CN101196415B - Ultrasonic sensor - Google Patents
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- CN101196415B CN101196415B CN2007101933542A CN200710193354A CN101196415B CN 101196415 B CN101196415 B CN 101196415B CN 2007101933542 A CN2007101933542 A CN 2007101933542A CN 200710193354 A CN200710193354 A CN 200710193354A CN 101196415 B CN101196415 B CN 101196415B
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Abstract
The aim of the invention is to control the diameter of the empty hole in the coupling layer formed by the ceramic porous body and organic glass. An ultrasonic sensor including a piezoelectrics, a casing for accommodating the piezoelectrics and a coupling layer arranged at the top of the casing is provided, wherein, the coupling layer is composed of the ceramic porous body which packs the uniform glass sphere that is formed by the dry gel of the organic glass. The ultrasonic sensor adds the resin particle (4) packed with liquefied gas in the serum (3) which uses the inorganic material, the resin particle (4) is foamed by the first heating working procedure to make the hollow spherical particle (5), in the second heating working procedure the ceramic porous body is executed with baking and an organic glass (7) is formed in the controlled empty hole, a coupling layer (9) which has stable inner density and a certain sound impedance is formed thereby providing an ultrasonic sensor that outputs stably.
Description
Technical field
The present invention relates to a kind of coupling layer that improves the sound equipment performance of ultrasonic sensor.
Background technology
In the past, the manufacture method of the coupling layer that uses in ultrasonic sensor etc. has following method: for example, shown in Fig. 6 (a), in container 19, sneak into microballoon 20 and resin 21 after, shown in Fig. 6 (b),, this container 19 makes its driving together with being arranged in the centrifugal separator 22.Then, shown in Fig. 6 (c), in the potpourri of glass microsphere 20 and resin 21, utilize difference in specific gravity to be separated into the first resin bed 21a of principal ingredient for the less glass microsphere of proportion, the second resin bed 21b that forms by the bigger resin bed of proportion only, bottom in container 19 forms by the second resin bed 21b that only is made up of resin bed 21, principal ingredient is formed at the top in container 19 is the first resin bed 21a of glass microsphere 20, then, only take out principal ingredient and be the first resin bed 21a of glass microsphere 20 and, it is processed the back as coupling layer (with reference to patent documentation 1) as coupling unit.
And known have a following method: replace resin 21 and use inorganic material such as oxide-based pottery, and replace glass microsphere and use bubble, be formed on the ceramic porous article (with reference to patent documentation 2) that has a plurality of pores in the pottery thus.
Coupling layer for ultrasonic propagation in air, need to reduce the sound equipment impedance of coupling layer, for this reason, in order in resin bed, stably to keep bubble, consider to cooperate and form the hollow sphere that forms by glass, for so the sound equipment impedance reduced and improve hyperacoustic propagation efficiency, consider to form air bubble and the conception of making coupling layer.
Patent documentation 1: No. 2634161 communique of Jap.P.
Patent documentation 2: Jap.P. 2001-261463 communique
But, in existing this manufacture method, since be formed on glass microsphere around when adhering to first resin bed of resin and principal ingredient only for second resin bed of the bigger resin of proportion, just first resin bed that is used for coupling unit, the second remaining resin bed goes out of use, thereby can be limited, thereby the lower manufacture method of the production efficiency of coupling unit from the part that the coupling unit that produces is taked.
And, in order in mineral-type materials, to form bubble with stable bubble diameter, use mixer etc. imports bubble in slurries, but in the rod shape that as coupling unit, has certain-length, inject under the situation of slurries, because of injecting the bubble collapse that operation makes not at all easy importing, bubble diameter in the coupling unit distributes and becomes uneven, thereby taking out from coupling unit the certain thickness coupling layer, can not obtain having the coupling layer of uniform bubble diameter, bubble diameter instability as the air of coupling layer, thereby can not ultrasound wave be propagated in the air effectively by coupling layer, thereby exist as the output of ultrasonic sensor because of each coupling layer different problem.
Summary of the invention
The present invention is used to solve above-mentioned existing problem, and a kind of coupling unit of stably controlling emptying aperture diameter (bubble diameter) as coupling layer in mineral-type materials is provided.
