CN202253679U - Silane exhaust combustion and purification device - Google Patents
Silane exhaust combustion and purification device Download PDFInfo
- Publication number
- CN202253679U CN202253679U CN2011203454968U CN201120345496U CN202253679U CN 202253679 U CN202253679 U CN 202253679U CN 2011203454968 U CN2011203454968 U CN 2011203454968U CN 201120345496 U CN201120345496 U CN 201120345496U CN 202253679 U CN202253679 U CN 202253679U
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- chamber
- spray chamber
- combustion
- spraying chamber
- cleaning equipment
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- Incineration Of Waste (AREA)
Abstract
The utility model relates to a silane exhaust combustion and purification device, which comprises a base. The base is provided with a tower body, the tower body comprises a water tank at the bottom and a combustion chamber and a spraying chamber above the water tank, the combustion chamber is arranged on the outer side of the spraying chamber, the spraying chamber comprises a left spraying chamber and a right spraying chamber arranged in a separate way, the lower walls of the left spraying chamber and the right spraying chamber are respectively provided with a switching valve, and gas discharged out of the combustion chamber is controlled by the switching valves to enter the left spraying chamber and/or the spraying chamber. Exhaust gas resulting from combustion in the combustion chamber can simultaneously enter the left spraying chamber and the right spraying chamber separated in parallel for reaction with circulating liquid, and thus better effects of exhaust gas absorption can be achieved. When a spraying system needs to be repaired or a filler needs to be replaced, the switching valve of one spraying chamber can be closed for repair of the spraying chamber, and the other spraying chamber can operate normally with no needs for shutdown.
Description
Technical field
The utility model relates to a kind of waste gas purification apparatus, particularly a kind of cleaning equipment of handling the tail gas of main silane.
Background technology
Can produce a lot of waste gas in the manufacture process of manufacture of solar cells process and integrated circuit and electronic component; As the waste gas that is produced when adopting the PECVD chemical vapor deposition method; The main silane of such waste gas also comprises ammonia etc., and these waste gas all need pass through processing and could discharge.And the device of handling such waste gas at present has a lot; Like publication number is that CN101255993A, denomination of invention are the disclosed scrubbing tower of one Chinese patent application of silicone hydride combustion scrubbing tower; This scrubbing tower with gas sampling after, waste gas is the internal combustion in the combustion chamber of scrubbing tower at first, mainly removes silane; And then be transported to spray chamber and remove soluble gas such as ammonia, last qualified discharge.But the combustion chamber of this scrubbing tower is arranged on the inside of spray chamber; Many spaces of spray chamber have been occupied; The area that gas after the burning can pass through in spray chamber reduces, and the filler of spray chamber is stopped up by impurity easily after a period of time, just needs to change filler; During safeguarding the replacing filler, then must shut down, cause great inconvenience to production.
The utility model content
The purpose of the utility model provides a kind of simple in structure, the burning cleaning equipment of the processing silane tail gas that can use continuously.
The technical scheme that realizes the utility model purpose is: a kind of silane exhaust combustion cleaning equipment; Has base; Base is provided with tower body; Combustion chamber and spray chamber that described tower body includes the water tank that is positioned at the bottom and is arranged on the water tank top, described combustion chamber is arranged on the outside of spray chamber, and spray chamber includes separate left spray chamber and right spray chamber; The bottom of left side spray chamber and right spray chamber is respectively arranged with transfer valve, and the gas that discharge the combustion chamber gets into left spray chamber and/or right spray chamber through transfer valve.
Described combustion chamber is provided with waste gas inlet, compressed air inlet port, nitrogen air inlet and new wind gas supplementing opening, and the top of combustion chamber also is provided with the gas outlet, and the bottom is provided with slag-drip opening.
All be provided with water collection device, spray system and filler in described left spray chamber and the right spray chamber from top to bottom respectively, the top of left spray chamber and right spray chamber is an exhaust outlet, all is provided with manhole on the sidewall.
The top of described left spray chamber and right spray chamber all is provided with venting.
Described filler is a silica.
