Summary of the invention
There is the problem that is difficult for discharging impurity in the present invention for the growth method that solves the germanium zinc phosphide monocrystalline, and the method for the single crystal growing of germanium zinc phosphide is provided.
Germanium zinc phosphide monocrystalline of the present invention adopts the method for former nucleus growth, the method of former nucleus growth germanium zinc phosphide monocrystalline is carried out as follows: one, selecting purity for use is that zinc, germanium, phosphorus more than 99.999% is that 1: 1: 2~2.005 ratio is quantitative in molar ratio, reactant is put into synthetic boat, to synthesize boat places silica tube to vacuumize sealing, again silica tube is put into horizontal synthetic furnace, make the synthetic boat of placing phosphorus be positioned at the cold zone of horizontal synthetic furnace, the synthetic boat of placing zinc and germanium is positioned at the high-temperature zone of horizontal synthetic furnace; Two, heat up that to make the cold zone temperature be 400~600 ℃, the high-temperature zone temperature is 900~1080 ℃, and insulation is cooled to room temperature more than 3 hours again, promptly obtains the germanium zinc phosphide polycrystal; Three, the germanium zinc phosphide polycrystal that step 2 obtains is put into crucible, place silica tube to vacuumize sealing in crucible, the silica tube of sealing is put into crucible decline single crystal growing furnace, with crucible horizontal tangent bottom is reference line, the temperature of above base line is higher than 1026 ℃, the following temperature of reference line is lower than 1026 ℃, be incubated after material all melts to the crucible, again with per hour less than the speed decline crucible of 8mm, until the whole crystallizations of material, crucible stops to descend, again with after per hour 1~20 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 10~50 ℃ cooling rate per hour, be cooled to 400 ℃ with 20~100 ℃ cooling rate per hour at last, room temperature is reduced in the single crystal growing furnace outage; Promptly obtain the germanium zinc phosphide monocrystalline.
The another kind of growth method of germanium zinc phosphide monocrystalline of the present invention adopts the method that seeded growth is arranged, have the method for seeded growth germanium zinc phosphide to carry out as follows: one, selecting purity for use is that zinc, germanium, phosphorus more than 99.999% is that 1: 1: 2~2.005 ratio is quantitative in molar ratio, reactant is put into synthetic boat, to synthesize boat places silica tube to vacuumize sealing, again silica tube is put into horizontal synthetic furnace, make the synthetic boat of placing phosphorus be positioned at the cold zone of horizontal synthetic furnace, the synthetic boat of placing zinc and germanium is positioned at the high-temperature zone of horizontal synthetic furnace; Two, heat up that to make the cold zone temperature be 400~600 ℃, the high-temperature zone temperature is 900~1080 ℃, and insulation is cooled to room temperature more than 3 hours again, promptly obtains the germanium zinc phosphide polycrystal; Three, choose directed germanium zinc phosphide monocrystalline as seed crystal, seed crystal is placed in the seed crystal trap of crucible inner bottom part, again the germanium zinc phosphide polycrystal is put into crucible, place silica tube to vacuumize sealing in crucible, the silica tube of sealing is put into crucible decline single crystal growing furnace, the contact position of seed crystal and polycrystal is a benchmark with this moment, make the temperature of the contact position of seed crystal and polycrystal be lower than 1026 ℃, perhaps guarantee to have at least the thick seed crystal of 5mm not molten, the temperature of polycrystal part is higher than 1027 ℃, after being incubated polycrystal to the crucible and all melting, less than the speed decline crucible of 8mm, until the whole crystallizations of material, crucible stops to descend with per hour, again with after per hour 1~20 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 10~50 ℃ cooling rate per hour, be cooled to 400 ℃, the single crystal growing furnace outage with 20~100 ℃ cooling rate per hour at last, reduce to room temperature, promptly obtain the germanium zinc phosphide monocrystalline.