In order to solve above-mentioned existing problem, ultrasonic sensor of the present invention, accommodate piezoelectrics in the enclosure, these piezoelectrics are by applying the ultrasound wave that voltage is exported regulation from terminal via electric conductor, coupling layer is set and can obtains stable hyperacoustic output at the top of above-mentioned shell, wherein, the thermal expansivity resin of bag liquid gas in the slurries that the inorganic powder material are adjusted into principal ingredient, mixing, the thermal treatment of regulation will be implemented after the slurries gelation that contains the hollow sphere resin that obtain thus, hollow sphere resin in the slurries is expanded and the formation coupling unit, this coupling unit has formed the hollow spheres particle with regulation particle diameter, in the hollow spheres particle of this coupling unit, form the desiccant gel of organic glass, thereby constitute above-mentioned coupling layer by the ceramic porous article of the uniform glass spheres of interior bag.
According to foregoing invention, by the heating process in 2 stages of implementing first heating process and second heating process is provided, can access the ceramic porous article that does not destroy emptying aperture and in coupling unit, contain the uniform emptying aperture of emptying aperture diameter, described first heating process, at the inner thermal expansivity hollow sphere that the thermal expansion volume increases that adds that cooperates because of certain limit of coupling unit, and when making coupling unit, the thermal expansivity hollow sphere is expanded; Described second heating process makes inorganic material burn till sclerosis.
Ultrasonic sensor of the present invention, because can be within the specific limits with the control of the emptying aperture diameter in the coupling layer, thereby can be simply and stably implement to import the method for emptying aperture to inorganic material, and make in the coupling unit the emptying aperture diameter within the specific limits, thereby can also improve thus the throughput rate of the coupling layer that takes out.Be equipped with and in this coupling layer, form the ultrasonic sensor that organic glass makes the further coupling layer that reduces of sound equipment impedance, emptying aperture diameter in the coupling layer is even, thereby the ultrasound wave velocity of sound of propagating in coupling layer is certain, the sound equipment impedance stabilization, the difference of the ultrasound wave output that causes of the difference of coupling layer is also less thus, the reliability of ultrasonic sensor output is improved, in the fluid measuring device that carries this ultrasonic sensor, also can significantly improve its production stability.
The ultrasonic sensor of first invention, accommodate piezoelectrics in the enclosure, these piezoelectrics are by applying the ultrasound wave that voltage is exported regulation from terminal via electric conductor, coupling layer is set and can obtains stable hyperacoustic output at the top of above-mentioned shell, it is characterized in that, the thermal expansivity resin of bag liquid gas in the slurries that the inorganic powder material are adjusted into principal ingredient, mixing, the thermal treatment of regulation will be implemented after the slurries gelation that contains the hollow sphere resin that obtain thus, hollow sphere resin in the slurries is expanded and constitute the coupling unit of the hollow spheres particle that has formed particle diameter with regulation, in the hollow spheres particle of this coupling unit, form the desiccant gel of organic glass, thereby constitute above-mentioned coupling layer by the ceramic porous article of the uniform glass spheres of interior bag.
By the heating process in 2 stages of implementing first heating process and second heating process is provided, can access the ceramic porous article that does not destroy emptying aperture and in coupling unit, contain the uniform emptying aperture of emptying aperture diameter, described first heating process, at the inner thermal expansivity hollow sphere that the thermal expansion volume increases that adds that cooperates because of certain limit of coupling unit, and when making coupling unit, the thermal expansivity hollow sphere is expanded; Described second heating process makes inorganic material burn till sclerosis.
The ultrasonic sensor of second invention, it is characterized in that, coupling unit, after making the slurries gelation that contains the hollow sphere resin, make its thermal expansion to first heating process of the particle diameter of regulation through the temperature that applies the degree that the polymer shell that forms the hollow sphere resin can not destroy, in second heating process that applies the temperature higher, destroy above-mentioned polymer shell, form emptying aperture with prescribed level than above-mentioned first heating process.