The top wall of described water tank is provided with automatic water supplement mouth and overfall, and water tank bottom is provided with sewage draining exit, and the top is provided with dog-house and for spray system provides the circulating pump of circulation fluid, also is provided with flow control valve between circulating pump and the spray system.
The utlity model has positive effect: in the silane exhaust combustion cleaning equipment of the utility model; Can get into simultaneously through the waste gas after the combustion chambers burn and to be set up in parallel and separate left spray chamber and right spray chamber and circulation fluid react, the waste gas assimilation effect is better.When needs overhaul spray system or change filler, can close the transfer valve of wherein any spray chamber, then it to be overhauled, then operation as usual of another spray chamber simultaneously needn't be shut down.Wherein, the flow control valve of spray system can be controlled the flow of the circulation fluid of spray system according to the situation of exhaust gas concentration and actual neutralization reaction.
Description of drawings
For the content that makes the utility model is expressly understood more easily,, the utility model is done further detailed explanation, wherein below according to specific embodiment and combine accompanying drawing
Fig. 1 shows the Facad structure sketch map of the utility model.
Fig. 2 shows the inner side structural representation of the utility model.
Fig. 3 shows the structural representation of overlooking of the utility model.
The specific embodiment
See Fig. 1 and Fig. 2; The silane exhaust combustion cleaning equipment of the utility model has base 3; Base 3 is provided with tower body 22; Combustion chamber 5 and spray chamber 20 that described tower body 22 includes the water tank 21 that is positioned at the bottom and is arranged on water tank 21 tops, described combustion chamber 5 is arranged on the outside of spray chamber 20, and spray chamber 20 includes separate left spray chamber 20.1 and right spray chamber 20.2; The bottom of left side spray chamber 20.1 and right spray chamber 20.2 is respectively arranged with transfer valve 18, and the gas that discharge combustion chamber 5 gets into left spray chamber 20.1 and/or right spray chamber 20.2 through transfer valve 18.The sidewall of combustion chamber 5 is provided with waste gas inlet 6, compressed air inlet port 1, nitrogen air inlet 2 and new wind gas supplementing opening 16, and the top of combustion chamber 5 also is provided with gas outlet 5.1, and the bottom is provided with slag-drip opening 4.All be provided with water collection device 10, spray system 9 and filler 7 from top to bottom respectively in left side spray chamber 20.1 and the right spray chamber 20.2, filler 7 is a silica.The top of left side spray chamber 20.1 and right spray chamber 202 has exhaust outlet 11, all is provided with manhole 8 on the sidewall.The top of left side spray chamber 20.1 and right spray chamber 20.2 all is provided with venting 19.The top of water tank 21 is provided with automatic water supplement mouth 13 and overfall 14; Water tank 21 bottoms are provided with sewage draining exit 15; The top is provided with dog-house 17 and is the circulating pump 12 that spray system 9 provides circulation fluid, also is provided with flow control valve 12.1 between circulating pump 12 and the spray system 9.
The utility model is used to handle soluble gas such as main silane and ammonia; The pending waste gas of collecting is through waste gas inlet 6 entering combustion chambers 5; Compressed air and fresh air are also respectively by compressed air inlet port 1 and new wind gas supplementing opening 16 entering combustion chambers 5; Mixed combustion in combustion chamber 5 is for guaranteeing safety, simultaneously from nitrogen air inlet 2 nitrogen injections.Waste gas silane after 5 internal combustion of combustion chamber burns basically fully.Waste gas after burning mainly contains soluble gas such as ammonia; Get into spray chamber 20 by the flow direction of illustrating among Fig. 2 through transfer valve 18 then, when transfer valve 18 was all opened, waste gas can get into left spray chamber 20.1 and right spray chamber 20.2 simultaneously; When spray chamber needs maintenance, scarfing cinder; Can close wherein any spray chamber and only make other through transfer valve 18, therefore can under non-stop-machine state, easily solve maintenance, scarfing cinder, change problems such as filler with a spray chamber.In spray chamber, waste gas absorbs the processing of soluble gas such as ammonia up to standard through washing, discharges from the exhaust outlet 11 at top at last.Wherein, circulating pump 12 sprays water smoke from spray system 9 after from water tank 21, extracting water at the spray chamber top, the last from top to down reflow tank 21 of water, so water recycles.Flow control valve 12.1 can be controlled the flow size of the water of spray system 9.