The germanium zinc phosphide monocrystalline that utilized seeded growth among the present invention, wherein seed crystal is the germanium zinc phosphide monocrystalline by conventional directed and the crystal with certain crystalline orientation that cutting method obtains.
The synthetic boat material of polycrystalline synthetic method and method for monocrystal growth is graphite, glass carbon, silica glass or boron nitride among the present invention.
The crucible material of method for monocrystal growth is graphite, glass carbon, silica glass or boron nitride among the present invention.
The present invention has the synthesis rate height, easily discharges the advantage of impurity.Germanium zinc phosphide polycrystalline synthesis rate has improved 50%~90% than method in the past, in the crystalline process of growth, because crucible is vertical the placement, the germanium zinc phosphide polycrystal all is discharged to impurity the top of crucible in the time of pyritous at boiling state, so impurity is removed easily, obtain high quality crystal, in the process of single crystal growing, the method that adopts crucible decline to lower the temperature is step by step carried out crystallisation by cooling, guaranteed the consistence of crystal growth, and add directed germanium zinc phosphide monocrystalline as seeding, can grow the germanium zinc phosphide monocrystalline of the required direction of growth, the germanium zinc phosphide monocrystalline that grows detects through the XRD diffractometer, and the crystalline direction of growth is consistent with the orientation of seed crystal.Synthetic germanium zinc phosphide polycrystalline of the present invention records the germanium zinc phosphide collection of illustrative plates as shown in Figure 1 through X-ray diffraction, the X-ray powder diffraction spectrogram of a line standard germanium zinc phosphide, the b line is a synthetic germanium zinc phosphide polycrystalline X-ray powder diffraction spectrogram of the present invention, and synthetic germanium zinc phosphide polycrystalline purity height of the present invention is described.
Embodiment
Embodiment one: the polycrystalline synthetic method of the germanium zinc phosphide of present embodiment is carried out as follows: one, selecting purity for use is that zinc, germanium, phosphorus more than 99.999% is that 1: 1: 2~2.005 ratio is quantitative in molar ratio, reactant is put into synthetic boat, to synthesize boat places silica tube to vacuumize sealing, again silica tube is put into horizontal synthetic furnace, make the synthetic boat of placing phosphorus be positioned at the cold zone of horizontal synthetic furnace, the synthetic boat of placing zinc and germanium is positioned at the high-temperature zone of horizontal synthetic furnace; Two, intensification makes the cold zone temperature at 400~600 ℃, and the high-temperature zone temperature is 900~1080 ℃, and insulation is cooled to room temperature more than 3 hours again; Promptly obtain the germanium zinc phosphide polycrystal.
Embodiment two: the difference of present embodiment and embodiment one is: heating up in the step 2 makes the cold zone temperature at 440~560 ℃, and the high-temperature zone temperature is 930~1050 ℃.Other step and parameter are identical with embodiment one.
Embodiment three: the difference of present embodiment and embodiment one is: heating up in the step 2 makes the cold zone temperature at 480~520 ℃, and the high-temperature zone temperature is 980~1000 ℃.Other step and parameter are identical with embodiment one.
Embodiment four: the difference of present embodiment and embodiment one is: heating up in the step 2 makes the cold zone temperature at 500 ℃, and the high-temperature zone temperature is 990 ℃.Other step and parameter are identical with embodiment one.
Embodiment five: the difference of present embodiment and embodiment one is: insulation is more than 4 hours in the step 2.Other step and parameter are identical with embodiment one.
Embodiment six: the difference of present embodiment and embodiment one is: the material of the synthetic boat in the step 1 is graphite, glass carbon, silica glass or boron nitride.
Embodiment seven: the difference of present embodiment and embodiment one is: zinc, germanium, phosphorus are that 1: 1: 2 ratio is quantitative in molar ratio in the step 1.Other step and parameter are identical with embodiment one.
