience of evaporation materials and processes greater evaporation by improving contact state of a white-hot filament and evaporation materials. The white-hot filament for the vacuum evaporation is characterized in that the white-hot filament is formed by continuously arranging placing section (23) of the evaporation materials (W) along a length direction at an upper side of a selective fusion section (22). The arranging placing section (23) is formed in a shaped in order to guide the evaporation materials (W) from upper side. On another hand, the evaporation materials (W) are in bending shape so as to be arranged on the arranging placing section (23) in a state maintaining loose lock with the white-hot filament (1), which enables the evaporation materials (W) to be more easily arranged related to the white-hot filament (1) for vacuum evaporation and enables the selective fusion section (22) to transport heat to the evaporation materials (W) efficiently.
Description
Technical field
The present invention relates to a kind of heating apparatus for vacuum evaporation of resin, metal products etc. being aluminized etc. by vacuum evaporation.
Background technology
Be accommodated in the vacuum chamber with machined material with as the aluminium flake of deposition material etc., the gimmick that makes the deposition material heating evaporation and form the tectal vacuum evaporation of aluminium on machined material is widely used always.In this process,, various improvement have been carried out for loss that reduces deposition material and the coating that on machined material, forms the overlay film shape with high-level efficiency etc.For example, a kind of the deposition material such as existing aluminium and the mutual shape of the white-hot filament of heating usefulness are transformed, thereby carried out the fusion of deposition material effectively, the device of evaporation is well known (for example, with reference to patent documentation 1).
Patent documentation 1: the Japanese Patent spy opens 2001-220662
As the ring of one in this type of technique improvement, technical task of the present invention is to provide a kind of novel heating apparatus for vacuum evaporation that improves the operation ease of deposition material and carry out better evaporation by the contact condition that improves white-hot filament and deposition material.
Summary of the invention
Utilize this invention, deposition material is easily carried out with respect to the setting of white-hot filament, and the fusion service portion is carried out efficiently to the heat passage of deposition material.
Utilize this invention, can make the evaporating materials that is melted spread all over fusion service portion universe, thereby can make the deposition material evaporation well.
Utilize this invention, the deposition material that is melted is spread all over more sleekly to fusion service portion universe.
Technical scheme 4 described heating apparatus for vacuum evaporation, is characterized in that described deposition material is spiral-shaped having on the basis of above-mentioned important document.
Utilize this invention, can make fusion service portion and evaporating materials carry out reliably loosely engaging.
Technical scheme 5 described heating apparatus for vacuum evaporation, is characterized in that described deposition material is formed by many wire rod twistings having on the basis of above-mentioned important document.
Utilize this invention, can promote heat passage to evaporating materials integral body fusion to be carried out sleekly.
The structure of the described invention of above-mentioned every technical scheme can be used as the method that solves the problems of the technologies described above.
If use the present invention, can improve the operation ease of deposition material and carry out better evaporation by the contact condition that improves white-hot filament and deposition material.
Description of drawings
Fig. 1 (a) represents the framework longitudinal sectional view of heating apparatus for vacuum evaporation of the present invention as the vacuum deposition apparatus of integrant, (b) is the stereographic map of expression heating apparatus for vacuum evaporation.
Fig. 2 (a) is expression vacuum evaporation with the stereographic map of white-hot filament and deposition material, (b) is deposition material is remained on vacuum evaporation with the local in addition illustrated stereographic map that amplifies of the state on the white-hot filament.
Fig. 3 (a) is the side-view of expression vacuum evaporation with white-hot filament and deposition material, is that expression makes deposition material remain on the side-view of vacuum evaporation with the state on the white-hot filament (b).
Fig. 4 (a) is the vertical view of expression vacuum evaporation with white-hot filament, is that expression makes deposition material remain on the vertical view of vacuum evaporation with the state on the white-hot filament (b).
Fig. 5 is the side-view of example of other shape of expression deposition material.
Fig. 6 (a) is that expression makes deposition material remain on the front view of the vacuum evaporation of formation heating apparatus for vacuum evaporation of the present invention with the state on the white-hot filament, (b) is the front view of the maintaining condition of the bar-shaped deposition material of expression.
(nomenclature)
1 vacuum evaporation white-hot filament 2 white-hot filament bodies
3 coiling materials, 5 evaporation coating devices
21 energising ends, 22 fusion service portions
23 arrangement portions, 31 coiling materials (coiling shape)
50 Room body 50A Processing Rooms
51 battery lead rods, 52 white heat guide frames
53 set screws, 55 worktable
M deposition material W machined material
Embodiment
Below, in accordance with the embodiments illustrated preferred forms of the present invention is described.And, also can in the scope of technological thought of the present invention, suitably change following embodiment.