Then, first heating process, owing to use the atmosphere heating unit that potpourri is heated, make at least a portion thermal expansion of the thermal expansivity resin in the said mixture and in said mixture, form the hollow spheres particle, thereby can implement expansion reaction to hollow sphere fully burning till before the sclerosis of inorganic material by first heating process, can be than the operation that imports the emptying aperture diameter by stirrings inorganic material such as mixers stable and reliably in inorganic material in wrap emptying aperture.And, owing to before reaching the firing temperature of inorganic material, form emptying aperture, thereby emptying aperture can not disappear before burning till.
And, in second heating process, owing to use the atmosphere heating unit under the temperature higher to heat than first heating process to the potpourri that comprises the hollow sphere resin that adds thermal expansion, in said mixture, form a plurality of emptying apertures, said mixture burns till sclerosis and forms the shaping thing, thereby form and to contain the ceramic porous article of above-mentioned emptying aperture, thereby emptying aperture is disappeared and obtain having the ceramic porous article of the emptying aperture diameter of being controlled.
The ultrasonic sensor of the 3rd invention is characterized in that, coupling layer or coupling unit use to have the reception room of specified volume and after forming the shape of regulation, the thickness that is cut to regulation is to guarantee required size.
Since in be wrapped in the inorganic material matrix the emptying aperture diameter within the specific limits, thereby can be within the specific limits, and can boost productivity with density control.
The ultrasonic sensor of the 4th invention is characterized in that, coupling layer or coupling unit use the reception room preestablished necessary size, shape to form, and do not form emptying aperture on the face beyond the side.
Owing on the face beyond the side, do not form emptying aperture, thereby can not upset, can guarantee to export the stable output that does not reduce from the wavelength of the sound wave of coupling aspect propagation.
The ultrasonic sensor of the 5th invention is characterized in that, as the flow measurement unit.
Coupling layer can be propagated as sound wave the vibration from piezoelectrics effectively in gas, by the speed of instantaneous measurement fluid, consider that according to flow velocity the key elements such as sectional area of stream are carried out computing, can also measure flow.
Description of drawings
Fig. 1 is the sketch that the reception room in first embodiment of the present invention is filled slurries.
Fig. 2 is the sketch that produces hollow-particle in first heating process of the coupling unit in first embodiment of the present invention.
Among Fig. 3, (a) being the sketch of the density inspect method of ceramic porous article, (b) is the figure of the Density Distribution of the ceramic porous article layer of expression in first embodiment of the present invention, (c), (d) be the figure of the Density Distribution of ceramic porous article layer in the expression comparative example.
Fig. 4 is the sketch of coupling unit.
Fig. 5 is to use the cut-open view of the ultrasonic sensor of the coupling layer in first embodiment of the present invention.
Among Fig. 6, (a) and (b), (c) are the manufacturing procedure pictures of existing coupling unit.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.Wherein, the invention is not restricted to this embodiment.
(first embodiment)
Fig. 1 represents the flow process of the manufacture method of coupling unit in first embodiment of the present invention and coupling layer with concise and to the point process chart.
The manufacture method that contains the slurries of hollow sphere resin of the present invention is: with inorganic material powder and low-melting glass, with water or organic solvent and with crosslinking chemical and hollow sphere mixed with resin.
Electrodeless dusty material is oxide-based stupalith, with silit, aluminium oxide, zirconia, monox trichroite etc. or cooperate composite oxides class that the multiple oxide-based stupalith of combination forms as principal ingredient.Pulverize this inorganic material powder and low-melting glass fully meticulously.Make particle diameter below 10 μ m.Mix so that the powder after this pulverizing more is evenly dispersed in water or the organic solvent.Organic solvent uses ethanol or methyl alcohol.As jelling agent, can use Methacrylamide, dimethylaminoethyl methacrylate etc.More than, so long as the cooperation that makes slurries burn till the inorganic material class stupalith that hardens and obtain to this constitutes, can be any formation.
The resin particle 4 of bag liquid gas in the slurries that are formed as described above, mixing.This resin particle is formed by the polymer shell of interior bag liquid gas.The mean grain size of described spheroid is approximately 10～15 μ m.
The method that forms ceramic porous article 6 is described.Reception room 2 in host body 1 injects the slurries 3 that contain resin particle 4.Through certain hour make the slurries gelation form solid-state after, above-mentioned host body 1 is placed the calibration cell that carries out atmosphere heating, the heat drying that slurries 3 are carried out as first heating process.Heating-up temperature is approximately 50 ℃～80 ℃.Shown in Fig. 2 (a) and (b), by this heating process, the shell air pressure inside of the resin particle 4 in the solid in the reception room 2 (gelinite) increases, and the shell of thermoplastic plastic softens and volume is increased sharply, thereby is changed to hollow ball particle 5.
