CN101255993B - Silicone hydride combustion tower - Google Patents
Silicone hydride combustion tower Download PDFInfo
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- CN101255993B CN101255993B CN2008100933855A CN200810093385A CN101255993B CN 101255993 B CN101255993 B CN 101255993B CN 2008100933855 A CN2008100933855 A CN 2008100933855A CN 200810093385 A CN200810093385 A CN 200810093385A CN 101255993 B CN101255993 B CN 101255993B
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Abstract
The invention relates to a device for treating inflammable inorganic oxide waste gas by using a burning method, especially relating to a silicone hydride combustion tower comprising a tower body and a water container. A combustion barrel, a material filling chamber, a spray chamber and a liquid-removal chamber are disposed in the tower body. The lower portion of the combustion barrel is disposed in the water container, a ballast cover is provided with the combustion barrel, a spray device is disposed in a hollow cavity between the ballast cover and the combustion barrel. A combustion chamber is disposed at the bottom of the combustion barrel, a voltage equalizing chamber is disposed at the middle portion of the combustion barrel, and a nitrogen protection chamber is disposed at the top ofthe combustion chamber. A slag discharging opening communicating to the outside of the tower body is disposed at the bottom of the combustion chamber. A waste gas inlet and a compressed air inlet aredisposed on the barrel body of the combustion chamber, a solo valve is provided at the waste gas inlet, and maintenance openings are provided at the upper portion of the material filling chamber and on the tower body where the spray chamber exists. The inventive device solves following problems that operation cost of silicone hydride waste gas treatment devices in prior art is high; explosion of silicone hydride waste gas occurs when inflammable gas extinguishes or expires; maintenance of the waste gas treatment device can be performed only when the device is closed down.
Description
Technical field
The present invention relates to a kind of device that utilizes burning method to handle the waste gas of flammable inorganic oxide, particularly a kind of silicone hydride combustion tower.
Background technology
When adopting chemical vapor deposition (CVD) technology in solar cell manufacturing and the manufacturing field at integrated circuit and electronic component, for preventing to pollute and fire, must avoid discharging use in atmosphere the gas and/or the gas of these processes generation.Some gaseous compound is poisonous to the people in these waste gas, is flammable when at high temperature contacting with air, even burning that also can be spontaneous when contacting with air or any oxidant at normal temperatures.They mainly are silane and ammonia chlorine etc.The equipment of traditional processing silicone hydride waste gas mainly adopts in the burn mode of silane of burning imflammable gas; the shortcoming of this mode is: operating cost is higher; when faults such as imflammable gas occurs extinguishing, dies; explosion danger appears in silicone hydride waste gas easily; and production equipment must shut down and could overhaul waste gas treatment equipment, increases economic loss so undoubtedly.
Summary of the invention
The technical problem to be solved in the present invention is: the equipment operating cost that solves existing processing silicone hydride waste gas is higher; When faults such as imflammable gas occurs extinguishing, dies, explosion danger appears in silicone hydride waste gas easily; Production equipment must be shut down could be to technical problems such as waste gas treatment equipment overhaul; the invention provides a kind of silicone hydride combustion tower; it utilizes silane to contact and the characteristics of spontaneous combustion with air; make silane at combustion chamber and air catalytic combustion; operating cost is low; safe and reliable, can production equipment not stopped status silicone hydride combustion tower is overhauled.
