CN101182847A - Magnetic axis bear turbo vacuum molecular pump with outer rotor structure - Google Patents
Magnetic axis bear turbo vacuum molecular pump with outer rotor structure Download PDFInfo
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- CN101182847A CN101182847A CNA2007103014307A CN200710301430A CN101182847A CN 101182847 A CN101182847 A CN 101182847A CN A2007103014307 A CNA2007103014307 A CN A2007103014307A CN 200710301430 A CN200710301430 A CN 200710301430A CN 101182847 A CN101182847 A CN 101182847A
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- magnetic bearing
- pump head
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- mandrel
- turbine pump
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Abstract
The invention discloses a magnetic bearing turbo molecular vacuum pump of an external rotor structure, which consists of a base, a shell, a motor, a turbo pump head, a radial magnetic bearing and an axial magnetic bearing. A core shaft is arranged on the base and an inverted bowl-structured turbo pump head is arranged on the core shaft concentrically. Besides, a motor stator is composed of the core shaft, a motor rotor is composed of the turbo pump head, and the radial magnetic bearing and the axial magnetic bearing are arranged between the core shaft and the turbo pump head. The structure of the molecular pump disclosed by the present invention is one structure less than that of the prior magnetic bearing molecular bearing, which not only reduces processing cost, simplifies manufacture, assembly and maintenance, but also improves the radiating effects of the whole pump and the dynamic features of the rotor and greatly increases the mode frequency of the structure, thus facilitating the supporting of the rotor with wider stable filed.
Description
Technical field
The present invention relates to a kind of magnetic axis bear turbo vacuum molecular pump of outer-rotor structure
Background technique
The turbo vacuum molecular pump is a kind of mechanical type vacuum pump, it is bled by the multistage turbine rotor blade of high speed rotating and the combination of turbine stationary blade, in the Molecular flow zone, pumped gas is produced very high compression ratio, thereby obtain needed high vacuum and ultra high vacuum performance.Adopted the turbo vacuum molecular pump of magnetic bearing technology, because bearing need not to add any lubricant medium, impeller moves under no deep-fried twisted dough sticks spare, therefore in operation process, high vacuum region can not be subjected to the pollution of oil vapor, do not need cold-trap and oil baffle, high vacuum that can obtain to clean and ultra-high vacuum environment; In addition, owing to do not have Mechanical Contact and friction on the bearing, also do not have the problem of lubricant medium trickling, therefore can realize arbitrarily angled installation, this makes that the application of molecular pump is more flexible.The magnetic suspension molecular pump has been widely used in the manufacturing of accelerator art, plasma technique, semiconductor manufacturing, electron microscope, electron tube and the every field of vacuum technique at present, for manufacture process provides reliable and stable high vacuum environment.
Adopted the turbo vacuum molecular pump device of magnetic bearing, comprised on the structure radially electromagnet that radial force supports and the axial magnetic iron that provides axial force to support are provided on the stator as supporting, and the magnetic conduction armature of corresponding stator electromagnet on the rotor.
As shown in Figure 1, existing magnetic axis bear turbo vacuum molecular pump has structurally kept the structural type of former mechanical bearing supporting substantially, promptly drives turbine pump head 5 high speed rotating that are connected axle head by an electric main shaft 4 and realizes bleeding and obtaining high vacuum.In order to make structure more compact, the mechanical characteristic that improves support simultaneously is designed to pump head the bowl formula structure of hollow usually to reduce shaft strength, tips upside down on the electric main shaft, wherein 5 is the turbine pump head, 4 is electric spindle rotor, and 3 is electric main shaft stator, and 2 is the molecular pump shell, 1 is the molecular pump base, 6,9 is radial magnetic bearing, and 7 is motor, and 8 is the axial magnetic bearing.There are some following problems in this structure:
1) because magnetic bearing is bigger than plain ball bearing volume, and complex structure, in the miniaturization of carrying out product, having certain difficulty, complicated assembling can increase the risk that fault takes place;
2) elongated mandrel adds the pump head that has than large rotating inertia, and this structure has stronger gyroscopic effect, and has increased rotor and cross the possibility of critical operation, makes the pump housing have destabilizing factor in ascending, descending speed process;
3) structurally, from the center to outside be respectively the structure of electric spindle rotor, electric main shaft stator, turbine pump head rotor, shell, complex structure and compact has inadequately caused certain space waste.
Summary of the invention
At the problem that prior art exists, the purpose of this invention is to provide a kind of magnetic axis bear turbo vacuum molecular pump of simple in structure, compact outer-rotor structure.
For achieving the above object, the magnetic axis bear turbo vacuum molecular pump of a kind of outer-rotor structure of the present invention, comprise base, shell, motor, turbine pump head, radial magnetic bearing and axial magnetic bearing, the turbine pump head is the bowl formula structure of hollow, be set with a mandrel on the base, the turbine pump head tips upside down on the described mandrel with one heart, and constitute motor stator by mandrel, the turbine pump head constitutes rotor, radial magnetic bearing and axial magnetic bearing all are arranged between mandrel and the turbine pump head, and the turbine pump head rotates around mandrel under radial and axial magnetic bearing supporting.