Embodiment eight: the method for the former nucleus growth of germanium zinc phosphide monocrystalline of present embodiment is carried out as follows: one, selecting purity for use is that zinc, germanium, phosphorus more than 99.999% is that 1: 1: 2~2.005 ratio is quantitative in molar ratio, reactant is put into synthetic boat, to synthesize boat places silica tube to vacuumize sealing, again silica tube is put into horizontal synthetic furnace, make the synthetic boat of placing phosphorus be positioned at the cold zone of horizontal synthetic furnace, the synthetic boat of placing zinc and germanium is positioned at the high-temperature zone of horizontal synthetic furnace; Two, heat up that to make the cold zone temperature be 400~600 ℃, the high-temperature zone temperature is 900~1080 ℃, and insulation is cooled to room temperature more than 3 hours again, promptly obtains the germanium zinc phosphide polycrystal; Three, the germanium zinc phosphide polycrystal that step 2 obtains is put into crucible, place silica tube to vacuumize sealing in crucible, the silica tube of sealing is put into crucible decline single crystal growing furnace, with crucible horizontal tangent bottom is reference line, the temperature of above base line is higher than 1026 ℃, the following temperature of reference line is lower than 1026 ℃, be incubated after material all melts to the crucible, again with per hour less than the speed decline crucible of 8mm, until the whole crystallizations of material, crucible stops to descend, again with after per hour 1~20 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 10~50 ℃ cooling rate per hour, be cooled to 400 ℃ with 20~100 ℃ cooling rate per hour at last, room temperature is reduced in the single crystal growing furnace outage; Promptly obtain the germanium zinc phosphide monocrystalline.
Embodiment nine: the difference of present embodiment and embodiment eight is: heating up in the step 2 and making the cold zone temperature is 440~560 ℃, and the high-temperature zone temperature is 930~1050 ℃.Other step and parameter are identical with embodiment eight.
Embodiment ten: the difference of present embodiment and embodiment eight is: heating up in the step 2 and making the cold zone temperature is 480~520 ℃, and the high-temperature zone temperature is 980~1000 ℃.Other step and parameter are identical with embodiment eight.
Embodiment 11: the difference of present embodiment and embodiment eight is: heating up in the step 2 and making the cold zone temperature is 500 ℃, and the high-temperature zone temperature is 990 ℃.Other step and parameter are identical with embodiment eight.
Embodiment 12: the difference of present embodiment and embodiment eight is: insulation is more than 4 hours in the step 2.Other step and parameter are identical with embodiment eight.
Embodiment 13: the difference of present embodiment and embodiment eight is: the material of the synthetic boat in the step 1 is graphite, glass carbon, silica glass or boron nitride.Other step and parameter are identical with embodiment eight.
Embodiment 14: the difference of present embodiment and embodiment eight is: the material of the crucible in the step 3 is graphite, glass carbon, silica glass or boron nitride.Other step and parameter are identical with embodiment eight.
Embodiment 15: the difference of present embodiment and embodiment eight is: the temperature of above base line is higher than 1080 ℃ in the step 3, and the following temperature of reference line is lower than 1000 ℃.Other step and parameter are identical with embodiment eight.
Embodiment 16: the difference of present embodiment and embodiment eight is: the temperature of above base line is higher than 1027 ℃ in the step 3, and the following temperature of reference line is lower than 1025 ℃.Other step and parameter are identical with embodiment eight.
Embodiment 17: the difference of present embodiment and embodiment eight is: in the step 3 with the speed decline crucible of 2~6mm per hour.Other step and parameter are identical with embodiment eight.
Embodiment 18: the difference of present embodiment and embodiment eight is: in the step 3 with the speed decline crucible of 4mm per hour.Other step and parameter are identical with embodiment eight.
Embodiment 19: the difference of present embodiment and embodiment eight is: in the step 3 at first with after per hour 4~16 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 20~40 ℃ cooling rate per hour again, be cooled to 400 ℃ with 40~80 ℃ cooling rate per hour at last.Other step and parameter are identical with embodiment eight.