The technical solution adopted for the present invention to solve the technical problems is: a kind of silicone hydride combustion tower, have tower body and water tank, the tower body top is provided with exhaust outlet, is provided with combustion barrel, filler chamber, spray chamber in the tower body and takes off liquid chamber, and the combustion barrel bottom is arranged in the water tank, combustion barrel is covered with the ballast cover, first spray equipment is housed in the cavity between ballast cover and combustion barrel, and the ballast cover is outward a filler chamber, and the filler chamber top is a spray chamber, second spray equipment is housed in the spray chamber, and the spray chamber top is for taking off liquid chamber; Be provided with two perforated baffles in the combustion barrel, combustion barrel is separated into three chambers, the bottom is the combustion chamber, the middle part is for all pressing the chamber, and the top is the nitrogen protection chamber, and the bottom, combustion chamber has leads to the outer slag-drip opening of tower body, waste gas inlet and compressed air inlet port are arranged on the cylindrical shell of combustion chamber, check valve is housed on the waste gas inlet, the nitrogen air inlet is housed on the cylindrical shell of nitrogen protection chamber, there is the gas outlet on the top of the cylindrical shell of nitrogen protection chamber; On the tower body at filler chamber top and spray chamber place, have access hole; Tower body is equipped with water circulating pump outward, and the pump intake of water circulating pump feeds under the liquid level of water tank, delivery port connects first spray equipment and second spray equipment by pipeline, and water tank bottom is provided with sewage draining exit, and water tank upper is provided with water tank inlet.The waste gas that contains silane and ammonia enters the combustion chamber of combustion barrel through check valve from waste gas inlet, charge into compressed air by compressed air inlet port to the combustion chamber, contact and the characteristics of spontaneous combustion with air according to silane, make silane at combustion chamber and air catalytic combustion, by the nitrogen air inlet to the indoor nitrogen that charges into of nitrogen protection, gas after the burning passes all the chamber of pressure and enters the nitrogen protection chamber and mix with nitrogen, with cooling of the gas after the burning and dilution, between the gas outlet inflow ballast cover and cavity between combustion barrel of gas by the combustion barrel top, gas is in cavity and the ejection of first spray equipment and after the circulation fluid haptoreaction, gas enters spray chamber after filler chamber filters, once more with spray chamber in second spray equipment ejection in and after the circulation fluid haptoreaction, gas is extracted out by air exhauster after liquid chamber takes off the liquid processing through taking off, and enters in the atmosphere; First spray equipment that is provided with in the cavity between ballast cover and combustion barrel also has the effect of cooling combustion tube.The SiO that waste gas burning produces in the combustion chamber
2Dust is discharged from the slag-drip opening of bottom, combustion chamber.The check valve of adorning on the waste gas inlet can prevent the into production equipment that flows backwards of the gas in the combustion chamber, the security performance of raising system, in in the water tank and circulation fluid cleannes when not reaching instructions for use, sewage draining exit by water tank bottom is discharged with circulation fluid in the water tank, inject new and circulation fluid by water inlet, with keep in the water tank in and the cleannes of circulation fluid.
For further improving the security of the use of silicone hydride combustion tower, the flame proof film is housed on the described perforated baffle, when the combustion chamber of combustion barrel or when all pressing the pressure of chamber excessive, the flame proof film is broken through, and plays the pressure release effect, prevents to set off an explosion because of pressure is excessive.
Described combustion chamber has leads to the outer new wind gas supplementing opening of tower body, and new wind gas supplementing opening is equipped with check valve.When if compressed air occur to interrupt, rely on internal negative pressure to carry out tonifying Qi to the combustion chamber by new wind gas supplementing opening, when chamber pressure during greater than ambient pressure, the check valve that installs additional is closed automatically, discharges from new wind gas supplementing opening with the gas that prevents the combustion chamber.
Described nitrogen air inlet and compressed air inlet port all are equipped with gas flowmeter and air volume regulating valve, by air volume regulating valve, the air inflow of compressed air and nitrogen are regulated by air volume regulating valve according to exhaust gas flow.
Fluid flowmeter and flow control valve are housed on the described water pipe, according to exhaust gas flow by flow control valve in and the flow of circulation fluid regulate.
Water tank is provided with the technology water supplement port, and second spray equipment is communicated with the technology water supplement port by the moisturizing pipeline, and the moisturizing pipeline is provided with the refill flow control valve, and the technology water supplement port is connected with running water pipe; When circulating pump breaks down; utilize the pressure of running water to carry out moisturizing, by the technology water supplement port to second spray equipment in and circulation fluid, according to arts demand by in the refill flow control valve control and the flow of circulation fluid; need not to shut down and just can overhaul, do not influence production equipment.
The invention has the beneficial effects as follows; silicone hydride combustion tower of the present invention; it utilizes silane to contact and the characteristics of spontaneous combustion with air; make silane at combustion chamber and air catalytic combustion; operating cost is low; waste gas purification is effective, and is safe and reliable, and can production equipment not stopped status silicone hydride combustion tower is overhauled.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is the structural representation of silicone hydride combustion tower of the present invention.
Fig. 2 is the vertical view of the perforated baffle among the present invention.
1. tower bodies among the figure, 1-1. exhaust outlet, 1-2. access hole, 2. water tank; 2-1. sewage draining exit, 2-2. water tank inlet, 2-3. overfall, 2-4. technology water supplement port; 2-5. the liquid level observation panel, 3. combustion barrel, 3-1. combustion chamber; 3-2. all press the chamber, 3-3. nitrogen protection chamber, 3-4. slag-drip opening; 3-5. waste gas inlet, 3-6. compressed air inlet port, 3-7. nitrogen air inlet; 3-8. the gas outlet, the new wind gas supplementing opening of 3-9., 4. filler chamber; 5. spray chamber 6. takes off liquid chamber, 7. the ballast cover; 8. first spray equipment, 8 '. second spray equipment, 9. perforated baffle; 10. check valve, 11. water circulating pumps, 11-1. pump intake; 11-2. delivery port, 12. water pipes, 13. flame proof films; 14. gas flowmeter, 15. air volume regulating valves, 16. fluid flowmeters; 17. flow control valve, 18. moisturizing pipelines, 19. refill flow control valves.