Thus, can be in the process of slurries 3 solid states, keep at hollow ball particle 5 under the state of hollow shape slurries 3 are heated and burn till.Method as importing emptying aperture has and utilizes stirring machine to make slurries 3 contain the mode of air bubble.But, as shown in Figure 1, because when injecting reception room 2, bubble in the slurries 3 causes froth breaking because of injecting operation to the impact of slurries 3, or after injecting reception room 2, the weight on slurries 3 tops makes the bubble froth breaking in reception room 3 bottoms, thereby with the shape of reception room 2, bubbles volume can not be remained on a certain amount of.
By first heating process, in the solid of slurries 3, behind the generation hollow-particle 5,, and, the solid of above-mentioned slurries 3 is carried out the heating of stipulated time with 1000 ℃～1500 ℃ temperature as second heating process from reception room 2 demouldings.Thus, by after the thermoplastic plastic that constitutes hollow ball particle 5 is burnt diffusing (baked I Fly ば) forming emptying aperture, ceramic porous article is burnt till.Emptying aperture also exists situation of burning formation intercommunicating pore when loosing or situation about existing as independent emptying aperture.And 2 of the reception rooms in the host body 1 have been described 1, and reception room 2 also can be a plurality of when considering throughput rate.And, in first heating process, heat, but after also can carrying out drying with set point of temperature, time, only the solid of the slurries after the demoulding 3 implemented second heating process after first heating process the slurries 3 that inject reception room 2 together with host body 1.
After being cut to certain thickness with the ceramic porous article of being finished, Fig. 3 (a) record measures the result of its each density.The ceramic porous article 6 that to make as first embodiment of invention is cut to certain thickness.Being shaped as of the ceramic porous article 6 of this moment is cylindrical, and the thickness of 1 pottery is cut to 0, and 75mm takes 60 ceramic porous article layers from 1 ceramic porous article.
At this moment, when injecting slurries 3, No. 1, the ceramic porous article floor called after that will form at the foot of cylinder will then be cut to No. 2, certain thickness ceramic porous article floor called after, name successively to top by this method, the floor that will cut off at the topmost of ceramic porous article is as No. 60.
With (b), (c) of Fig. 3, its result of graphical presentation of (d).Fig. 3 (b) is the density of the ceramic porous article layer made by first embodiment of the present invention, and Fig. 3 (c), (d) are for comparing, and slurries are stirred and imports the density of the ceramic porous article layer made from existing method of bubble with mixer.
Density Distribution from figure as can be known, in the ceramic porous article layer of the present invention, the density whichever of the ceramic porous article layer of being finished part all stablize, but with the density of the ceramic porous article layer of the comparative example of mixer importing bubble, density changes because of the position of ceramic porous article 6.This is because owing to emptying aperture diameter (bubble diameter) instability that forms in ceramic porous article 6 by existing method, thereby there is deviation in the density of the ceramic porous article layer of integral manufacturing.Think that the bubble of ceramic porous article concentrates on top when reception room 2 injects slurries along with numbering becomes big and reason that the density of ceramic porous article layer diminishes is, or after being injected into reception room 2, the bubble of reception room 2 bottoms cannot stand the weight of slurries 3 and froth breaking.And, think along with numbering becomes big and the density ceramic porous article layer becomes big reason and is, at the bubble froth breaking that injects the slurries 3 that operation is in reception room 2 tops and density becomes big.
As mentioned above, in the manufacture method of the ceramic porous article of embodiments of the present invention, no matter get which position and can both obtain certain, the density stabilized ceramic porous article layer of emptying aperture diameter.