Embodiment 20: the difference of present embodiment and embodiment eight is: in the step 3 at first with after per hour 8~12 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 25~35 ℃ cooling rate per hour again, be cooled to 400 ℃ with 50~70 ℃ cooling rate per hour at last.Other step and parameter are identical with embodiment eight.
Embodiment 21: the difference of present embodiment and embodiment eight is: in the step 3 at first with after per hour 10 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 30 ℃ cooling rate per hour again, be cooled to 400 ℃ with 60 ℃ cooling rate per hour at last.Other step and parameter are identical with embodiment eight.
Embodiment 22: the difference of present embodiment and embodiment eight is: crucible is with per hour greater than 0 and descend less than the speed of 8mm in the step 3.Other step and parameter are identical with embodiment eight.
Embodiment 23: the germanium zinc phosphide monocrystalline of present embodiment has the method for seeded growth to carry out as follows: one, selecting purity for use is that zinc, germanium, phosphorus more than 99.999% is that 1: 1: 2~2.005 ratio is quantitative in molar ratio, reactant is put into synthetic boat, to synthesize boat places silica tube to vacuumize sealing, again silica tube is put into horizontal synthetic furnace, make the synthetic boat of placing phosphorus be positioned at the cold zone of horizontal synthetic furnace, the synthetic boat of placing zinc and germanium is positioned at the high-temperature zone of horizontal synthetic furnace; Two, heat up that to make the cold zone temperature be 400~600 ℃, the high-temperature zone temperature is 900~1080 ℃, and insulation is cooled to room temperature more than 3 hours again, promptly obtains the germanium zinc phosphide polycrystal; Three, choose directed germanium zinc phosphide monocrystalline as seed crystal, seed crystal is placed in the seed crystal trap of crucible inner bottom part, again the germanium zinc phosphide polycrystal is put into crucible, place silica tube to vacuumize sealing in crucible, the silica tube of sealing is put into crucible decline single crystal growing furnace, the contact position of seed crystal and polycrystal is a benchmark with this moment, make the temperature of the contact position of seed crystal and polycrystal be lower than 1026 ℃, perhaps guarantee to have at least the thick seed crystal of 5mm not molten, the temperature of polycrystal part is higher than 1027 ℃, after being incubated polycrystal to the crucible and all melting, less than the speed decline crucible of 8mm, until the whole crystallizations of material, crucible stops to descend with per hour, again with after per hour 1~20 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 10~50 ℃ cooling rate per hour, be cooled to 400 ℃, the single crystal growing furnace outage with 20~100 ℃ cooling rate per hour at last, reduce to room temperature, promptly obtain the germanium zinc phosphide monocrystalline.
Embodiment 24: the difference of present embodiment and embodiment 23 is: heating up in the step 2 and making the cold zone temperature is 440~560 ℃, and the high-temperature zone temperature is 930~1050 ℃.Other step and parameter are identical with embodiment 23.
Embodiment 25: the difference of present embodiment and embodiment 23 is: heating up in the step 2 and making the cold zone temperature is 480~520 ℃, and the high-temperature zone temperature is 980~1000 ℃.Other step and parameter are identical with embodiment 23.
Embodiment 26: the difference of present embodiment and embodiment 23 is: heating up in the step 2 and making the cold zone temperature is 500 ℃, and the high-temperature zone temperature is 990 ℃.Other step and parameter are identical with embodiment 23.
Embodiment 27: the difference of present embodiment and embodiment 23 is: insulation is more than 4 hours in the step 2.Other step and parameter are identical with embodiment 23.
Embodiment 28: the difference of present embodiment and embodiment 23 is: the material of the synthetic boat in the step 1 is graphite, glass carbon, silica glass or boron nitride.Other step and parameter are identical with embodiment 23.
Embodiment 29: the difference of present embodiment and embodiment 23 is: the material of the crucible in the step 3 is graphite, glass carbon, silica glass or boron nitride.Other step and parameter are identical with embodiment 23.
