CN101241041A - CO2 laser light path lens temperature detection and temperature differential overrun alarm system - Google Patents

CO2 laser light path lens temperature detection and temperature differential overrun alarm system Download PDF

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Publication number
CN101241041A
CN101241041A CNA200810010578XA CN200810010578A CN101241041A CN 101241041 A CN101241041 A CN 101241041A CN A200810010578X A CNA200810010578X A CN A200810010578XA CN 200810010578 A CN200810010578 A CN 200810010578A CN 101241041 A CN101241041 A CN 101241041A
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temperature
temperature difference
laser
lens
signal
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CN100585363C (en
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尚晓峰
王维
回丽
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Shenyang Institute of Aeronautical Engineering
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Shenyang Institute of Aeronautical Engineering
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Abstract

In order to solve problems of reduction of laser outputting power and stability caused by the pollution of the laser lens or burning of the lens, CO(SUB)2(/SUB) laser optical path lens temperature detection and temperature difference over limit alarming system are provided, which are composed of a computer temperature detection and temperature difference over limit alarming module in the signal processing component, an ADAM-4520 module, an ADAM-4018 module and a group of thermoelectricity component and each lens of the laser by electrical connection. The gorge line communication cable transmits the collected temperature signal to computer temperature detection and temperature difference over limit alarming module for calculation and process, and displays water temperature signal of the lens component on the monitor in-real time way. When the temperature difference is over-limit, the sound is alarming. Effects: real-time, rapid, precise detection for working state in the lens of the laser optical path; timely and accurately processing laser polluting alarming. The lens working state is improved and using age is enhanced. Function is stable and suitable for long and continuous detection. The data transmission has long distance, strong resisting disturbance ability, which is easy to operate, friendly interface, convenient to integrate and control the system.

Description

CO 2Laser light path lens temperature detection and temperature difference overrun alarm system
Technical field:
The present invention relates to a kind of CO 2Eyeglass system for detecting temperature in the laser-processing system light path particularly relates to a kind of high-power CO 2Laser light path lens temperature detection and temperature difference overrun alarm system.
Background technology:
Laser is one of natural science applied invention of great significance of twentieth century.Since nineteen sixty, first laser instrument was born in the world, in nearly 50 years, the laser science technology has obtained developing rapidly and widespread use in nearly all fields such as national defence, science and technology, industry, agricultural, medical science, daily lifes with its exclusive characteristic and great vitality.
The development of laser instrument develops towards multiple class laser instrument direction on the one hand, for example develops into present semiconductor laser (Diode Laser), carbon dioxide laser (CO from initial ruby laser (Rugby Laser), he-Ne laser (He-Ne Laser) 2Laser), Argon ion laser (Argon IonLaser), neodymium aluminium garnet laser instrument (Nd:YAG Laser), dye laser (Dye Laser), excimer laser (Tunalbe Laser) or the like; Develop towards high-power direction on the other hand, to such an extent as to for example carbon dioxide laser from the glass tube of tens watts of power of initial output, secaled-off tube structural development several kw of power of exportable several hectowatts till now laterally, longitudinal stream dynamic formula structure, and the carbon dioxide laser output power of the fast axis streaming structure of studying at present can reach myriawatt.
Along with high-power CO 2The generation of laser instrument, development and application, the problem in the performance of eyeglass, working condition and serviceable life more and more looms large and anxious to be solved in the laser optical path.CO 2Eyeglass in the laser instrument laser optical path divides by composition material and mainly is divided into fine copper mirror, molybdenum mirror, silicon mirror, copper base plating gold, silver, nickel, chromium, molybdenum mirror, germanium (Ge) crystal mirror, zinc selenide (ZnSe) crystal mirror, gallium arsenide (GaAs) crystal mirror etc.; Divide back mirror, the outgoing mirror that mainly is divided in the resonator cavity, the catoptrons at different levels in the light path, condenser lens, reflect focalization mirror etc. by application function.All these eyeglasses all need water cooling.