Then the formation to organic glass 7 describes.Organic glass 7 as coupling layer requires velocity of sound less, and density is lower.Utilizing catalyzer that frits such as Ethoxysilane or methoxy silane are had under the state of abundant activity, it is dispersed in the alcohols solvents such as methyl alcohol or ethanol.In the ceramic porous article 6 after this solution being added catalyzer such as ammoniacal liquor and making it immerse the fully degassing and carry out vitreous, obtain containing moistening gel thus than the organic glass of multi-solvent.This moistening gel is formed in the bubble of the inside of ceramic porous article 6, particularly above-mentioned generation.The organic glass of Xing Chenging closely contacts with ceramic porous article 6 securely like this, plays a role thereby can be used as the high coupling unit of reliability.The internal solvent of this moistening gel is carried out drying and obtain the dry body of organic glass.Thus, form the organic glass 7 that velocity of sound is less, density is lower.Organic glass 7 also can be formed by monox, titanium dioxide, zirconia or aluminium oxide etc.
The coupling unit of making thus 8 is cut to the thickness of regulation and in coupling layer 9 as ultrasonic sensor.
And, if be predetermined size, the shape of reception room 2, so that size, the shape of coupling unit 8 or coupling layer 9 become size, shape when being used in ultrasonic sensor, face in the time of then will making beyond the top of reception room 2 contacts with the inside surface of reception room 2 and can not form emptying aperture, because of having the face that does not form emptying aperture, can not upset from the wavelength of the sound wave of coupling aspect propagation, can guarantee to export the stable output that does not reduce.
(second embodiment)
Fig. 5 is to use the cut-open view of the ultrasonic sensor of the coupling layer 9 that is obtained by above-mentioned embodiment.
Have top 11 on the shell 10 of the tubular of conductive material system, the internal face at this top 11 is bonded with piezoelectrics 12, is bonded with coupling layer 9 in outside wall surface.
From terminal 13,15 via electric conductor 17 when piezoelectrics 12 apply voltage, these piezoelectrics 12 are because of the piezoelectricity vibration.
The piezoelectrics 12 of Fig. 5 vibrate with about 500KHz, and this vibration is passed to coupling layer 9 from shell 10, and the vibration of coupling layer 9 is propagated to gas as sound wave.
Usually coupling layer 9 and top 11 usefulness bonding agents carry out bonding, but exist in coupling layer 9 inside in be surrounded by the wavelength disorder of the sound waves that the size of emptying aperture of machine glass 7 do not propagate from coupling layer 9 surfaces simultaneously in coupling layer 9 inside, the phenomenon that output reduces, and between the ultrasonic sensor that carries other coupling layers 9, also produce this problem, thereby can not obtain producing the ultrasonic sensor of uniform output.
With respect to this, the coupling layer of taking from the coupling unit of making by the manufacture method of embodiments of the present invention 89, owing to have certain emptying aperture diameter, and in this emptying aperture, be formed uniformly organic glass, thereby the inconsistent ultrasonic sensor of the output that can not produce each coupling layer 9, can stably make the stable ultrasonic sensor of output.
And the ultrasonic sensor that uses this coupling layer 9 can be used in the flow assay device of fluid.Promptly, fluid flow direction upstream side and downstream at stream dispose a pair of ultrasonic sensor at least, the time that the ultrasound wave that detection sends from side's ultrasonic sensor is received by the opposing party's ultrasonic sensor, promptly ultrasonic propagation time can be measured flow rate of fluid then.
And, carry out computing by the key elements such as sectional area of taking all factors into consideration stream according to above-mentioned flow velocity, can also measure flow.
And, as mentioned above,, thereby can carry out the instrumentation of flow velocity and/or flow accurately because ultrasonic sensor output is stable and be high-performance.
Industrial applicibility
Ultrasonic sensor of the present invention, owing to can be certain with the emptying aperture diameter control in the coupling layer, can in this emptying aperture, generate equably lucite, thereby the unsettled vibration output of the output that can eliminate the ultrasonic sensor that uses this coupling layer, thereby applicable to the gas that carries ultrasonic sensor, the flow rate-measuring device of liquid etc.
Claims (16)
1. ultrasonic sensor comprises piezoelectrics, accommodates the shell of described piezoelectrics and is located at the coupling layer at the top of described shell, wherein,
Described coupling layer is made of the ceramic porous article of emptying aperture Nei Neibao uniform glass spheroid, and described glass spheres is formed by the desiccant gel of organic glass,
The following formation of described ceramic porous article:
In mixing in as the slurries of principal ingredient, wrap the resin particle of liquid gas and make resiniferous slurries with the inorganic material of powderization,
Make described resiniferous slurries gelation and form solid,
The thermal treatment that the professional etiquette of going forward side by side is fixed, the thermal treatment of described regulation is, described solid is heated, described resin particle in the described solid is expanded and after becoming the hollow spheres particle, keep hollow and form emptying aperture and burn till by described hollow spheres particle.