The specific embodiment
Silicone hydride combustion tower of the present invention shown in Fig. 1～2, have tower body 1 and water tank 2, tower body 1 top is provided with exhaust outlet 1-1, be provided with combustion barrel 3 in the tower body 1, filler chamber 4, spray chamber 5 and take off liquid chamber 6, water tank 2 bottoms are provided with sewage draining exit 2-1, combustion barrel 3 bottoms are arranged in the water tank 2, combustion barrel 3 is covered with ballast cover 7, first spray equipment 8 is housed in the cavity that ballast cover 7 and combustion barrel are 3, is filler chamber 4 outside the ballast cover 7, and filler chamber 4 is filled with stainless steel Bao Er ring filler, filler chamber 4 tops are spray chamber 5, second spray equipment 8 ' is housed in the spray chamber 5, and spray chamber 5 tops are taken off liquid chamber 6 and are filled with stainless steel Bao Er ring filler for taking off liquid chamber 6; Be provided with two perforated baffles 9 in the combustion barrel 3, combustion barrel 3 is separated into three chambers, the bottom is combustion chamber 3-1, the middle part is for all pressing chamber 3-2, the top is nitrogen protection chamber 3-3, flame proof film 13 is housed on the perforated baffle 9, the slag-drip opening 3-4 that leads to outside the tower body 1 is arranged at combustion chamber 3-1 bottom, waste gas inlet 3-5 is arranged on the cylindrical shell of combustion chamber 3-1, compressed air inlet port 3-6 and new wind gas supplementing opening 3-9, waste gas inlet 3-5 is equipped with check valve 10, nitrogen air inlet 3-7 is housed on the cylindrical shell of nitrogen protection chamber 3-3, there is gas outlet 3-8 on the top of the cylindrical shell of nitrogen protection chamber 3-3, and nitrogen air inlet 3-7 and compressed air inlet port 3-6 all are equipped with gas flowmeter 14 and air volume regulating valve 15; On the tower body 1 at filler chamber 4 tops and spray chamber 5 places, have access hole 1-2; The tower body 1 outer water circulating pump 11 that is equipped with, the pump intake 11-1 of water circulating pump 11 feeds under the liquid level of water tank 2, delivery port 11-2 connects first spray equipment 8 and second spray equipment 8 ' by water pipe 12, fluid flowmeter 16 and flow control valve 17 are housed on the water pipe 12, water tank 2 tops are provided with overfall 2-3, technology water supplement port 2-4 and water tank inlet 2-2, second spray equipment 8 ' is communicated with technology water supplement port 2-4 by moisturizing pipeline 18, moisturizing pipeline 18 is provided with refill flow control valve 19, water tank 2 walls are provided with liquid level observation panel 2-5, be used for observing water tank 2 in and the liquid level of circulation fluid, technology water supplement port 2-4 is connected with running water pipe, when water circulating pump 11 breaks down, utilize the pressure of running water to carry out moisturizing.
Claims (6)
1. silicone hydride combustion tower, it is characterized in that: have tower body (1) and water tank (2), tower body (1) top is provided with exhaust outlet (1-1), be provided with combustion barrel (3) in the tower body (1), filler chamber (4), spray chamber (5) and take off liquid chamber (6), combustion barrel (3) bottom is arranged in the water tank (2), combustion barrel (3) is covered with ballast cover (7), in the cavity between ballast cover (7) and combustion barrel (3) first spray equipment (8) is housed, ballast cover (7) is outer to be filler chamber (4), filler chamber (4) top is spray chamber (5), second spray equipment (8 ') is housed in the spray chamber (5), and spray chamber (5) top is for taking off liquid chamber (6); Be provided with two perforated baffles (9) in the combustion barrel (3), combustion barrel (3) is separated into three chambers, the bottom is combustion chamber (3-1), the middle part is for all pressing chamber (3-2), the top is nitrogen protection chamber (3-3), bottom, combustion chamber (3-1) has leads to the outer slag-drip opening (3-4) of tower body (1), waste gas inlet (3-5) and compressed air inlet port (3-6) are arranged on the cylindrical shell of combustion chamber (3-1), waste gas inlet (3-5) is equipped with check valve (10), nitrogen air inlet (3-7) is housed on the cylindrical shell of nitrogen protection chamber (3-3), and there is gas outlet (3-8) on the top of the cylindrical shell of nitrogen protection chamber (3-3); On the tower body (1) that filler chamber (4) top and spray chamber (5) are located, have access hole (1-2); The outer water circulating pump (11) that is equipped with of tower body (1), the pump intake (11-1) of water circulating pump (11) feeds under the liquid level of water tank (2), delivery port (11-2) connects first spray equipment (8) and second spray equipment (8 ') by water pipe (12), described water tank (2) bottom is provided with sewage draining exit (2-1), and water tank (2) top is provided with water tank inlet (2-2).