The main cause that influences eyeglass working condition and serviceable life is the pollution of eyeglass.After eyeglass was polluted, the transmitance or the reflectivity on surface obviously reduced, and the absorptivity of eyeglass then obviously raises, and this will have influence on the output power and the stability of laser instrument.The lighter causes laser output power to reduce, and weight person causes eyeglass to be heated gross distortion until burning.
Summary of the invention:
In order to solve above-mentioned laser eyeglass, the invention provides a kind of high-power CO because of being subjected to polluting the problem that causes laser output power and stability to reduce even cause eyeglass to burn 2Laser light path lens temperature detection and temperature difference overrun alarm system, this system comprises laser instrument back mirror assembly (1), laser resonant cavity (2), laser instrument outgoing mirror assembly (3), first order corner cube mirror assembly (5), reflect focalization mirror assembly (6), second level corner cube mirror assembly (7) and the electrical connection between them, this system also comprises signal processing component (8), and described signal processing component (8) is mainly detected and temperature difference overload alarm module (16) by computer temperature, ADAM-4520 module (17) and ADAM-4018 module (18) and one group of thermocouple assembly (11) constitute; Described computer temperature detects and temperature difference overload alarm module (16) is electrically connected with each Lens assembly by thermocouple assembly (11); And after the water temperature signal that thermocouple assembly (11) is collected carries out analog/digital signal conversion through ADAM-4018 module (18), pass through ADAM-4520 module (17) again and carry out the RS-323/RS-485 conversion of signals, import in computer temperature detection and the temperature difference overload alarm module (16) by the serial communication cable then, data are calculated and are handled in computer temperature detection and temperature difference overload alarm module (16), and the water temperature signal on each Lens assembly is presented on the display in real time, when transfiniting, the temperature difference reports to the police.
Described computer temperature detects and temperature difference overload alarm module (16) realizes by following concrete steps:
(1) demarcation in temperature difference interval, the upper limit of definite input, output cooling range is reported to the police when promptly the temperature difference surpasses higher limit;
(2) eyeglass pollutes signal extraction, with the entrance and exit collecting temperature signal of thermocouple assembly from the eyeglass chilled water, extracts eyeglass and pollute signal from entrance and exit temperature difference situation of change;
(3) eyeglass pollutes the signal transmission, adopts the serial communication mode to carry out the transmission that eyeglass pollutes signal;
(4) eyeglass pollutes signal identification and reports to the police, eyeglass pollutes signal identification and reports to the police and adopt computer program control, and each road cooling water temperature gathered in real time and show, cooling range is calculated in real time and shows, cooling range is transfinited carry out audible alarm and image data is stored, analyzed.
Advantage of the present invention and beneficial effect are:
1. the present invention can realize in real time, detect rapidly, exactly the working condition of all eyeglasses in the laser optical system, and can carry out eyeglass in time, exactly and pollute indication and warning.
2. the present invention can in time find and handle the eyeglass that is polluted owing to detect the duty of eyeglasses at different levels in real time, improves its serviceable life thereby improve the eyeglass working condition.
3. the present invention judges laser optical path eyeglass absorption variations situation, the pollution level of indirect detection eyeglass by the input of detection laser light path lens, output cooling range.The method principle is clear, technology is simplified, and is highly suitable for and carries out rig-site utilization in the engineering practice.
4. the present invention adopts thermopair to carry out water temperature to detect, and highly sensitive, technology maturation, reliable operation, stable performance are fit to long-time continuous and detect.
5. the present invention adopts ADAM-4018 and ADAM-4520 commercial Application level commercial modules to carry out data processing, reliability height, stable performance.
6. the present invention adopts the serial communication mode to carry out data transmission, and software development is simple, long distance for data, antijamming capability is strong, reliability is high.
7. the present invention adopts the computer program of easy to operate, friendly interface, stable performance to carry out data computing and view alarm and audible alarm prompting, and is user-friendly, be convenient to the integrated of system and control.