2. ultrasonic sensor according to claim 1, wherein, the thermal treatment of described regulation comprises that first heating process and second heating process form described ceramic porous article,
Described first heating process is heated to the temperature of the polymer shell degree that can not destroy the described resin particle of formation in the described solid with the described solid of gelation, thereby makes the particle diameter of described hollow spheres particle thermal expansion to regulation,
Described second heating process is heated to than the high temperature of described first heating process, to destroy described polymer shell, forms the described emptying aperture with prescribed level.
3. ultrasonic sensor according to claim 1, wherein, described coupling layer, utilize reception room to form the shape of regulation with specified volume after, be cut to the thickness of regulation and make required size.
4. ultrasonic sensor according to claim 1, wherein, described coupling layer utilizes the reception room preestablished size, shape to form, and does not form emptying aperture on the face beyond the end face.
5. a fluid measuring device wherein, uses each described ultrasonic sensor in the claim 1 to 4.
6. the manufacture method of a ceramic porous article, wherein,
In mixing in as the slurries of principal ingredient, wrap the resin particle of liquid gas and make resiniferous slurries with the inorganic material of powderization,
Make described resiniferous slurries gelation and form solid,
The thermal treatment that the professional etiquette of going forward side by side is fixed, the thermal treatment of described regulation is, described solid is heated, described resin particle in the described solid is expanded and after becoming the hollow spheres particle, keep hollow and form emptying aperture and burn till by described hollow spheres particle.
7. the manufacture method of ceramic porous article according to claim 6 wherein, and then forms the desiccant gel of organic glass and interior bag glass spheres in described emptying aperture.
8. the manufacture method of ceramic porous article according to claim 6, wherein, the thermal treatment of described regulation comprises first heating process and second heating process,
Described first heating process is heated to the temperature of the polymer shell degree that can not destroy the described resin particle of formation in the described solid with the described solid of gelation, thereby makes the particle diameter of described hollow spheres particle thermal expansion to regulation,
Described second heating process is heated to than the high temperature of described first heating process, to destroy described polymer shell, forms the described emptying aperture with prescribed level.
9. the manufacture method of ceramic porous article according to claim 6, wherein, described ceramic porous article injects reception room with described resiniferous slurries and forms the solid of regulation shape.
10. the manufacture method of ceramic porous article according to claim 6, wherein, described ceramic porous article utilizes the reception room that has preestablished required size, shape to form, and does not form described emptying aperture on the face beyond the end face.
11. the manufacture method of ceramic porous article according to claim 8, wherein, described solid is injected reception room and is formed the shape of regulation, described solid is being contained under the state of described reception room, the atmosphere by 50 ℃～80 ℃ in calibration cell heats the heating of carrying out described first heating process.
12. the manufacture method of ceramic porous article according to claim 11, wherein, described solid after described first heating process, from the described reception room demoulding, is implemented second heat treated with 1000 ℃～1500 ℃ temperature.
13. the manufacture method of ceramic porous article according to claim 8, wherein, described resin particle is formed by the thermoplastic resin of interior bag liquid gas,
In described first heating process, make softening expansion of described polymer shell and form described hollow spheres particle,
In described second heating process, burn described hollow spheres particle diffusing and the formation emptying aperture.
14. the manufacture method of a ultrasonic sensor, described ultrasonic sensor is contained in piezoelectrics in the shell, is provided with coupling layer at the top of described shell, wherein,
The thickness that will be cut to regulation by the ceramic porous article that the described manufacture method of claim 7 produces forms coupling layer.
