CN101209572A - Multi-line cutting machine - Google Patents
Multi-line cutting machine Download PDFInfo
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- CN101209572A CN101209572A CNA2007103034175A CN200710303417A CN101209572A CN 101209572 A CN101209572 A CN 101209572A CN A2007103034175 A CNA2007103034175 A CN A2007103034175A CN 200710303417 A CN200710303417 A CN 200710303417A CN 101209572 A CN101209572 A CN 101209572A
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Abstract
The invention discloses a multi-line cutting machine, comprising a cutting line routing system, a workbench, a control system, a circulation oil cooling system and an oil gas lubrication device. Grinding material is guided into the processing area of the semiconductor for grinding through the high-speed reciprocating motion of a metal wire and the speed of a line arrangement motor and the nonlinear speed of the line arrangement motor are controlled through controlling a servo device so as to implement no-shaft transmission tracking control; furthermore, the circulation oil cooling system and the oil gas lubrication device are adopted to solve the temperature and lubrication control of a mainshaft and the semiconductor material is finally cut into thin pieces. The multi-line cutting machine has the advantages of high tension cutting precision, high routing speed, small cutting loss and long mean time between failures (MTBF).
Description
Technical field
The present invention relates to a kind of semiconductor processing equipment, specifically is a kind of high-speed, high accuracy, low-loss multi-line cutting machine.
Background technology
Multifibres cutting is that a kind of the reciprocating motion by high speed wiry brought abrasive material into silicon heavy stone used as an anchor machining area and ground, finally a kind of novel processing method of silicon heavy stone used as an anchor dicing thin slice; The multifibres cutting machine has replaced the main mode that traditional interior circle is cut into the silicon chip cutting processing gradually, is mainly used in various hard brittle materials such as cutting magnetic material, crystal, pottery, compound, oxide, synthetic cut stone, monocrystalline silicon.The development of multi-line cutting machine bed is the research field of a multidisciplinary intersection, it is mainly to contain the executing agency of quick motor movement, carry out brand-new Control System Design in conjunction with control theory and technology, Digital Signal Processing, computer technology, sensor technology, mechanical technique, bussing technique, network technology etc., to reach desired high-speed, the high-precision requirement of motion control.In the multi-line cutting machine running, the linear velocity of unwrapping wire motor, take-up motor will be followed the tracks of the linear velocity of main motor, the linear velocity of winding displacement motor will be followed the tracks of the take-up motor angular velocity, and in the cabling running, mechanical parameter such as radius, rotary inertia all can change, so this is the control problem of a nonlinear and time-varying system, mainly study the tension force control of line of cut; The speed of retractable line motor does not have through-drive and follows the tracks of control; Difficult problems such as the nonlinear velocity control of winding displacement motor, the temperature of main shaft and lubricated control.
Summary of the invention
At prior art, the object of the invention aims to provide a kind of multi-line cutting machine, can use the electromechanical integration method, replaces weight or cylinder to apply tension force to line of cut with servomotor output torque, and realizes no through-drive tracking control; And further control the temperature and the lubricated control of main shaft, make that multi-line cutting machine has that tension force cutting accuracy height, Trace speed are fast, little, average non-failure operation time of cutting loss long advantage.
The invention provides in a kind of multi-line cutting machine, comprise that line of cut walks wire system, workbench, control system, recycle oil cooling system and oil-air lubrication device, wherein said line of cut is walked wire system and is comprised wire and 3 working rolls that are wrapped on the unwrapping wire roller, described wire is wound on 3 working rolls by directive wheel, processing Kun has formed cut surface by the wire that twines in the lower end, be wound into the take-up roller by directive wheel again after the cutting processing, line of cut is walked wire system and is also comprised strand oscillator, will be from the line of actinobacillus wheel equably around to take-up pulley; Described control system comprises motion controller, servo unit, analog quantity input-output unit and communication unit; Wherein servo unit comprises 7 servomotors: main motor, take-up motor, unwrapping wire motor, workbench motor, two tension motors and winding displacement motor are respectively as the tension force fork of working roll, unwrapping wire roller, take-up roller, workbench, retractable cable both sides, the executing agency of strand oscillator, and above-mentioned servomotor all is equipped with tachogenerator.