Because problems such as there is not friction in magnetic bearing, lubricate, therefore outer-rotor structure does not increase any difficulty to the design of axle and bearing in realization, opposite such outer-rotor structure design can be so that the structural type of turbo vacuum molecular pump itself obtains simplifying, therefrom mind-set is respectively outward the structure of stator, rotor, shell, magnetic bearing molecular pump than the internal rotor form has lacked one deck structure, this structural simplification has following outstanding advantage:
1) because structural simplification, make on the whole than the molecular pump processing of conventional construction, assemble up more simply, thereby also more be easy to safeguard;
2) structural type of Jian Huaing is brought the minimizing of finished parts quantity, the reduction of amount of finish and machining period, and the decline of structure manufacture cost;
3) because this structural design, shortened heat conducting approach greatly, in the hysteresis loss of magnetic bearing and rotor part and the heat that eddy current loss produces, it is enterprising and outwards radiate to be directly transferred to the turbine pump head, and the heating on the stator can be transmitted to the external world fast by central shaft, necessary words can also add the cooling channel very easily stator is cooled off on central shaft
4) owing to the aluminum alloy material of magnetic bearing rotor soft magnetic material density greater than pump head, therefore when carrying out the structural design of rotor, can design very big magnitude of interference, both cooperate in the process that rotating speed raises can be more and more tightr, and this is good to reducing the assembly technology difficulty;
5) owing to the simplification of rotor structure, improved the dynamics of himself, the model frequency of structure raises greatly, makes that the supporting of this rotor is easier, also has more wide in range stable region degree.
Description of drawings
Fig. 1 is existing magnetic axis bear turbo vacuum molecular pump structural representation;
Fig. 2 is a magnetic axis bear turbo vacuum molecular pump structural representation of the present invention.
Embodiment
As shown in Figure 2, outer-rotor structure magnetic axis bear turbo vacuum molecular pump of the present invention comprises base 1, shell 2, motor 7, turbine pump head 5, radial magnetic bearing 6,9 and axial magnetic bearing 8, wherein, turbine pump head 5 adopts the bowl formula structure of hollow same as the prior art, be set with a mandrel 10 on the base 1, mandrel 10 can be made into integration with base 1, and interfixing after also can processing separately is integral again.Turbine pump head 5 tips upside down on the mandrel 10, and concentric with mandrel 10.Be provided with electric machine structure same as the prior art between mandrel 10 and the turbine pump head 5, wherein mandrel 10 constitutes the stationary part of motor 7, the rotor portion of 5 formation motors 7 of turbine pump head, simultaneously, by mode same as the prior art 6,9 and one groups of axial magnetic bearings 8 of two groups of radial magnetic bearings are set between mandrel 10 and turbine pump head 5.
During work, turbine pump head 5 motor 7 drive and the supporting of radial magnetic bearing 6,9, axial magnetic bearing 8 under rotate around mandrel 10.
Because turbine pump head 5 directly as rotor, has omitted and structures such as electric main shaft in the past, electric main shaft stator, therefore the molecule pump structure is simplified greatly, and brought a series of advantage thus.
Claims (1)
1. the magnetic axis bear turbo vacuum molecular pump of an outer-rotor structure, comprise base, shell, motor, the turbine pump head, radial magnetic bearing and axial magnetic bearing, it is characterized in that, the bowl formula structure that described turbine pump head is a hollow, be set with a mandrel on the described base, the turbine pump head tips upside down on the described mandrel with one heart, and constitute described motor stator by mandrel, the turbine pump head constitutes described rotor, described radial magnetic bearing and described axial magnetic bearing all are arranged between mandrel and the turbine pump head, and the turbine pump head rotates around mandrel under radial and axial magnetic bearing supporting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103014307A CN101182847A (en) | 2007-12-27 | 2007-12-27 | Magnetic axis bear turbo vacuum molecular pump with outer rotor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103014307A CN101182847A (en) | 2007-12-27 | 2007-12-27 | Magnetic axis bear turbo vacuum molecular pump with outer rotor structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101182847A true CN101182847A (en) | 2008-05-21 |
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ID=39448233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007103014307A Pending CN101182847A (en) | 2007-12-27 | 2007-12-27 | Magnetic axis bear turbo vacuum molecular pump with outer rotor structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101182847A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103388621A (en) * | 2012-05-13 | 2013-11-13 | 芜湖市宝艺游乐科技设备有限公司 | Linear magnetic suspension bearing |
| CN104895922A (en) * | 2015-05-28 | 2015-09-09 | 山东大学 | Single-ended axial separation type magnetic suspension bearing applied to centrifugal artificial heart pump |
| CN112955662A (en) * | 2018-11-13 | 2021-06-11 | 爱德华兹有限公司 | Vacuum pump |
| CN113074157A (en) * | 2020-01-06 | 2021-07-06 | 住友重机械工业株式会社 | Actuator |
-
2007
- 2007-12-27 CN CNA2007103014307A patent/CN101182847A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103388621A (en) * | 2012-05-13 | 2013-11-13 | 芜湖市宝艺游乐科技设备有限公司 | Linear magnetic suspension bearing |
| CN104895922A (en) * | 2015-05-28 | 2015-09-09 | 山东大学 | Single-ended axial separation type magnetic suspension bearing applied to centrifugal artificial heart pump |
| CN104895922B (en) * | 2015-05-28 | 2017-03-22 | 山东大学 | Single-ended axial separation type magnetic suspension bearing applied to centrifugal artificial heart pump |
| CN112955662A (en) * | 2018-11-13 | 2021-06-11 | 爱德华兹有限公司 | Vacuum pump |
| CN113074157A (en) * | 2020-01-06 | 2021-07-06 | 住友重机械工业株式会社 | Actuator |
| CN113074157B (en) * | 2020-01-06 | 2024-03-05 | 住友重机械工业株式会社 | Actuator with a spring |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20080521 |