Embodiment
Among the figure, symbol 1 expression vacuum evaporation white-hot filament, this vacuum evaporation is made of white-hot filament body 2 and coiling material 3 as major parts with white-hot filament 1, and this white-hot filament body 2 uses wire rods such as tungsten filament, and this coiling material 3 is wound on the outside of white-hot filament body 2 and adopts metal fine etc.This vacuum evaporation with white-hot filament 1 in Fig. 1 with in the evaporation coating device 5 of frame representation as the integrant of heating apparatus for vacuum evaporation.And, vacuum evaporation is energized heating with white-hot filament 1 under vacuum environment, make the deposition material M fusion, the evaporation that remain on this vacuum evaporation usefulness white-hot filament 1, thereby form metal film coated (coating) on the surface of the machined material W of evaporation in being disposed at evaporation coating device 5.
At first, before vacuum evaporation was specifically described with white-hot filament 1, the summary to evaporation coating device 5 described earlier.This evaporation coating device 5 as shown in Figure 1, as Processing Room 50A, its substantial middle is erect and is formed with battery lead rod 51 with the inside of the chamber body 50 of tubular.Be formed with a plurality of branches ground up and down and be extruded with a pair of white heat guide frame 52 respectively, utilize set screw 53 that vacuum evaporation is fixed on the front end of this white heat guide frame 52 with white-hot filament 1, constitute heating apparatus for vacuum evaporation thus from this battery lead rod 51.
Surround above-mentioned a plurality of vacuum evaporation in vacuum evaporation with the periphery of white-hot filament 1 and be provided with many group worktable 55 with white-hot filament 1 ground.As an example of this worktable 55, omit detailed explanation: the base portion supports of worktable 55 is being changeed on the discous parts, in the periphery rotation of vacuum evaporation with white-hot filament 1, carries out planetary motion.By such action, the machined material W that is supported on the worktable 55 is covered with by the deposition material M of fusion, evaporation.
In addition, in the chamber body 50, the vacuum evaporation white-hot filament 1 and worktable 55 exposures that are positioned at Processing Room 50A by independent rising of its case member or local segmentation, expansion are made, these vacuum evaporations can suitably be slided with white-hot filament 1 and worktable 55, thereby the setting of deposition material M and machined material W is easily carried out.
Next, described vacuum evaporation is carried out more specific description with white-hot filament 1.An example as described white-hot filament body 2 is formed by the twisting of many tungsten filament single lines, and its two ends are formed with and for example are the roughly energising end 21 of linearity.And this 21 at energising end forms to three-dimensional unfolded fusion service portion 22, as an example, shown in Fig. 2,3,4, forms the importing shape that allows evaporating materials M to import from the top.
Concrete shown in Fig. 6 (a), the wire rod that forms white-hot filament body 2 is V word shape on side-view, and integral body as shown in Figure 4, carries out bending machining to form fusion service portion 22 with the sinusoidal curve shape in vertical view with launching.With the superjacent air space of fusion service portion 22 arrangement portion 23 as deposition material M.
In addition, described white-hot filament body 2 itself is not limited to adopt the twisting line, also can be made of the metal single line.
On described fusion service portion 22, be wound with the coiling material 3 (, when especially it being represented, representing) of coiling shape with symbol 31 about the coiling material 3 of coiling shape.
In addition, in order to make fusion service portion 22 and the contact condition of deposition material M keep good, described two energising ends 21 to laterally outstanding, and preferably make energising hold 21 height grade to be positioned at the bottom of fusion service portion 22 with identical height grade as the side-view of Fig. 3 (a) shown in.
With white-hot filament 1, shown in Fig. 2 (b), Fig. 3 (b), Fig. 4 (b), is that example forms the deposition material M that spirrillum constitutes and is arranged in the arrangement portion 23 with loose fastening state with aluminum steel etc. with respect to the vacuum evaporation of this shape.
At this moment, because fusion service portion 22 forms the importing shape that allows evaporating materials M to import from the top.Therefore shown in Fig. 6 (a), fusion service portion 22 is V word shape on side-view launches, no matter deposition material M is dropped at any position above this fusion service portion 22, can both arrive foot, twine mutually with the fusion service portion 22 of left and right sides both end sides that ground is loose to engage, therefore can guarantee bigger contact area reliably.
Therefore, the throwing device of deposition material M does not require high precision.Even also need not the over-drastic skill when carrying out manual working.
In addition, deposition material M is by with much thinner wire rod twistings and be processed as the spiral-shaped heat conductivity that improves each wire rod, thereby promotes heat passage to deposition material M integral body, forms deposition material M yet also can carry out bending machining to single line.
In addition, the helix pitch of deposition material M is shown in Fig. 4 (b), 2 times (integral multiples) for the spacing of fusion service portion 22, thereby can make deposition material M and fusion service portion 22 twine mutually that ground is loose to engage with its contact area of further expansion, yet also can shown in the deposition material M1 of Fig. 3 (a), form with different spacings.
And, the shape of deposition material M only need be to get final product with the curved shape that white-hot filament body 2 is placed in the arrangement portion 23 with keeping loose fastening state, therefore, as shown in Figure 5, the both ends that make deposition material M are shape in the shape of a spiral, between part can form linearity, even can not form spirrillum and in same plane with the waveform shape bending.
An example as heating apparatus for vacuum evaporation of the present invention, adopt said structure, in the process of carrying out evaporation, chamber body 50 is risen, deposition material M and machined material W are provided with thereby the vacuum evaporation that is positioned at Processing Room 50A is slided with white-hot filament 1 and worktable 55.