The tachogenerator of main motor, take-up motor, unwrapping wire motor, workbench motor is selected 17 incremental photoelectric encoders for use in the wherein above-mentioned servomotor, and two tension motors and winding displacement motor are selected 17 absolute value photoelectric encoders for use.
Described recycle oil cooling system comprises oil pump, cool exchanger, main shaft cooling pipe, fuel tank, liquid cooling machine.
Described control system also comprises the man-machine interface unit.
The oil-air lubrication device is made up of five parts: oil mass supply and allocation units; Air supply unit; The oil gas mixed cell; Oil gas is carried and allocation units; The oil-air lubrication control module.
Described communication unit module adopts communication interface card JAPMC-CM2300, connects each functional unit block primordial in the Fieldbus Control network with the MECHATROLINK cable.
Operation principle of the present invention is described in detail as follows: it is its core that line of cut is walked wire system.Line of cut jitter amplitude and frequency in walking line process have directly determined the quality (depth of parallelism of cut surface, the minimum widith of cut channel) of line cutting processing.In order to guarantee crudy, during the bringing into operation of multi-line cutting machine, all wires all are wrapped on the unwrapping wire roller, be wound on 3 working rolls that drag by main motor by a series of directive wheels, processing Kun has formed cut surface by the wire that twines in the lower end, carry out being wound into the take-up roller by a series of directive wheels again after the cutting processing, unwrapping wire Kun and take-up Kun are respectively by unwrapping wire motor and take-up motor-driven; In walking line process, need strand oscillator of design, will be from the line of actinobacillus wheel equably around to take-up pulley, the effect of strand oscillator is to guarantee that the take-up pulley take-up is even.
Following surface analysis is the control thinking of motor one by one.
(1) main motor: the speed of main motor is controlled by program setting, during the cutting machine operation, adopt the mode of program setting to control main motor by the given forward and reverse alternate-running of speed drive working roll, thereby metal wire is back and forth moved, and the forward of setting wants ratio inverse long the duration of runs duration of runs, so wire is just transferred to the take-up roller by the unwrapping wire roller gradually.Main motor is the core of multi-machine system, and the speed of retractable line motor, winding displacement motor, tension motor is controlled by it all directly or indirectly.
(2) unwrapping wire and take-up motor: the cutting wire by tension adjustment tension force fork, is gone to the work Kun that main motor drags from actinobacillus wheel.In order to control constant tension, require payingoff speed must follow the linear velocity of working roll, so the speed of unwrapping wire motor is controlled jointly by the speed of main motor and the speed of unwrapping wire side tension motor, belong to servomechanism.In like manner, the speed of take-up motor is controlled jointly by the speed of main motor and the speed of take-up side tension motor.
(3) tension motor: tension motor plays a part line of cut is applied tension force, during the cutting machine operation it is carried out permanent torque control.The two ends of tension force fork are respectively main motor and retractable line motor, when the two linear velocity is asynchronous, will drag the fork motion of permanent torque.So the tension force fork plays the function that speed is regulated: the position reflection of tension force fork be the regulating power of servo-drive system, the speed reflection of tension force fork be the tracking error of servo-drive system, the acceleration reflection of tension force fork be tension force on the line of cut.Ideally, when the linear velocity of actinobacillus wheel linear velocity and main motor roller was consistent, the speed of tension force fork and acceleration were zero, and the tension force on the line of cut keeps constant at this moment.
(4) winding displacement motor; The main effect of winding displacement motor is to guarantee that the take-up pulley take-up is even, and its speed and position are determined by the unwrapping wire rotating speed of motor.