Above-described specific embodiment; Purpose, technical scheme and beneficial effect to the utility model have carried out further explain, it should be understood that the above is merely the specific embodiment of the utility model; Be not limited to the utility model; All within the spirit and principle of the utility model, any modification of being made, be equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (6)
1. silane exhaust combustion cleaning equipment; Has base (3); Base (3) is provided with tower body (22); Combustion chamber (5) and spray chamber (20) that described tower body (22) includes the water tank (21) that is positioned at the bottom and is arranged on water tank (21) top, it is characterized in that: described combustion chamber (5) are arranged on the outside of spray chamber (20), and spray chamber (20) includes separate left spray chamber (20.1) and right spray chamber (20.2); The bottom of left side spray chamber (20.1) and right spray chamber (20.2) is respectively arranged with transfer valve (18), and the gas that discharge combustion chamber (5) gets into left spray chamber (20.1) and/or right spray chamber (20.2) through transfer valve (18).
2. silane exhaust combustion cleaning equipment according to claim 1; It is characterized in that: described combustion chamber (5) are provided with waste gas inlet (6), compressed air inlet port (1), nitrogen air inlet (2) and new wind gas supplementing opening (16); The top of combustion chamber (5) is provided with gas outlet (5.1), and the bottom is provided with slag-drip opening (4).
3. silane exhaust combustion cleaning equipment according to claim 1; It is characterized in that: all be provided with water collection device (10), spray system (9) and filler (7) in described left spray chamber (20.1) and the right spray chamber (20.2) from top to bottom respectively; The top of left side spray chamber (20.1) and right spray chamber (20.2) is provided with exhaust outlet (11), all is provided with manhole (8) on the sidewall.
4. silane exhaust combustion cleaning equipment according to claim 3 is characterized in that: the top of described left spray chamber (20.1) and right spray chamber (20.2) all is provided with venting (19).
5. silane exhaust combustion cleaning equipment according to claim 3 is characterized in that: described filler (7) is a silica.
6. silane exhaust combustion cleaning equipment according to claim 1; It is characterized in that: the top wall of described water tank (21) is provided with automatic water supplement mouth (13) and overfall (14); Water tank (21) bottom is provided with sewage draining exit (15); The top is provided with dog-house (17) and is the circulating pump (12) that spray system (9) provides circulation fluid, also is provided with flow control valve (12.1) between circulating pump (12) and the spray system (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203454968U CN202253679U (en) | 2011-09-15 | 2011-09-15 | Silane exhaust combustion and purification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203454968U CN202253679U (en) | 2011-09-15 | 2011-09-15 | Silane exhaust combustion and purification device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202253679U true CN202253679U (en) | 2012-05-30 |
Family
ID=46114915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203454968U Expired - Lifetime CN202253679U (en) | 2011-09-15 | 2011-09-15 | Silane exhaust combustion and purification device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202253679U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103041672A (en) * | 2013-01-21 | 2013-04-17 | 天津英利新能源有限公司 | Externally discharged ammonia water recycling system |
| CN109668156A (en) * | 2017-10-13 | 2019-04-23 | 胜豹上桥科技股份有限公司 | The burning structure of multi-cavity processing tail gas |
-
2011
- 2011-09-15 CN CN2011203454968U patent/CN202253679U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103041672A (en) * | 2013-01-21 | 2013-04-17 | 天津英利新能源有限公司 | Externally discharged ammonia water recycling system |
| CN103041672B (en) * | 2013-01-21 | 2014-12-17 | 天津英利新能源有限公司 | Externally discharged ammonia water recycling system |
| CN109668156A (en) * | 2017-10-13 | 2019-04-23 | 胜豹上桥科技股份有限公司 | The burning structure of multi-cavity processing tail gas |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120530 |