Description of drawings
Fig. 1 structural representation of the present invention;
Fig. 2 is the first order corner cube mirror modular construction synoptic diagram among Fig. 1;
Fig. 3 is a signal processing component structural representation among Fig. 1;
Fig. 4 is a thermocouple assembly structural representation among Fig. 1;
Fig. 5 is the user interface in temperature detection and the temperature difference overload alarm module among Fig. 3;
Fig. 6 dynamic structure synoptic diagram of the present invention.
Embodiment
Referring to Fig. 1-Fig. 6, CO of the present invention 2Laser light path lens temperature detection and temperature difference overrun alarm system, this system comprises laser instrument back mirror assembly 1, laser resonant cavity 2, laser instrument outgoing mirror assembly 3, first order corner cube mirror assembly 5, reflect focalization mirror assembly 6, second level corner cube mirror assembly 7 and the electrical connection between them, this system also comprises signal processing component 8, and described signal processing component 8 is mainly detected by computer temperature and temperature difference overload alarm module 16, ADAM-4520 module 17 and ADAM-4018 module 18 and one group of thermocouple assembly 11 constitute; Described computer temperature detects and temperature difference overload alarm module 16 is electrically connected with each Lens assembly by thermocouple assembly 11; And after the water temperature signal that thermocouple assembly 11 is collected carries out analog/digital signal conversion through ADAM-4018 module 18, carry out the RS-323/RS-485 conversion of signals through ADAM-4520 module 17 again, import in computer temperature detection and the temperature difference overload alarm module 16 by the serial communication cable then, data are calculated and are handled in computer temperature detection and temperature difference overload alarm module 16, and the water temperature signal on each Lens assembly is presented on the display in real time, when transfiniting, the temperature difference reports to the police.
Described each Lens assembly comprises laser instrument back mirror assembly 1, laser instrument outgoing mirror assembly 3, first order corner cube mirror assembly 5, second level corner cube mirror assembly 7 and reflect focalization mirror assembly 6.
The composition structure of described thermocouple assembly 11 is mainly to be imported outspoken spigot joint 20 by three-way body 21 and the chilled water that places its corresponding two-port and exports outspoken spigot joint 24 with chilled water and be connected with pipeline, the top of thermopair 19 is stretched into the water cavity from the another port of three-way body 21, by sealing rubber ring 22, setting nut 23 sealing and fixing.
Described computer temperature detects and temperature difference overload alarm module 16 realizes by following concrete steps:
(1) demarcation in temperature difference interval, the upper limit of definite input, output cooling range is reported to the police when promptly the temperature difference surpasses higher limit;
(2) eyeglass pollutes signal extraction, with the entrance and exit collecting temperature signal of thermocouple assembly from the eyeglass chilled water, extracts eyeglass and pollute signal from entrance and exit temperature difference situation of change;
(3) eyeglass pollutes the signal transmission, adopts the serial communication mode to carry out the transmission that eyeglass pollutes signal;
(4) eyeglass pollutes signal identification and reports to the police, eyeglass pollutes signal identification and reports to the police and adopt computer program control, and each road cooling water temperature gathered in real time and show, cooling range is calculated in real time and shows, cooling range is transfinited carry out audible alarm and image data is stored, analyzed.
The invention will be further described below in conjunction with accompanying drawing.
Referring to Fig. 6, high-power CO of the present invention 2Laser light path lens temperature detection and temperature difference overrun alarm system structure mainly comprise laser instrument back mirror assembly 1, laser resonant cavity 2, laser instrument outgoing mirror assembly 3, first order corner cube mirror assembly 5, reflect focalization mirror assembly 6, second level corner cube mirror assembly 7, signal processing component 8 and the electrical connection between them.Laser beam 4 in laser resonant cavity 2 laser instrument back mirror assembly 1 and laser instrument outgoing mirror assembly 3 between amplify through stimulated radiation after, by 3 outputs of laser instrument outgoing mirror assembly, after first order corner cube mirror assembly 5,7 reflections of second level corner cube mirror assembly, focus on the finished surface through reflect focalization mirror assembly 6.After the temperature signal of laser instrument back mirror assembly 1, laser instrument outgoing mirror assembly 3, first order corner cube mirror assembly 5, second level corner cube mirror assembly 7 and reflect focalization mirror assembly 6 is handled through signal processing component 8, realize the real-time detection and the temperature difference overload alarm of laser light path lens temperature.