(5) workbench motor; The workbench motor is determined each position and speed of workbench constantly according to hardness, geometry and the factors such as size, cutting accuracy of material to be cut, when velocity variations is big, need carry out Speed interpolation.
Wherein multi-line cutting machine also needs to control main shaft temperature and lubricated, and wherein heat radiation is one of spindle technology difficult point, and the main thermal source of main shaft inside is a main shaft bearing.Motor is burnt in the too high meeting of main shaft temperature, reduces bearing life and operating accuracy, and the recycle oil cooling system is adopted in electric main shaft heat radiation in the multi-line cutting machine.The recycle oil cooling system comprises: oil pump, cool exchanger, main shaft cooling pipe, fuel tank, liquid cooling machine.Oil pump is delivered to cool exchanger with cold oil, and cold oil is admitted to the main shaft cooling pipe, flows back to fuel tank again after taking away the heat that main shaft produces, and the liquid cools function realizes that fault alarm, self check, signal output can link with main frame; Realize the monitoring temperature of main shaft running status.
Multi-line cutting machine of the present invention has following characteristics:
(1) utilization electromechanical integration method replaces weight or cylinder to apply tension force to line of cut with servomotor output torque, and the disconnection fault rate is low;
(2) the retractable cable motor adopts the linear velocity that advanced no through-drive technology is followed the tracks of main motor; Make the slew rate and the amplitude of oscillation of tension force fork less, kinematic system stable and reliable operation, cutting accuracy height, Trace speed height;
(3) the winding displacement function realizes that with the servomotor of band absolute value encoder the winding displacement effect is good;
(4) be linked to be a network control system by fieldbus between motion controller, servo unit, AD and the DA unit, the Applied Digital communication technology is transmission of control signals, feedback information or fault message between each unit;
(5) can select the wire of different size for use, according to the difference of material to be cut.The diameter of wire can
Select 0.10mm, 0.12mm, 0.14mm or 0.16mm for use, so the cutting loss is little.
Description of drawings
Fig. 1 is the structural equivalents schematic diagram of a multi-line cutting machine among the embodiment;
Fig. 2 is the servo unit schematic diagram of multi-line cutting machine among the embodiment;
Fig. 3 is many motor servo systems control structure block diagram among the embodiment;
In the accompanying drawings:
1---cut surface 2---unwrapping wire roller 3---take-up roller
4---unwrapping wire side tension force fork 5---take-up side tension force fork 6---strand oscillators
7---workbench 8---bus 9---DA converters
10---AD converter 11---communication terminal resistance
12---IO mouth 13---mortar temperature 14---air compressor machine air pressure
15---mortar flow 16---Trace speed instruction 17---torque instructions
18---unwrapping wire side tension force detecting sensor 19---take-up side tension force detecting sensor
20,21,22---processing Kun 23,24---ball screw
25---motion controller 26---touch-screen 27---control panels
28---the motor output speed
M1-master's motor M 2-unwrapping wire motor M 3-take-up motor M 4-unwrapping wire side tension motor
M5-take-up side tension motor M6-winding displacement motor M 7-workbench motor
SD1, SD2, SD3, SD4, SD5, SD6, SD7-servo-driver
S1, S2, S3, S7-17 position incremental photoelectric encoder
S4, S5, S6-17 position absolute value photoelectric encoder
The specific embodiment
Multi-thread line of cut described in the embodiment, comprise that line of cut walks wire system, control system, recycle oil cooling system, oil-air lubrication device, wherein line of cut is walked wire system and is comprised wire and 3 working rolls 20,21,22 that are wrapped on the unwrapping wire roller 2, described wire is wound on 3 working rolls 20,21,22 by directive wheel, processing Kun has formed cut surface 1 by the wire that twines in 20,21,22 lower ends, be wound into take-up roller 3 by directive wheel again after the cutting processing, also comprise strand oscillator 6; Described control system comprises motion controller 25, servo unit, the analog quantity input-output unit based on PLC, also comprises the man-machine interface unit, the communication unit that are connected with motion controller 25; Wherein servo unit has 7 motors as executing agency.