15. a ceramic porous article, the uniform glass spheroid that forms by the desiccant gel of organic glass at emptying aperture Nei Neibao, wherein,
The following formation of described ceramic porous article:
In mixing in as the slurries of principal ingredient, wrap the resin particle of liquid gas and make resiniferous slurries with the inorganic material of powderization,
Make described resiniferous slurries gelation and form solid,
The thermal treatment that the professional etiquette of going forward side by side is fixed, described regulation thermal treatment is, described solid is heated, and described resin particle in the described solid expanded and after becoming the hollow spheres particle, kept hollow and formed emptying aperture and burn till by described hollow spheres particle.
16. ceramic porous article according to claim 15, wherein,
The thermal treatment of described regulation comprises first heating process and second heating process,
Described first heating process is heated to the temperature of the polymer shell degree that can not destroy the described resin particle of formation in the described solid with the described solid of gelation, thereby makes the particle diameter of described hollow spheres particle thermal expansion to regulation,
Described second heating process is heated to than the high temperature of described first heating process, to destroy described polymer shell, forms the described emptying aperture with prescribed level.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006-328988 | 2006-12-06 | ||
| JP2006328988 | 2006-12-06 | ||
| JP2006328988A JP2008147731A (en) | 2006-12-06 | 2006-12-06 | Ultrasonic sensor |
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| CN101196415A CN101196415A (en) | 2008-06-11 |
| CN101196415B true CN101196415B (en) | 2011-10-12 |
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| CN2007101933542A Expired - Fee Related CN101196415B (en) | 2006-12-06 | 2007-12-06 | Ultrasonic sensor |
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| CN (1) | CN101196415B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US8166829B2 (en) * | 2010-06-29 | 2012-05-01 | Daniel Measurement And Control, Inc. | Method and system of an ultrasonic flow meter transducer assembly |
| CN103471633A (en) * | 2013-09-30 | 2013-12-25 | 江苏德易普传感科技有限公司 | Ultrasonic sensor with heating function |
| CN104049104B (en) * | 2014-07-01 | 2016-08-24 | 山东理工大学 | Ceramic mud flow monitor and detection method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86204001U (en) * | 1986-08-05 | 1987-09-12 | 上海无线电一厂 | Miniature ultrasonic sensor |
| CN1458808A (en) * | 2002-05-15 | 2003-11-26 | 松下电器产业株式会社 | Sound matching part, supersonic transducer, supersonic flow meter and its producing method |
| CN2646722Y (en) * | 2003-05-30 | 2004-10-06 | 广州市番禺奥迪威电子有限公司 | High sensitivity ultrasonic sensor |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2225426B (en) * | 1988-09-29 | 1993-05-26 | Michael John Gill | A transducer |
| JPH1121182A (en) * | 1997-07-03 | 1999-01-26 | Murata Mfg Co Ltd | Production of porous ceramic |
| JP2001323102A (en) * | 2000-05-16 | 2001-11-20 | Inoac Corp | Composite material, its production method, and ceramic porous body obtained by using the composite material |
| JP4082165B2 (en) * | 2002-10-07 | 2008-04-30 | 松下電器産業株式会社 | Manufacturing method of matching member and ultrasonic sensor using the same |
| JP2006023099A (en) * | 2004-07-06 | 2006-01-26 | Matsushita Electric Ind Co Ltd | Acoustic matching layer, ultrasonic transducer using it, and ultrasonic flow measuring apparatus having ultrasonic transducer |
| JP2006166183A (en) * | 2004-12-09 | 2006-06-22 | Matsushita Electric Ind Co Ltd | Ultrasonic vibrator and flow measurement apparatus of fluid using the same |
-
2006
- 2006-12-06 JP JP2006328988A patent/JP2008147731A/en active Pending
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- 2007-12-06 CN CN2007101933542A patent/CN101196415B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86204001U (en) * | 1986-08-05 | 1987-09-12 | 上海无线电一厂 | Miniature ultrasonic sensor |
| CN1458808A (en) * | 2002-05-15 | 2003-11-26 | 松下电器产业株式会社 | Sound matching part, supersonic transducer, supersonic flow meter and its producing method |
| CN2646722Y (en) * | 2003-05-30 | 2004-10-06 | 广州市番禺奥迪威电子有限公司 | High sensitivity ultrasonic sensor |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2003-315124A 2003.11.06 |
| JP特开平9-133562A 1997.05.20 |
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| JP2008147731A (en) | 2008-06-26 |
| CN101196415A (en) | 2008-06-11 |
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