Referring to Fig. 2, be example with first order corner cube mirror assembly 5, its primary structure comprises chilled water delivery outlet 9, chilled water input port 10, thermocouple assembly 11, mirror body cooling water cavity 12 and minute surface 14.After incoming laser beam 15 shines on the minute surface 14, reflect to form reflection lasering beam 13 on the one hand, the part laser energy is absorbed by minute surface 14 on the other hand, the chilled water in the heating cooling water cavity 12.Chilled water is flowed into by chilled water input port 10, collects the water temperature at 10 places, chilled water input port when the thermocouple assembly 11 at 10 places, supercooled water input port; , flowed out by the energy heating that minute surface 14 absorbs through mirror body cooling water cavity 12 backs from chilled water delivery outlet 9; The thermocouple assembly 11 at chilled water delivery outlet 9 places collects the water temperature at chilled water delivery outlet 9 places.
Referring to Fig. 3, the composition structure of signal processing component 8 comprises mainly that computer temperature detects and temperature difference overload alarm module 16, ADAM-4520 module 17, ADAM-4018 module 18 among Fig. 1.After the water temperature signal that thermopair 19 collects carries out mould/number conversion through ADAM-4018 module 18, carry out the RS-323/RS-485 conversion of signals through ADAM-4520 module 17 again, import in computer temperature detection and the temperature difference overload alarm module 16 by the serial communication cable then, data are calculated and are handled in computer temperature detection and temperature difference overload alarm module 16, the water temperature signal on each Lens assembly are presented in real time on the display of computer temperature detection and temperature difference overload alarm module 16.
Referring to Fig. 4, the composition structure of thermocouple assembly 11 comprises that mainly chilled water imports outspoken spigot joint 20, three-way body 21, thermopair 19, sealing rubber ring 22, setting nut 23 and chilled water and export outspoken spigot joint 24 among Fig. 2.Chilled water is imported outspoken spigot joint 20 from chilled water and is flowed into, and washes away the top of thermopair 19 in the water cavity of three-way body 21, exports outspoken spigot joint 24 from chilled water again and flows out.Thermopair 19 becomes electric potential signal to transfer out the temperature transition of chilled water.Can closely link to each other with thermopair 19 behind sealing rubber ring 22 process setting nuts 23 pretensions, can play rapid sealing function on the one hand, can carry out trace to the stretch into amount of thermopair 19 tops in three-way body 21 on the other hand and regulate.
Referring to Fig. 5, the temperature detection of computing machine temperature detection and temperature difference overload alarm module 16 and temperature difference overload alarm interface comprise temperature acquisition control zone, Temperature numerical viewing area, temperature over-range view zone of alarm and temperature curve view viewing area among Fig. 3.The startup of the record of temperature data, preservation, demonstration setting and serial ports, control function such as close and all concentrate and be arranged in the temperature acquisition control zone.Be arranged in the Temperature numerical viewing area in the real-time numerical value demonstration of temperature data, the choice set of thermopair.Temperature over-range view zone of alarm adopts the view identification temperature regime of different colours.Temperature curve view viewing area can show the temperature regime of each thermopair and the temperature difference situation of each Lens assembly intuitively, real-time dynamicly.
Principle of work:
Thermocouple assembly 11 on output by being installed in each light path lens assembly and the input chilled water detects with ADAM-4520 module 17, ADAM-4018 module 18 and computer temperature in the signal processing component 8 and temperature difference overload alarm module 16 is electrically connected; After the water temperature signal of gathering by thermocouple assembly 11 carries out analog/digital signal conversion through ADAM-4018 module 18, carry out the RS-323/RS-485 conversion of signals through ADAM-4520 module 17 again, import in computer temperature detection and the temperature difference overload alarm module 16 by the serial communication cable then, judge laser optical path eyeglass absorption variations situation according to the temperature approach of demarcating in advance, the pollution level of indirect detection eyeglass, the real-time detection and the temperature difference overload alarm of realization laser light path lens temperature.