Next, send vacuum evaporation back to original position with white-hot filament 1, worktable 55 and chamber body 50, at this moment and since deposition material M and vacuum evaporation with the loose fastening state of white-hot filament 1 maintenance be placed in the arrangement portion 23, so vibration that can be when not mobile etc. causes deposition material M to come off.
In addition, shown in Fig. 6 (b), when deposition material M and vacuum evaporation did not keep loose fastening state with white-hot filament 1, vibration when mobile etc. had once caused deposition material M to come off.
And, do the time spent at evaporation, the white-hot filament body 2 that is energized from white heat guide frame 52 generates heat, thereby effectively the deposition material M that is supported in the arrangement portion 23 is carried out fusion and evaporation.At this moment, the deposition material M that is melted does not pile up part because of the capillary phenomenon of the coiling material 3 that is wound in white-hot filament body 2 from the below to the top, launch but flow.Finally make deposition material M be covered with the fusion service portion 22 of white-hot filament body 2, then, the aluminium molecule be evaporated and at the surperficial evaporation of machined material W to form overlay film (coating).
In addition, shown in Fig. 6 (b), be simple when bar-shaped at deposition material M, since less with the contact area of fusion service portion 22, therefore can make fusion service portion 22 produce the over-drastic heat producing losses.And, may have only contact part to be melted and situation that not fusion of middle portion and causing comes off.
In addition, also package coiling material 3 on described fusion service portion 22 not at this moment, is supported on vacuum evaporation and can directly receives heat passage from white-hot filament body 2 with the deposition material M on the white-hot filament 1, thereby promptly be melted.
Claims (5)
1, a kind of heating apparatus for vacuum evaporation, deposition material is remained on because of on the heated white-hot filament of energising, make this deposition material heating evaporation and on machined material, form the evaporation overlay film, it is characterized in that, described white-hot filament forms by the arrangement portion that deposition material is set above the fusion service portion along its length continuously, and should arrangement portion form the shape that deposition material is imported from the top, on the other hand, described deposition material is curved shape, thereby is placed in the arrangement portion with white-hot filament with keeping loose fastening state.
2, heating apparatus for vacuum evaporation as claimed in claim 1 is characterized in that, described white-hot filament is formed by many wire rod twistings.
3, heating apparatus for vacuum evaporation as claimed in claim 1 or 2 is characterized in that, package has winding line on the described white-hot filament.
As each described heating apparatus for vacuum evaporation in the claim 1 to 3, it is characterized in that 4, described deposition material is spiral-shaped.
As each described heating apparatus for vacuum evaporation in the claim 1 to 4, it is characterized in that 5, described deposition material is formed by many wire rod twistings.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007079088A JP4969281B2 (en) | 2007-03-26 | 2007-03-26 | How to use heating equipment for vacuum deposition |
| JP2007-079088 | 2007-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101275217A true CN101275217A (en) | 2008-10-01 |
Family
ID=39911709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101485175A Pending CN101275217A (en) | 2007-03-26 | 2007-08-22 | Heating apparatus for vacuum evaporation |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4969281B2 (en) |
| CN (1) | CN101275217A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104313545A (en) * | 2014-09-26 | 2015-01-28 | 马瑞利汽车零部件(芜湖)有限公司 | Storage rack of aluminizing machine |
| CN113930729A (en) * | 2021-09-22 | 2022-01-14 | 铜陵市超越电子有限公司 | High-efficient coating by vaporization device of metallized film |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS552727A (en) * | 1978-06-21 | 1980-01-10 | Hitachi Ltd | Vacuum evaporation apparatus |
| JPH0243823B2 (en) * | 1984-08-31 | 1990-10-01 | Nippon Genshiryoku Kenkyusho | KINZOKUJOHATSUSEN |
| JP3643978B2 (en) * | 2000-02-04 | 2005-04-27 | 美光産業株式会社 | Vapor deposition material used for vacuum deposition |
| JP2003268534A (en) * | 2002-03-18 | 2003-09-25 | Hitachi Metals Ltd | Composite vapor deposition material and its manufacturing method |
| JP2005290483A (en) * | 2004-03-31 | 2005-10-20 | Biko Mekku Kogyo Kk | Filament for vacuum deposition |
-
2007
- 2007-03-26 JP JP2007079088A patent/JP4969281B2/en not_active Expired - Fee Related
- 2007-08-22 CN CNA2007101485175A patent/CN101275217A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104313545A (en) * | 2014-09-26 | 2015-01-28 | 马瑞利汽车零部件(芜湖)有限公司 | Storage rack of aluminizing machine |
| CN113930729A (en) * | 2021-09-22 | 2022-01-14 | 铜陵市超越电子有限公司 | High-efficient coating by vaporization device of metallized film |
| CN113930729B (en) * | 2021-09-22 | 2024-04-05 | 铜陵市超越电子有限公司 | High-efficient evaporation device of metallized film |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008240023A (en) | 2008-10-09 |
| JP4969281B2 (en) | 2012-07-04 |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20081001 |