Described recycle oil cooling system comprises oil pump, cool exchanger, main shaft cooling pipe, fuel tank, liquid cooling machine.Wherein oil pump is delivered to cool exchanger with cold oil, and cold oil is admitted to the main shaft cooling pipe, flows back to fuel tank again after taking away the heat that main shaft produces.The liquid cools function realizes that fault alarm, self check, signal output can link with main frame; Realize the monitoring temperature of main shaft running status.
The control system of multi-line cutting machine described in embodiment structure as shown in Figure 2, motion controller 25 is selected the MP2300 motion controller of YASKAWA company for use, each servo unit is selected the ∑ III type servo-driver and the ∑ II type servomotor of YASKAWA company for use, carry out digital communication by MECHATROLINK fieldbus 8 between each unit of control system and the motion controller 25, transmission of control signals and feedback speed, position, tension force, temperature, flow and fault message.Control system mainly contains three modules and constitutes: 1, based on the motion controller of PLC: motion controller makes the core of The whole control system, controls each unit co-ordination, and under its control, an organic whole has been formed in the unit; 2, servo unit: multi-line cutting machine has 7 servomotors as executing agency in the present embodiment, each motor speed measuring sensor and take-up tachogenerator are selected 17 photoelectric encoders for use, and the tachogenerator of wherein main motor M 1, unwrapping wire motor M 2, take-up motor M 3, workbench motor M 7 is selected 17 incremental photoelectric encoder S1, S2, S3, S7 respectively for use.Two tension motor M4, M5 and winding displacement motor M 6 are selected 17 absolute value photoelectric encoder S4, S5, S6 respectively for use; 3, man-machine interface unit: man-machine interface is made up of two parts: with Shielded Twisted Pair touch-screen 26 that links to each other with MP2300 and the guidance panel 27 that links to each other with MP2300 by IO mouth 12.The user imports operational factors, back-to-back running information, reponse system failure diagnosis information by touch-screen 26 and guidance panel 27.4, analog quantity input-output unit: AD converter 10 is selected the AN2900 of YASKAWA company for use, mainly feeds back the tension force of take-up side, take-up side, mortar temperature 13 and main shaft temperature.DA converter 11 adopts the AN2910 of YASKAWA company, is mainly used in the rotating speed of control variable-frequency motor, and then control mortar flow.AD and DA carry out digital communication by fieldbus and MP2300 and come Data transmission.5, communication unit: as the communication unit module, connect functional unit block with the MECHATROLINK cable with the communication interface card JAPMC-CM2300 of YASKAWA company, primordial is in the Fieldbus Control network.
The oil-air lubrication device is made up of five parts among the embodiment: (1) oil mass supply and allocation units; (2) air supply unit; (3) oil gas mixed cell; (4) oil gas is carried and allocation units; (5) oil-air lubrication control module.(adjustable) is by the micro lubricating oil of oil mass supply and the quantitative output of allocation units quantitative plunger pump distributor at regular intervals, in oil gas hybrid cell mixing valve,, carry and allocation units nylon tube output oil gas through oil gas with after compressed air that air supply unit provides mixes.Compare oil-air lubrication equipment needed thereby complexity with fog lubrication, cost height, but that this lubricating system can carry out respectively accurately each bearing is lubricated, the lubricating oil utilization rate high (with oil mass have only fog lubrication 1/10), the bearing heating amount is little, non-environmental-pollution.
Compare with same kind of products at abroad, the present invention has following characteristics and advantage:
1) from cabling mode, the present invention with compare with same kind of products at abroad, the curve of routing reversing is more Smoothly, transit time is short;
2) from the SERVO CONTROL network, same kind of products at abroad adopts the communication mode based on dummycable, control System complex processed, communication I/O mouth dummycable wiring complexity, discrete component quantity are many, and the cost height; And the present invention controls the Fieldbus Based totally digitilized communication mode of network using, element is few, Become body, reliability height, control flexibly, hardware maintenance and system upgrade be all very convenient.