Embodiment:
(1) demarcation in temperature difference interval;
Demarcation temperature difference interval is in order to determine the upper limit of input, output cooling range, to report to the police when promptly how many temperature difference be worth above.Factors such as degrees of tolerance, laser output power, cooling water flow are polluted in the demarcation in temperature difference interval with eyeglass relevant, need determine by analysis of experiments.
(2) eyeglass pollutes signal extraction, adopts thermopair going into/exporting, extraction eyeglass pollution signal in the temperature difference situation of change that collects from the eyeglass chilled water;
Because the absorptivity to laser after eyeglass is subjected to polluting significantly increases, thereby cause the Lens assembly temperature to raise, and then the cooling water temperature of output is raise.If the cooling water temperature of input is T Go into, the cooling water temperature of output is T Go out, then input and the cooling range Δ T=T that exports Go out-T Go intoIf it is Q that eyeglass absorbs the heat of laser, because specific heat capacity c=4.2 * 10 of chilled water 3(J/Kg ℃) is constant, the chilled water quality m (Kg) that flows through cooling chamber in unit interval also is constant, then as can be known, the eyeglass heat that absorbs laser be directly proportional with input, output cooling range (heat of suppose eyeglass absorption laser all be cooled water absorption) according to physics heat formula Q=cm Δ T.The temperature difference is big more, and it is many more that eyeglass absorbs heat, illustrates that the eyeglass pollution level is heavy more.According to this principle, eyeglass pollution level signal can adopt thermopair to extract from the temperature difference situation of change of eyeglass chilled water.
(3) eyeglass pollutes the signal transmission, adopts the serial communication mode to carry out the transmission that eyeglass pollutes signal;
Because laser apparatus is huge, the eyeglass number is more and the dispersion that distributes, therefore adopt the serial communication mode that exploitation is simple, transmission range is far away to carry out the transmission of eyeglass pollution signal.The implementation method of its technical scheme is that the ADAM-4018 module that adopts Taiwan to grind the production of magnificent company is carried out the collection and the mould/number conversion of thermocouple signal, adopts the ADAM-4520 module to carry out RS-323/RS-485 conversion of signals and transmission.Each module can be gathered 8 thermocouple signals simultaneously, and every eyeglass needs 2 thermopairs, is equipped with the number of module according to the eyeglass number.
(4) eyeglass pollutes input and warning;
Eyeglass pollutes input and reports to the police and adopt computing machine to finish by program.Computer program possesses following function: the real-time calculating of the real-time collection of each road cooling water temperature and demonstration, cooling range and demonstration, cooling range the transfinite storage and convenient, the friendly operation interface of audible alarm, image data.
The reference of the technology of the present invention index:
1. temperature detection interval: 0 ℃-100 ℃.Coolant water temperature is lower than 0 ℃ solidify with the boiling that is higher than 100 ℃ the warning of limit water temperature all is set.
2. temperature detection frequency range: 0.1 second/time-60 seconds/time.Can in frequency range, regulate arbitrarily as requested.
3. temperature detecting precision: temperature detecting precision depends primarily on the precision property of selected thermopair.Adopting K type, armouring, copper-CopperNickel thermocouple among the present invention, temperature detecting precision is higher than ± and 0.5 ℃.
4. stream time: greater than 24 hours.Temperature data adopts the linked list data structure form to carry out record in calculator memory.This data structure save memory improves stream time; Conveniently manage, be convenient to search, realize various Presentation Functions easily.