Embodiment 30: the difference of present embodiment and embodiment 23 is: the temperature of seed crystal and polycrystalline contact position is lower than 1000 ℃ in the step 3, perhaps guarantees to have at least the thick seed crystal of 6mm not molten.Other step and parameter are identical with embodiment 23.
The embodiment hentriaconta-: the difference of present embodiment and embodiment 23 is: in the step 3 with the speed decline crucible of 1~7mm per hour.Other step and parameter are identical with embodiment 23.
Embodiment 32: 23 difference of present embodiment and embodiment is: in the step 3 with the speed decline crucible of 5mm per hour.Other step and parameter are identical with embodiment 23.
Embodiment 33: the difference of present embodiment and embodiment 23 is: in the step 3 at first with after per hour 4~16 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 20~40 ℃ cooling rate per hour again, be cooled to 400 ℃ with 40~80 ℃ cooling rate per hour at last.Other step and parameter are identical with embodiment 23.
Embodiment 34: the difference of present embodiment and embodiment 23 is: in the step 3 at first with after per hour 8~12 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 25~35 ℃ cooling rate per hour again, be cooled to 400 ℃ with 50~70 ℃ cooling rate per hour at last.Other step and parameter are identical with embodiment 23.
Embodiment 35: the difference of present embodiment and embodiment 23 is: in the step 3 at first with after per hour 10 ℃ cooling rate is cooled to 900 ℃, be cooled to 600 ℃ with 30 ℃ cooling rate per hour again, be cooled to 400 ℃ with 60 ℃ cooling rate per hour at last.Other step and parameter are identical with embodiment 23.
Embodiment 36: the difference of present embodiment and embodiment 23 is: the thickness of the seed crystal in the step 3 is greater than 5mm.Other step and parameter are identical with embodiment 23.
Embodiment 37: the difference of present embodiment and embodiment 23 is: crucible is with per hour greater than 0 and descend less than the speed of 8mm in the step 3.Other step and parameter are identical with embodiment 23.
Embodiment 38: the germanium zinc phosphide monocrystalline of present embodiment has the method for seeded growth to carry out as follows: one, selecting purity for use is that 99.999% zinc, germanium, phosphorus are that 1: 1: 2.005 ratio is quantitative in molar ratio, reactant is put into synthetic boat, to synthesize boat places silica tube to vacuumize sealing, again silica tube is put into horizontal synthetic furnace, make the synthetic boat of placing phosphorus be positioned at the cold zone of horizontal synthetic furnace, the synthetic boat of placing zinc and germanium is positioned at the high-temperature zone of horizontal synthetic furnace; Two, heat up that to make the cold zone temperature be 500 ℃, the high-temperature zone temperature is 1000 ℃, is incubated 4 hours, is cooled to room temperature again, promptly obtains the germanium zinc phosphide polycrystal; Three, choose directed germanium zinc phosphide monocrystalline as seed crystal, seed crystal is placed in the seed crystal trap of crucible inner bottom part, again the germanium zinc phosphide polycrystal is put into crucible, place silica tube to vacuumize sealing in crucible, the silica tube of sealing is put into crucible decline single crystal growing furnace, the contact position of seed crystal and polycrystal is a benchmark with this moment, the temperature that makes the contact position of seed crystal and polycrystal is 1000 ℃, the temperature of polycrystal part is 1050 ℃, after being incubated polycrystal to the crucible and all melting, with the speed decline crucible of 5mm per hour, until the whole crystallizations of material, crucible stops to descend, and again with after per hour 8 ℃ cooling rate is cooled to 900 ℃, is cooled to 600 ℃ with 15 ℃ cooling rate per hour, at last be cooled to 400 ℃ with 40 ℃ cooling rate per hour, room temperature is reduced in the single crystal growing furnace outage, promptly obtains the germanium zinc phosphide monocrystalline.
The germanium zinc phosphide monocrystalline of the growth that present embodiment makes detects through the XRD diffractometer, and the crystalline direction of growth is consistent with the orientation of seed crystal.