2. silicone hydride combustion tower according to claim 1 is characterized in that: flame proof film (13) is housed on the described perforated baffle (9).
3. silicone hydride combustion tower according to claim 1 and 2 is characterized in that: described combustion chamber (3-1) has the new wind gas supplementing opening (3-9) that leads to outside the tower body (1), and new wind gas supplementing opening (3-9) is equipped with check valve (10).
4. silicone hydride combustion tower according to claim 1 and 2 is characterized in that: described nitrogen air inlet (3-7) and compressed air inlet port (3-6) all are equipped with gas flowmeter (14) and air volume regulating valve (15).
5. silicone hydride combustion tower according to claim 1 and 2 is characterized in that: fluid flowmeter (16) and flow control valve (17) are housed on the described water pipe (12).
6. silicone hydride combustion tower according to claim 1 and 2, it is characterized in that: described water tank (2) is provided with technology water supplement port (2-4), second spray equipment (8 ') is communicated with technology water supplement port (2-4) by moisturizing pipeline (18), and moisturizing pipeline (18) is provided with refill flow control valve (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100933855A CN101255993B (en) | 2007-07-30 | 2008-04-07 | Silicone hydride combustion tower |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710025421 | 2007-07-30 | ||
| CN200710025421.X | 2007-07-30 | ||
| CN2008100933855A CN101255993B (en) | 2007-07-30 | 2008-04-07 | Silicone hydride combustion tower |
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| Publication Number | Publication Date |
|---|---|
| CN101255993A CN101255993A (en) | 2008-09-03 |
| CN101255993B true CN101255993B (en) | 2010-09-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100933855A Active CN101255993B (en) | 2007-07-30 | 2008-04-07 | Silicone hydride combustion tower |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102080827B (en) * | 2011-01-20 | 2012-04-11 | 常州恒威净化设备有限公司 | Silane combustion tower capable of being maintained on line |
| CN102954475A (en) * | 2011-08-24 | 2013-03-06 | 苏州仕净环保设备有限公司 | Silane tail gas purifying device |
| CN103090399B (en) * | 2011-10-28 | 2015-05-13 | 无锡华润华晶微电子有限公司 | Silane tail gas treatment deivce and method |
| CN103423753B (en) * | 2012-05-25 | 2016-05-18 | 浙江慈能光伏科技有限公司 | A kind of amorphous silicon film battery exhaust gas processing device |
| CN105032176B (en) * | 2015-06-14 | 2017-08-08 | 朱新洁 | A kind of emission-control equipment |
| CN109163337A (en) * | 2018-09-25 | 2019-01-08 | 江苏宏仁特种气体有限公司 | Silicone hydride combustion device |
| CN116990182B (en) * | 2023-09-28 | 2023-12-01 | 是高(北京)智能科技有限公司 | On-line detection and analysis method and system for chlorosilane total carbon |
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2008
- 2008-04-07 CN CN2008100933855A patent/CN101255993B/en active Active
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| CN101255993A (en) | 2008-09-03 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| C14 | Grant of patent or utility model | ||
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| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Changzhou Hengwei Purification Equipment Co.,Ltd. Assignor: Zhang Wenguang Contract record no.: 2012320000374 Denomination of invention: Silicone hydride combustion tower Granted publication date: 20100908 License type: Exclusive License Open date: 20080903 Record date: 20120401 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20230621 Address after: 213000 Caoqiao Industrial Concentration Zone, Xueyan Town, Wujin District, Changzhou City, Jiangsu Province Patentee after: Changzhou Hengwei Purification Equipment Co.,Ltd. Address before: 213171 Jiangsu province Changzhou city Wujin District Caoqiao Town Industrial Park Changzhou HENGWEI purification equipment limited company Patentee before: Zhang Wenguang |