3) from the angle of intelligent level, speed of the present invention is followed and has been adopted intelligent control technology in the control, The characteristic parameter of energy ONLINE RECOGNITION machinery need not to import mechanical parameter during operation, and external product Generally all need exactly input such as mechanical parameters such as actinobacillus wheel, take-up pulley radiuses.
4) on the effect of tension force control, owing to the present invention is directed to the tension force control problem of line of cut, adopt With the control strategy of electromechanical integration, the control effect is better than same kind of products at abroad.
5) from winding displacement control, characteristic of the present invention is: remember with the absolute value encoder that servomotor carries Record strand oscillator positional information has realized the limit function of I-beam wheel inner edge both sides, connects thereby replaced Nearly switch has reduced system cost, and has greatly improved the performance of winding displacement.
6) see on the servo type selecting that what the similar ginseng product of external high bird adopted is analog servomechanism, motion controller with Adopt Simulation with I/O mouth to carry out digital quantity (4～20mA, 24V) between servo unit or carry out analog quantity Communication; Full-digital servo, motion controller and the servo unit of the in the world main flow that the present invention adopts Between adopt fieldbus networks to communicate; So control performance is superior.
Claims (6)
1. multi-line cutting machine, comprise that line of cut walks wire system, workbench, control system, recycle oil cooling system and oil-air lubrication device, it is characterized in that, described line of cut is walked wire system and is comprised wire and 3 working rolls that are wrapped on the unwrapping wire roller, described wire is wound on 3 working rolls by directive wheel, processing Kun has formed cut surface by the wire that twines in the lower end, be wound into the take-up roller by directive wheel again after the cutting processing, line of cut is walked wire system and is also comprised strand oscillator, will be from the line of actinobacillus wheel equably around to take-up pulley; Servo unit and analog quantity input-output unit that described control system comprises motion controller, is connected respectively by communication unit and motion controller; Wherein servo unit comprises 7 servomotors: main motor, take-up motor, unwrapping wire motor, workbench motor, two tension motors and winding displacement motor, as the tension force fork of working roll, unwrapping wire roller, take-up roller, workbench, retractable cable both sides, the executing agency of strand oscillator, above-mentioned servomotor all is equipped with tachogenerator respectively.
2. according to the described multi-line cutting machine of claim 1, it is characterized in that, the tachogenerator of main motor, take-up motor, unwrapping wire motor, workbench motor is selected 17 incremental photoelectric encoders for use in the described servomotor, and two tension motors and winding displacement motor are selected 17 absolute value photoelectric encoders for use.
3. according to the described multi-line cutting machine of claim 1, it is characterized in that described recycle oil cooling system comprises oil pump, the cool exchanger that is connected with the oil pump output, and cool exchanger is connected with liquid cooling machine with fuel tank by the main shaft cooling pipe.
4. according to the described multi-line cutting machine of claim 1, it is characterized in that described control system also comprises the man-machine interface unit that is connected with motion controller.
5. according to the described multi-line cutting machine of claim 1, it is characterized in that described oil-air lubrication device is connected to form successively by oil mass supply and allocation units, air supply unit, oil gas mixed cell, oil gas conveying and allocation units, oil-air lubrication control module.
6. according to the described multi-line cutting machine of claim 1, it is characterized in that, described communication unit module adopts communication interface card JAPMC-CM2300, connects motion controller, servo unit and analog quantity input-output unit primordial in the Fieldbus Control network with the MECHATROLINK cable.