Claims (4)

1, CO 2Laser light path lens temperature detection and temperature difference overrun alarm system, this system comprises laser instrument back mirror assembly (1), laser resonant cavity (2), laser instrument outgoing mirror assembly (3), first order corner cube mirror assembly (5), reflect focalization mirror assembly (6), second level corner cube mirror assembly (7) and the electrical connection between them, it is characterized in that: also comprise signal processing component (8), described signal processing component (8) is mainly detected and temperature difference overload alarm module (16) by computer temperature, ADAM-4520 module (17) and ADAM-4018 module (18) and one group of thermocouple assembly (11) constitute; Described computer temperature detects and temperature difference overload alarm module (16) is electrically connected with each Lens assembly by thermocouple assembly (11); And after the water temperature signal that thermocouple assembly (11) is collected carries out analog/digital signal conversion through ADAM-4018 module (18), pass through ADAM-4520 module (17) again and carry out the RS-323/RS-485 conversion of signals, import in computer temperature detection and the temperature difference overload alarm module (16) by the serial communication cable then, data are calculated and are handled in computer temperature detection and temperature difference overload alarm module (16), and the water temperature signal on each Lens assembly is presented on the display in real time, when transfiniting, the temperature difference reports to the police.
2, CO according to claim 1 2Laser light path lens temperature detection and temperature difference overrun alarm system is characterized in that: described each Lens assembly comprises laser instrument back mirror assembly (1), laser instrument outgoing mirror assembly (3), first order corner cube mirror assembly (5), second level corner cube mirror assembly (7) and reflect focalization mirror assembly (6).
3, CO according to claim 1 2Laser light path lens temperature detection and temperature difference overrun alarm system, it is characterized in that: the composition structure of described thermocouple assembly (11) is mainly to be imported outspoken spigot joint (20) by three-way body (21) and the chilled water that places its corresponding two-port and exports outspoken spigot joint (24) with chilled water and be connected with pipeline, the top of thermopair (19) is stretched into the water cavity from the another port of three-way body (21), by sealing rubber ring (22), setting nut (23) sealing and fixing.
4, CO according to claim 1 2Laser light path lens temperature detection and temperature difference overrun alarm system is characterized in that: described computer temperature detects and temperature difference overload alarm module (16) realizes by following concrete steps:
(1) demarcation in temperature difference interval, the upper limit of definite input, output cooling range is reported to the police when promptly the temperature difference surpasses higher limit;
(2) eyeglass pollutes signal extraction, with the entrance and exit collecting temperature signal of thermocouple assembly from the eyeglass chilled water, extracts eyeglass and pollute signal from entrance and exit temperature difference situation of change;
(3) eyeglass pollutes the signal transmission, adopts the serial communication mode to carry out the transmission that eyeglass pollutes signal;
(4) eyeglass pollutes signal identification and reports to the police, eyeglass pollutes signal identification and reports to the police and adopt computer program control, and each road cooling water temperature gathered in real time and show, cooling range is calculated in real time and shows, cooling range is transfinited carry out audible alarm and image data is stored, analyzed.
CN200810010578A 2008-03-07 2008-03-07 CO2 laser light path lens temperature detection and temperature differential overrun alarm system Expired - Fee Related CN100585363C (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102717184A (en) * 2012-03-23 2012-10-10 海目(北京)激光与数控发展有限公司 Automatic protection equipment for laser transmitting device and laser device
CN105312777A (en) * 2014-06-30 2016-02-10 株式会社迪思科 Laser machining apparatus
CN107661980A (en) * 2016-07-29 2018-02-06 上海微电子装备(集团)股份有限公司 Environment control method in 3D printing device and 3D printing device
CN115389166A (en) * 2022-10-08 2022-11-25 无锡镭可施光电技术有限公司 Fault monitoring method for reflector of laser galvanometer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102717184A (en) * 2012-03-23 2012-10-10 海目(北京)激光与数控发展有限公司 Automatic protection equipment for laser transmitting device and laser device
CN105312777A (en) * 2014-06-30 2016-02-10 株式会社迪思科 Laser machining apparatus
CN107661980A (en) * 2016-07-29 2018-02-06 上海微电子装备(集团)股份有限公司 Environment control method in 3D printing device and 3D printing device
CN115389166A (en) * 2022-10-08 2022-11-25 无锡镭可施光电技术有限公司 Fault monitoring method for reflector of laser galvanometer
CN115389166B (en) * 2022-10-08 2023-11-21 无锡镭可施光电技术有限公司 Fault monitoring method for reflecting lens of laser galvanometer

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