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| CNA2007103034175A CN101209572A (en) | 2007-12-24 | 2007-12-24 | Multi-line cutting machine |
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| CNA2007103034175A CN101209572A (en) | 2007-12-24 | 2007-12-24 | Multi-line cutting machine |
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| CN102049817A (en) * | 2009-10-28 | 2011-05-11 | 上海日进机床有限公司 | Wire arraying mechanism of wire winding drum of diamond wire cutting machine |
| CN101758561B (en) * | 2010-01-12 | 2011-06-15 | 大连连城数控机器有限公司 | Novel wire management device of multi wire saw |
| CN102198600A (en) * | 2011-05-12 | 2011-09-28 | 无锡机床股份有限公司 | Roller shaft driving structure of multiwire cutting machine |
| CN101502984B (en) * | 2009-03-09 | 2011-11-02 | 无锡开源太阳能设备科技有限公司 | Structure for deploying and retracting cutting line for silicon chip cutter |
| CN102233620A (en) * | 2010-04-28 | 2011-11-09 | 云南中科鑫圆晶体材料有限公司 | Method for controlling multi-wire cutting load |
| CN102331740A (en) * | 2011-07-13 | 2012-01-25 | 中达电通股份有限公司 | System and method for automatically controlling multi-wire cutting machine |
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| CN102672829A (en) * | 2011-03-17 | 2012-09-19 | 苏州赫瑞特电子专用设备科技有限公司 | Control system for precision multi-thread cutting machine |
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| CN101502984B (en) * | 2009-03-09 | 2011-11-02 | 无锡开源太阳能设备科技有限公司 | Structure for deploying and retracting cutting line for silicon chip cutter |
| CN101602232B (en) * | 2009-07-15 | 2013-03-20 | 北京京联发数控科技有限公司 | Wire butting machine tool |
| CN102039638B (en) * | 2009-10-26 | 2013-04-24 | 英利能源（中国）有限公司 | Cutting method for cutting substrate by utilizing cutting line |
| CN102049817A (en) * | 2009-10-28 | 2011-05-11 | 上海日进机床有限公司 | Wire arraying mechanism of wire winding drum of diamond wire cutting machine |
| CN101758561B (en) * | 2010-01-12 | 2011-06-15 | 大连连城数控机器有限公司 | Novel wire management device of multi wire saw |
| CN101745989B (en) * | 2010-03-04 | 2011-11-09 | 周文敏 | Double-station multiwire wafer cutting machine controlled by microcomputer |
| CN101745989A (en) * | 2010-03-04 | 2010-06-23 | 周文敏 | Double-station multiwire wafer cutting machine controlled by microcomputer |
| CN102233620A (en) * | 2010-04-28 | 2011-11-09 | 云南中科鑫圆晶体材料有限公司 | Method for controlling multi-wire cutting load |
| CN102672829A (en) * | 2011-03-17 | 2012-09-19 | 苏州赫瑞特电子专用设备科技有限公司 | Control system for precision multi-thread cutting machine |
| CN102198600A (en) * | 2011-05-12 | 2011-09-28 | 无锡机床股份有限公司 | Roller shaft driving structure of multiwire cutting machine |
| CN102331740A (en) * | 2011-07-13 | 2012-01-25 | 中达电通股份有限公司 | System and method for automatically controlling multi-wire cutting machine |
| CN102626953A (en) * | 2012-02-14 | 2012-08-08 | 上海五同机械制造有限公司 | Servo control system of linear cutting machine |
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| CN103878893A (en) * | 2013-12-31 | 2014-06-25 | 无锡市和迅亿阳自动化工程有限公司 | Automatic control system and automatic control method for multi-wire cutting machine |
| CN104057545A (en) * | 2014-06-04 | 2014-09-24 | 上海日进机床有限公司 | Multi-wire cutting equipment and tension adjusting mechanism thereof |
| CN105235080A (en) * | 2015-10-30 | 2016-01-13 | 江苏耀阳电子有限公司 | Multi-wire sawing machine used for machining solar cell panel |
| CN109877985A (en) * | 2019-04-24 | 2019-06-14 | 宇晶机器（长沙）有限公司 | A kind of multi-line cutting machine tension control system based on image procossing |
| CN113665009A (en) * | 2021-08-30 | 2021-11-19 | 燕山大学 | Wire bow parameter monitoring device for multi-wire cutting machine |
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